2/13/2012	12:07:09 AM	Recipe started at 12:06 AM
2/13/2012	12:07:09 AM	Helium valve closed
2/13/2012	12:07:09 AM	H2 valve closed
2/13/2012	12:07:09 AM	BCl3 valve closed
2/13/2012	12:07:09 AM	PH3 valve closed
2/13/2012	12:07:09 AM	SiCl4 pre valve closed
2/13/2012	12:07:09 AM	SiCl4 post valve closed
2/13/2012	12:07:09 AM	Bypass valve closed
2/13/2012	12:07:09 AM	Bubbler valve closed
2/13/2012	12:07:09 AM	Main Vac valve opened
2/13/2012	12:07:09 AM	Helium MFC set to  0.000000
2/13/2012	12:07:09 AM	H2 MFC set to  0.000000
2/13/2012	12:07:09 AM	BCl3 MFC set to  0.000000
2/13/2012	12:07:09 AM	PH3 MFC set to  0.000000
2/13/2012	12:07:09 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:07:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:07:09 AM	Tube furnace set to 0
2/13/2012	12:07:39 AM	H2 valve closed
2/13/2012	12:07:39 AM	BCl3 valve closed
2/13/2012	12:07:39 AM	PH3 valve closed
2/13/2012	12:07:39 AM	SiCl4 pre valve closed
2/13/2012	12:07:39 AM	SiCl4 post valve closed
2/13/2012	12:07:39 AM	Bypass valve closed
2/13/2012	12:07:39 AM	Bubbler valve closed
2/13/2012	12:07:39 AM	Helium valve opened
2/13/2012	12:07:39 AM	Main Vac valve opened
2/13/2012	12:07:39 AM	Helium MFC set to  20.000000
2/13/2012	12:07:39 AM	H2 MFC set to  0.000000
2/13/2012	12:07:39 AM	BCl3 MFC set to  0.000000
2/13/2012	12:07:39 AM	PH3 MFC set to  0.000000
2/13/2012	12:07:39 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:07:39 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:07:39 AM	Tube furnace set to 0
2/13/2012	12:08:10 AM	Helium valve closed
2/13/2012	12:08:10 AM	H2 valve closed
2/13/2012	12:08:10 AM	BCl3 valve closed
2/13/2012	12:08:10 AM	PH3 valve closed
2/13/2012	12:08:10 AM	SiCl4 pre valve closed
2/13/2012	12:08:10 AM	SiCl4 post valve closed
2/13/2012	12:08:10 AM	Bypass valve closed
2/13/2012	12:08:10 AM	Bubbler valve closed
2/13/2012	12:08:10 AM	Main Vac valve opened
2/13/2012	12:08:10 AM	Helium MFC set to  0.000000
2/13/2012	12:08:10 AM	H2 MFC set to  0.000000
2/13/2012	12:08:10 AM	BCl3 MFC set to  0.000000
2/13/2012	12:08:10 AM	PH3 MFC set to  0.000000
2/13/2012	12:08:10 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:08:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:08:10 AM	Tube furnace set to 0
2/13/2012	12:08:40 AM	H2 valve closed
2/13/2012	12:08:40 AM	BCl3 valve closed
2/13/2012	12:08:40 AM	PH3 valve closed
2/13/2012	12:08:40 AM	SiCl4 pre valve closed
2/13/2012	12:08:40 AM	SiCl4 post valve closed
2/13/2012	12:08:40 AM	Bypass valve closed
2/13/2012	12:08:40 AM	Bubbler valve closed
2/13/2012	12:08:40 AM	Helium valve opened
2/13/2012	12:08:40 AM	Main Vac valve opened
2/13/2012	12:08:40 AM	Helium MFC set to  20.000000
2/13/2012	12:08:40 AM	H2 MFC set to  0.000000
2/13/2012	12:08:40 AM	BCl3 MFC set to  0.000000
2/13/2012	12:08:40 AM	PH3 MFC set to  0.000000
2/13/2012	12:08:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:08:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:08:40 AM	Tube furnace set to 0
2/13/2012	12:09:10 AM	Helium valve closed
2/13/2012	12:09:10 AM	H2 valve closed
2/13/2012	12:09:10 AM	BCl3 valve closed
2/13/2012	12:09:10 AM	PH3 valve closed
2/13/2012	12:09:10 AM	SiCl4 pre valve closed
2/13/2012	12:09:10 AM	SiCl4 post valve closed
2/13/2012	12:09:10 AM	Bypass valve closed
2/13/2012	12:09:10 AM	Bubbler valve closed
2/13/2012	12:09:10 AM	Main Vac valve opened
2/13/2012	12:09:10 AM	Helium MFC set to  0.000000
2/13/2012	12:09:10 AM	H2 MFC set to  0.000000
2/13/2012	12:09:10 AM	BCl3 MFC set to  0.000000
2/13/2012	12:09:10 AM	PH3 MFC set to  0.000000
2/13/2012	12:09:10 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:09:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:09:10 AM	Tube furnace set to 0
2/13/2012	12:09:40 AM	H2 valve closed
2/13/2012	12:09:40 AM	BCl3 valve closed
2/13/2012	12:09:40 AM	PH3 valve closed
2/13/2012	12:09:40 AM	SiCl4 pre valve closed
2/13/2012	12:09:40 AM	SiCl4 post valve closed
2/13/2012	12:09:40 AM	Bypass valve closed
2/13/2012	12:09:40 AM	Bubbler valve closed
2/13/2012	12:09:40 AM	Helium valve opened
2/13/2012	12:09:40 AM	Main Vac valve opened
2/13/2012	12:09:40 AM	Helium MFC set to  20.000000
2/13/2012	12:09:40 AM	H2 MFC set to  0.000000
2/13/2012	12:09:40 AM	BCl3 MFC set to  0.000000
2/13/2012	12:09:40 AM	PH3 MFC set to  0.000000
2/13/2012	12:09:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:09:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:09:40 AM	Tube furnace set to 0
2/13/2012	12:10:10 AM	Helium valve closed
2/13/2012	12:10:10 AM	H2 valve closed
2/13/2012	12:10:10 AM	BCl3 valve closed
2/13/2012	12:10:10 AM	PH3 valve closed
2/13/2012	12:10:10 AM	SiCl4 pre valve closed
2/13/2012	12:10:10 AM	SiCl4 post valve closed
2/13/2012	12:10:10 AM	Bypass valve closed
2/13/2012	12:10:10 AM	Bubbler valve closed
2/13/2012	12:10:10 AM	Main Vac valve opened
2/13/2012	12:10:10 AM	Helium MFC set to  0.000000
2/13/2012	12:10:10 AM	H2 MFC set to  0.000000
2/13/2012	12:10:10 AM	BCl3 MFC set to  0.000000
2/13/2012	12:10:10 AM	PH3 MFC set to  0.000000
2/13/2012	12:10:10 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:10:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:10:11 AM	Tube furnace set to 0
2/13/2012	12:10:41 AM	H2 valve closed
2/13/2012	12:10:41 AM	BCl3 valve closed
2/13/2012	12:10:41 AM	PH3 valve closed
2/13/2012	12:10:41 AM	SiCl4 pre valve closed
2/13/2012	12:10:41 AM	SiCl4 post valve closed
2/13/2012	12:10:41 AM	Bypass valve closed
2/13/2012	12:10:41 AM	Bubbler valve closed
2/13/2012	12:10:41 AM	Helium valve opened
2/13/2012	12:10:41 AM	Main Vac valve opened
2/13/2012	12:10:41 AM	Helium MFC set to  20.000000
2/13/2012	12:10:41 AM	H2 MFC set to  0.000000
2/13/2012	12:10:41 AM	BCl3 MFC set to  0.000000
2/13/2012	12:10:41 AM	PH3 MFC set to  0.000000
2/13/2012	12:10:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:10:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:10:41 AM	Tube furnace set to 0
2/13/2012	12:11:11 AM	Helium valve closed
2/13/2012	12:11:11 AM	H2 valve closed
2/13/2012	12:11:11 AM	BCl3 valve closed
2/13/2012	12:11:11 AM	PH3 valve closed
2/13/2012	12:11:11 AM	SiCl4 pre valve closed
2/13/2012	12:11:11 AM	SiCl4 post valve closed
2/13/2012	12:11:11 AM	Bypass valve closed
2/13/2012	12:11:11 AM	Bubbler valve closed
2/13/2012	12:11:11 AM	Main Vac valve opened
2/13/2012	12:11:11 AM	Helium MFC set to  0.000000
2/13/2012	12:11:11 AM	H2 MFC set to  0.000000
2/13/2012	12:11:11 AM	BCl3 MFC set to  0.000000
2/13/2012	12:11:11 AM	PH3 MFC set to  0.000000
2/13/2012	12:11:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:11:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:11:11 AM	Tube furnace set to 0
2/13/2012	12:11:41 AM	H2 valve closed
2/13/2012	12:11:41 AM	BCl3 valve closed
2/13/2012	12:11:41 AM	PH3 valve closed
2/13/2012	12:11:41 AM	SiCl4 pre valve closed
2/13/2012	12:11:41 AM	SiCl4 post valve closed
2/13/2012	12:11:41 AM	Bypass valve closed
2/13/2012	12:11:41 AM	Bubbler valve closed
2/13/2012	12:11:41 AM	Helium valve opened
2/13/2012	12:11:41 AM	Main Vac valve opened
2/13/2012	12:11:41 AM	Helium MFC set to  20.000000
2/13/2012	12:11:41 AM	H2 MFC set to  0.000000
2/13/2012	12:11:41 AM	BCl3 MFC set to  0.000000
2/13/2012	12:11:41 AM	PH3 MFC set to  0.000000
2/13/2012	12:11:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:11:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:11:41 AM	Tube furnace set to 0
2/13/2012	12:12:11 AM	Helium valve closed
2/13/2012	12:12:11 AM	H2 valve closed
2/13/2012	12:12:11 AM	BCl3 valve closed
2/13/2012	12:12:11 AM	PH3 valve closed
2/13/2012	12:12:11 AM	SiCl4 pre valve closed
2/13/2012	12:12:11 AM	SiCl4 post valve closed
2/13/2012	12:12:11 AM	Bypass valve closed
2/13/2012	12:12:11 AM	Bubbler valve closed
2/13/2012	12:12:11 AM	Main Vac valve opened
2/13/2012	12:12:11 AM	Helium MFC set to  0.000000
2/13/2012	12:12:11 AM	H2 MFC set to  0.000000
2/13/2012	12:12:11 AM	BCl3 MFC set to  0.000000
2/13/2012	12:12:11 AM	PH3 MFC set to  0.000000
2/13/2012	12:12:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:12:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:12:11 AM	Tube furnace set to 0
2/13/2012	12:12:41 AM	H2 valve closed
2/13/2012	12:12:41 AM	BCl3 valve closed
2/13/2012	12:12:41 AM	PH3 valve closed
2/13/2012	12:12:41 AM	SiCl4 pre valve closed
2/13/2012	12:12:41 AM	SiCl4 post valve closed
2/13/2012	12:12:41 AM	Bypass valve closed
2/13/2012	12:12:41 AM	Bubbler valve closed
2/13/2012	12:12:41 AM	Helium valve opened
2/13/2012	12:12:41 AM	Main Vac valve opened
2/13/2012	12:12:41 AM	Helium MFC set to  20.000000
2/13/2012	12:12:41 AM	H2 MFC set to  0.000000
2/13/2012	12:12:41 AM	BCl3 MFC set to  0.000000
2/13/2012	12:12:41 AM	PH3 MFC set to  0.000000
2/13/2012	12:12:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:12:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:12:42 AM	Tube furnace set to 0
2/13/2012	12:13:12 AM	Helium valve closed
2/13/2012	12:13:12 AM	H2 valve closed
2/13/2012	12:13:12 AM	BCl3 valve closed
2/13/2012	12:13:12 AM	PH3 valve closed
2/13/2012	12:13:12 AM	SiCl4 pre valve closed
2/13/2012	12:13:12 AM	SiCl4 post valve closed
2/13/2012	12:13:12 AM	Bypass valve closed
2/13/2012	12:13:12 AM	Bubbler valve closed
2/13/2012	12:13:12 AM	Main Vac valve opened
2/13/2012	12:13:12 AM	Helium MFC set to  0.000000
2/13/2012	12:13:12 AM	H2 MFC set to  0.000000
2/13/2012	12:13:12 AM	BCl3 MFC set to  0.000000
2/13/2012	12:13:12 AM	PH3 MFC set to  0.000000
2/13/2012	12:13:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:13:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:13:12 AM	Tube furnace set to 0
2/13/2012	12:13:42 AM	H2 valve closed
2/13/2012	12:13:42 AM	BCl3 valve closed
2/13/2012	12:13:42 AM	PH3 valve closed
2/13/2012	12:13:42 AM	SiCl4 pre valve closed
2/13/2012	12:13:42 AM	SiCl4 post valve closed
2/13/2012	12:13:42 AM	Bypass valve closed
2/13/2012	12:13:42 AM	Bubbler valve closed
2/13/2012	12:13:42 AM	Helium valve opened
2/13/2012	12:13:42 AM	Main Vac valve opened
2/13/2012	12:13:42 AM	Helium MFC set to  20.000000
2/13/2012	12:13:42 AM	H2 MFC set to  0.000000
2/13/2012	12:13:42 AM	BCl3 MFC set to  0.000000
2/13/2012	12:13:42 AM	PH3 MFC set to  0.000000
2/13/2012	12:13:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:13:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:13:42 AM	Tube furnace set to 0
2/13/2012	12:14:12 AM	Helium valve closed
2/13/2012	12:14:12 AM	H2 valve closed
2/13/2012	12:14:12 AM	BCl3 valve closed
2/13/2012	12:14:12 AM	PH3 valve closed
2/13/2012	12:14:12 AM	SiCl4 pre valve closed
2/13/2012	12:14:12 AM	SiCl4 post valve closed
2/13/2012	12:14:12 AM	Bypass valve closed
2/13/2012	12:14:12 AM	Bubbler valve closed
2/13/2012	12:14:12 AM	Main Vac valve opened
2/13/2012	12:14:12 AM	Helium MFC set to  0.000000
2/13/2012	12:14:12 AM	H2 MFC set to  0.000000
2/13/2012	12:14:12 AM	BCl3 MFC set to  0.000000
2/13/2012	12:14:12 AM	PH3 MFC set to  0.000000
2/13/2012	12:14:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:14:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:14:12 AM	Tube furnace set to 0
2/13/2012	12:14:42 AM	H2 valve closed
2/13/2012	12:14:42 AM	BCl3 valve closed
2/13/2012	12:14:42 AM	PH3 valve closed
2/13/2012	12:14:42 AM	SiCl4 pre valve closed
2/13/2012	12:14:42 AM	SiCl4 post valve closed
2/13/2012	12:14:42 AM	Bypass valve closed
2/13/2012	12:14:42 AM	Bubbler valve closed
2/13/2012	12:14:42 AM	Helium valve opened
2/13/2012	12:14:42 AM	Main Vac valve opened
2/13/2012	12:14:42 AM	Helium MFC set to  20.000000
2/13/2012	12:14:42 AM	H2 MFC set to  0.000000
2/13/2012	12:14:42 AM	BCl3 MFC set to  0.000000
2/13/2012	12:14:42 AM	PH3 MFC set to  0.000000
2/13/2012	12:14:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:14:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:14:42 AM	Tube furnace set to 0
2/13/2012	12:15:12 AM	Helium valve closed
2/13/2012	12:15:12 AM	H2 valve closed
2/13/2012	12:15:12 AM	BCl3 valve closed
2/13/2012	12:15:12 AM	PH3 valve closed
2/13/2012	12:15:12 AM	SiCl4 pre valve closed
2/13/2012	12:15:12 AM	SiCl4 post valve closed
2/13/2012	12:15:12 AM	Bypass valve closed
2/13/2012	12:15:12 AM	Bubbler valve closed
2/13/2012	12:15:12 AM	Main Vac valve opened
2/13/2012	12:15:12 AM	Helium MFC set to  0.000000
2/13/2012	12:15:12 AM	H2 MFC set to  0.000000
2/13/2012	12:15:12 AM	BCl3 MFC set to  0.000000
2/13/2012	12:15:12 AM	PH3 MFC set to  0.000000
2/13/2012	12:15:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:15:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:15:13 AM	Tube furnace set to 0
2/13/2012	12:15:43 AM	H2 valve closed
2/13/2012	12:15:43 AM	BCl3 valve closed
2/13/2012	12:15:43 AM	PH3 valve closed
2/13/2012	12:15:43 AM	SiCl4 pre valve closed
2/13/2012	12:15:43 AM	SiCl4 post valve closed
2/13/2012	12:15:43 AM	Bypass valve closed
2/13/2012	12:15:43 AM	Bubbler valve closed
2/13/2012	12:15:43 AM	Helium valve opened
2/13/2012	12:15:43 AM	Main Vac valve opened
2/13/2012	12:15:43 AM	Helium MFC set to  20.000000
2/13/2012	12:15:43 AM	H2 MFC set to  0.000000
2/13/2012	12:15:43 AM	BCl3 MFC set to  0.000000
2/13/2012	12:15:43 AM	PH3 MFC set to  0.000000
2/13/2012	12:15:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:15:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:15:43 AM	Tube furnace set to 0
2/13/2012	12:16:13 AM	Helium valve closed
2/13/2012	12:16:13 AM	H2 valve closed
2/13/2012	12:16:13 AM	BCl3 valve closed
2/13/2012	12:16:13 AM	PH3 valve closed
2/13/2012	12:16:13 AM	SiCl4 pre valve closed
2/13/2012	12:16:13 AM	SiCl4 post valve closed
2/13/2012	12:16:13 AM	Bypass valve closed
2/13/2012	12:16:13 AM	Bubbler valve closed
2/13/2012	12:16:13 AM	Main Vac valve opened
2/13/2012	12:16:13 AM	Helium MFC set to  0.000000
2/13/2012	12:16:13 AM	H2 MFC set to  0.000000
2/13/2012	12:16:13 AM	BCl3 MFC set to  0.000000
2/13/2012	12:16:13 AM	PH3 MFC set to  0.000000
2/13/2012	12:16:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:16:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:16:13 AM	Tube furnace set to 200
2/13/2012	12:16:43 AM	H2 valve closed
2/13/2012	12:16:43 AM	BCl3 valve closed
2/13/2012	12:16:43 AM	PH3 valve closed
2/13/2012	12:16:43 AM	SiCl4 pre valve closed
2/13/2012	12:16:43 AM	SiCl4 post valve closed
2/13/2012	12:16:43 AM	Bypass valve closed
2/13/2012	12:16:43 AM	Bubbler valve closed
2/13/2012	12:16:43 AM	Helium valve opened
2/13/2012	12:16:43 AM	Main Vac valve opened
2/13/2012	12:16:43 AM	Helium MFC set to  20.000000
2/13/2012	12:16:43 AM	H2 MFC set to  0.000000
2/13/2012	12:16:43 AM	BCl3 MFC set to  0.000000
2/13/2012	12:16:43 AM	PH3 MFC set to  0.000000
2/13/2012	12:16:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:16:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:16:43 AM	Tube furnace set to 200
2/13/2012	12:17:13 AM	Helium valve closed
2/13/2012	12:17:13 AM	H2 valve closed
2/13/2012	12:17:13 AM	BCl3 valve closed
2/13/2012	12:17:13 AM	PH3 valve closed
2/13/2012	12:17:13 AM	SiCl4 pre valve closed
2/13/2012	12:17:13 AM	SiCl4 post valve closed
2/13/2012	12:17:13 AM	Bypass valve closed
2/13/2012	12:17:13 AM	Bubbler valve closed
2/13/2012	12:17:13 AM	Main Vac valve opened
2/13/2012	12:17:13 AM	Helium MFC set to  0.000000
2/13/2012	12:17:13 AM	H2 MFC set to  0.000000
2/13/2012	12:17:13 AM	BCl3 MFC set to  0.000000
2/13/2012	12:17:13 AM	PH3 MFC set to  0.000000
2/13/2012	12:17:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:17:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:17:13 AM	Tube furnace set to 200
2/13/2012	12:17:43 AM	H2 valve closed
2/13/2012	12:17:43 AM	BCl3 valve closed
2/13/2012	12:17:43 AM	PH3 valve closed
2/13/2012	12:17:43 AM	SiCl4 pre valve closed
2/13/2012	12:17:43 AM	SiCl4 post valve closed
2/13/2012	12:17:43 AM	Bypass valve closed
2/13/2012	12:17:43 AM	Bubbler valve closed
2/13/2012	12:17:43 AM	Helium valve opened
2/13/2012	12:17:43 AM	Main Vac valve opened
2/13/2012	12:17:43 AM	Helium MFC set to  20.000000
2/13/2012	12:17:43 AM	H2 MFC set to  0.000000
2/13/2012	12:17:43 AM	BCl3 MFC set to  0.000000
2/13/2012	12:17:43 AM	PH3 MFC set to  0.000000
2/13/2012	12:17:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:17:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:17:44 AM	Tube furnace set to 200
2/13/2012	12:18:14 AM	Helium valve closed
2/13/2012	12:18:14 AM	H2 valve closed
2/13/2012	12:18:14 AM	BCl3 valve closed
2/13/2012	12:18:14 AM	PH3 valve closed
2/13/2012	12:18:14 AM	SiCl4 pre valve closed
2/13/2012	12:18:14 AM	SiCl4 post valve closed
2/13/2012	12:18:14 AM	Bypass valve closed
2/13/2012	12:18:14 AM	Bubbler valve closed
2/13/2012	12:18:14 AM	Main Vac valve opened
2/13/2012	12:18:14 AM	Helium MFC set to  0.000000
2/13/2012	12:18:14 AM	H2 MFC set to  0.000000
2/13/2012	12:18:14 AM	BCl3 MFC set to  0.000000
2/13/2012	12:18:14 AM	PH3 MFC set to  0.000000
2/13/2012	12:18:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:18:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:18:14 AM	Tube furnace set to 200
2/13/2012	12:18:44 AM	H2 valve closed
2/13/2012	12:18:44 AM	BCl3 valve closed
2/13/2012	12:18:44 AM	PH3 valve closed
2/13/2012	12:18:44 AM	SiCl4 pre valve closed
2/13/2012	12:18:44 AM	SiCl4 post valve closed
2/13/2012	12:18:44 AM	Bypass valve closed
2/13/2012	12:18:44 AM	Bubbler valve closed
2/13/2012	12:18:44 AM	Helium valve opened
2/13/2012	12:18:44 AM	Main Vac valve opened
2/13/2012	12:18:44 AM	Helium MFC set to  20.000000
2/13/2012	12:18:44 AM	H2 MFC set to  0.000000
2/13/2012	12:18:44 AM	BCl3 MFC set to  0.000000
2/13/2012	12:18:44 AM	PH3 MFC set to  0.000000
2/13/2012	12:18:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:18:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:18:44 AM	Tube furnace set to 200
2/13/2012	12:19:14 AM	Helium valve closed
2/13/2012	12:19:14 AM	H2 valve closed
2/13/2012	12:19:14 AM	BCl3 valve closed
2/13/2012	12:19:14 AM	PH3 valve closed
2/13/2012	12:19:14 AM	SiCl4 pre valve closed
2/13/2012	12:19:14 AM	SiCl4 post valve closed
2/13/2012	12:19:14 AM	Bypass valve closed
2/13/2012	12:19:14 AM	Bubbler valve closed
2/13/2012	12:19:14 AM	Main Vac valve opened
2/13/2012	12:19:14 AM	Helium MFC set to  0.000000
2/13/2012	12:19:14 AM	H2 MFC set to  0.000000
2/13/2012	12:19:14 AM	BCl3 MFC set to  0.000000
2/13/2012	12:19:14 AM	PH3 MFC set to  0.000000
2/13/2012	12:19:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:19:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:19:14 AM	Tube furnace set to 200
2/13/2012	12:19:44 AM	H2 valve closed
2/13/2012	12:19:44 AM	BCl3 valve closed
2/13/2012	12:19:44 AM	PH3 valve closed
2/13/2012	12:19:44 AM	SiCl4 pre valve closed
2/13/2012	12:19:44 AM	SiCl4 post valve closed
2/13/2012	12:19:44 AM	Bypass valve closed
2/13/2012	12:19:44 AM	Bubbler valve closed
2/13/2012	12:19:44 AM	Helium valve opened
2/13/2012	12:19:44 AM	Main Vac valve opened
2/13/2012	12:19:44 AM	Helium MFC set to  20.000000
2/13/2012	12:19:44 AM	H2 MFC set to  0.000000
2/13/2012	12:19:44 AM	BCl3 MFC set to  0.000000
2/13/2012	12:19:44 AM	PH3 MFC set to  0.000000
2/13/2012	12:19:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:19:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:19:44 AM	Tube furnace set to 200
2/13/2012	12:20:14 AM	Helium valve closed
2/13/2012	12:20:14 AM	H2 valve closed
2/13/2012	12:20:14 AM	BCl3 valve closed
2/13/2012	12:20:14 AM	PH3 valve closed
2/13/2012	12:20:14 AM	SiCl4 pre valve closed
2/13/2012	12:20:14 AM	SiCl4 post valve closed
2/13/2012	12:20:14 AM	Bypass valve closed
2/13/2012	12:20:14 AM	Bubbler valve closed
2/13/2012	12:20:14 AM	Main Vac valve opened
2/13/2012	12:20:14 AM	Helium MFC set to  0.000000
2/13/2012	12:20:14 AM	H2 MFC set to  0.000000
2/13/2012	12:20:14 AM	BCl3 MFC set to  0.000000
2/13/2012	12:20:14 AM	PH3 MFC set to  0.000000
2/13/2012	12:20:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:20:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:20:15 AM	Tube furnace set to 200
2/13/2012	12:20:45 AM	H2 valve closed
2/13/2012	12:20:45 AM	BCl3 valve closed
2/13/2012	12:20:45 AM	PH3 valve closed
2/13/2012	12:20:45 AM	SiCl4 pre valve closed
2/13/2012	12:20:45 AM	SiCl4 post valve closed
2/13/2012	12:20:45 AM	Bypass valve closed
2/13/2012	12:20:45 AM	Bubbler valve closed
2/13/2012	12:20:45 AM	Helium valve opened
2/13/2012	12:20:45 AM	Main Vac valve opened
2/13/2012	12:20:45 AM	Helium MFC set to  20.000000
2/13/2012	12:20:45 AM	H2 MFC set to  0.000000
2/13/2012	12:20:45 AM	BCl3 MFC set to  0.000000
2/13/2012	12:20:45 AM	PH3 MFC set to  0.000000
2/13/2012	12:20:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:20:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:20:45 AM	Tube furnace set to 200
2/13/2012	12:21:15 AM	Helium valve closed
2/13/2012	12:21:15 AM	H2 valve closed
2/13/2012	12:21:15 AM	BCl3 valve closed
2/13/2012	12:21:15 AM	PH3 valve closed
2/13/2012	12:21:15 AM	SiCl4 pre valve closed
2/13/2012	12:21:15 AM	SiCl4 post valve closed
2/13/2012	12:21:15 AM	Bypass valve closed
2/13/2012	12:21:15 AM	Bubbler valve closed
2/13/2012	12:21:15 AM	Main Vac valve opened
2/13/2012	12:21:15 AM	Helium MFC set to  0.000000
2/13/2012	12:21:15 AM	H2 MFC set to  0.000000
2/13/2012	12:21:15 AM	BCl3 MFC set to  0.000000
2/13/2012	12:21:15 AM	PH3 MFC set to  0.000000
2/13/2012	12:21:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:21:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:21:15 AM	Tube furnace set to 200
2/13/2012	12:21:45 AM	H2 valve closed
2/13/2012	12:21:45 AM	BCl3 valve closed
2/13/2012	12:21:45 AM	PH3 valve closed
2/13/2012	12:21:45 AM	SiCl4 pre valve closed
2/13/2012	12:21:45 AM	SiCl4 post valve closed
2/13/2012	12:21:45 AM	Bypass valve closed
2/13/2012	12:21:45 AM	Bubbler valve closed
2/13/2012	12:21:45 AM	Helium valve opened
2/13/2012	12:21:45 AM	Main Vac valve opened
2/13/2012	12:21:45 AM	Helium MFC set to  20.000000
2/13/2012	12:21:45 AM	H2 MFC set to  0.000000
2/13/2012	12:21:45 AM	BCl3 MFC set to  0.000000
2/13/2012	12:21:45 AM	PH3 MFC set to  0.000000
2/13/2012	12:21:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:21:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:21:45 AM	Tube furnace set to 200
2/13/2012	12:22:15 AM	Helium valve closed
2/13/2012	12:22:15 AM	H2 valve closed
2/13/2012	12:22:15 AM	BCl3 valve closed
2/13/2012	12:22:15 AM	PH3 valve closed
2/13/2012	12:22:15 AM	SiCl4 pre valve closed
2/13/2012	12:22:15 AM	SiCl4 post valve closed
2/13/2012	12:22:15 AM	Bypass valve closed
2/13/2012	12:22:15 AM	Bubbler valve closed
2/13/2012	12:22:15 AM	Main Vac valve opened
2/13/2012	12:22:15 AM	Helium MFC set to  0.000000
2/13/2012	12:22:15 AM	H2 MFC set to  0.000000
2/13/2012	12:22:15 AM	BCl3 MFC set to  0.000000
2/13/2012	12:22:15 AM	PH3 MFC set to  0.000000
2/13/2012	12:22:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:22:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:22:15 AM	Tube furnace set to 0
2/13/2012	12:22:16 AM	Run finished at 12:22 AM
2/13/2012	12:28:35 AM	Main Vac valve closed
2/13/2012	12:28:43 AM	Main Vac valve opened
2/13/2012	12:28:56 AM	Recipe started at 12:28 AM
2/13/2012	12:28:56 AM	Helium valve closed
2/13/2012	12:28:56 AM	H2 valve closed
2/13/2012	12:28:56 AM	BCl3 valve closed
2/13/2012	12:28:56 AM	PH3 valve closed
2/13/2012	12:28:56 AM	SiCl4 pre valve closed
2/13/2012	12:28:56 AM	SiCl4 post valve closed
2/13/2012	12:28:56 AM	Bypass valve closed
2/13/2012	12:28:56 AM	Bubbler valve closed
2/13/2012	12:28:56 AM	Main Vac valve opened
2/13/2012	12:28:56 AM	Helium MFC set to  0.000000
2/13/2012	12:28:56 AM	H2 MFC set to  0.000000
2/13/2012	12:28:56 AM	BCl3 MFC set to  0.000000
2/13/2012	12:28:56 AM	PH3 MFC set to  0.000000
2/13/2012	12:28:56 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:28:56 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:28:56 AM	Tube furnace set to 0
2/13/2012	12:28:58 AM	H2 valve closed
2/13/2012	12:28:58 AM	BCl3 valve closed
2/13/2012	12:28:58 AM	PH3 valve closed
2/13/2012	12:28:58 AM	SiCl4 pre valve closed
2/13/2012	12:28:58 AM	SiCl4 post valve closed
2/13/2012	12:28:58 AM	Bypass valve closed
2/13/2012	12:28:58 AM	Bubbler valve closed
2/13/2012	12:28:58 AM	Helium valve opened
2/13/2012	12:28:58 AM	Main Vac valve opened
2/13/2012	12:28:58 AM	Helium MFC set to  20.000000
2/13/2012	12:28:58 AM	H2 MFC set to  0.000000
2/13/2012	12:28:58 AM	BCl3 MFC set to  0.000000
2/13/2012	12:28:58 AM	PH3 MFC set to  0.000000
2/13/2012	12:28:58 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:28:58 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:28:59 AM	Tube furnace set to 0
2/13/2012	12:29:29 AM	Helium valve closed
2/13/2012	12:29:29 AM	H2 valve closed
2/13/2012	12:29:29 AM	BCl3 valve closed
2/13/2012	12:29:29 AM	PH3 valve closed
2/13/2012	12:29:29 AM	SiCl4 pre valve closed
2/13/2012	12:29:29 AM	SiCl4 post valve closed
2/13/2012	12:29:29 AM	Bypass valve closed
2/13/2012	12:29:29 AM	Bubbler valve closed
2/13/2012	12:29:29 AM	Main Vac valve opened
2/13/2012	12:29:29 AM	Helium MFC set to  0.000000
2/13/2012	12:29:29 AM	H2 MFC set to  0.000000
2/13/2012	12:29:29 AM	BCl3 MFC set to  0.000000
2/13/2012	12:29:29 AM	PH3 MFC set to  0.000000
2/13/2012	12:29:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:29:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:29:29 AM	Tube furnace set to 0
2/13/2012	12:29:59 AM	H2 valve closed
2/13/2012	12:29:59 AM	BCl3 valve closed
2/13/2012	12:29:59 AM	PH3 valve closed
2/13/2012	12:29:59 AM	SiCl4 pre valve closed
2/13/2012	12:29:59 AM	SiCl4 post valve closed
2/13/2012	12:29:59 AM	Bypass valve closed
2/13/2012	12:29:59 AM	Bubbler valve closed
2/13/2012	12:29:59 AM	Helium valve opened
2/13/2012	12:29:59 AM	Main Vac valve opened
2/13/2012	12:29:59 AM	Helium MFC set to  20.000000
2/13/2012	12:29:59 AM	H2 MFC set to  0.000000
2/13/2012	12:29:59 AM	BCl3 MFC set to  0.000000
2/13/2012	12:29:59 AM	PH3 MFC set to  0.000000
2/13/2012	12:29:59 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:29:59 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:29:59 AM	Tube furnace set to 0
2/13/2012	12:30:29 AM	Helium valve closed
2/13/2012	12:30:29 AM	H2 valve closed
2/13/2012	12:30:29 AM	BCl3 valve closed
2/13/2012	12:30:29 AM	PH3 valve closed
2/13/2012	12:30:29 AM	SiCl4 pre valve closed
2/13/2012	12:30:29 AM	SiCl4 post valve closed
2/13/2012	12:30:29 AM	Bypass valve closed
2/13/2012	12:30:29 AM	Bubbler valve closed
2/13/2012	12:30:29 AM	Main Vac valve opened
2/13/2012	12:30:29 AM	Helium MFC set to  0.000000
2/13/2012	12:30:29 AM	H2 MFC set to  0.000000
2/13/2012	12:30:29 AM	BCl3 MFC set to  0.000000
2/13/2012	12:30:29 AM	PH3 MFC set to  0.000000
2/13/2012	12:30:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:30:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:30:29 AM	Tube furnace set to 0
2/13/2012	12:30:59 AM	H2 valve closed
2/13/2012	12:30:59 AM	BCl3 valve closed
2/13/2012	12:30:59 AM	PH3 valve closed
2/13/2012	12:30:59 AM	SiCl4 pre valve closed
2/13/2012	12:30:59 AM	SiCl4 post valve closed
2/13/2012	12:30:59 AM	Bypass valve closed
2/13/2012	12:30:59 AM	Bubbler valve closed
2/13/2012	12:30:59 AM	Helium valve opened
2/13/2012	12:30:59 AM	Main Vac valve opened
2/13/2012	12:30:59 AM	Helium MFC set to  20.000000
2/13/2012	12:30:59 AM	H2 MFC set to  0.000000
2/13/2012	12:30:59 AM	BCl3 MFC set to  0.000000
2/13/2012	12:30:59 AM	PH3 MFC set to  0.000000
2/13/2012	12:30:59 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:30:59 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:30:59 AM	Tube furnace set to 0
2/13/2012	12:31:29 AM	Helium valve closed
2/13/2012	12:31:29 AM	H2 valve closed
2/13/2012	12:31:29 AM	BCl3 valve closed
2/13/2012	12:31:29 AM	PH3 valve closed
2/13/2012	12:31:29 AM	SiCl4 pre valve closed
2/13/2012	12:31:29 AM	SiCl4 post valve closed
2/13/2012	12:31:29 AM	Bypass valve closed
2/13/2012	12:31:29 AM	Bubbler valve closed
2/13/2012	12:31:29 AM	Main Vac valve opened
2/13/2012	12:31:29 AM	Helium MFC set to  0.000000
2/13/2012	12:31:29 AM	H2 MFC set to  0.000000
2/13/2012	12:31:29 AM	BCl3 MFC set to  0.000000
2/13/2012	12:31:29 AM	PH3 MFC set to  0.000000
2/13/2012	12:31:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:31:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:31:30 AM	Tube furnace set to 0
2/13/2012	12:32:00 AM	H2 valve closed
2/13/2012	12:32:00 AM	BCl3 valve closed
2/13/2012	12:32:00 AM	PH3 valve closed
2/13/2012	12:32:00 AM	SiCl4 pre valve closed
2/13/2012	12:32:00 AM	SiCl4 post valve closed
2/13/2012	12:32:00 AM	Bypass valve closed
2/13/2012	12:32:00 AM	Bubbler valve closed
2/13/2012	12:32:00 AM	Helium valve opened
2/13/2012	12:32:00 AM	Main Vac valve opened
2/13/2012	12:32:00 AM	Helium MFC set to  20.000000
2/13/2012	12:32:00 AM	H2 MFC set to  0.000000
2/13/2012	12:32:00 AM	BCl3 MFC set to  0.000000
2/13/2012	12:32:00 AM	PH3 MFC set to  0.000000
2/13/2012	12:32:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:32:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:32:00 AM	Tube furnace set to 0
2/13/2012	12:32:30 AM	Helium valve closed
2/13/2012	12:32:30 AM	H2 valve closed
2/13/2012	12:32:30 AM	BCl3 valve closed
2/13/2012	12:32:30 AM	PH3 valve closed
2/13/2012	12:32:30 AM	SiCl4 pre valve closed
2/13/2012	12:32:30 AM	SiCl4 post valve closed
2/13/2012	12:32:30 AM	Bypass valve closed
2/13/2012	12:32:30 AM	Bubbler valve closed
2/13/2012	12:32:30 AM	Main Vac valve opened
2/13/2012	12:32:30 AM	Helium MFC set to  0.000000
2/13/2012	12:32:30 AM	H2 MFC set to  0.000000
2/13/2012	12:32:30 AM	BCl3 MFC set to  0.000000
2/13/2012	12:32:30 AM	PH3 MFC set to  0.000000
2/13/2012	12:32:30 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:32:30 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:32:30 AM	Tube furnace set to 0
2/13/2012	12:33:00 AM	H2 valve closed
2/13/2012	12:33:00 AM	BCl3 valve closed
2/13/2012	12:33:00 AM	PH3 valve closed
2/13/2012	12:33:00 AM	SiCl4 pre valve closed
2/13/2012	12:33:00 AM	SiCl4 post valve closed
2/13/2012	12:33:00 AM	Bypass valve closed
2/13/2012	12:33:00 AM	Bubbler valve closed
2/13/2012	12:33:00 AM	Helium valve opened
2/13/2012	12:33:00 AM	Main Vac valve opened
2/13/2012	12:33:00 AM	Helium MFC set to  20.000000
2/13/2012	12:33:00 AM	H2 MFC set to  0.000000
2/13/2012	12:33:00 AM	BCl3 MFC set to  0.000000
2/13/2012	12:33:00 AM	PH3 MFC set to  0.000000
2/13/2012	12:33:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:33:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:33:00 AM	Tube furnace set to 0
2/13/2012	12:33:30 AM	Helium valve closed
2/13/2012	12:33:30 AM	H2 valve closed
2/13/2012	12:33:30 AM	BCl3 valve closed
2/13/2012	12:33:30 AM	PH3 valve closed
2/13/2012	12:33:30 AM	SiCl4 pre valve closed
2/13/2012	12:33:30 AM	SiCl4 post valve closed
2/13/2012	12:33:30 AM	Bypass valve closed
2/13/2012	12:33:30 AM	Bubbler valve closed
2/13/2012	12:33:30 AM	Main Vac valve opened
2/13/2012	12:33:30 AM	Helium MFC set to  0.000000
2/13/2012	12:33:30 AM	H2 MFC set to  0.000000
2/13/2012	12:33:30 AM	BCl3 MFC set to  0.000000
2/13/2012	12:33:30 AM	PH3 MFC set to  0.000000
2/13/2012	12:33:30 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:33:30 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:33:30 AM	Tube furnace set to 0
2/13/2012	12:34:00 AM	H2 valve closed
2/13/2012	12:34:00 AM	BCl3 valve closed
2/13/2012	12:34:00 AM	PH3 valve closed
2/13/2012	12:34:00 AM	SiCl4 pre valve closed
2/13/2012	12:34:00 AM	SiCl4 post valve closed
2/13/2012	12:34:00 AM	Bypass valve closed
2/13/2012	12:34:00 AM	Bubbler valve closed
2/13/2012	12:34:00 AM	Helium valve opened
2/13/2012	12:34:00 AM	Main Vac valve opened
2/13/2012	12:34:00 AM	Helium MFC set to  20.000000
2/13/2012	12:34:00 AM	H2 MFC set to  0.000000
2/13/2012	12:34:00 AM	BCl3 MFC set to  0.000000
2/13/2012	12:34:00 AM	PH3 MFC set to  0.000000
2/13/2012	12:34:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:34:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:34:01 AM	Tube furnace set to 0
2/13/2012	12:34:31 AM	Helium valve closed
2/13/2012	12:34:31 AM	H2 valve closed
2/13/2012	12:34:31 AM	BCl3 valve closed
2/13/2012	12:34:31 AM	PH3 valve closed
2/13/2012	12:34:31 AM	SiCl4 pre valve closed
2/13/2012	12:34:31 AM	SiCl4 post valve closed
2/13/2012	12:34:31 AM	Bypass valve closed
2/13/2012	12:34:31 AM	Bubbler valve closed
2/13/2012	12:34:31 AM	Main Vac valve opened
2/13/2012	12:34:31 AM	Helium MFC set to  0.000000
2/13/2012	12:34:31 AM	H2 MFC set to  0.000000
2/13/2012	12:34:31 AM	BCl3 MFC set to  0.000000
2/13/2012	12:34:31 AM	PH3 MFC set to  0.000000
2/13/2012	12:34:31 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:34:31 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:34:31 AM	Tube furnace set to 0
2/13/2012	12:35:01 AM	H2 valve closed
2/13/2012	12:35:01 AM	BCl3 valve closed
2/13/2012	12:35:01 AM	PH3 valve closed
2/13/2012	12:35:01 AM	SiCl4 pre valve closed
2/13/2012	12:35:01 AM	SiCl4 post valve closed
2/13/2012	12:35:01 AM	Bypass valve closed
2/13/2012	12:35:01 AM	Bubbler valve closed
2/13/2012	12:35:01 AM	Helium valve opened
2/13/2012	12:35:01 AM	Main Vac valve opened
2/13/2012	12:35:01 AM	Helium MFC set to  20.000000
2/13/2012	12:35:01 AM	H2 MFC set to  0.000000
2/13/2012	12:35:01 AM	BCl3 MFC set to  0.000000
2/13/2012	12:35:01 AM	PH3 MFC set to  0.000000
2/13/2012	12:35:01 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:35:01 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:35:01 AM	Tube furnace set to 0
2/13/2012	12:35:31 AM	Helium valve closed
2/13/2012	12:35:31 AM	H2 valve closed
2/13/2012	12:35:31 AM	BCl3 valve closed
2/13/2012	12:35:31 AM	PH3 valve closed
2/13/2012	12:35:31 AM	SiCl4 pre valve closed
2/13/2012	12:35:31 AM	SiCl4 post valve closed
2/13/2012	12:35:31 AM	Bypass valve closed
2/13/2012	12:35:31 AM	Bubbler valve closed
2/13/2012	12:35:31 AM	Main Vac valve opened
2/13/2012	12:35:31 AM	Helium MFC set to  0.000000
2/13/2012	12:35:31 AM	H2 MFC set to  0.000000
2/13/2012	12:35:31 AM	BCl3 MFC set to  0.000000
2/13/2012	12:35:31 AM	PH3 MFC set to  0.000000
2/13/2012	12:35:31 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:35:31 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:35:31 AM	Tube furnace set to 0
2/13/2012	12:36:01 AM	H2 valve closed
2/13/2012	12:36:01 AM	BCl3 valve closed
2/13/2012	12:36:01 AM	PH3 valve closed
2/13/2012	12:36:01 AM	SiCl4 pre valve closed
2/13/2012	12:36:01 AM	SiCl4 post valve closed
2/13/2012	12:36:01 AM	Bypass valve closed
2/13/2012	12:36:01 AM	Bubbler valve closed
2/13/2012	12:36:01 AM	Helium valve opened
2/13/2012	12:36:01 AM	Main Vac valve opened
2/13/2012	12:36:01 AM	Helium MFC set to  20.000000
2/13/2012	12:36:01 AM	H2 MFC set to  0.000000
2/13/2012	12:36:01 AM	BCl3 MFC set to  0.000000
2/13/2012	12:36:01 AM	PH3 MFC set to  0.000000
2/13/2012	12:36:01 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:36:01 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:36:01 AM	Tube furnace set to 0
2/13/2012	12:36:31 AM	Helium valve closed
2/13/2012	12:36:31 AM	H2 valve closed
2/13/2012	12:36:31 AM	BCl3 valve closed
2/13/2012	12:36:31 AM	PH3 valve closed
2/13/2012	12:36:31 AM	SiCl4 pre valve closed
2/13/2012	12:36:31 AM	SiCl4 post valve closed
2/13/2012	12:36:31 AM	Bypass valve closed
2/13/2012	12:36:31 AM	Bubbler valve closed
2/13/2012	12:36:31 AM	Main Vac valve opened
2/13/2012	12:36:31 AM	Helium MFC set to  0.000000
2/13/2012	12:36:31 AM	H2 MFC set to  0.000000
2/13/2012	12:36:31 AM	BCl3 MFC set to  0.000000
2/13/2012	12:36:31 AM	PH3 MFC set to  0.000000
2/13/2012	12:36:32 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:36:32 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:36:32 AM	Tube furnace set to 0
2/13/2012	12:37:02 AM	H2 valve closed
2/13/2012	12:37:02 AM	BCl3 valve closed
2/13/2012	12:37:02 AM	PH3 valve closed
2/13/2012	12:37:02 AM	SiCl4 pre valve closed
2/13/2012	12:37:02 AM	SiCl4 post valve closed
2/13/2012	12:37:02 AM	Bypass valve closed
2/13/2012	12:37:02 AM	Bubbler valve closed
2/13/2012	12:37:02 AM	Helium valve opened
2/13/2012	12:37:02 AM	Main Vac valve opened
2/13/2012	12:37:02 AM	Helium MFC set to  20.000000
2/13/2012	12:37:02 AM	H2 MFC set to  0.000000
2/13/2012	12:37:02 AM	BCl3 MFC set to  0.000000
2/13/2012	12:37:02 AM	PH3 MFC set to  0.000000
2/13/2012	12:37:02 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:37:02 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:37:02 AM	Tube furnace set to 0
2/13/2012	12:37:32 AM	Helium valve closed
2/13/2012	12:37:32 AM	H2 valve closed
2/13/2012	12:37:32 AM	BCl3 valve closed
2/13/2012	12:37:32 AM	PH3 valve closed
2/13/2012	12:37:32 AM	SiCl4 pre valve closed
2/13/2012	12:37:32 AM	SiCl4 post valve closed
2/13/2012	12:37:32 AM	Bypass valve closed
2/13/2012	12:37:32 AM	Bubbler valve closed
2/13/2012	12:37:32 AM	Main Vac valve opened
2/13/2012	12:37:32 AM	Helium MFC set to  0.000000
2/13/2012	12:37:32 AM	H2 MFC set to  0.000000
2/13/2012	12:37:32 AM	BCl3 MFC set to  0.000000
2/13/2012	12:37:32 AM	PH3 MFC set to  0.000000
2/13/2012	12:37:32 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:37:32 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:37:32 AM	Tube furnace set to 200
2/13/2012	12:38:02 AM	H2 valve closed
2/13/2012	12:38:02 AM	BCl3 valve closed
2/13/2012	12:38:02 AM	PH3 valve closed
2/13/2012	12:38:02 AM	SiCl4 pre valve closed
2/13/2012	12:38:02 AM	SiCl4 post valve closed
2/13/2012	12:38:02 AM	Bypass valve closed
2/13/2012	12:38:02 AM	Bubbler valve closed
2/13/2012	12:38:02 AM	Helium valve opened
2/13/2012	12:38:02 AM	Main Vac valve opened
2/13/2012	12:38:02 AM	Helium MFC set to  20.000000
2/13/2012	12:38:02 AM	H2 MFC set to  0.000000
2/13/2012	12:38:02 AM	BCl3 MFC set to  0.000000
2/13/2012	12:38:02 AM	PH3 MFC set to  0.000000
2/13/2012	12:38:02 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:38:02 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:38:02 AM	Tube furnace set to 200
2/13/2012	12:38:32 AM	Helium valve closed
2/13/2012	12:38:32 AM	H2 valve closed
2/13/2012	12:38:32 AM	BCl3 valve closed
2/13/2012	12:38:32 AM	PH3 valve closed
2/13/2012	12:38:32 AM	SiCl4 pre valve closed
2/13/2012	12:38:32 AM	SiCl4 post valve closed
2/13/2012	12:38:32 AM	Bypass valve closed
2/13/2012	12:38:32 AM	Bubbler valve closed
2/13/2012	12:38:32 AM	Main Vac valve opened
2/13/2012	12:38:32 AM	Helium MFC set to  0.000000
2/13/2012	12:38:32 AM	H2 MFC set to  0.000000
2/13/2012	12:38:32 AM	BCl3 MFC set to  0.000000
2/13/2012	12:38:32 AM	PH3 MFC set to  0.000000
2/13/2012	12:38:32 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:38:32 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:38:33 AM	Tube furnace set to 200
2/13/2012	12:39:03 AM	H2 valve closed
2/13/2012	12:39:03 AM	BCl3 valve closed
2/13/2012	12:39:03 AM	PH3 valve closed
2/13/2012	12:39:03 AM	SiCl4 pre valve closed
2/13/2012	12:39:03 AM	SiCl4 post valve closed
2/13/2012	12:39:03 AM	Bypass valve closed
2/13/2012	12:39:03 AM	Bubbler valve closed
2/13/2012	12:39:03 AM	Helium valve opened
2/13/2012	12:39:03 AM	Main Vac valve opened
2/13/2012	12:39:03 AM	Helium MFC set to  20.000000
2/13/2012	12:39:03 AM	H2 MFC set to  0.000000
2/13/2012	12:39:03 AM	BCl3 MFC set to  0.000000
2/13/2012	12:39:03 AM	PH3 MFC set to  0.000000
2/13/2012	12:39:03 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:39:03 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:39:03 AM	Tube furnace set to 200
2/13/2012	12:39:33 AM	Helium valve closed
2/13/2012	12:39:33 AM	H2 valve closed
2/13/2012	12:39:33 AM	BCl3 valve closed
2/13/2012	12:39:33 AM	PH3 valve closed
2/13/2012	12:39:33 AM	SiCl4 pre valve closed
2/13/2012	12:39:33 AM	SiCl4 post valve closed
2/13/2012	12:39:33 AM	Bypass valve closed
2/13/2012	12:39:33 AM	Bubbler valve closed
2/13/2012	12:39:33 AM	Main Vac valve opened
2/13/2012	12:39:33 AM	Helium MFC set to  0.000000
2/13/2012	12:39:33 AM	H2 MFC set to  0.000000
2/13/2012	12:39:33 AM	BCl3 MFC set to  0.000000
2/13/2012	12:39:33 AM	PH3 MFC set to  0.000000
2/13/2012	12:39:33 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:39:33 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:39:33 AM	Tube furnace set to 200
2/13/2012	12:40:03 AM	H2 valve closed
2/13/2012	12:40:03 AM	BCl3 valve closed
2/13/2012	12:40:03 AM	PH3 valve closed
2/13/2012	12:40:03 AM	SiCl4 pre valve closed
2/13/2012	12:40:03 AM	SiCl4 post valve closed
2/13/2012	12:40:03 AM	Bypass valve closed
2/13/2012	12:40:03 AM	Bubbler valve closed
2/13/2012	12:40:03 AM	Helium valve opened
2/13/2012	12:40:03 AM	Main Vac valve opened
2/13/2012	12:40:03 AM	Helium MFC set to  20.000000
2/13/2012	12:40:03 AM	H2 MFC set to  0.000000
2/13/2012	12:40:03 AM	BCl3 MFC set to  0.000000
2/13/2012	12:40:03 AM	PH3 MFC set to  0.000000
2/13/2012	12:40:03 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:40:03 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:40:03 AM	Tube furnace set to 200
2/13/2012	12:40:33 AM	Helium valve closed
2/13/2012	12:40:33 AM	H2 valve closed
2/13/2012	12:40:33 AM	BCl3 valve closed
2/13/2012	12:40:33 AM	PH3 valve closed
2/13/2012	12:40:33 AM	SiCl4 pre valve closed
2/13/2012	12:40:33 AM	SiCl4 post valve closed
2/13/2012	12:40:33 AM	Bypass valve closed
2/13/2012	12:40:33 AM	Bubbler valve closed
2/13/2012	12:40:33 AM	Main Vac valve opened
2/13/2012	12:40:33 AM	Helium MFC set to  0.000000
2/13/2012	12:40:33 AM	H2 MFC set to  0.000000
2/13/2012	12:40:33 AM	BCl3 MFC set to  0.000000
2/13/2012	12:40:33 AM	PH3 MFC set to  0.000000
2/13/2012	12:40:33 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:40:33 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:40:33 AM	Tube furnace set to 200
2/13/2012	12:41:03 AM	H2 valve closed
2/13/2012	12:41:03 AM	BCl3 valve closed
2/13/2012	12:41:03 AM	PH3 valve closed
2/13/2012	12:41:03 AM	SiCl4 pre valve closed
2/13/2012	12:41:03 AM	SiCl4 post valve closed
2/13/2012	12:41:03 AM	Bypass valve closed
2/13/2012	12:41:03 AM	Bubbler valve closed
2/13/2012	12:41:03 AM	Helium valve opened
2/13/2012	12:41:03 AM	Main Vac valve opened
2/13/2012	12:41:03 AM	Helium MFC set to  20.000000
2/13/2012	12:41:03 AM	H2 MFC set to  0.000000
2/13/2012	12:41:03 AM	BCl3 MFC set to  0.000000
2/13/2012	12:41:03 AM	PH3 MFC set to  0.000000
2/13/2012	12:41:03 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:41:03 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:41:04 AM	Tube furnace set to 200
2/13/2012	12:41:34 AM	Helium valve closed
2/13/2012	12:41:34 AM	H2 valve closed
2/13/2012	12:41:34 AM	BCl3 valve closed
2/13/2012	12:41:34 AM	PH3 valve closed
2/13/2012	12:41:34 AM	SiCl4 pre valve closed
2/13/2012	12:41:34 AM	SiCl4 post valve closed
2/13/2012	12:41:34 AM	Bypass valve closed
2/13/2012	12:41:34 AM	Bubbler valve closed
2/13/2012	12:41:34 AM	Main Vac valve opened
2/13/2012	12:41:34 AM	Helium MFC set to  0.000000
2/13/2012	12:41:34 AM	H2 MFC set to  0.000000
2/13/2012	12:41:34 AM	BCl3 MFC set to  0.000000
2/13/2012	12:41:34 AM	PH3 MFC set to  0.000000
2/13/2012	12:41:34 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:41:34 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:41:34 AM	Tube furnace set to 200
2/13/2012	12:42:04 AM	H2 valve closed
2/13/2012	12:42:04 AM	BCl3 valve closed
2/13/2012	12:42:04 AM	PH3 valve closed
2/13/2012	12:42:04 AM	SiCl4 pre valve closed
2/13/2012	12:42:04 AM	SiCl4 post valve closed
2/13/2012	12:42:04 AM	Bypass valve closed
2/13/2012	12:42:04 AM	Bubbler valve closed
2/13/2012	12:42:04 AM	Helium valve opened
2/13/2012	12:42:04 AM	Main Vac valve opened
2/13/2012	12:42:04 AM	Helium MFC set to  20.000000
2/13/2012	12:42:04 AM	H2 MFC set to  0.000000
2/13/2012	12:42:04 AM	BCl3 MFC set to  0.000000
2/13/2012	12:42:04 AM	PH3 MFC set to  0.000000
2/13/2012	12:42:04 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:42:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:42:04 AM	Tube furnace set to 200
2/13/2012	12:42:34 AM	Helium valve closed
2/13/2012	12:42:34 AM	H2 valve closed
2/13/2012	12:42:34 AM	BCl3 valve closed
2/13/2012	12:42:34 AM	PH3 valve closed
2/13/2012	12:42:34 AM	SiCl4 pre valve closed
2/13/2012	12:42:34 AM	SiCl4 post valve closed
2/13/2012	12:42:34 AM	Bypass valve closed
2/13/2012	12:42:34 AM	Bubbler valve closed
2/13/2012	12:42:34 AM	Main Vac valve opened
2/13/2012	12:42:34 AM	Helium MFC set to  0.000000
2/13/2012	12:42:34 AM	H2 MFC set to  0.000000
2/13/2012	12:42:34 AM	BCl3 MFC set to  0.000000
2/13/2012	12:42:34 AM	PH3 MFC set to  0.000000
2/13/2012	12:42:34 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:42:34 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:42:34 AM	Tube furnace set to 200
2/13/2012	12:43:04 AM	H2 valve closed
2/13/2012	12:43:04 AM	BCl3 valve closed
2/13/2012	12:43:04 AM	PH3 valve closed
2/13/2012	12:43:04 AM	SiCl4 pre valve closed
2/13/2012	12:43:04 AM	SiCl4 post valve closed
2/13/2012	12:43:04 AM	Bypass valve closed
2/13/2012	12:43:04 AM	Bubbler valve closed
2/13/2012	12:43:04 AM	Helium valve opened
2/13/2012	12:43:04 AM	Main Vac valve opened
2/13/2012	12:43:04 AM	Helium MFC set to  20.000000
2/13/2012	12:43:04 AM	H2 MFC set to  0.000000
2/13/2012	12:43:04 AM	BCl3 MFC set to  0.000000
2/13/2012	12:43:04 AM	PH3 MFC set to  0.000000
2/13/2012	12:43:04 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:43:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:43:04 AM	Tube furnace set to 200
2/13/2012	12:43:34 AM	Helium valve closed
2/13/2012	12:43:34 AM	H2 valve closed
2/13/2012	12:43:34 AM	BCl3 valve closed
2/13/2012	12:43:34 AM	PH3 valve closed
2/13/2012	12:43:34 AM	SiCl4 pre valve closed
2/13/2012	12:43:34 AM	SiCl4 post valve closed
2/13/2012	12:43:34 AM	Bypass valve closed
2/13/2012	12:43:34 AM	Bubbler valve closed
2/13/2012	12:43:34 AM	Main Vac valve opened
2/13/2012	12:43:34 AM	Helium MFC set to  0.000000
2/13/2012	12:43:34 AM	H2 MFC set to  0.000000
2/13/2012	12:43:34 AM	BCl3 MFC set to  0.000000
2/13/2012	12:43:34 AM	PH3 MFC set to  0.000000
2/13/2012	12:43:34 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:43:34 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:43:35 AM	Tube furnace set to 0
2/13/2012	12:43:36 AM	Run finished at 12:43 AM
2/13/2012	12:57:47 AM	Main Vac valve closed
2/13/2012	12:57:56 AM	Main Vac valve opened
2/13/2012	12:59:09 AM	Recipe started at 12:59 AM
2/13/2012	12:59:09 AM	Helium valve closed
2/13/2012	12:59:09 AM	H2 valve closed
2/13/2012	12:59:09 AM	BCl3 valve closed
2/13/2012	12:59:09 AM	PH3 valve closed
2/13/2012	12:59:09 AM	SiCl4 pre valve closed
2/13/2012	12:59:09 AM	SiCl4 post valve closed
2/13/2012	12:59:09 AM	Main Vac valve closed
2/13/2012	12:59:09 AM	Bypass valve closed
2/13/2012	12:59:09 AM	Bubbler valve closed
2/13/2012	12:59:09 AM	Helium MFC set to  0.000000
2/13/2012	12:59:09 AM	H2 MFC set to  0.000000
2/13/2012	12:59:09 AM	BCl3 MFC set to  0.000000
2/13/2012	12:59:09 AM	PH3 MFC set to  0.000000
2/13/2012	12:59:09 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:59:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:59:09 AM	Tube furnace set to 0
2/13/2012	12:59:12 AM	Helium valve closed
2/13/2012	12:59:12 AM	BCl3 valve closed
2/13/2012	12:59:12 AM	PH3 valve closed
2/13/2012	12:59:12 AM	SiCl4 pre valve closed
2/13/2012	12:59:12 AM	SiCl4 post valve closed
2/13/2012	12:59:12 AM	Main Vac valve closed
2/13/2012	12:59:12 AM	Bypass valve closed
2/13/2012	12:59:12 AM	Bubbler valve closed
2/13/2012	12:59:12 AM	H2 valve opened
2/13/2012	12:59:12 AM	Helium MFC set to  0.000000
2/13/2012	12:59:12 AM	H2 MFC set to  500.000000
2/13/2012	12:59:12 AM	BCl3 MFC set to  0.000000
2/13/2012	12:59:12 AM	PH3 MFC set to  0.000000
2/13/2012	12:59:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	12:59:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	12:59:12 AM	Tube furnace set to 0
2/13/2012	1:00:16 AM	Helium valve closed
2/13/2012	1:00:16 AM	BCl3 valve closed
2/13/2012	1:00:16 AM	PH3 valve closed
2/13/2012	1:00:16 AM	SiCl4 pre valve closed
2/13/2012	1:00:16 AM	SiCl4 post valve closed
2/13/2012	1:00:16 AM	Main Vac valve closed
2/13/2012	1:00:16 AM	Bypass valve closed
2/13/2012	1:00:16 AM	H2 valve opened
2/13/2012	1:00:16 AM	Bubbler valve opened
2/13/2012	1:00:16 AM	Helium MFC set to  0.000000
2/13/2012	1:00:16 AM	H2 MFC set to  500.000000
2/13/2012	1:00:16 AM	BCl3 MFC set to  0.000000
2/13/2012	1:00:16 AM	PH3 MFC set to  0.000000
2/13/2012	1:00:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:00:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:00:17 AM	Tube furnace set to 0
2/13/2012	1:00:18 AM	Helium valve closed
2/13/2012	1:00:18 AM	BCl3 valve closed
2/13/2012	1:00:18 AM	PH3 valve closed
2/13/2012	1:00:18 AM	SiCl4 pre valve closed
2/13/2012	1:00:18 AM	SiCl4 post valve closed
2/13/2012	1:00:18 AM	Main Vac valve closed
2/13/2012	1:00:18 AM	Bypass valve closed
2/13/2012	1:00:18 AM	H2 valve opened
2/13/2012	1:00:18 AM	Bubbler valve opened
2/13/2012	1:00:18 AM	Helium MFC set to  0.000000
2/13/2012	1:00:18 AM	H2 MFC set to  500.000000
2/13/2012	1:00:18 AM	BCl3 MFC set to  0.000000
2/13/2012	1:00:18 AM	PH3 MFC set to  0.000000
2/13/2012	1:00:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:00:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:00:18 AM	Tube furnace set to 1000
2/13/2012	1:20:18 AM	Helium valve closed
2/13/2012	1:20:18 AM	BCl3 valve closed
2/13/2012	1:20:18 AM	Main Vac valve closed
2/13/2012	1:20:18 AM	Bypass valve closed
2/13/2012	1:20:18 AM	H2 valve opened
2/13/2012	1:20:18 AM	PH3 valve opened
2/13/2012	1:20:18 AM	SiCl4 pre valve opened
2/13/2012	1:20:18 AM	SiCl4 post valve opened
2/13/2012	1:20:18 AM	Bubbler valve opened
2/13/2012	1:20:18 AM	Helium MFC set to  0.000000
2/13/2012	1:20:18 AM	H2 MFC set to  500.000000
2/13/2012	1:20:18 AM	BCl3 MFC set to  0.000000
2/13/2012	1:20:18 AM	PH3 MFC set to  0.600000
2/13/2012	1:20:18 AM	SiCl4 MFC set to  50.000000
2/13/2012	1:20:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:20:18 AM	Tube furnace set to 1000
2/13/2012	1:39:18 AM	Helium valve closed
2/13/2012	1:39:18 AM	BCl3 valve closed
2/13/2012	1:39:18 AM	PH3 valve closed
2/13/2012	1:39:18 AM	SiCl4 pre valve closed
2/13/2012	1:39:18 AM	SiCl4 post valve closed
2/13/2012	1:39:18 AM	Main Vac valve closed
2/13/2012	1:39:18 AM	Bypass valve closed
2/13/2012	1:39:18 AM	H2 valve opened
2/13/2012	1:39:18 AM	Bubbler valve opened
2/13/2012	1:39:18 AM	Helium MFC set to  0.000000
2/13/2012	1:39:18 AM	H2 MFC set to  500.000000
2/13/2012	1:39:18 AM	BCl3 MFC set to  0.000000
2/13/2012	1:39:18 AM	PH3 MFC set to  0.000000
2/13/2012	1:39:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:39:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:39:18 AM	Tube furnace set to 950
2/13/2012	1:41:18 AM	Helium valve closed
2/13/2012	1:41:18 AM	BCl3 valve closed
2/13/2012	1:41:18 AM	PH3 valve closed
2/13/2012	1:41:18 AM	SiCl4 pre valve closed
2/13/2012	1:41:18 AM	SiCl4 post valve closed
2/13/2012	1:41:18 AM	Main Vac valve closed
2/13/2012	1:41:18 AM	Bypass valve closed
2/13/2012	1:41:18 AM	H2 valve opened
2/13/2012	1:41:18 AM	Bubbler valve opened
2/13/2012	1:41:18 AM	Helium MFC set to  0.000000
2/13/2012	1:41:18 AM	H2 MFC set to  500.000000
2/13/2012	1:41:18 AM	BCl3 MFC set to  0.000000
2/13/2012	1:41:18 AM	PH3 MFC set to  0.000000
2/13/2012	1:41:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:41:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:41:18 AM	Tube furnace set to 900
2/13/2012	1:43:18 AM	Helium valve closed
2/13/2012	1:43:18 AM	BCl3 valve closed
2/13/2012	1:43:18 AM	PH3 valve closed
2/13/2012	1:43:18 AM	SiCl4 pre valve closed
2/13/2012	1:43:18 AM	SiCl4 post valve closed
2/13/2012	1:43:18 AM	Main Vac valve closed
2/13/2012	1:43:18 AM	Bypass valve closed
2/13/2012	1:43:18 AM	H2 valve opened
2/13/2012	1:43:18 AM	Bubbler valve opened
2/13/2012	1:43:18 AM	Helium MFC set to  0.000000
2/13/2012	1:43:18 AM	H2 MFC set to  500.000000
2/13/2012	1:43:18 AM	BCl3 MFC set to  0.000000
2/13/2012	1:43:18 AM	PH3 MFC set to  0.000000
2/13/2012	1:43:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:43:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:43:19 AM	Tube furnace set to 850
2/13/2012	1:45:19 AM	H2 valve closed
2/13/2012	1:45:19 AM	BCl3 valve closed
2/13/2012	1:45:19 AM	PH3 valve closed
2/13/2012	1:45:19 AM	SiCl4 pre valve closed
2/13/2012	1:45:19 AM	SiCl4 post valve closed
2/13/2012	1:45:19 AM	Main Vac valve closed
2/13/2012	1:45:19 AM	Bypass valve closed
2/13/2012	1:45:19 AM	Helium valve opened
2/13/2012	1:45:19 AM	Bubbler valve opened
2/13/2012	1:45:19 AM	Helium MFC set to  500.000000
2/13/2012	1:45:19 AM	H2 MFC set to  0.000000
2/13/2012	1:45:19 AM	BCl3 MFC set to  0.000000
2/13/2012	1:45:19 AM	PH3 MFC set to  0.000000
2/13/2012	1:45:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:45:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:45:19 AM	Tube furnace set to 800
2/13/2012	1:47:19 AM	H2 valve closed
2/13/2012	1:47:19 AM	BCl3 valve closed
2/13/2012	1:47:19 AM	PH3 valve closed
2/13/2012	1:47:19 AM	SiCl4 pre valve closed
2/13/2012	1:47:19 AM	SiCl4 post valve closed
2/13/2012	1:47:19 AM	Main Vac valve closed
2/13/2012	1:47:19 AM	Bypass valve closed
2/13/2012	1:47:19 AM	Helium valve opened
2/13/2012	1:47:19 AM	Bubbler valve opened
2/13/2012	1:47:19 AM	Helium MFC set to  500.000000
2/13/2012	1:47:19 AM	H2 MFC set to  0.000000
2/13/2012	1:47:19 AM	BCl3 MFC set to  0.000000
2/13/2012	1:47:19 AM	PH3 MFC set to  0.000000
2/13/2012	1:47:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:47:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:47:19 AM	Tube furnace set to 750
2/13/2012	1:49:19 AM	H2 valve closed
2/13/2012	1:49:19 AM	BCl3 valve closed
2/13/2012	1:49:19 AM	PH3 valve closed
2/13/2012	1:49:19 AM	SiCl4 pre valve closed
2/13/2012	1:49:19 AM	SiCl4 post valve closed
2/13/2012	1:49:19 AM	Main Vac valve closed
2/13/2012	1:49:19 AM	Bypass valve closed
2/13/2012	1:49:19 AM	Helium valve opened
2/13/2012	1:49:19 AM	Bubbler valve opened
2/13/2012	1:49:19 AM	Helium MFC set to  500.000000
2/13/2012	1:49:19 AM	H2 MFC set to  0.000000
2/13/2012	1:49:19 AM	BCl3 MFC set to  0.000000
2/13/2012	1:49:19 AM	PH3 MFC set to  0.000000
2/13/2012	1:49:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	1:49:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:49:19 AM	Tube furnace set to 0
2/13/2012	2:09:19 AM	Helium valve closed
2/13/2012	2:09:19 AM	H2 valve closed
2/13/2012	2:09:19 AM	BCl3 valve closed
2/13/2012	2:09:19 AM	PH3 valve closed
2/13/2012	2:09:19 AM	SiCl4 pre valve closed
2/13/2012	2:09:19 AM	SiCl4 post valve closed
2/13/2012	2:09:19 AM	Main Vac valve closed
2/13/2012	2:09:19 AM	Bypass valve closed
2/13/2012	2:09:19 AM	Bubbler valve closed
2/13/2012	2:09:19 AM	Helium MFC set to  0.000000
2/13/2012	2:09:19 AM	H2 MFC set to  0.000000
2/13/2012	2:09:19 AM	BCl3 MFC set to  0.000000
2/13/2012	2:09:19 AM	PH3 MFC set to  0.000000
2/13/2012	2:09:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:09:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:09:19 AM	Tube furnace set to 0
2/13/2012	2:09:20 AM	Run finished at 2:09 AM
2/13/2012	2:14:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	2:14:14 AM	Recipe started at 2:14 AM
2/13/2012	2:14:14 AM	Helium valve closed
2/13/2012	2:14:14 AM	H2 valve closed
2/13/2012	2:14:14 AM	BCl3 valve closed
2/13/2012	2:14:14 AM	PH3 valve closed
2/13/2012	2:14:14 AM	SiCl4 pre valve closed
2/13/2012	2:14:14 AM	SiCl4 post valve closed
2/13/2012	2:14:14 AM	Main Vac valve closed
2/13/2012	2:14:14 AM	Bypass valve closed
2/13/2012	2:14:14 AM	Bubbler valve closed
2/13/2012	2:14:14 AM	Helium MFC set to  0.000000
2/13/2012	2:14:14 AM	H2 MFC set to  0.000000
2/13/2012	2:14:14 AM	BCl3 MFC set to  0.000000
2/13/2012	2:14:14 AM	PH3 MFC set to  0.000000
2/13/2012	2:14:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:14:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:14:14 AM	Tube furnace set to 0
2/13/2012	2:14:17 AM	H2 valve closed
2/13/2012	2:14:17 AM	BCl3 valve closed
2/13/2012	2:14:17 AM	PH3 valve closed
2/13/2012	2:14:17 AM	SiCl4 pre valve closed
2/13/2012	2:14:17 AM	SiCl4 post valve closed
2/13/2012	2:14:17 AM	Main Vac valve closed
2/13/2012	2:14:17 AM	Bypass valve closed
2/13/2012	2:14:17 AM	Bubbler valve closed
2/13/2012	2:14:17 AM	Helium valve opened
2/13/2012	2:14:17 AM	Helium MFC set to  500.000000
2/13/2012	2:14:17 AM	H2 MFC set to  0.000000
2/13/2012	2:14:17 AM	BCl3 MFC set to  0.000000
2/13/2012	2:14:17 AM	PH3 MFC set to  0.000000
2/13/2012	2:14:17 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:14:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:14:17 AM	Tube furnace set to 0
2/13/2012	2:14:18 AM	Helium valve closed
2/13/2012	2:14:18 AM	H2 valve closed
2/13/2012	2:14:18 AM	BCl3 valve closed
2/13/2012	2:14:18 AM	PH3 valve closed
2/13/2012	2:14:18 AM	SiCl4 pre valve closed
2/13/2012	2:14:18 AM	SiCl4 post valve closed
2/13/2012	2:14:18 AM	Main Vac valve closed
2/13/2012	2:14:18 AM	Bypass valve closed
2/13/2012	2:14:18 AM	Bubbler valve closed
2/13/2012	2:14:18 AM	Helium MFC set to  0.000000
2/13/2012	2:14:18 AM	H2 MFC set to  0.000000
2/13/2012	2:14:18 AM	BCl3 MFC set to  0.000000
2/13/2012	2:14:18 AM	PH3 MFC set to  0.000000
2/13/2012	2:14:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:14:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:14:18 AM	Tube furnace set to 0
2/13/2012	2:14:19 AM	Run finished at 2:14 AM
2/13/2012	2:14:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	2:17:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	2:17:44 AM	Recipe started at 2:17 AM
2/13/2012	2:17:44 AM	Helium valve closed
2/13/2012	2:17:44 AM	H2 valve closed
2/13/2012	2:17:44 AM	BCl3 valve closed
2/13/2012	2:17:44 AM	PH3 valve closed
2/13/2012	2:17:44 AM	SiCl4 pre valve closed
2/13/2012	2:17:44 AM	SiCl4 post valve closed
2/13/2012	2:17:44 AM	Main Vac valve closed
2/13/2012	2:17:44 AM	Bubbler valve closed
2/13/2012	2:17:44 AM	Bypass valve opened
2/13/2012	2:17:44 AM	Helium MFC set to  0.000000
2/13/2012	2:17:44 AM	H2 MFC set to  0.000000
2/13/2012	2:17:44 AM	BCl3 MFC set to  0.000000
2/13/2012	2:17:44 AM	PH3 MFC set to  0.000000
2/13/2012	2:17:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:17:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:17:44 AM	Tube furnace set to 0
2/13/2012	2:18:46 AM	Helium valve closed
2/13/2012	2:18:46 AM	H2 valve closed
2/13/2012	2:18:46 AM	BCl3 valve closed
2/13/2012	2:18:46 AM	PH3 valve closed
2/13/2012	2:18:46 AM	SiCl4 pre valve closed
2/13/2012	2:18:46 AM	SiCl4 post valve closed
2/13/2012	2:18:46 AM	Main Vac valve closed
2/13/2012	2:18:46 AM	Bubbler valve closed
2/13/2012	2:18:46 AM	Bypass valve opened
2/13/2012	2:18:46 AM	Helium MFC set to  0.000000
2/13/2012	2:18:46 AM	H2 MFC set to  0.000000
2/13/2012	2:18:46 AM	BCl3 MFC set to  0.000000
2/13/2012	2:18:46 AM	PH3 MFC set to  0.000000
2/13/2012	2:18:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:18:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:18:46 AM	Tube furnace set to 0
2/13/2012	2:19:46 AM	Helium valve closed
2/13/2012	2:19:46 AM	H2 valve closed
2/13/2012	2:19:46 AM	BCl3 valve closed
2/13/2012	2:19:46 AM	PH3 valve closed
2/13/2012	2:19:46 AM	SiCl4 pre valve closed
2/13/2012	2:19:46 AM	SiCl4 post valve closed
2/13/2012	2:19:46 AM	Bypass valve closed
2/13/2012	2:19:46 AM	Bubbler valve closed
2/13/2012	2:19:46 AM	Main Vac valve opened
2/13/2012	2:19:46 AM	Helium MFC set to  0.000000
2/13/2012	2:19:46 AM	H2 MFC set to  0.000000
2/13/2012	2:19:46 AM	BCl3 MFC set to  0.000000
2/13/2012	2:19:46 AM	PH3 MFC set to  0.000000
2/13/2012	2:19:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:19:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:19:46 AM	Tube furnace set to 0
2/13/2012	2:19:47 AM	Run finished at 2:19 AM
2/13/2012	2:19:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	2:22:47 AM	Recipe started at 2:22 AM
2/13/2012	2:22:47 AM	Helium valve closed
2/13/2012	2:22:47 AM	H2 valve closed
2/13/2012	2:22:47 AM	BCl3 valve closed
2/13/2012	2:22:47 AM	PH3 valve closed
2/13/2012	2:22:47 AM	SiCl4 pre valve closed
2/13/2012	2:22:47 AM	SiCl4 post valve closed
2/13/2012	2:22:47 AM	Bypass valve closed
2/13/2012	2:22:47 AM	Bubbler valve closed
2/13/2012	2:22:47 AM	Main Vac valve opened
2/13/2012	2:22:47 AM	Helium MFC set to  0.000000
2/13/2012	2:22:47 AM	H2 MFC set to  0.000000
2/13/2012	2:22:47 AM	BCl3 MFC set to  0.000000
2/13/2012	2:22:47 AM	PH3 MFC set to  0.000000
2/13/2012	2:22:47 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:22:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:22:48 AM	Tube furnace set to 0
2/13/2012	2:23:18 AM	H2 valve closed
2/13/2012	2:23:18 AM	BCl3 valve closed
2/13/2012	2:23:18 AM	PH3 valve closed
2/13/2012	2:23:18 AM	SiCl4 pre valve closed
2/13/2012	2:23:18 AM	SiCl4 post valve closed
2/13/2012	2:23:18 AM	Bypass valve closed
2/13/2012	2:23:18 AM	Bubbler valve closed
2/13/2012	2:23:18 AM	Helium valve opened
2/13/2012	2:23:18 AM	Main Vac valve opened
2/13/2012	2:23:18 AM	Helium MFC set to  20.000000
2/13/2012	2:23:18 AM	H2 MFC set to  0.000000
2/13/2012	2:23:18 AM	BCl3 MFC set to  0.000000
2/13/2012	2:23:18 AM	PH3 MFC set to  0.000000
2/13/2012	2:23:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:23:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:23:18 AM	Tube furnace set to 0
2/13/2012	2:23:48 AM	Helium valve closed
2/13/2012	2:23:48 AM	H2 valve closed
2/13/2012	2:23:48 AM	BCl3 valve closed
2/13/2012	2:23:48 AM	PH3 valve closed
2/13/2012	2:23:48 AM	SiCl4 pre valve closed
2/13/2012	2:23:48 AM	SiCl4 post valve closed
2/13/2012	2:23:48 AM	Bypass valve closed
2/13/2012	2:23:48 AM	Bubbler valve closed
2/13/2012	2:23:48 AM	Main Vac valve opened
2/13/2012	2:23:48 AM	Helium MFC set to  0.000000
2/13/2012	2:23:48 AM	H2 MFC set to  0.000000
2/13/2012	2:23:48 AM	BCl3 MFC set to  0.000000
2/13/2012	2:23:48 AM	PH3 MFC set to  0.000000
2/13/2012	2:23:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:23:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:23:48 AM	Tube furnace set to 0
2/13/2012	2:24:18 AM	H2 valve closed
2/13/2012	2:24:18 AM	BCl3 valve closed
2/13/2012	2:24:18 AM	PH3 valve closed
2/13/2012	2:24:18 AM	SiCl4 pre valve closed
2/13/2012	2:24:18 AM	SiCl4 post valve closed
2/13/2012	2:24:18 AM	Bypass valve closed
2/13/2012	2:24:18 AM	Bubbler valve closed
2/13/2012	2:24:18 AM	Helium valve opened
2/13/2012	2:24:18 AM	Main Vac valve opened
2/13/2012	2:24:18 AM	Helium MFC set to  20.000000
2/13/2012	2:24:18 AM	H2 MFC set to  0.000000
2/13/2012	2:24:18 AM	BCl3 MFC set to  0.000000
2/13/2012	2:24:18 AM	PH3 MFC set to  0.000000
2/13/2012	2:24:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:24:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:24:18 AM	Tube furnace set to 0
2/13/2012	2:24:48 AM	Helium valve closed
2/13/2012	2:24:48 AM	H2 valve closed
2/13/2012	2:24:48 AM	BCl3 valve closed
2/13/2012	2:24:48 AM	PH3 valve closed
2/13/2012	2:24:48 AM	SiCl4 pre valve closed
2/13/2012	2:24:48 AM	SiCl4 post valve closed
2/13/2012	2:24:48 AM	Bypass valve closed
2/13/2012	2:24:48 AM	Bubbler valve closed
2/13/2012	2:24:48 AM	Main Vac valve opened
2/13/2012	2:24:48 AM	Helium MFC set to  0.000000
2/13/2012	2:24:48 AM	H2 MFC set to  0.000000
2/13/2012	2:24:48 AM	BCl3 MFC set to  0.000000
2/13/2012	2:24:48 AM	PH3 MFC set to  0.000000
2/13/2012	2:24:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:24:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:24:48 AM	Tube furnace set to 0
2/13/2012	2:25:18 AM	H2 valve closed
2/13/2012	2:25:18 AM	BCl3 valve closed
2/13/2012	2:25:18 AM	PH3 valve closed
2/13/2012	2:25:18 AM	SiCl4 pre valve closed
2/13/2012	2:25:18 AM	SiCl4 post valve closed
2/13/2012	2:25:18 AM	Bypass valve closed
2/13/2012	2:25:18 AM	Bubbler valve closed
2/13/2012	2:25:18 AM	Helium valve opened
2/13/2012	2:25:18 AM	Main Vac valve opened
2/13/2012	2:25:18 AM	Helium MFC set to  20.000000
2/13/2012	2:25:18 AM	H2 MFC set to  0.000000
2/13/2012	2:25:18 AM	BCl3 MFC set to  0.000000
2/13/2012	2:25:18 AM	PH3 MFC set to  0.000000
2/13/2012	2:25:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:25:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:25:19 AM	Tube furnace set to 0
2/13/2012	2:25:49 AM	Helium valve closed
2/13/2012	2:25:49 AM	H2 valve closed
2/13/2012	2:25:49 AM	BCl3 valve closed
2/13/2012	2:25:49 AM	PH3 valve closed
2/13/2012	2:25:49 AM	SiCl4 pre valve closed
2/13/2012	2:25:49 AM	SiCl4 post valve closed
2/13/2012	2:25:49 AM	Bypass valve closed
2/13/2012	2:25:49 AM	Bubbler valve closed
2/13/2012	2:25:49 AM	Main Vac valve opened
2/13/2012	2:25:49 AM	Helium MFC set to  0.000000
2/13/2012	2:25:49 AM	H2 MFC set to  0.000000
2/13/2012	2:25:49 AM	BCl3 MFC set to  0.000000
2/13/2012	2:25:49 AM	PH3 MFC set to  0.000000
2/13/2012	2:25:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:25:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:25:49 AM	Tube furnace set to 0
2/13/2012	2:26:19 AM	H2 valve closed
2/13/2012	2:26:19 AM	BCl3 valve closed
2/13/2012	2:26:19 AM	PH3 valve closed
2/13/2012	2:26:19 AM	SiCl4 pre valve closed
2/13/2012	2:26:19 AM	SiCl4 post valve closed
2/13/2012	2:26:19 AM	Bypass valve closed
2/13/2012	2:26:19 AM	Bubbler valve closed
2/13/2012	2:26:19 AM	Helium valve opened
2/13/2012	2:26:19 AM	Main Vac valve opened
2/13/2012	2:26:19 AM	Helium MFC set to  20.000000
2/13/2012	2:26:19 AM	H2 MFC set to  0.000000
2/13/2012	2:26:19 AM	BCl3 MFC set to  0.000000
2/13/2012	2:26:19 AM	PH3 MFC set to  0.000000
2/13/2012	2:26:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:26:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:26:19 AM	Tube furnace set to 0
2/13/2012	2:26:49 AM	Helium valve closed
2/13/2012	2:26:49 AM	H2 valve closed
2/13/2012	2:26:49 AM	BCl3 valve closed
2/13/2012	2:26:49 AM	PH3 valve closed
2/13/2012	2:26:49 AM	SiCl4 pre valve closed
2/13/2012	2:26:49 AM	SiCl4 post valve closed
2/13/2012	2:26:49 AM	Bypass valve closed
2/13/2012	2:26:49 AM	Bubbler valve closed
2/13/2012	2:26:49 AM	Main Vac valve opened
2/13/2012	2:26:49 AM	Helium MFC set to  0.000000
2/13/2012	2:26:49 AM	H2 MFC set to  0.000000
2/13/2012	2:26:49 AM	BCl3 MFC set to  0.000000
2/13/2012	2:26:49 AM	PH3 MFC set to  0.000000
2/13/2012	2:26:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:26:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:26:49 AM	Tube furnace set to 0
2/13/2012	2:27:19 AM	H2 valve closed
2/13/2012	2:27:19 AM	BCl3 valve closed
2/13/2012	2:27:19 AM	PH3 valve closed
2/13/2012	2:27:19 AM	SiCl4 pre valve closed
2/13/2012	2:27:19 AM	SiCl4 post valve closed
2/13/2012	2:27:19 AM	Bypass valve closed
2/13/2012	2:27:19 AM	Bubbler valve closed
2/13/2012	2:27:19 AM	Helium valve opened
2/13/2012	2:27:19 AM	Main Vac valve opened
2/13/2012	2:27:19 AM	Helium MFC set to  20.000000
2/13/2012	2:27:19 AM	H2 MFC set to  0.000000
2/13/2012	2:27:19 AM	BCl3 MFC set to  0.000000
2/13/2012	2:27:19 AM	PH3 MFC set to  0.000000
2/13/2012	2:27:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:27:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:27:19 AM	Tube furnace set to 0
2/13/2012	2:27:49 AM	Helium valve closed
2/13/2012	2:27:49 AM	H2 valve closed
2/13/2012	2:27:49 AM	BCl3 valve closed
2/13/2012	2:27:49 AM	PH3 valve closed
2/13/2012	2:27:49 AM	SiCl4 pre valve closed
2/13/2012	2:27:49 AM	SiCl4 post valve closed
2/13/2012	2:27:49 AM	Bypass valve closed
2/13/2012	2:27:49 AM	Bubbler valve closed
2/13/2012	2:27:49 AM	Main Vac valve opened
2/13/2012	2:27:49 AM	Helium MFC set to  0.000000
2/13/2012	2:27:49 AM	H2 MFC set to  0.000000
2/13/2012	2:27:49 AM	BCl3 MFC set to  0.000000
2/13/2012	2:27:49 AM	PH3 MFC set to  0.000000
2/13/2012	2:27:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:27:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:27:50 AM	Tube furnace set to 0
2/13/2012	2:28:20 AM	H2 valve closed
2/13/2012	2:28:20 AM	BCl3 valve closed
2/13/2012	2:28:20 AM	PH3 valve closed
2/13/2012	2:28:20 AM	SiCl4 pre valve closed
2/13/2012	2:28:20 AM	SiCl4 post valve closed
2/13/2012	2:28:20 AM	Bypass valve closed
2/13/2012	2:28:20 AM	Bubbler valve closed
2/13/2012	2:28:20 AM	Helium valve opened
2/13/2012	2:28:20 AM	Main Vac valve opened
2/13/2012	2:28:20 AM	Helium MFC set to  20.000000
2/13/2012	2:28:20 AM	H2 MFC set to  0.000000
2/13/2012	2:28:20 AM	BCl3 MFC set to  0.000000
2/13/2012	2:28:20 AM	PH3 MFC set to  0.000000
2/13/2012	2:28:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:28:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:28:20 AM	Tube furnace set to 0
2/13/2012	2:28:50 AM	Helium valve closed
2/13/2012	2:28:50 AM	H2 valve closed
2/13/2012	2:28:50 AM	BCl3 valve closed
2/13/2012	2:28:50 AM	PH3 valve closed
2/13/2012	2:28:50 AM	SiCl4 pre valve closed
2/13/2012	2:28:50 AM	SiCl4 post valve closed
2/13/2012	2:28:50 AM	Bypass valve closed
2/13/2012	2:28:50 AM	Bubbler valve closed
2/13/2012	2:28:50 AM	Main Vac valve opened
2/13/2012	2:28:50 AM	Helium MFC set to  0.000000
2/13/2012	2:28:50 AM	H2 MFC set to  0.000000
2/13/2012	2:28:50 AM	BCl3 MFC set to  0.000000
2/13/2012	2:28:50 AM	PH3 MFC set to  0.000000
2/13/2012	2:28:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:28:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:28:50 AM	Tube furnace set to 0
2/13/2012	2:29:20 AM	H2 valve closed
2/13/2012	2:29:20 AM	BCl3 valve closed
2/13/2012	2:29:20 AM	PH3 valve closed
2/13/2012	2:29:20 AM	SiCl4 pre valve closed
2/13/2012	2:29:20 AM	SiCl4 post valve closed
2/13/2012	2:29:20 AM	Bypass valve closed
2/13/2012	2:29:20 AM	Bubbler valve closed
2/13/2012	2:29:20 AM	Helium valve opened
2/13/2012	2:29:20 AM	Main Vac valve opened
2/13/2012	2:29:20 AM	Helium MFC set to  20.000000
2/13/2012	2:29:20 AM	H2 MFC set to  0.000000
2/13/2012	2:29:20 AM	BCl3 MFC set to  0.000000
2/13/2012	2:29:20 AM	PH3 MFC set to  0.000000
2/13/2012	2:29:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:29:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:29:20 AM	Tube furnace set to 0
2/13/2012	2:29:50 AM	Helium valve closed
2/13/2012	2:29:50 AM	H2 valve closed
2/13/2012	2:29:50 AM	BCl3 valve closed
2/13/2012	2:29:50 AM	PH3 valve closed
2/13/2012	2:29:50 AM	SiCl4 pre valve closed
2/13/2012	2:29:50 AM	SiCl4 post valve closed
2/13/2012	2:29:50 AM	Bypass valve closed
2/13/2012	2:29:50 AM	Bubbler valve closed
2/13/2012	2:29:50 AM	Main Vac valve opened
2/13/2012	2:29:50 AM	Helium MFC set to  0.000000
2/13/2012	2:29:50 AM	H2 MFC set to  0.000000
2/13/2012	2:29:50 AM	BCl3 MFC set to  0.000000
2/13/2012	2:29:50 AM	PH3 MFC set to  0.000000
2/13/2012	2:29:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:29:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:29:50 AM	Tube furnace set to 0
2/13/2012	2:30:20 AM	H2 valve closed
2/13/2012	2:30:20 AM	BCl3 valve closed
2/13/2012	2:30:20 AM	PH3 valve closed
2/13/2012	2:30:20 AM	SiCl4 pre valve closed
2/13/2012	2:30:20 AM	SiCl4 post valve closed
2/13/2012	2:30:20 AM	Bypass valve closed
2/13/2012	2:30:20 AM	Bubbler valve closed
2/13/2012	2:30:20 AM	Helium valve opened
2/13/2012	2:30:20 AM	Main Vac valve opened
2/13/2012	2:30:20 AM	Helium MFC set to  20.000000
2/13/2012	2:30:20 AM	H2 MFC set to  0.000000
2/13/2012	2:30:20 AM	BCl3 MFC set to  0.000000
2/13/2012	2:30:21 AM	PH3 MFC set to  0.000000
2/13/2012	2:30:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:30:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:30:21 AM	Tube furnace set to 0
2/13/2012	2:30:51 AM	Helium valve closed
2/13/2012	2:30:51 AM	H2 valve closed
2/13/2012	2:30:51 AM	BCl3 valve closed
2/13/2012	2:30:51 AM	PH3 valve closed
2/13/2012	2:30:51 AM	SiCl4 pre valve closed
2/13/2012	2:30:51 AM	SiCl4 post valve closed
2/13/2012	2:30:51 AM	Bypass valve closed
2/13/2012	2:30:51 AM	Bubbler valve closed
2/13/2012	2:30:51 AM	Main Vac valve opened
2/13/2012	2:30:51 AM	Helium MFC set to  0.000000
2/13/2012	2:30:51 AM	H2 MFC set to  0.000000
2/13/2012	2:30:51 AM	BCl3 MFC set to  0.000000
2/13/2012	2:30:51 AM	PH3 MFC set to  0.000000
2/13/2012	2:30:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:30:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:30:51 AM	Tube furnace set to 0
2/13/2012	2:31:21 AM	H2 valve closed
2/13/2012	2:31:21 AM	BCl3 valve closed
2/13/2012	2:31:21 AM	PH3 valve closed
2/13/2012	2:31:21 AM	SiCl4 pre valve closed
2/13/2012	2:31:21 AM	SiCl4 post valve closed
2/13/2012	2:31:21 AM	Bypass valve closed
2/13/2012	2:31:21 AM	Bubbler valve closed
2/13/2012	2:31:21 AM	Helium valve opened
2/13/2012	2:31:21 AM	Main Vac valve opened
2/13/2012	2:31:21 AM	Helium MFC set to  20.000000
2/13/2012	2:31:21 AM	H2 MFC set to  0.000000
2/13/2012	2:31:21 AM	BCl3 MFC set to  0.000000
2/13/2012	2:31:21 AM	PH3 MFC set to  0.000000
2/13/2012	2:31:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:31:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:31:21 AM	Tube furnace set to 0
2/13/2012	2:31:51 AM	Helium valve closed
2/13/2012	2:31:51 AM	H2 valve closed
2/13/2012	2:31:51 AM	BCl3 valve closed
2/13/2012	2:31:51 AM	PH3 valve closed
2/13/2012	2:31:51 AM	SiCl4 pre valve closed
2/13/2012	2:31:51 AM	SiCl4 post valve closed
2/13/2012	2:31:51 AM	Bypass valve closed
2/13/2012	2:31:51 AM	Bubbler valve closed
2/13/2012	2:31:51 AM	Main Vac valve opened
2/13/2012	2:31:51 AM	Helium MFC set to  0.000000
2/13/2012	2:31:51 AM	H2 MFC set to  0.000000
2/13/2012	2:31:51 AM	BCl3 MFC set to  0.000000
2/13/2012	2:31:51 AM	PH3 MFC set to  0.000000
2/13/2012	2:31:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:31:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:31:51 AM	Tube furnace set to 200
2/13/2012	2:32:21 AM	H2 valve closed
2/13/2012	2:32:21 AM	BCl3 valve closed
2/13/2012	2:32:21 AM	PH3 valve closed
2/13/2012	2:32:21 AM	SiCl4 pre valve closed
2/13/2012	2:32:21 AM	SiCl4 post valve closed
2/13/2012	2:32:21 AM	Bypass valve closed
2/13/2012	2:32:21 AM	Bubbler valve closed
2/13/2012	2:32:21 AM	Helium valve opened
2/13/2012	2:32:21 AM	Main Vac valve opened
2/13/2012	2:32:21 AM	Helium MFC set to  20.000000
2/13/2012	2:32:21 AM	H2 MFC set to  0.000000
2/13/2012	2:32:21 AM	BCl3 MFC set to  0.000000
2/13/2012	2:32:21 AM	PH3 MFC set to  0.000000
2/13/2012	2:32:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:32:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:32:22 AM	Tube furnace set to 200
2/13/2012	2:32:52 AM	Helium valve closed
2/13/2012	2:32:52 AM	H2 valve closed
2/13/2012	2:32:52 AM	BCl3 valve closed
2/13/2012	2:32:52 AM	PH3 valve closed
2/13/2012	2:32:52 AM	SiCl4 pre valve closed
2/13/2012	2:32:52 AM	SiCl4 post valve closed
2/13/2012	2:32:52 AM	Bypass valve closed
2/13/2012	2:32:52 AM	Bubbler valve closed
2/13/2012	2:32:52 AM	Main Vac valve opened
2/13/2012	2:32:52 AM	Helium MFC set to  0.000000
2/13/2012	2:32:52 AM	H2 MFC set to  0.000000
2/13/2012	2:32:52 AM	BCl3 MFC set to  0.000000
2/13/2012	2:32:52 AM	PH3 MFC set to  0.000000
2/13/2012	2:32:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:32:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:32:52 AM	Tube furnace set to 200
2/13/2012	2:33:22 AM	H2 valve closed
2/13/2012	2:33:22 AM	BCl3 valve closed
2/13/2012	2:33:22 AM	PH3 valve closed
2/13/2012	2:33:22 AM	SiCl4 pre valve closed
2/13/2012	2:33:22 AM	SiCl4 post valve closed
2/13/2012	2:33:22 AM	Bypass valve closed
2/13/2012	2:33:22 AM	Bubbler valve closed
2/13/2012	2:33:22 AM	Helium valve opened
2/13/2012	2:33:22 AM	Main Vac valve opened
2/13/2012	2:33:22 AM	Helium MFC set to  20.000000
2/13/2012	2:33:22 AM	H2 MFC set to  0.000000
2/13/2012	2:33:22 AM	BCl3 MFC set to  0.000000
2/13/2012	2:33:22 AM	PH3 MFC set to  0.000000
2/13/2012	2:33:22 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:33:22 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:33:22 AM	Tube furnace set to 200
2/13/2012	2:33:52 AM	Helium valve closed
2/13/2012	2:33:52 AM	H2 valve closed
2/13/2012	2:33:52 AM	BCl3 valve closed
2/13/2012	2:33:52 AM	PH3 valve closed
2/13/2012	2:33:52 AM	SiCl4 pre valve closed
2/13/2012	2:33:52 AM	SiCl4 post valve closed
2/13/2012	2:33:52 AM	Bypass valve closed
2/13/2012	2:33:52 AM	Bubbler valve closed
2/13/2012	2:33:52 AM	Main Vac valve opened
2/13/2012	2:33:52 AM	Helium MFC set to  0.000000
2/13/2012	2:33:52 AM	H2 MFC set to  0.000000
2/13/2012	2:33:52 AM	BCl3 MFC set to  0.000000
2/13/2012	2:33:52 AM	PH3 MFC set to  0.000000
2/13/2012	2:33:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:33:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:33:52 AM	Tube furnace set to 200
2/13/2012	2:34:22 AM	H2 valve closed
2/13/2012	2:34:22 AM	BCl3 valve closed
2/13/2012	2:34:22 AM	PH3 valve closed
2/13/2012	2:34:22 AM	SiCl4 pre valve closed
2/13/2012	2:34:22 AM	SiCl4 post valve closed
2/13/2012	2:34:22 AM	Bypass valve closed
2/13/2012	2:34:22 AM	Bubbler valve closed
2/13/2012	2:34:22 AM	Helium valve opened
2/13/2012	2:34:22 AM	Main Vac valve opened
2/13/2012	2:34:22 AM	Helium MFC set to  20.000000
2/13/2012	2:34:22 AM	H2 MFC set to  0.000000
2/13/2012	2:34:22 AM	BCl3 MFC set to  0.000000
2/13/2012	2:34:22 AM	PH3 MFC set to  0.000000
2/13/2012	2:34:22 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:34:22 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:34:22 AM	Tube furnace set to 200
2/13/2012	2:34:52 AM	Helium valve closed
2/13/2012	2:34:52 AM	H2 valve closed
2/13/2012	2:34:52 AM	BCl3 valve closed
2/13/2012	2:34:52 AM	PH3 valve closed
2/13/2012	2:34:52 AM	SiCl4 pre valve closed
2/13/2012	2:34:52 AM	SiCl4 post valve closed
2/13/2012	2:34:52 AM	Bypass valve closed
2/13/2012	2:34:52 AM	Bubbler valve closed
2/13/2012	2:34:52 AM	Main Vac valve opened
2/13/2012	2:34:52 AM	Helium MFC set to  0.000000
2/13/2012	2:34:52 AM	H2 MFC set to  0.000000
2/13/2012	2:34:52 AM	BCl3 MFC set to  0.000000
2/13/2012	2:34:52 AM	PH3 MFC set to  0.000000
2/13/2012	2:34:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:34:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:34:53 AM	Tube furnace set to 200
2/13/2012	2:35:23 AM	H2 valve closed
2/13/2012	2:35:23 AM	BCl3 valve closed
2/13/2012	2:35:23 AM	PH3 valve closed
2/13/2012	2:35:23 AM	SiCl4 pre valve closed
2/13/2012	2:35:23 AM	SiCl4 post valve closed
2/13/2012	2:35:23 AM	Bypass valve closed
2/13/2012	2:35:23 AM	Bubbler valve closed
2/13/2012	2:35:23 AM	Helium valve opened
2/13/2012	2:35:23 AM	Main Vac valve opened
2/13/2012	2:35:23 AM	Helium MFC set to  20.000000
2/13/2012	2:35:23 AM	H2 MFC set to  0.000000
2/13/2012	2:35:23 AM	BCl3 MFC set to  0.000000
2/13/2012	2:35:23 AM	PH3 MFC set to  0.000000
2/13/2012	2:35:23 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:35:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:35:23 AM	Tube furnace set to 200
2/13/2012	2:35:53 AM	Helium valve closed
2/13/2012	2:35:53 AM	H2 valve closed
2/13/2012	2:35:53 AM	BCl3 valve closed
2/13/2012	2:35:53 AM	PH3 valve closed
2/13/2012	2:35:53 AM	SiCl4 pre valve closed
2/13/2012	2:35:53 AM	SiCl4 post valve closed
2/13/2012	2:35:53 AM	Bypass valve closed
2/13/2012	2:35:53 AM	Bubbler valve closed
2/13/2012	2:35:53 AM	Main Vac valve opened
2/13/2012	2:35:53 AM	Helium MFC set to  0.000000
2/13/2012	2:35:53 AM	H2 MFC set to  0.000000
2/13/2012	2:35:53 AM	BCl3 MFC set to  0.000000
2/13/2012	2:35:53 AM	PH3 MFC set to  0.000000
2/13/2012	2:35:53 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:35:53 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:35:53 AM	Tube furnace set to 200
2/13/2012	2:36:23 AM	H2 valve closed
2/13/2012	2:36:23 AM	BCl3 valve closed
2/13/2012	2:36:23 AM	PH3 valve closed
2/13/2012	2:36:23 AM	SiCl4 pre valve closed
2/13/2012	2:36:23 AM	SiCl4 post valve closed
2/13/2012	2:36:23 AM	Bypass valve closed
2/13/2012	2:36:23 AM	Bubbler valve closed
2/13/2012	2:36:23 AM	Helium valve opened
2/13/2012	2:36:23 AM	Main Vac valve opened
2/13/2012	2:36:23 AM	Helium MFC set to  20.000000
2/13/2012	2:36:23 AM	H2 MFC set to  0.000000
2/13/2012	2:36:23 AM	BCl3 MFC set to  0.000000
2/13/2012	2:36:23 AM	PH3 MFC set to  0.000000
2/13/2012	2:36:23 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:36:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:36:23 AM	Tube furnace set to 200
2/13/2012	2:36:53 AM	Helium valve closed
2/13/2012	2:36:53 AM	H2 valve closed
2/13/2012	2:36:53 AM	BCl3 valve closed
2/13/2012	2:36:53 AM	PH3 valve closed
2/13/2012	2:36:53 AM	SiCl4 pre valve closed
2/13/2012	2:36:53 AM	SiCl4 post valve closed
2/13/2012	2:36:53 AM	Bypass valve closed
2/13/2012	2:36:53 AM	Bubbler valve closed
2/13/2012	2:36:53 AM	Main Vac valve opened
2/13/2012	2:36:53 AM	Helium MFC set to  0.000000
2/13/2012	2:36:53 AM	H2 MFC set to  0.000000
2/13/2012	2:36:53 AM	BCl3 MFC set to  0.000000
2/13/2012	2:36:53 AM	PH3 MFC set to  0.000000
2/13/2012	2:36:53 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:36:53 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:36:53 AM	Tube furnace set to 200
2/13/2012	2:37:23 AM	H2 valve closed
2/13/2012	2:37:23 AM	BCl3 valve closed
2/13/2012	2:37:23 AM	PH3 valve closed
2/13/2012	2:37:23 AM	SiCl4 pre valve closed
2/13/2012	2:37:23 AM	SiCl4 post valve closed
2/13/2012	2:37:23 AM	Bypass valve closed
2/13/2012	2:37:23 AM	Bubbler valve closed
2/13/2012	2:37:23 AM	Helium valve opened
2/13/2012	2:37:23 AM	Main Vac valve opened
2/13/2012	2:37:23 AM	Helium MFC set to  20.000000
2/13/2012	2:37:23 AM	H2 MFC set to  0.000000
2/13/2012	2:37:23 AM	BCl3 MFC set to  0.000000
2/13/2012	2:37:23 AM	PH3 MFC set to  0.000000
2/13/2012	2:37:23 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:37:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:37:24 AM	Tube furnace set to 200
2/13/2012	2:37:54 AM	Helium valve closed
2/13/2012	2:37:54 AM	H2 valve closed
2/13/2012	2:37:54 AM	BCl3 valve closed
2/13/2012	2:37:54 AM	PH3 valve closed
2/13/2012	2:37:54 AM	SiCl4 pre valve closed
2/13/2012	2:37:54 AM	SiCl4 post valve closed
2/13/2012	2:37:54 AM	Bypass valve closed
2/13/2012	2:37:54 AM	Bubbler valve closed
2/13/2012	2:37:54 AM	Main Vac valve opened
2/13/2012	2:37:54 AM	Helium MFC set to  0.000000
2/13/2012	2:37:54 AM	H2 MFC set to  0.000000
2/13/2012	2:37:54 AM	BCl3 MFC set to  0.000000
2/13/2012	2:37:54 AM	PH3 MFC set to  0.000000
2/13/2012	2:37:54 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:37:54 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:37:54 AM	Tube furnace set to 0
2/13/2012	2:37:55 AM	Run finished at 2:37 AM
2/13/2012	2:43:46 AM	Main Vac valve closed
2/13/2012	2:43:51 AM	Main Vac valve opened
2/13/2012	2:44:05 AM	Recipe started at 2:43 AM
2/13/2012	2:44:05 AM	Helium valve closed
2/13/2012	2:44:05 AM	H2 valve closed
2/13/2012	2:44:05 AM	BCl3 valve closed
2/13/2012	2:44:05 AM	PH3 valve closed
2/13/2012	2:44:05 AM	SiCl4 pre valve closed
2/13/2012	2:44:05 AM	SiCl4 post valve closed
2/13/2012	2:44:05 AM	Bypass valve closed
2/13/2012	2:44:05 AM	Bubbler valve closed
2/13/2012	2:44:05 AM	Main Vac valve opened
2/13/2012	2:44:05 AM	Helium MFC set to  0.000000
2/13/2012	2:44:05 AM	H2 MFC set to  0.000000
2/13/2012	2:44:05 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:05 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:05 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:05 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:05 AM	Tube furnace set to 0
2/13/2012	2:44:05 AM	H2 valve closed
2/13/2012	2:44:05 AM	BCl3 valve closed
2/13/2012	2:44:05 AM	PH3 valve closed
2/13/2012	2:44:05 AM	SiCl4 pre valve closed
2/13/2012	2:44:05 AM	SiCl4 post valve closed
2/13/2012	2:44:05 AM	Bypass valve closed
2/13/2012	2:44:05 AM	Bubbler valve closed
2/13/2012	2:44:05 AM	Helium valve opened
2/13/2012	2:44:05 AM	Main Vac valve opened
2/13/2012	2:44:05 AM	Helium MFC set to  20.000000
2/13/2012	2:44:05 AM	H2 MFC set to  0.000000
2/13/2012	2:44:05 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:05 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:05 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:05 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:05 AM	Tube furnace set to 0
2/13/2012	2:44:06 AM	Helium valve closed
2/13/2012	2:44:06 AM	H2 valve closed
2/13/2012	2:44:06 AM	BCl3 valve closed
2/13/2012	2:44:06 AM	PH3 valve closed
2/13/2012	2:44:06 AM	SiCl4 pre valve closed
2/13/2012	2:44:06 AM	SiCl4 post valve closed
2/13/2012	2:44:06 AM	Bypass valve closed
2/13/2012	2:44:06 AM	Bubbler valve closed
2/13/2012	2:44:06 AM	Main Vac valve opened
2/13/2012	2:44:06 AM	Helium MFC set to  0.000000
2/13/2012	2:44:06 AM	H2 MFC set to  0.000000
2/13/2012	2:44:06 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:06 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:06 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:06 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:06 AM	Tube furnace set to 0
2/13/2012	2:44:06 AM	H2 valve closed
2/13/2012	2:44:06 AM	BCl3 valve closed
2/13/2012	2:44:06 AM	PH3 valve closed
2/13/2012	2:44:06 AM	SiCl4 pre valve closed
2/13/2012	2:44:06 AM	SiCl4 post valve closed
2/13/2012	2:44:06 AM	Bypass valve closed
2/13/2012	2:44:06 AM	Bubbler valve closed
2/13/2012	2:44:06 AM	Helium valve opened
2/13/2012	2:44:06 AM	Main Vac valve opened
2/13/2012	2:44:06 AM	Helium MFC set to  20.000000
2/13/2012	2:44:06 AM	H2 MFC set to  0.000000
2/13/2012	2:44:06 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:06 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:06 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:06 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:07 AM	Tube furnace set to 0
2/13/2012	2:44:07 AM	Helium valve closed
2/13/2012	2:44:07 AM	H2 valve closed
2/13/2012	2:44:07 AM	BCl3 valve closed
2/13/2012	2:44:07 AM	PH3 valve closed
2/13/2012	2:44:07 AM	SiCl4 pre valve closed
2/13/2012	2:44:07 AM	SiCl4 post valve closed
2/13/2012	2:44:07 AM	Bypass valve closed
2/13/2012	2:44:07 AM	Bubbler valve closed
2/13/2012	2:44:07 AM	Main Vac valve opened
2/13/2012	2:44:07 AM	Helium MFC set to  0.000000
2/13/2012	2:44:07 AM	H2 MFC set to  0.000000
2/13/2012	2:44:07 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:07 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:07 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:07 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:07 AM	Tube furnace set to 0
2/13/2012	2:44:08 AM	H2 valve closed
2/13/2012	2:44:08 AM	BCl3 valve closed
2/13/2012	2:44:08 AM	PH3 valve closed
2/13/2012	2:44:08 AM	SiCl4 pre valve closed
2/13/2012	2:44:08 AM	SiCl4 post valve closed
2/13/2012	2:44:08 AM	Bypass valve closed
2/13/2012	2:44:08 AM	Bubbler valve closed
2/13/2012	2:44:08 AM	Helium valve opened
2/13/2012	2:44:08 AM	Main Vac valve opened
2/13/2012	2:44:08 AM	Helium MFC set to  20.000000
2/13/2012	2:44:08 AM	H2 MFC set to  0.000000
2/13/2012	2:44:08 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:08 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:08 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:08 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:08 AM	Tube furnace set to 0
2/13/2012	2:44:09 AM	Helium valve closed
2/13/2012	2:44:09 AM	H2 valve closed
2/13/2012	2:44:09 AM	BCl3 valve closed
2/13/2012	2:44:09 AM	PH3 valve closed
2/13/2012	2:44:09 AM	SiCl4 pre valve closed
2/13/2012	2:44:09 AM	SiCl4 post valve closed
2/13/2012	2:44:09 AM	Bypass valve closed
2/13/2012	2:44:09 AM	Bubbler valve closed
2/13/2012	2:44:09 AM	Main Vac valve opened
2/13/2012	2:44:09 AM	Helium MFC set to  0.000000
2/13/2012	2:44:09 AM	H2 MFC set to  0.000000
2/13/2012	2:44:09 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:09 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:09 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:09 AM	Tube furnace set to 0
2/13/2012	2:44:09 AM	H2 valve closed
2/13/2012	2:44:09 AM	BCl3 valve closed
2/13/2012	2:44:09 AM	PH3 valve closed
2/13/2012	2:44:09 AM	SiCl4 pre valve closed
2/13/2012	2:44:09 AM	SiCl4 post valve closed
2/13/2012	2:44:09 AM	Bypass valve closed
2/13/2012	2:44:09 AM	Bubbler valve closed
2/13/2012	2:44:09 AM	Helium valve opened
2/13/2012	2:44:09 AM	Main Vac valve opened
2/13/2012	2:44:09 AM	Helium MFC set to  20.000000
2/13/2012	2:44:09 AM	H2 MFC set to  0.000000
2/13/2012	2:44:09 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:09 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:09 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:09 AM	Tube furnace set to 0
2/13/2012	2:44:39 AM	Helium valve closed
2/13/2012	2:44:39 AM	H2 valve closed
2/13/2012	2:44:39 AM	BCl3 valve closed
2/13/2012	2:44:40 AM	PH3 valve closed
2/13/2012	2:44:40 AM	SiCl4 pre valve closed
2/13/2012	2:44:40 AM	SiCl4 post valve closed
2/13/2012	2:44:40 AM	Bypass valve closed
2/13/2012	2:44:40 AM	Bubbler valve closed
2/13/2012	2:44:40 AM	Main Vac valve opened
2/13/2012	2:44:40 AM	Helium MFC set to  0.000000
2/13/2012	2:44:40 AM	H2 MFC set to  0.000000
2/13/2012	2:44:40 AM	BCl3 MFC set to  0.000000
2/13/2012	2:44:40 AM	PH3 MFC set to  0.000000
2/13/2012	2:44:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:44:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:44:40 AM	Tube furnace set to 0
2/13/2012	2:45:10 AM	H2 valve closed
2/13/2012	2:45:10 AM	BCl3 valve closed
2/13/2012	2:45:10 AM	PH3 valve closed
2/13/2012	2:45:10 AM	SiCl4 pre valve closed
2/13/2012	2:45:10 AM	SiCl4 post valve closed
2/13/2012	2:45:10 AM	Bypass valve closed
2/13/2012	2:45:10 AM	Bubbler valve closed
2/13/2012	2:45:10 AM	Helium valve opened
2/13/2012	2:45:10 AM	Main Vac valve opened
2/13/2012	2:45:10 AM	Helium MFC set to  20.000000
2/13/2012	2:45:10 AM	H2 MFC set to  0.000000
2/13/2012	2:45:10 AM	BCl3 MFC set to  0.000000
2/13/2012	2:45:10 AM	PH3 MFC set to  0.000000
2/13/2012	2:45:10 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:45:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:45:10 AM	Tube furnace set to 0
2/13/2012	2:45:40 AM	Helium valve closed
2/13/2012	2:45:40 AM	H2 valve closed
2/13/2012	2:45:40 AM	BCl3 valve closed
2/13/2012	2:45:40 AM	PH3 valve closed
2/13/2012	2:45:40 AM	SiCl4 pre valve closed
2/13/2012	2:45:40 AM	SiCl4 post valve closed
2/13/2012	2:45:40 AM	Bypass valve closed
2/13/2012	2:45:40 AM	Bubbler valve closed
2/13/2012	2:45:40 AM	Main Vac valve opened
2/13/2012	2:45:40 AM	Helium MFC set to  0.000000
2/13/2012	2:45:40 AM	H2 MFC set to  0.000000
2/13/2012	2:45:40 AM	BCl3 MFC set to  0.000000
2/13/2012	2:45:40 AM	PH3 MFC set to  0.000000
2/13/2012	2:45:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:45:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:45:40 AM	Tube furnace set to 0
2/13/2012	2:46:10 AM	H2 valve closed
2/13/2012	2:46:10 AM	BCl3 valve closed
2/13/2012	2:46:10 AM	PH3 valve closed
2/13/2012	2:46:10 AM	SiCl4 pre valve closed
2/13/2012	2:46:10 AM	SiCl4 post valve closed
2/13/2012	2:46:10 AM	Bypass valve closed
2/13/2012	2:46:10 AM	Bubbler valve closed
2/13/2012	2:46:10 AM	Helium valve opened
2/13/2012	2:46:10 AM	Main Vac valve opened
2/13/2012	2:46:10 AM	Helium MFC set to  20.000000
2/13/2012	2:46:10 AM	H2 MFC set to  0.000000
2/13/2012	2:46:10 AM	BCl3 MFC set to  0.000000
2/13/2012	2:46:10 AM	PH3 MFC set to  0.000000
2/13/2012	2:46:10 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:46:10 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:46:10 AM	Tube furnace set to 0
2/13/2012	2:46:40 AM	Helium valve closed
2/13/2012	2:46:40 AM	H2 valve closed
2/13/2012	2:46:40 AM	BCl3 valve closed
2/13/2012	2:46:40 AM	PH3 valve closed
2/13/2012	2:46:40 AM	SiCl4 pre valve closed
2/13/2012	2:46:40 AM	SiCl4 post valve closed
2/13/2012	2:46:40 AM	Bypass valve closed
2/13/2012	2:46:40 AM	Bubbler valve closed
2/13/2012	2:46:40 AM	Main Vac valve opened
2/13/2012	2:46:40 AM	Helium MFC set to  0.000000
2/13/2012	2:46:40 AM	H2 MFC set to  0.000000
2/13/2012	2:46:40 AM	BCl3 MFC set to  0.000000
2/13/2012	2:46:40 AM	PH3 MFC set to  0.000000
2/13/2012	2:46:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:46:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:46:41 AM	Tube furnace set to 0
2/13/2012	2:47:11 AM	H2 valve closed
2/13/2012	2:47:11 AM	BCl3 valve closed
2/13/2012	2:47:11 AM	PH3 valve closed
2/13/2012	2:47:11 AM	SiCl4 pre valve closed
2/13/2012	2:47:11 AM	SiCl4 post valve closed
2/13/2012	2:47:11 AM	Bypass valve closed
2/13/2012	2:47:11 AM	Bubbler valve closed
2/13/2012	2:47:11 AM	Helium valve opened
2/13/2012	2:47:11 AM	Main Vac valve opened
2/13/2012	2:47:11 AM	Helium MFC set to  20.000000
2/13/2012	2:47:11 AM	H2 MFC set to  0.000000
2/13/2012	2:47:11 AM	BCl3 MFC set to  0.000000
2/13/2012	2:47:11 AM	PH3 MFC set to  0.000000
2/13/2012	2:47:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:47:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:47:11 AM	Tube furnace set to 0
2/13/2012	2:47:41 AM	Helium valve closed
2/13/2012	2:47:41 AM	H2 valve closed
2/13/2012	2:47:41 AM	BCl3 valve closed
2/13/2012	2:47:41 AM	PH3 valve closed
2/13/2012	2:47:41 AM	SiCl4 pre valve closed
2/13/2012	2:47:41 AM	SiCl4 post valve closed
2/13/2012	2:47:41 AM	Bypass valve closed
2/13/2012	2:47:41 AM	Bubbler valve closed
2/13/2012	2:47:41 AM	Main Vac valve opened
2/13/2012	2:47:41 AM	Helium MFC set to  0.000000
2/13/2012	2:47:41 AM	H2 MFC set to  0.000000
2/13/2012	2:47:41 AM	BCl3 MFC set to  0.000000
2/13/2012	2:47:41 AM	PH3 MFC set to  0.000000
2/13/2012	2:47:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:47:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:47:41 AM	Tube furnace set to 0
2/13/2012	2:48:11 AM	H2 valve closed
2/13/2012	2:48:11 AM	BCl3 valve closed
2/13/2012	2:48:11 AM	PH3 valve closed
2/13/2012	2:48:11 AM	SiCl4 pre valve closed
2/13/2012	2:48:11 AM	SiCl4 post valve closed
2/13/2012	2:48:11 AM	Bypass valve closed
2/13/2012	2:48:11 AM	Bubbler valve closed
2/13/2012	2:48:11 AM	Helium valve opened
2/13/2012	2:48:11 AM	Main Vac valve opened
2/13/2012	2:48:11 AM	Helium MFC set to  20.000000
2/13/2012	2:48:11 AM	H2 MFC set to  0.000000
2/13/2012	2:48:11 AM	BCl3 MFC set to  0.000000
2/13/2012	2:48:11 AM	PH3 MFC set to  0.000000
2/13/2012	2:48:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:48:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:48:11 AM	Tube furnace set to 0
2/13/2012	2:48:41 AM	Helium valve closed
2/13/2012	2:48:41 AM	H2 valve closed
2/13/2012	2:48:41 AM	BCl3 valve closed
2/13/2012	2:48:41 AM	PH3 valve closed
2/13/2012	2:48:41 AM	SiCl4 pre valve closed
2/13/2012	2:48:41 AM	SiCl4 post valve closed
2/13/2012	2:48:41 AM	Bypass valve closed
2/13/2012	2:48:41 AM	Bubbler valve closed
2/13/2012	2:48:41 AM	Main Vac valve opened
2/13/2012	2:48:41 AM	Helium MFC set to  0.000000
2/13/2012	2:48:41 AM	H2 MFC set to  0.000000
2/13/2012	2:48:41 AM	BCl3 MFC set to  0.000000
2/13/2012	2:48:41 AM	PH3 MFC set to  0.000000
2/13/2012	2:48:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:48:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:48:41 AM	Tube furnace set to 0
2/13/2012	2:49:11 AM	H2 valve closed
2/13/2012	2:49:11 AM	BCl3 valve closed
2/13/2012	2:49:11 AM	PH3 valve closed
2/13/2012	2:49:11 AM	SiCl4 pre valve closed
2/13/2012	2:49:11 AM	SiCl4 post valve closed
2/13/2012	2:49:11 AM	Bypass valve closed
2/13/2012	2:49:11 AM	Bubbler valve closed
2/13/2012	2:49:11 AM	Helium valve opened
2/13/2012	2:49:11 AM	Main Vac valve opened
2/13/2012	2:49:11 AM	Helium MFC set to  20.000000
2/13/2012	2:49:11 AM	H2 MFC set to  0.000000
2/13/2012	2:49:11 AM	BCl3 MFC set to  0.000000
2/13/2012	2:49:11 AM	PH3 MFC set to  0.000000
2/13/2012	2:49:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:49:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:49:12 AM	Tube furnace set to 0
2/13/2012	2:49:42 AM	Helium valve closed
2/13/2012	2:49:42 AM	H2 valve closed
2/13/2012	2:49:42 AM	BCl3 valve closed
2/13/2012	2:49:42 AM	PH3 valve closed
2/13/2012	2:49:42 AM	SiCl4 pre valve closed
2/13/2012	2:49:42 AM	SiCl4 post valve closed
2/13/2012	2:49:42 AM	Bypass valve closed
2/13/2012	2:49:42 AM	Bubbler valve closed
2/13/2012	2:49:42 AM	Main Vac valve opened
2/13/2012	2:49:42 AM	Helium MFC set to  0.000000
2/13/2012	2:49:42 AM	H2 MFC set to  0.000000
2/13/2012	2:49:42 AM	BCl3 MFC set to  0.000000
2/13/2012	2:49:42 AM	PH3 MFC set to  0.000000
2/13/2012	2:49:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:49:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:49:42 AM	Tube furnace set to 200
2/13/2012	2:50:12 AM	H2 valve closed
2/13/2012	2:50:12 AM	BCl3 valve closed
2/13/2012	2:50:12 AM	PH3 valve closed
2/13/2012	2:50:12 AM	SiCl4 pre valve closed
2/13/2012	2:50:12 AM	SiCl4 post valve closed
2/13/2012	2:50:12 AM	Bypass valve closed
2/13/2012	2:50:12 AM	Bubbler valve closed
2/13/2012	2:50:12 AM	Helium valve opened
2/13/2012	2:50:12 AM	Main Vac valve opened
2/13/2012	2:50:12 AM	Helium MFC set to  20.000000
2/13/2012	2:50:12 AM	H2 MFC set to  0.000000
2/13/2012	2:50:12 AM	BCl3 MFC set to  0.000000
2/13/2012	2:50:12 AM	PH3 MFC set to  0.000000
2/13/2012	2:50:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:50:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:50:12 AM	Tube furnace set to 200
2/13/2012	2:50:42 AM	Helium valve closed
2/13/2012	2:50:42 AM	H2 valve closed
2/13/2012	2:50:42 AM	BCl3 valve closed
2/13/2012	2:50:42 AM	PH3 valve closed
2/13/2012	2:50:42 AM	SiCl4 pre valve closed
2/13/2012	2:50:42 AM	SiCl4 post valve closed
2/13/2012	2:50:42 AM	Bypass valve closed
2/13/2012	2:50:42 AM	Bubbler valve closed
2/13/2012	2:50:42 AM	Main Vac valve opened
2/13/2012	2:50:42 AM	Helium MFC set to  0.000000
2/13/2012	2:50:42 AM	H2 MFC set to  0.000000
2/13/2012	2:50:42 AM	BCl3 MFC set to  0.000000
2/13/2012	2:50:42 AM	PH3 MFC set to  0.000000
2/13/2012	2:50:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:50:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:50:42 AM	Tube furnace set to 200
2/13/2012	2:51:12 AM	H2 valve closed
2/13/2012	2:51:12 AM	BCl3 valve closed
2/13/2012	2:51:12 AM	PH3 valve closed
2/13/2012	2:51:12 AM	SiCl4 pre valve closed
2/13/2012	2:51:12 AM	SiCl4 post valve closed
2/13/2012	2:51:12 AM	Bypass valve closed
2/13/2012	2:51:12 AM	Bubbler valve closed
2/13/2012	2:51:12 AM	Helium valve opened
2/13/2012	2:51:12 AM	Main Vac valve opened
2/13/2012	2:51:12 AM	Helium MFC set to  20.000000
2/13/2012	2:51:12 AM	H2 MFC set to  0.000000
2/13/2012	2:51:12 AM	BCl3 MFC set to  0.000000
2/13/2012	2:51:12 AM	PH3 MFC set to  0.000000
2/13/2012	2:51:12 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:51:12 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:51:12 AM	Tube furnace set to 200
2/13/2012	2:51:42 AM	Helium valve closed
2/13/2012	2:51:42 AM	H2 valve closed
2/13/2012	2:51:42 AM	BCl3 valve closed
2/13/2012	2:51:42 AM	PH3 valve closed
2/13/2012	2:51:42 AM	SiCl4 pre valve closed
2/13/2012	2:51:42 AM	SiCl4 post valve closed
2/13/2012	2:51:42 AM	Bypass valve closed
2/13/2012	2:51:42 AM	Bubbler valve closed
2/13/2012	2:51:42 AM	Main Vac valve opened
2/13/2012	2:51:42 AM	Helium MFC set to  0.000000
2/13/2012	2:51:42 AM	H2 MFC set to  0.000000
2/13/2012	2:51:42 AM	BCl3 MFC set to  0.000000
2/13/2012	2:51:42 AM	PH3 MFC set to  0.000000
2/13/2012	2:51:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:51:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:51:43 AM	Tube furnace set to 200
2/13/2012	2:52:13 AM	H2 valve closed
2/13/2012	2:52:13 AM	BCl3 valve closed
2/13/2012	2:52:13 AM	PH3 valve closed
2/13/2012	2:52:13 AM	SiCl4 pre valve closed
2/13/2012	2:52:13 AM	SiCl4 post valve closed
2/13/2012	2:52:13 AM	Bypass valve closed
2/13/2012	2:52:13 AM	Bubbler valve closed
2/13/2012	2:52:13 AM	Helium valve opened
2/13/2012	2:52:13 AM	Main Vac valve opened
2/13/2012	2:52:13 AM	Helium MFC set to  20.000000
2/13/2012	2:52:13 AM	H2 MFC set to  0.000000
2/13/2012	2:52:13 AM	BCl3 MFC set to  0.000000
2/13/2012	2:52:13 AM	PH3 MFC set to  0.000000
2/13/2012	2:52:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:52:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:52:13 AM	Tube furnace set to 200
2/13/2012	2:52:43 AM	Helium valve closed
2/13/2012	2:52:43 AM	H2 valve closed
2/13/2012	2:52:43 AM	BCl3 valve closed
2/13/2012	2:52:43 AM	PH3 valve closed
2/13/2012	2:52:43 AM	SiCl4 pre valve closed
2/13/2012	2:52:43 AM	SiCl4 post valve closed
2/13/2012	2:52:43 AM	Bypass valve closed
2/13/2012	2:52:43 AM	Bubbler valve closed
2/13/2012	2:52:43 AM	Main Vac valve opened
2/13/2012	2:52:43 AM	Helium MFC set to  0.000000
2/13/2012	2:52:43 AM	H2 MFC set to  0.000000
2/13/2012	2:52:43 AM	BCl3 MFC set to  0.000000
2/13/2012	2:52:43 AM	PH3 MFC set to  0.000000
2/13/2012	2:52:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:52:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:52:43 AM	Tube furnace set to 200
2/13/2012	2:53:13 AM	H2 valve closed
2/13/2012	2:53:13 AM	BCl3 valve closed
2/13/2012	2:53:13 AM	PH3 valve closed
2/13/2012	2:53:13 AM	SiCl4 pre valve closed
2/13/2012	2:53:13 AM	SiCl4 post valve closed
2/13/2012	2:53:13 AM	Bypass valve closed
2/13/2012	2:53:13 AM	Bubbler valve closed
2/13/2012	2:53:13 AM	Helium valve opened
2/13/2012	2:53:13 AM	Main Vac valve opened
2/13/2012	2:53:13 AM	Helium MFC set to  20.000000
2/13/2012	2:53:13 AM	H2 MFC set to  0.000000
2/13/2012	2:53:13 AM	BCl3 MFC set to  0.000000
2/13/2012	2:53:13 AM	PH3 MFC set to  0.000000
2/13/2012	2:53:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:53:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:53:13 AM	Tube furnace set to 200
2/13/2012	2:53:43 AM	Helium valve closed
2/13/2012	2:53:43 AM	H2 valve closed
2/13/2012	2:53:43 AM	BCl3 valve closed
2/13/2012	2:53:43 AM	PH3 valve closed
2/13/2012	2:53:43 AM	SiCl4 pre valve closed
2/13/2012	2:53:43 AM	SiCl4 post valve closed
2/13/2012	2:53:43 AM	Bypass valve closed
2/13/2012	2:53:43 AM	Bubbler valve closed
2/13/2012	2:53:43 AM	Main Vac valve opened
2/13/2012	2:53:43 AM	Helium MFC set to  0.000000
2/13/2012	2:53:43 AM	H2 MFC set to  0.000000
2/13/2012	2:53:43 AM	BCl3 MFC set to  0.000000
2/13/2012	2:53:43 AM	PH3 MFC set to  0.000000
2/13/2012	2:53:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:53:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:53:43 AM	Tube furnace set to 200
2/13/2012	2:54:13 AM	H2 valve closed
2/13/2012	2:54:13 AM	BCl3 valve closed
2/13/2012	2:54:13 AM	PH3 valve closed
2/13/2012	2:54:13 AM	SiCl4 pre valve closed
2/13/2012	2:54:13 AM	SiCl4 post valve closed
2/13/2012	2:54:13 AM	Bypass valve closed
2/13/2012	2:54:13 AM	Bubbler valve closed
2/13/2012	2:54:13 AM	Helium valve opened
2/13/2012	2:54:13 AM	Main Vac valve opened
2/13/2012	2:54:13 AM	Helium MFC set to  20.000000
2/13/2012	2:54:13 AM	H2 MFC set to  0.000000
2/13/2012	2:54:13 AM	BCl3 MFC set to  0.000000
2/13/2012	2:54:13 AM	PH3 MFC set to  0.000000
2/13/2012	2:54:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:54:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:54:14 AM	Tube furnace set to 200
2/13/2012	2:54:44 AM	Helium valve closed
2/13/2012	2:54:44 AM	H2 valve closed
2/13/2012	2:54:44 AM	BCl3 valve closed
2/13/2012	2:54:44 AM	PH3 valve closed
2/13/2012	2:54:44 AM	SiCl4 pre valve closed
2/13/2012	2:54:44 AM	SiCl4 post valve closed
2/13/2012	2:54:44 AM	Bypass valve closed
2/13/2012	2:54:44 AM	Bubbler valve closed
2/13/2012	2:54:44 AM	Main Vac valve opened
2/13/2012	2:54:44 AM	Helium MFC set to  0.000000
2/13/2012	2:54:44 AM	H2 MFC set to  0.000000
2/13/2012	2:54:44 AM	BCl3 MFC set to  0.000000
2/13/2012	2:54:44 AM	PH3 MFC set to  0.000000
2/13/2012	2:54:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:54:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:54:44 AM	Tube furnace set to 200
2/13/2012	2:55:14 AM	H2 valve closed
2/13/2012	2:55:14 AM	BCl3 valve closed
2/13/2012	2:55:14 AM	PH3 valve closed
2/13/2012	2:55:14 AM	SiCl4 pre valve closed
2/13/2012	2:55:14 AM	SiCl4 post valve closed
2/13/2012	2:55:14 AM	Bypass valve closed
2/13/2012	2:55:14 AM	Bubbler valve closed
2/13/2012	2:55:14 AM	Helium valve opened
2/13/2012	2:55:14 AM	Main Vac valve opened
2/13/2012	2:55:14 AM	Helium MFC set to  20.000000
2/13/2012	2:55:14 AM	H2 MFC set to  0.000000
2/13/2012	2:55:14 AM	BCl3 MFC set to  0.000000
2/13/2012	2:55:14 AM	PH3 MFC set to  0.000000
2/13/2012	2:55:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:55:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:55:14 AM	Tube furnace set to 200
2/13/2012	2:55:44 AM	Helium valve closed
2/13/2012	2:55:44 AM	H2 valve closed
2/13/2012	2:55:44 AM	BCl3 valve closed
2/13/2012	2:55:44 AM	PH3 valve closed
2/13/2012	2:55:44 AM	SiCl4 pre valve closed
2/13/2012	2:55:44 AM	SiCl4 post valve closed
2/13/2012	2:55:44 AM	Bypass valve closed
2/13/2012	2:55:44 AM	Bubbler valve closed
2/13/2012	2:55:44 AM	Main Vac valve opened
2/13/2012	2:55:44 AM	Helium MFC set to  0.000000
2/13/2012	2:55:44 AM	H2 MFC set to  0.000000
2/13/2012	2:55:44 AM	BCl3 MFC set to  0.000000
2/13/2012	2:55:44 AM	PH3 MFC set to  0.000000
2/13/2012	2:55:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	2:55:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:55:44 AM	Tube furnace set to 0
2/13/2012	2:55:45 AM	Run finished at 2:55 AM
2/13/2012	3:16:11 AM	Main Vac valve closed
2/13/2012	3:16:21 AM	Main Vac valve opened
2/13/2012	3:32:36 AM	Main Vac valve closed
2/13/2012	3:32:46 AM	Main Vac valve opened
2/13/2012	3:33:11 AM	Recipe started at 3:33 AM
2/13/2012	3:33:11 AM	Helium valve closed
2/13/2012	3:33:11 AM	H2 valve closed
2/13/2012	3:33:11 AM	BCl3 valve closed
2/13/2012	3:33:11 AM	PH3 valve closed
2/13/2012	3:33:11 AM	SiCl4 pre valve closed
2/13/2012	3:33:11 AM	SiCl4 post valve closed
2/13/2012	3:33:11 AM	Main Vac valve closed
2/13/2012	3:33:11 AM	Bypass valve closed
2/13/2012	3:33:11 AM	Bubbler valve closed
2/13/2012	3:33:11 AM	Helium MFC set to  0.000000
2/13/2012	3:33:11 AM	H2 MFC set to  0.000000
2/13/2012	3:33:11 AM	BCl3 MFC set to  0.000000
2/13/2012	3:33:11 AM	PH3 MFC set to  0.000000
2/13/2012	3:33:11 AM	SiCl4 MFC set to  0.000000
2/13/2012	3:33:11 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:33:11 AM	Tube furnace set to 0
2/13/2012	3:33:14 AM	Helium valve closed
2/13/2012	3:33:14 AM	BCl3 valve closed
2/13/2012	3:33:14 AM	PH3 valve closed
2/13/2012	3:33:14 AM	SiCl4 pre valve closed
2/13/2012	3:33:14 AM	SiCl4 post valve closed
2/13/2012	3:33:14 AM	Main Vac valve closed
2/13/2012	3:33:14 AM	Bypass valve closed
2/13/2012	3:33:14 AM	Bubbler valve closed
2/13/2012	3:33:14 AM	H2 valve opened
2/13/2012	3:33:14 AM	Helium MFC set to  0.000000
2/13/2012	3:33:14 AM	H2 MFC set to  500.000000
2/13/2012	3:33:14 AM	BCl3 MFC set to  0.000000
2/13/2012	3:33:14 AM	PH3 MFC set to  0.000000
2/13/2012	3:33:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	3:33:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:33:14 AM	Tube furnace set to 0
2/13/2012	3:34:19 AM	Helium valve closed
2/13/2012	3:34:19 AM	BCl3 valve closed
2/13/2012	3:34:19 AM	PH3 valve closed
2/13/2012	3:34:19 AM	SiCl4 pre valve closed
2/13/2012	3:34:19 AM	SiCl4 post valve closed
2/13/2012	3:34:19 AM	Main Vac valve closed
2/13/2012	3:34:19 AM	Bypass valve closed
2/13/2012	3:34:19 AM	H2 valve opened
2/13/2012	3:34:19 AM	Bubbler valve opened
2/13/2012	3:34:19 AM	Helium MFC set to  0.000000
2/13/2012	3:34:19 AM	H2 MFC set to  500.000000
2/13/2012	3:34:19 AM	BCl3 MFC set to  0.000000
2/13/2012	3:34:19 AM	PH3 MFC set to  0.000000
2/13/2012	3:34:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	3:34:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:34:19 AM	Tube furnace set to 0
2/13/2012	3:34:20 AM	Helium valve closed
2/13/2012	3:34:20 AM	BCl3 valve closed
2/13/2012	3:34:20 AM	PH3 valve closed
2/13/2012	3:34:20 AM	SiCl4 pre valve closed
2/13/2012	3:34:20 AM	SiCl4 post valve closed
2/13/2012	3:34:20 AM	Main Vac valve closed
2/13/2012	3:34:20 AM	Bypass valve closed
2/13/2012	3:34:20 AM	H2 valve opened
2/13/2012	3:34:20 AM	Bubbler valve opened
2/13/2012	3:34:20 AM	Helium MFC set to  0.000000
2/13/2012	3:34:20 AM	H2 MFC set to  500.000000
2/13/2012	3:34:20 AM	BCl3 MFC set to  0.000000
2/13/2012	3:34:20 AM	PH3 MFC set to  0.000000
2/13/2012	3:34:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	3:34:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:34:20 AM	Tube furnace set to 1000
2/13/2012	3:54:20 AM	Helium valve closed
2/13/2012	3:54:20 AM	BCl3 valve closed
2/13/2012	3:54:20 AM	Main Vac valve closed
2/13/2012	3:54:20 AM	Bypass valve closed
2/13/2012	3:54:20 AM	H2 valve opened
2/13/2012	3:54:20 AM	PH3 valve opened
2/13/2012	3:54:20 AM	SiCl4 pre valve opened
2/13/2012	3:54:20 AM	SiCl4 post valve opened
2/13/2012	3:54:20 AM	Bubbler valve opened
2/13/2012	3:54:20 AM	Helium MFC set to  0.000000
2/13/2012	3:54:20 AM	H2 MFC set to  500.000000
2/13/2012	3:54:20 AM	BCl3 MFC set to  0.000000
2/13/2012	3:54:20 AM	PH3 MFC set to  0.400000
2/13/2012	3:54:20 AM	SiCl4 MFC set to  50.000000
2/13/2012	3:54:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:54:20 AM	Tube furnace set to 1000
2/13/2012	4:16:20 AM	Helium valve closed
2/13/2012	4:16:20 AM	BCl3 valve closed
2/13/2012	4:16:20 AM	PH3 valve closed
2/13/2012	4:16:20 AM	SiCl4 pre valve closed
2/13/2012	4:16:20 AM	SiCl4 post valve closed
2/13/2012	4:16:20 AM	Main Vac valve closed
2/13/2012	4:16:20 AM	Bypass valve closed
2/13/2012	4:16:20 AM	H2 valve opened
2/13/2012	4:16:20 AM	Bubbler valve opened
2/13/2012	4:16:20 AM	Helium MFC set to  0.000000
2/13/2012	4:16:20 AM	H2 MFC set to  500.000000
2/13/2012	4:16:20 AM	BCl3 MFC set to  0.000000
2/13/2012	4:16:20 AM	PH3 MFC set to  0.000000
2/13/2012	4:16:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:16:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:16:20 AM	Tube furnace set to 950
2/13/2012	4:18:20 AM	Helium valve closed
2/13/2012	4:18:20 AM	BCl3 valve closed
2/13/2012	4:18:20 AM	PH3 valve closed
2/13/2012	4:18:20 AM	SiCl4 pre valve closed
2/13/2012	4:18:20 AM	SiCl4 post valve closed
2/13/2012	4:18:20 AM	Main Vac valve closed
2/13/2012	4:18:20 AM	Bypass valve closed
2/13/2012	4:18:20 AM	H2 valve opened
2/13/2012	4:18:20 AM	Bubbler valve opened
2/13/2012	4:18:20 AM	Helium MFC set to  0.000000
2/13/2012	4:18:20 AM	H2 MFC set to  500.000000
2/13/2012	4:18:20 AM	BCl3 MFC set to  0.000000
2/13/2012	4:18:20 AM	PH3 MFC set to  0.000000
2/13/2012	4:18:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:18:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:18:21 AM	Tube furnace set to 900
2/13/2012	4:20:21 AM	Helium valve closed
2/13/2012	4:20:21 AM	BCl3 valve closed
2/13/2012	4:20:21 AM	PH3 valve closed
2/13/2012	4:20:21 AM	SiCl4 pre valve closed
2/13/2012	4:20:21 AM	SiCl4 post valve closed
2/13/2012	4:20:21 AM	Main Vac valve closed
2/13/2012	4:20:21 AM	Bypass valve closed
2/13/2012	4:20:21 AM	H2 valve opened
2/13/2012	4:20:21 AM	Bubbler valve opened
2/13/2012	4:20:21 AM	Helium MFC set to  0.000000
2/13/2012	4:20:21 AM	H2 MFC set to  500.000000
2/13/2012	4:20:21 AM	BCl3 MFC set to  0.000000
2/13/2012	4:20:21 AM	PH3 MFC set to  0.000000
2/13/2012	4:20:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:20:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:20:21 AM	Tube furnace set to 850
2/13/2012	4:22:21 AM	H2 valve closed
2/13/2012	4:22:21 AM	BCl3 valve closed
2/13/2012	4:22:21 AM	PH3 valve closed
2/13/2012	4:22:21 AM	SiCl4 pre valve closed
2/13/2012	4:22:21 AM	SiCl4 post valve closed
2/13/2012	4:22:21 AM	Main Vac valve closed
2/13/2012	4:22:21 AM	Bypass valve closed
2/13/2012	4:22:21 AM	Helium valve opened
2/13/2012	4:22:21 AM	Bubbler valve opened
2/13/2012	4:22:21 AM	Helium MFC set to  500.000000
2/13/2012	4:22:21 AM	H2 MFC set to  0.000000
2/13/2012	4:22:21 AM	BCl3 MFC set to  0.000000
2/13/2012	4:22:21 AM	PH3 MFC set to  0.000000
2/13/2012	4:22:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:22:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:22:21 AM	Tube furnace set to 800
2/13/2012	4:24:21 AM	H2 valve closed
2/13/2012	4:24:21 AM	BCl3 valve closed
2/13/2012	4:24:21 AM	PH3 valve closed
2/13/2012	4:24:21 AM	SiCl4 pre valve closed
2/13/2012	4:24:21 AM	SiCl4 post valve closed
2/13/2012	4:24:21 AM	Main Vac valve closed
2/13/2012	4:24:21 AM	Bypass valve closed
2/13/2012	4:24:21 AM	Helium valve opened
2/13/2012	4:24:21 AM	Bubbler valve opened
2/13/2012	4:24:21 AM	Helium MFC set to  500.000000
2/13/2012	4:24:21 AM	H2 MFC set to  0.000000
2/13/2012	4:24:21 AM	BCl3 MFC set to  0.000000
2/13/2012	4:24:21 AM	PH3 MFC set to  0.000000
2/13/2012	4:24:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:24:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:24:21 AM	Tube furnace set to 750
2/13/2012	4:26:21 AM	H2 valve closed
2/13/2012	4:26:21 AM	BCl3 valve closed
2/13/2012	4:26:21 AM	PH3 valve closed
2/13/2012	4:26:21 AM	SiCl4 pre valve closed
2/13/2012	4:26:21 AM	SiCl4 post valve closed
2/13/2012	4:26:21 AM	Main Vac valve closed
2/13/2012	4:26:21 AM	Bypass valve closed
2/13/2012	4:26:21 AM	Helium valve opened
2/13/2012	4:26:21 AM	Bubbler valve opened
2/13/2012	4:26:21 AM	Helium MFC set to  500.000000
2/13/2012	4:26:21 AM	H2 MFC set to  0.000000
2/13/2012	4:26:21 AM	BCl3 MFC set to  0.000000
2/13/2012	4:26:21 AM	PH3 MFC set to  0.000000
2/13/2012	4:26:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:26:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:26:21 AM	Tube furnace set to 0
2/13/2012	4:46:21 AM	Helium valve closed
2/13/2012	4:46:21 AM	H2 valve closed
2/13/2012	4:46:21 AM	BCl3 valve closed
2/13/2012	4:46:21 AM	PH3 valve closed
2/13/2012	4:46:21 AM	SiCl4 pre valve closed
2/13/2012	4:46:21 AM	SiCl4 post valve closed
2/13/2012	4:46:21 AM	Main Vac valve closed
2/13/2012	4:46:21 AM	Bypass valve closed
2/13/2012	4:46:21 AM	Bubbler valve closed
2/13/2012	4:46:21 AM	Helium MFC set to  0.000000
2/13/2012	4:46:21 AM	H2 MFC set to  0.000000
2/13/2012	4:46:21 AM	BCl3 MFC set to  0.000000
2/13/2012	4:46:21 AM	PH3 MFC set to  0.000000
2/13/2012	4:46:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:46:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:46:22 AM	Tube furnace set to 0
2/13/2012	4:46:23 AM	Run finished at 4:46 AM
2/13/2012	4:53:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	4:53:27 AM	Recipe started at 4:53 AM
2/13/2012	4:53:27 AM	Helium valve closed
2/13/2012	4:53:27 AM	H2 valve closed
2/13/2012	4:53:27 AM	BCl3 valve closed
2/13/2012	4:53:27 AM	PH3 valve closed
2/13/2012	4:53:27 AM	SiCl4 pre valve closed
2/13/2012	4:53:27 AM	SiCl4 post valve closed
2/13/2012	4:53:27 AM	Main Vac valve closed
2/13/2012	4:53:27 AM	Bypass valve closed
2/13/2012	4:53:27 AM	Bubbler valve closed
2/13/2012	4:53:27 AM	Helium MFC set to  0.000000
2/13/2012	4:53:27 AM	H2 MFC set to  0.000000
2/13/2012	4:53:27 AM	BCl3 MFC set to  0.000000
2/13/2012	4:53:27 AM	PH3 MFC set to  0.000000
2/13/2012	4:53:27 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:53:27 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:53:28 AM	Tube furnace set to 0
2/13/2012	4:53:31 AM	H2 valve closed
2/13/2012	4:53:31 AM	BCl3 valve closed
2/13/2012	4:53:31 AM	PH3 valve closed
2/13/2012	4:53:31 AM	SiCl4 pre valve closed
2/13/2012	4:53:31 AM	SiCl4 post valve closed
2/13/2012	4:53:31 AM	Main Vac valve closed
2/13/2012	4:53:31 AM	Bypass valve closed
2/13/2012	4:53:31 AM	Bubbler valve closed
2/13/2012	4:53:31 AM	Helium valve opened
2/13/2012	4:53:31 AM	Helium MFC set to  500.000000
2/13/2012	4:53:31 AM	H2 MFC set to  0.000000
2/13/2012	4:53:31 AM	BCl3 MFC set to  0.000000
2/13/2012	4:53:31 AM	PH3 MFC set to  0.000000
2/13/2012	4:53:31 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:53:31 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:53:31 AM	Tube furnace set to 0
2/13/2012	4:53:32 AM	Helium valve closed
2/13/2012	4:53:32 AM	H2 valve closed
2/13/2012	4:53:32 AM	BCl3 valve closed
2/13/2012	4:53:32 AM	PH3 valve closed
2/13/2012	4:53:32 AM	SiCl4 pre valve closed
2/13/2012	4:53:32 AM	SiCl4 post valve closed
2/13/2012	4:53:32 AM	Main Vac valve closed
2/13/2012	4:53:32 AM	Bypass valve closed
2/13/2012	4:53:32 AM	Bubbler valve closed
2/13/2012	4:53:32 AM	Helium MFC set to  0.000000
2/13/2012	4:53:32 AM	H2 MFC set to  0.000000
2/13/2012	4:53:32 AM	BCl3 MFC set to  0.000000
2/13/2012	4:53:32 AM	PH3 MFC set to  0.000000
2/13/2012	4:53:32 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:53:32 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:53:32 AM	Tube furnace set to 0
2/13/2012	4:53:33 AM	Run finished at 4:53 AM
2/13/2012	4:53:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	4:56:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	4:56:52 AM	Recipe started at 4:56 AM
2/13/2012	4:56:52 AM	Helium valve closed
2/13/2012	4:56:52 AM	H2 valve closed
2/13/2012	4:56:52 AM	BCl3 valve closed
2/13/2012	4:56:52 AM	PH3 valve closed
2/13/2012	4:56:52 AM	SiCl4 pre valve closed
2/13/2012	4:56:52 AM	SiCl4 post valve closed
2/13/2012	4:56:52 AM	Main Vac valve closed
2/13/2012	4:56:52 AM	Bubbler valve closed
2/13/2012	4:56:52 AM	Bypass valve opened
2/13/2012	4:56:52 AM	Helium MFC set to  0.000000
2/13/2012	4:56:52 AM	H2 MFC set to  0.000000
2/13/2012	4:56:52 AM	BCl3 MFC set to  0.000000
2/13/2012	4:56:52 AM	PH3 MFC set to  0.000000
2/13/2012	4:56:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:56:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:56:52 AM	Tube furnace set to 0
2/13/2012	4:57:55 AM	Helium valve closed
2/13/2012	4:57:55 AM	H2 valve closed
2/13/2012	4:57:55 AM	BCl3 valve closed
2/13/2012	4:57:55 AM	PH3 valve closed
2/13/2012	4:57:55 AM	SiCl4 pre valve closed
2/13/2012	4:57:55 AM	SiCl4 post valve closed
2/13/2012	4:57:55 AM	Main Vac valve closed
2/13/2012	4:57:55 AM	Bubbler valve closed
2/13/2012	4:57:55 AM	Bypass valve opened
2/13/2012	4:57:55 AM	Helium MFC set to  0.000000
2/13/2012	4:57:55 AM	H2 MFC set to  0.000000
2/13/2012	4:57:55 AM	BCl3 MFC set to  0.000000
2/13/2012	4:57:55 AM	PH3 MFC set to  0.000000
2/13/2012	4:57:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:57:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:57:55 AM	Tube furnace set to 0
2/13/2012	4:58:55 AM	Helium valve closed
2/13/2012	4:58:55 AM	H2 valve closed
2/13/2012	4:58:55 AM	BCl3 valve closed
2/13/2012	4:58:55 AM	PH3 valve closed
2/13/2012	4:58:55 AM	SiCl4 pre valve closed
2/13/2012	4:58:55 AM	SiCl4 post valve closed
2/13/2012	4:58:55 AM	Bypass valve closed
2/13/2012	4:58:55 AM	Bubbler valve closed
2/13/2012	4:58:55 AM	Main Vac valve opened
2/13/2012	4:58:55 AM	Helium MFC set to  0.000000
2/13/2012	4:58:55 AM	H2 MFC set to  0.000000
2/13/2012	4:58:55 AM	BCl3 MFC set to  0.000000
2/13/2012	4:58:55 AM	PH3 MFC set to  0.000000
2/13/2012	4:58:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	4:58:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:58:55 AM	Tube furnace set to 0
2/13/2012	4:58:56 AM	Run finished at 4:58 AM
2/13/2012	4:58:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	5:02:44 AM	Recipe started at 5:02 AM
2/13/2012	5:02:44 AM	Helium valve closed
2/13/2012	5:02:44 AM	H2 valve closed
2/13/2012	5:02:44 AM	BCl3 valve closed
2/13/2012	5:02:44 AM	PH3 valve closed
2/13/2012	5:02:44 AM	SiCl4 pre valve closed
2/13/2012	5:02:44 AM	SiCl4 post valve closed
2/13/2012	5:02:44 AM	Bypass valve closed
2/13/2012	5:02:44 AM	Bubbler valve closed
2/13/2012	5:02:44 AM	Main Vac valve opened
2/13/2012	5:02:44 AM	Helium MFC set to  0.000000
2/13/2012	5:02:44 AM	H2 MFC set to  0.000000
2/13/2012	5:02:44 AM	BCl3 MFC set to  0.000000
2/13/2012	5:02:44 AM	PH3 MFC set to  0.000000
2/13/2012	5:02:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:02:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:02:45 AM	Tube furnace set to 0
2/13/2012	5:03:15 AM	H2 valve closed
2/13/2012	5:03:15 AM	BCl3 valve closed
2/13/2012	5:03:15 AM	PH3 valve closed
2/13/2012	5:03:15 AM	SiCl4 pre valve closed
2/13/2012	5:03:15 AM	SiCl4 post valve closed
2/13/2012	5:03:15 AM	Bypass valve closed
2/13/2012	5:03:15 AM	Bubbler valve closed
2/13/2012	5:03:15 AM	Helium valve opened
2/13/2012	5:03:15 AM	Main Vac valve opened
2/13/2012	5:03:15 AM	Helium MFC set to  20.000000
2/13/2012	5:03:15 AM	H2 MFC set to  0.000000
2/13/2012	5:03:15 AM	BCl3 MFC set to  0.000000
2/13/2012	5:03:15 AM	PH3 MFC set to  0.000000
2/13/2012	5:03:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:03:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:03:15 AM	Tube furnace set to 0
2/13/2012	5:03:45 AM	Helium valve closed
2/13/2012	5:03:45 AM	H2 valve closed
2/13/2012	5:03:45 AM	BCl3 valve closed
2/13/2012	5:03:45 AM	PH3 valve closed
2/13/2012	5:03:45 AM	SiCl4 pre valve closed
2/13/2012	5:03:45 AM	SiCl4 post valve closed
2/13/2012	5:03:45 AM	Bypass valve closed
2/13/2012	5:03:45 AM	Bubbler valve closed
2/13/2012	5:03:45 AM	Main Vac valve opened
2/13/2012	5:03:45 AM	Helium MFC set to  0.000000
2/13/2012	5:03:45 AM	H2 MFC set to  0.000000
2/13/2012	5:03:45 AM	BCl3 MFC set to  0.000000
2/13/2012	5:03:45 AM	PH3 MFC set to  0.000000
2/13/2012	5:03:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:03:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:03:45 AM	Tube furnace set to 0
2/13/2012	5:04:15 AM	H2 valve closed
2/13/2012	5:04:15 AM	BCl3 valve closed
2/13/2012	5:04:15 AM	PH3 valve closed
2/13/2012	5:04:15 AM	SiCl4 pre valve closed
2/13/2012	5:04:15 AM	SiCl4 post valve closed
2/13/2012	5:04:15 AM	Bypass valve closed
2/13/2012	5:04:15 AM	Bubbler valve closed
2/13/2012	5:04:15 AM	Helium valve opened
2/13/2012	5:04:15 AM	Main Vac valve opened
2/13/2012	5:04:15 AM	Helium MFC set to  20.000000
2/13/2012	5:04:15 AM	H2 MFC set to  0.000000
2/13/2012	5:04:15 AM	BCl3 MFC set to  0.000000
2/13/2012	5:04:15 AM	PH3 MFC set to  0.000000
2/13/2012	5:04:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:04:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:04:15 AM	Tube furnace set to 0
2/13/2012	5:04:45 AM	Helium valve closed
2/13/2012	5:04:45 AM	H2 valve closed
2/13/2012	5:04:45 AM	BCl3 valve closed
2/13/2012	5:04:45 AM	PH3 valve closed
2/13/2012	5:04:45 AM	SiCl4 pre valve closed
2/13/2012	5:04:45 AM	SiCl4 post valve closed
2/13/2012	5:04:45 AM	Bypass valve closed
2/13/2012	5:04:45 AM	Bubbler valve closed
2/13/2012	5:04:45 AM	Main Vac valve opened
2/13/2012	5:04:45 AM	Helium MFC set to  0.000000
2/13/2012	5:04:45 AM	H2 MFC set to  0.000000
2/13/2012	5:04:45 AM	BCl3 MFC set to  0.000000
2/13/2012	5:04:45 AM	PH3 MFC set to  0.000000
2/13/2012	5:04:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:04:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:04:45 AM	Tube furnace set to 0
2/13/2012	5:05:15 AM	H2 valve closed
2/13/2012	5:05:15 AM	BCl3 valve closed
2/13/2012	5:05:15 AM	PH3 valve closed
2/13/2012	5:05:15 AM	SiCl4 pre valve closed
2/13/2012	5:05:15 AM	SiCl4 post valve closed
2/13/2012	5:05:15 AM	Bypass valve closed
2/13/2012	5:05:15 AM	Bubbler valve closed
2/13/2012	5:05:15 AM	Helium valve opened
2/13/2012	5:05:15 AM	Main Vac valve opened
2/13/2012	5:05:15 AM	Helium MFC set to  20.000000
2/13/2012	5:05:15 AM	H2 MFC set to  0.000000
2/13/2012	5:05:15 AM	BCl3 MFC set to  0.000000
2/13/2012	5:05:15 AM	PH3 MFC set to  0.000000
2/13/2012	5:05:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:05:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:05:16 AM	Tube furnace set to 0
2/13/2012	5:05:46 AM	Helium valve closed
2/13/2012	5:05:46 AM	H2 valve closed
2/13/2012	5:05:46 AM	BCl3 valve closed
2/13/2012	5:05:46 AM	PH3 valve closed
2/13/2012	5:05:46 AM	SiCl4 pre valve closed
2/13/2012	5:05:46 AM	SiCl4 post valve closed
2/13/2012	5:05:46 AM	Bypass valve closed
2/13/2012	5:05:46 AM	Bubbler valve closed
2/13/2012	5:05:46 AM	Main Vac valve opened
2/13/2012	5:05:46 AM	Helium MFC set to  0.000000
2/13/2012	5:05:46 AM	H2 MFC set to  0.000000
2/13/2012	5:05:46 AM	BCl3 MFC set to  0.000000
2/13/2012	5:05:46 AM	PH3 MFC set to  0.000000
2/13/2012	5:05:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:05:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:05:46 AM	Tube furnace set to 0
2/13/2012	5:06:16 AM	H2 valve closed
2/13/2012	5:06:16 AM	BCl3 valve closed
2/13/2012	5:06:16 AM	PH3 valve closed
2/13/2012	5:06:16 AM	SiCl4 pre valve closed
2/13/2012	5:06:16 AM	SiCl4 post valve closed
2/13/2012	5:06:16 AM	Bypass valve closed
2/13/2012	5:06:16 AM	Bubbler valve closed
2/13/2012	5:06:16 AM	Helium valve opened
2/13/2012	5:06:16 AM	Main Vac valve opened
2/13/2012	5:06:16 AM	Helium MFC set to  20.000000
2/13/2012	5:06:16 AM	H2 MFC set to  0.000000
2/13/2012	5:06:16 AM	BCl3 MFC set to  0.000000
2/13/2012	5:06:16 AM	PH3 MFC set to  0.000000
2/13/2012	5:06:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:06:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:06:16 AM	Tube furnace set to 0
2/13/2012	5:06:46 AM	Helium valve closed
2/13/2012	5:06:46 AM	H2 valve closed
2/13/2012	5:06:46 AM	BCl3 valve closed
2/13/2012	5:06:46 AM	PH3 valve closed
2/13/2012	5:06:46 AM	SiCl4 pre valve closed
2/13/2012	5:06:46 AM	SiCl4 post valve closed
2/13/2012	5:06:46 AM	Bypass valve closed
2/13/2012	5:06:46 AM	Bubbler valve closed
2/13/2012	5:06:46 AM	Main Vac valve opened
2/13/2012	5:06:46 AM	Helium MFC set to  0.000000
2/13/2012	5:06:46 AM	H2 MFC set to  0.000000
2/13/2012	5:06:46 AM	BCl3 MFC set to  0.000000
2/13/2012	5:06:46 AM	PH3 MFC set to  0.000000
2/13/2012	5:06:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:06:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:06:46 AM	Tube furnace set to 0
2/13/2012	5:07:16 AM	H2 valve closed
2/13/2012	5:07:16 AM	BCl3 valve closed
2/13/2012	5:07:16 AM	PH3 valve closed
2/13/2012	5:07:16 AM	SiCl4 pre valve closed
2/13/2012	5:07:16 AM	SiCl4 post valve closed
2/13/2012	5:07:16 AM	Bypass valve closed
2/13/2012	5:07:16 AM	Bubbler valve closed
2/13/2012	5:07:16 AM	Helium valve opened
2/13/2012	5:07:16 AM	Main Vac valve opened
2/13/2012	5:07:16 AM	Helium MFC set to  20.000000
2/13/2012	5:07:16 AM	H2 MFC set to  0.000000
2/13/2012	5:07:16 AM	BCl3 MFC set to  0.000000
2/13/2012	5:07:16 AM	PH3 MFC set to  0.000000
2/13/2012	5:07:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:07:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:07:16 AM	Tube furnace set to 0
2/13/2012	5:07:46 AM	Helium valve closed
2/13/2012	5:07:46 AM	H2 valve closed
2/13/2012	5:07:46 AM	BCl3 valve closed
2/13/2012	5:07:47 AM	PH3 valve closed
2/13/2012	5:07:47 AM	SiCl4 pre valve closed
2/13/2012	5:07:47 AM	SiCl4 post valve closed
2/13/2012	5:07:47 AM	Bypass valve closed
2/13/2012	5:07:47 AM	Bubbler valve closed
2/13/2012	5:07:47 AM	Main Vac valve opened
2/13/2012	5:07:47 AM	Helium MFC set to  0.000000
2/13/2012	5:07:47 AM	H2 MFC set to  0.000000
2/13/2012	5:07:47 AM	BCl3 MFC set to  0.000000
2/13/2012	5:07:47 AM	PH3 MFC set to  0.000000
2/13/2012	5:07:47 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:07:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:07:47 AM	Tube furnace set to 0
2/13/2012	5:08:17 AM	H2 valve closed
2/13/2012	5:08:17 AM	BCl3 valve closed
2/13/2012	5:08:17 AM	PH3 valve closed
2/13/2012	5:08:17 AM	SiCl4 pre valve closed
2/13/2012	5:08:17 AM	SiCl4 post valve closed
2/13/2012	5:08:17 AM	Bypass valve closed
2/13/2012	5:08:17 AM	Bubbler valve closed
2/13/2012	5:08:17 AM	Helium valve opened
2/13/2012	5:08:17 AM	Main Vac valve opened
2/13/2012	5:08:17 AM	Helium MFC set to  20.000000
2/13/2012	5:08:17 AM	H2 MFC set to  0.000000
2/13/2012	5:08:17 AM	BCl3 MFC set to  0.000000
2/13/2012	5:08:17 AM	PH3 MFC set to  0.000000
2/13/2012	5:08:17 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:08:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:08:17 AM	Tube furnace set to 0
2/13/2012	5:08:47 AM	Helium valve closed
2/13/2012	5:08:47 AM	H2 valve closed
2/13/2012	5:08:47 AM	BCl3 valve closed
2/13/2012	5:08:47 AM	PH3 valve closed
2/13/2012	5:08:47 AM	SiCl4 pre valve closed
2/13/2012	5:08:47 AM	SiCl4 post valve closed
2/13/2012	5:08:47 AM	Bypass valve closed
2/13/2012	5:08:47 AM	Bubbler valve closed
2/13/2012	5:08:47 AM	Main Vac valve opened
2/13/2012	5:08:47 AM	Helium MFC set to  0.000000
2/13/2012	5:08:47 AM	H2 MFC set to  0.000000
2/13/2012	5:08:47 AM	BCl3 MFC set to  0.000000
2/13/2012	5:08:47 AM	PH3 MFC set to  0.000000
2/13/2012	5:08:47 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:08:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:08:47 AM	Tube furnace set to 0
2/13/2012	5:09:17 AM	H2 valve closed
2/13/2012	5:09:17 AM	BCl3 valve closed
2/13/2012	5:09:17 AM	PH3 valve closed
2/13/2012	5:09:17 AM	SiCl4 pre valve closed
2/13/2012	5:09:17 AM	SiCl4 post valve closed
2/13/2012	5:09:17 AM	Bypass valve closed
2/13/2012	5:09:17 AM	Bubbler valve closed
2/13/2012	5:09:17 AM	Helium valve opened
2/13/2012	5:09:17 AM	Main Vac valve opened
2/13/2012	5:09:17 AM	Helium MFC set to  20.000000
2/13/2012	5:09:17 AM	H2 MFC set to  0.000000
2/13/2012	5:09:17 AM	BCl3 MFC set to  0.000000
2/13/2012	5:09:17 AM	PH3 MFC set to  0.000000
2/13/2012	5:09:17 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:09:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:09:17 AM	Tube furnace set to 0
2/13/2012	5:09:47 AM	Helium valve closed
2/13/2012	5:09:47 AM	H2 valve closed
2/13/2012	5:09:47 AM	BCl3 valve closed
2/13/2012	5:09:47 AM	PH3 valve closed
2/13/2012	5:09:47 AM	SiCl4 pre valve closed
2/13/2012	5:09:47 AM	SiCl4 post valve closed
2/13/2012	5:09:47 AM	Bypass valve closed
2/13/2012	5:09:47 AM	Bubbler valve closed
2/13/2012	5:09:47 AM	Main Vac valve opened
2/13/2012	5:09:47 AM	Helium MFC set to  0.000000
2/13/2012	5:09:47 AM	H2 MFC set to  0.000000
2/13/2012	5:09:47 AM	BCl3 MFC set to  0.000000
2/13/2012	5:09:47 AM	PH3 MFC set to  0.000000
2/13/2012	5:09:47 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:09:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:09:47 AM	Tube furnace set to 0
2/13/2012	5:10:18 AM	H2 valve closed
2/13/2012	5:10:18 AM	BCl3 valve closed
2/13/2012	5:10:18 AM	PH3 valve closed
2/13/2012	5:10:18 AM	SiCl4 pre valve closed
2/13/2012	5:10:18 AM	SiCl4 post valve closed
2/13/2012	5:10:18 AM	Bypass valve closed
2/13/2012	5:10:18 AM	Bubbler valve closed
2/13/2012	5:10:18 AM	Helium valve opened
2/13/2012	5:10:18 AM	Main Vac valve opened
2/13/2012	5:10:18 AM	Helium MFC set to  20.000000
2/13/2012	5:10:18 AM	H2 MFC set to  0.000000
2/13/2012	5:10:18 AM	BCl3 MFC set to  0.000000
2/13/2012	5:10:18 AM	PH3 MFC set to  0.000000
2/13/2012	5:10:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:10:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:10:18 AM	Tube furnace set to 0
2/13/2012	5:10:48 AM	Helium valve closed
2/13/2012	5:10:48 AM	H2 valve closed
2/13/2012	5:10:48 AM	BCl3 valve closed
2/13/2012	5:10:48 AM	PH3 valve closed
2/13/2012	5:10:48 AM	SiCl4 pre valve closed
2/13/2012	5:10:48 AM	SiCl4 post valve closed
2/13/2012	5:10:48 AM	Bypass valve closed
2/13/2012	5:10:48 AM	Bubbler valve closed
2/13/2012	5:10:48 AM	Main Vac valve opened
2/13/2012	5:10:48 AM	Helium MFC set to  0.000000
2/13/2012	5:10:48 AM	H2 MFC set to  0.000000
2/13/2012	5:10:48 AM	BCl3 MFC set to  0.000000
2/13/2012	5:10:48 AM	PH3 MFC set to  0.000000
2/13/2012	5:10:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:10:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:10:48 AM	Tube furnace set to 0
2/13/2012	5:11:18 AM	H2 valve closed
2/13/2012	5:11:18 AM	BCl3 valve closed
2/13/2012	5:11:18 AM	PH3 valve closed
2/13/2012	5:11:18 AM	SiCl4 pre valve closed
2/13/2012	5:11:18 AM	SiCl4 post valve closed
2/13/2012	5:11:18 AM	Bypass valve closed
2/13/2012	5:11:18 AM	Bubbler valve closed
2/13/2012	5:11:18 AM	Helium valve opened
2/13/2012	5:11:18 AM	Main Vac valve opened
2/13/2012	5:11:18 AM	Helium MFC set to  20.000000
2/13/2012	5:11:18 AM	H2 MFC set to  0.000000
2/13/2012	5:11:18 AM	BCl3 MFC set to  0.000000
2/13/2012	5:11:18 AM	PH3 MFC set to  0.000000
2/13/2012	5:11:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:11:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:11:18 AM	Tube furnace set to 0
2/13/2012	5:11:48 AM	Helium valve closed
2/13/2012	5:11:48 AM	H2 valve closed
2/13/2012	5:11:48 AM	BCl3 valve closed
2/13/2012	5:11:48 AM	PH3 valve closed
2/13/2012	5:11:48 AM	SiCl4 pre valve closed
2/13/2012	5:11:48 AM	SiCl4 post valve closed
2/13/2012	5:11:48 AM	Bypass valve closed
2/13/2012	5:11:48 AM	Bubbler valve closed
2/13/2012	5:11:48 AM	Main Vac valve opened
2/13/2012	5:11:48 AM	Helium MFC set to  0.000000
2/13/2012	5:11:48 AM	H2 MFC set to  0.000000
2/13/2012	5:11:48 AM	BCl3 MFC set to  0.000000
2/13/2012	5:11:48 AM	PH3 MFC set to  0.000000
2/13/2012	5:11:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:11:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:11:48 AM	Tube furnace set to 200
2/13/2012	5:12:18 AM	H2 valve closed
2/13/2012	5:12:18 AM	BCl3 valve closed
2/13/2012	5:12:18 AM	PH3 valve closed
2/13/2012	5:12:18 AM	SiCl4 pre valve closed
2/13/2012	5:12:18 AM	SiCl4 post valve closed
2/13/2012	5:12:18 AM	Bypass valve closed
2/13/2012	5:12:18 AM	Bubbler valve closed
2/13/2012	5:12:18 AM	Helium valve opened
2/13/2012	5:12:18 AM	Main Vac valve opened
2/13/2012	5:12:18 AM	Helium MFC set to  20.000000
2/13/2012	5:12:18 AM	H2 MFC set to  0.000000
2/13/2012	5:12:18 AM	BCl3 MFC set to  0.000000
2/13/2012	5:12:18 AM	PH3 MFC set to  0.000000
2/13/2012	5:12:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:12:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:12:19 AM	Tube furnace set to 200
2/13/2012	5:12:49 AM	Helium valve closed
2/13/2012	5:12:49 AM	H2 valve closed
2/13/2012	5:12:49 AM	BCl3 valve closed
2/13/2012	5:12:49 AM	PH3 valve closed
2/13/2012	5:12:49 AM	SiCl4 pre valve closed
2/13/2012	5:12:49 AM	SiCl4 post valve closed
2/13/2012	5:12:49 AM	Bypass valve closed
2/13/2012	5:12:49 AM	Bubbler valve closed
2/13/2012	5:12:49 AM	Main Vac valve opened
2/13/2012	5:12:49 AM	Helium MFC set to  0.000000
2/13/2012	5:12:49 AM	H2 MFC set to  0.000000
2/13/2012	5:12:49 AM	BCl3 MFC set to  0.000000
2/13/2012	5:12:49 AM	PH3 MFC set to  0.000000
2/13/2012	5:12:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:12:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:12:49 AM	Tube furnace set to 200
2/13/2012	5:13:19 AM	H2 valve closed
2/13/2012	5:13:19 AM	BCl3 valve closed
2/13/2012	5:13:19 AM	PH3 valve closed
2/13/2012	5:13:19 AM	SiCl4 pre valve closed
2/13/2012	5:13:19 AM	SiCl4 post valve closed
2/13/2012	5:13:19 AM	Bypass valve closed
2/13/2012	5:13:19 AM	Bubbler valve closed
2/13/2012	5:13:19 AM	Helium valve opened
2/13/2012	5:13:19 AM	Main Vac valve opened
2/13/2012	5:13:19 AM	Helium MFC set to  20.000000
2/13/2012	5:13:19 AM	H2 MFC set to  0.000000
2/13/2012	5:13:19 AM	BCl3 MFC set to  0.000000
2/13/2012	5:13:19 AM	PH3 MFC set to  0.000000
2/13/2012	5:13:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:13:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:13:19 AM	Tube furnace set to 200
2/13/2012	5:13:49 AM	Helium valve closed
2/13/2012	5:13:49 AM	H2 valve closed
2/13/2012	5:13:49 AM	BCl3 valve closed
2/13/2012	5:13:49 AM	PH3 valve closed
2/13/2012	5:13:49 AM	SiCl4 pre valve closed
2/13/2012	5:13:49 AM	SiCl4 post valve closed
2/13/2012	5:13:49 AM	Bypass valve closed
2/13/2012	5:13:49 AM	Bubbler valve closed
2/13/2012	5:13:49 AM	Main Vac valve opened
2/13/2012	5:13:49 AM	Helium MFC set to  0.000000
2/13/2012	5:13:49 AM	H2 MFC set to  0.000000
2/13/2012	5:13:49 AM	BCl3 MFC set to  0.000000
2/13/2012	5:13:49 AM	PH3 MFC set to  0.000000
2/13/2012	5:13:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:13:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:13:49 AM	Tube furnace set to 200
2/13/2012	5:14:19 AM	H2 valve closed
2/13/2012	5:14:19 AM	BCl3 valve closed
2/13/2012	5:14:19 AM	PH3 valve closed
2/13/2012	5:14:19 AM	SiCl4 pre valve closed
2/13/2012	5:14:19 AM	SiCl4 post valve closed
2/13/2012	5:14:19 AM	Bypass valve closed
2/13/2012	5:14:19 AM	Bubbler valve closed
2/13/2012	5:14:19 AM	Helium valve opened
2/13/2012	5:14:19 AM	Main Vac valve opened
2/13/2012	5:14:19 AM	Helium MFC set to  20.000000
2/13/2012	5:14:19 AM	H2 MFC set to  0.000000
2/13/2012	5:14:19 AM	BCl3 MFC set to  0.000000
2/13/2012	5:14:19 AM	PH3 MFC set to  0.000000
2/13/2012	5:14:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:14:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:14:19 AM	Tube furnace set to 200
2/13/2012	5:14:49 AM	Helium valve closed
2/13/2012	5:14:49 AM	H2 valve closed
2/13/2012	5:14:49 AM	BCl3 valve closed
2/13/2012	5:14:49 AM	PH3 valve closed
2/13/2012	5:14:49 AM	SiCl4 pre valve closed
2/13/2012	5:14:49 AM	SiCl4 post valve closed
2/13/2012	5:14:49 AM	Bypass valve closed
2/13/2012	5:14:49 AM	Bubbler valve closed
2/13/2012	5:14:49 AM	Main Vac valve opened
2/13/2012	5:14:49 AM	Helium MFC set to  0.000000
2/13/2012	5:14:49 AM	H2 MFC set to  0.000000
2/13/2012	5:14:49 AM	BCl3 MFC set to  0.000000
2/13/2012	5:14:49 AM	PH3 MFC set to  0.000000
2/13/2012	5:14:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:14:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:14:50 AM	Tube furnace set to 200
2/13/2012	5:15:20 AM	H2 valve closed
2/13/2012	5:15:20 AM	BCl3 valve closed
2/13/2012	5:15:20 AM	PH3 valve closed
2/13/2012	5:15:20 AM	SiCl4 pre valve closed
2/13/2012	5:15:20 AM	SiCl4 post valve closed
2/13/2012	5:15:20 AM	Bypass valve closed
2/13/2012	5:15:20 AM	Bubbler valve closed
2/13/2012	5:15:20 AM	Helium valve opened
2/13/2012	5:15:20 AM	Main Vac valve opened
2/13/2012	5:15:20 AM	Helium MFC set to  20.000000
2/13/2012	5:15:20 AM	H2 MFC set to  0.000000
2/13/2012	5:15:20 AM	BCl3 MFC set to  0.000000
2/13/2012	5:15:20 AM	PH3 MFC set to  0.000000
2/13/2012	5:15:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:15:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:15:20 AM	Tube furnace set to 200
2/13/2012	5:15:50 AM	Helium valve closed
2/13/2012	5:15:50 AM	H2 valve closed
2/13/2012	5:15:50 AM	BCl3 valve closed
2/13/2012	5:15:50 AM	PH3 valve closed
2/13/2012	5:15:50 AM	SiCl4 pre valve closed
2/13/2012	5:15:50 AM	SiCl4 post valve closed
2/13/2012	5:15:50 AM	Bypass valve closed
2/13/2012	5:15:50 AM	Bubbler valve closed
2/13/2012	5:15:50 AM	Main Vac valve opened
2/13/2012	5:15:50 AM	Helium MFC set to  0.000000
2/13/2012	5:15:50 AM	H2 MFC set to  0.000000
2/13/2012	5:15:50 AM	BCl3 MFC set to  0.000000
2/13/2012	5:15:50 AM	PH3 MFC set to  0.000000
2/13/2012	5:15:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:15:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:15:50 AM	Tube furnace set to 200
2/13/2012	5:16:20 AM	H2 valve closed
2/13/2012	5:16:20 AM	BCl3 valve closed
2/13/2012	5:16:20 AM	PH3 valve closed
2/13/2012	5:16:20 AM	SiCl4 pre valve closed
2/13/2012	5:16:20 AM	SiCl4 post valve closed
2/13/2012	5:16:20 AM	Bypass valve closed
2/13/2012	5:16:20 AM	Bubbler valve closed
2/13/2012	5:16:20 AM	Helium valve opened
2/13/2012	5:16:20 AM	Main Vac valve opened
2/13/2012	5:16:20 AM	Helium MFC set to  20.000000
2/13/2012	5:16:20 AM	H2 MFC set to  0.000000
2/13/2012	5:16:20 AM	BCl3 MFC set to  0.000000
2/13/2012	5:16:20 AM	PH3 MFC set to  0.000000
2/13/2012	5:16:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:16:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:16:20 AM	Tube furnace set to 200
2/13/2012	5:16:50 AM	Helium valve closed
2/13/2012	5:16:50 AM	H2 valve closed
2/13/2012	5:16:50 AM	BCl3 valve closed
2/13/2012	5:16:50 AM	PH3 valve closed
2/13/2012	5:16:50 AM	SiCl4 pre valve closed
2/13/2012	5:16:50 AM	SiCl4 post valve closed
2/13/2012	5:16:50 AM	Bypass valve closed
2/13/2012	5:16:50 AM	Bubbler valve closed
2/13/2012	5:16:50 AM	Main Vac valve opened
2/13/2012	5:16:50 AM	Helium MFC set to  0.000000
2/13/2012	5:16:50 AM	H2 MFC set to  0.000000
2/13/2012	5:16:50 AM	BCl3 MFC set to  0.000000
2/13/2012	5:16:50 AM	PH3 MFC set to  0.000000
2/13/2012	5:16:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:16:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:16:50 AM	Tube furnace set to 200
2/13/2012	5:17:20 AM	H2 valve closed
2/13/2012	5:17:20 AM	BCl3 valve closed
2/13/2012	5:17:20 AM	PH3 valve closed
2/13/2012	5:17:20 AM	SiCl4 pre valve closed
2/13/2012	5:17:20 AM	SiCl4 post valve closed
2/13/2012	5:17:20 AM	Bypass valve closed
2/13/2012	5:17:20 AM	Bubbler valve closed
2/13/2012	5:17:20 AM	Helium valve opened
2/13/2012	5:17:20 AM	Main Vac valve opened
2/13/2012	5:17:20 AM	Helium MFC set to  20.000000
2/13/2012	5:17:20 AM	H2 MFC set to  0.000000
2/13/2012	5:17:20 AM	BCl3 MFC set to  0.000000
2/13/2012	5:17:20 AM	PH3 MFC set to  0.000000
2/13/2012	5:17:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:17:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:17:21 AM	Tube furnace set to 200
2/13/2012	5:17:51 AM	Helium valve closed
2/13/2012	5:17:51 AM	H2 valve closed
2/13/2012	5:17:51 AM	BCl3 valve closed
2/13/2012	5:17:51 AM	PH3 valve closed
2/13/2012	5:17:51 AM	SiCl4 pre valve closed
2/13/2012	5:17:51 AM	SiCl4 post valve closed
2/13/2012	5:17:51 AM	Bypass valve closed
2/13/2012	5:17:51 AM	Bubbler valve closed
2/13/2012	5:17:51 AM	Main Vac valve opened
2/13/2012	5:17:51 AM	Helium MFC set to  0.000000
2/13/2012	5:17:51 AM	H2 MFC set to  0.000000
2/13/2012	5:17:51 AM	BCl3 MFC set to  0.000000
2/13/2012	5:17:51 AM	PH3 MFC set to  0.000000
2/13/2012	5:17:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:17:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:17:51 AM	Tube furnace set to 0
2/13/2012	5:17:52 AM	Run finished at 5:17 AM
2/13/2012	5:23:14 AM	Main Vac valve closed
2/13/2012	5:23:21 AM	Main Vac valve opened
2/13/2012	5:26:24 AM	Recipe started at 5:26 AM
2/13/2012	5:26:24 AM	Helium valve closed
2/13/2012	5:26:24 AM	H2 valve closed
2/13/2012	5:26:24 AM	BCl3 valve closed
2/13/2012	5:26:24 AM	PH3 valve closed
2/13/2012	5:26:24 AM	SiCl4 pre valve closed
2/13/2012	5:26:24 AM	SiCl4 post valve closed
2/13/2012	5:26:24 AM	Bypass valve closed
2/13/2012	5:26:24 AM	Bubbler valve closed
2/13/2012	5:26:24 AM	Main Vac valve opened
2/13/2012	5:26:24 AM	Helium MFC set to  0.000000
2/13/2012	5:26:24 AM	H2 MFC set to  0.000000
2/13/2012	5:26:25 AM	BCl3 MFC set to  0.000000
2/13/2012	5:26:25 AM	PH3 MFC set to  0.000000
2/13/2012	5:26:25 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:26:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:26:25 AM	Tube furnace set to 0
2/13/2012	5:26:55 AM	H2 valve closed
2/13/2012	5:26:55 AM	BCl3 valve closed
2/13/2012	5:26:55 AM	PH3 valve closed
2/13/2012	5:26:55 AM	SiCl4 pre valve closed
2/13/2012	5:26:55 AM	SiCl4 post valve closed
2/13/2012	5:26:55 AM	Bypass valve closed
2/13/2012	5:26:55 AM	Bubbler valve closed
2/13/2012	5:26:55 AM	Helium valve opened
2/13/2012	5:26:55 AM	Main Vac valve opened
2/13/2012	5:26:55 AM	Helium MFC set to  20.000000
2/13/2012	5:26:55 AM	H2 MFC set to  0.000000
2/13/2012	5:26:55 AM	BCl3 MFC set to  0.000000
2/13/2012	5:26:55 AM	PH3 MFC set to  0.000000
2/13/2012	5:26:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:26:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:26:55 AM	Tube furnace set to 0
2/13/2012	5:27:25 AM	Helium valve closed
2/13/2012	5:27:25 AM	H2 valve closed
2/13/2012	5:27:25 AM	BCl3 valve closed
2/13/2012	5:27:25 AM	PH3 valve closed
2/13/2012	5:27:25 AM	SiCl4 pre valve closed
2/13/2012	5:27:25 AM	SiCl4 post valve closed
2/13/2012	5:27:25 AM	Bypass valve closed
2/13/2012	5:27:25 AM	Bubbler valve closed
2/13/2012	5:27:25 AM	Main Vac valve opened
2/13/2012	5:27:25 AM	Helium MFC set to  0.000000
2/13/2012	5:27:25 AM	H2 MFC set to  0.000000
2/13/2012	5:27:25 AM	BCl3 MFC set to  0.000000
2/13/2012	5:27:25 AM	PH3 MFC set to  0.000000
2/13/2012	5:27:25 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:27:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:27:25 AM	Tube furnace set to 0
2/13/2012	5:27:55 AM	H2 valve closed
2/13/2012	5:27:55 AM	BCl3 valve closed
2/13/2012	5:27:55 AM	PH3 valve closed
2/13/2012	5:27:55 AM	SiCl4 pre valve closed
2/13/2012	5:27:55 AM	SiCl4 post valve closed
2/13/2012	5:27:55 AM	Bypass valve closed
2/13/2012	5:27:55 AM	Bubbler valve closed
2/13/2012	5:27:55 AM	Helium valve opened
2/13/2012	5:27:55 AM	Main Vac valve opened
2/13/2012	5:27:55 AM	Helium MFC set to  20.000000
2/13/2012	5:27:55 AM	H2 MFC set to  0.000000
2/13/2012	5:27:55 AM	BCl3 MFC set to  0.000000
2/13/2012	5:27:55 AM	PH3 MFC set to  0.000000
2/13/2012	5:27:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:27:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:27:55 AM	Tube furnace set to 0
2/13/2012	5:28:25 AM	Helium valve closed
2/13/2012	5:28:25 AM	H2 valve closed
2/13/2012	5:28:25 AM	BCl3 valve closed
2/13/2012	5:28:25 AM	PH3 valve closed
2/13/2012	5:28:25 AM	SiCl4 pre valve closed
2/13/2012	5:28:25 AM	SiCl4 post valve closed
2/13/2012	5:28:25 AM	Bypass valve closed
2/13/2012	5:28:25 AM	Bubbler valve closed
2/13/2012	5:28:25 AM	Main Vac valve opened
2/13/2012	5:28:25 AM	Helium MFC set to  0.000000
2/13/2012	5:28:25 AM	H2 MFC set to  0.000000
2/13/2012	5:28:25 AM	BCl3 MFC set to  0.000000
2/13/2012	5:28:25 AM	PH3 MFC set to  0.000000
2/13/2012	5:28:25 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:28:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:28:25 AM	Tube furnace set to 0
2/13/2012	5:28:55 AM	H2 valve closed
2/13/2012	5:28:55 AM	BCl3 valve closed
2/13/2012	5:28:56 AM	PH3 valve closed
2/13/2012	5:28:56 AM	SiCl4 pre valve closed
2/13/2012	5:28:56 AM	SiCl4 post valve closed
2/13/2012	5:28:56 AM	Bypass valve closed
2/13/2012	5:28:56 AM	Bubbler valve closed
2/13/2012	5:28:56 AM	Helium valve opened
2/13/2012	5:28:56 AM	Main Vac valve opened
2/13/2012	5:28:56 AM	Helium MFC set to  20.000000
2/13/2012	5:28:56 AM	H2 MFC set to  0.000000
2/13/2012	5:28:56 AM	BCl3 MFC set to  0.000000
2/13/2012	5:28:56 AM	PH3 MFC set to  0.000000
2/13/2012	5:28:56 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:28:56 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:28:56 AM	Tube furnace set to 0
2/13/2012	5:29:26 AM	Helium valve closed
2/13/2012	5:29:26 AM	H2 valve closed
2/13/2012	5:29:26 AM	BCl3 valve closed
2/13/2012	5:29:26 AM	PH3 valve closed
2/13/2012	5:29:26 AM	SiCl4 pre valve closed
2/13/2012	5:29:26 AM	SiCl4 post valve closed
2/13/2012	5:29:26 AM	Bypass valve closed
2/13/2012	5:29:26 AM	Bubbler valve closed
2/13/2012	5:29:26 AM	Main Vac valve opened
2/13/2012	5:29:26 AM	Helium MFC set to  0.000000
2/13/2012	5:29:26 AM	H2 MFC set to  0.000000
2/13/2012	5:29:26 AM	BCl3 MFC set to  0.000000
2/13/2012	5:29:26 AM	PH3 MFC set to  0.000000
2/13/2012	5:29:26 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:29:26 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:29:26 AM	Tube furnace set to 0
2/13/2012	5:29:56 AM	H2 valve closed
2/13/2012	5:29:56 AM	BCl3 valve closed
2/13/2012	5:29:56 AM	PH3 valve closed
2/13/2012	5:29:56 AM	SiCl4 pre valve closed
2/13/2012	5:29:56 AM	SiCl4 post valve closed
2/13/2012	5:29:56 AM	Bypass valve closed
2/13/2012	5:29:56 AM	Bubbler valve closed
2/13/2012	5:29:56 AM	Helium valve opened
2/13/2012	5:29:56 AM	Main Vac valve opened
2/13/2012	5:29:56 AM	Helium MFC set to  20.000000
2/13/2012	5:29:56 AM	H2 MFC set to  0.000000
2/13/2012	5:29:56 AM	BCl3 MFC set to  0.000000
2/13/2012	5:29:56 AM	PH3 MFC set to  0.000000
2/13/2012	5:29:56 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:29:56 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:29:56 AM	Tube furnace set to 0
2/13/2012	5:30:26 AM	Helium valve closed
2/13/2012	5:30:26 AM	H2 valve closed
2/13/2012	5:30:26 AM	BCl3 valve closed
2/13/2012	5:30:26 AM	PH3 valve closed
2/13/2012	5:30:26 AM	SiCl4 pre valve closed
2/13/2012	5:30:26 AM	SiCl4 post valve closed
2/13/2012	5:30:26 AM	Bypass valve closed
2/13/2012	5:30:26 AM	Bubbler valve closed
2/13/2012	5:30:26 AM	Main Vac valve opened
2/13/2012	5:30:26 AM	Helium MFC set to  0.000000
2/13/2012	5:30:26 AM	H2 MFC set to  0.000000
2/13/2012	5:30:26 AM	BCl3 MFC set to  0.000000
2/13/2012	5:30:26 AM	PH3 MFC set to  0.000000
2/13/2012	5:30:26 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:30:26 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:30:26 AM	Tube furnace set to 0
2/13/2012	5:30:56 AM	H2 valve closed
2/13/2012	5:30:56 AM	BCl3 valve closed
2/13/2012	5:30:56 AM	PH3 valve closed
2/13/2012	5:30:56 AM	SiCl4 pre valve closed
2/13/2012	5:30:56 AM	SiCl4 post valve closed
2/13/2012	5:30:56 AM	Bypass valve closed
2/13/2012	5:30:56 AM	Bubbler valve closed
2/13/2012	5:30:56 AM	Helium valve opened
2/13/2012	5:30:56 AM	Main Vac valve opened
2/13/2012	5:30:56 AM	Helium MFC set to  20.000000
2/13/2012	5:30:56 AM	H2 MFC set to  0.000000
2/13/2012	5:30:56 AM	BCl3 MFC set to  0.000000
2/13/2012	5:30:56 AM	PH3 MFC set to  0.000000
2/13/2012	5:30:56 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:30:56 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:30:57 AM	Tube furnace set to 0
2/13/2012	5:31:27 AM	Helium valve closed
2/13/2012	5:31:27 AM	H2 valve closed
2/13/2012	5:31:27 AM	BCl3 valve closed
2/13/2012	5:31:27 AM	PH3 valve closed
2/13/2012	5:31:27 AM	SiCl4 pre valve closed
2/13/2012	5:31:27 AM	SiCl4 post valve closed
2/13/2012	5:31:27 AM	Bypass valve closed
2/13/2012	5:31:27 AM	Bubbler valve closed
2/13/2012	5:31:27 AM	Main Vac valve opened
2/13/2012	5:31:27 AM	Helium MFC set to  0.000000
2/13/2012	5:31:27 AM	H2 MFC set to  0.000000
2/13/2012	5:31:27 AM	BCl3 MFC set to  0.000000
2/13/2012	5:31:27 AM	PH3 MFC set to  0.000000
2/13/2012	5:31:27 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:31:27 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:31:27 AM	Tube furnace set to 0
2/13/2012	5:31:57 AM	H2 valve closed
2/13/2012	5:31:57 AM	BCl3 valve closed
2/13/2012	5:31:57 AM	PH3 valve closed
2/13/2012	5:31:57 AM	SiCl4 pre valve closed
2/13/2012	5:31:57 AM	SiCl4 post valve closed
2/13/2012	5:31:57 AM	Bypass valve closed
2/13/2012	5:31:57 AM	Bubbler valve closed
2/13/2012	5:31:57 AM	Helium valve opened
2/13/2012	5:31:57 AM	Main Vac valve opened
2/13/2012	5:31:57 AM	Helium MFC set to  20.000000
2/13/2012	5:31:57 AM	H2 MFC set to  0.000000
2/13/2012	5:31:57 AM	BCl3 MFC set to  0.000000
2/13/2012	5:31:57 AM	PH3 MFC set to  0.000000
2/13/2012	5:31:57 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:31:57 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:31:57 AM	Tube furnace set to 0
2/13/2012	5:32:27 AM	Helium valve closed
2/13/2012	5:32:27 AM	H2 valve closed
2/13/2012	5:32:27 AM	BCl3 valve closed
2/13/2012	5:32:27 AM	PH3 valve closed
2/13/2012	5:32:27 AM	SiCl4 pre valve closed
2/13/2012	5:32:27 AM	SiCl4 post valve closed
2/13/2012	5:32:27 AM	Bypass valve closed
2/13/2012	5:32:27 AM	Bubbler valve closed
2/13/2012	5:32:27 AM	Main Vac valve opened
2/13/2012	5:32:27 AM	Helium MFC set to  0.000000
2/13/2012	5:32:27 AM	H2 MFC set to  0.000000
2/13/2012	5:32:27 AM	BCl3 MFC set to  0.000000
2/13/2012	5:32:27 AM	PH3 MFC set to  0.000000
2/13/2012	5:32:27 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:32:27 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:32:27 AM	Tube furnace set to 0
2/13/2012	5:32:57 AM	H2 valve closed
2/13/2012	5:32:57 AM	BCl3 valve closed
2/13/2012	5:32:57 AM	PH3 valve closed
2/13/2012	5:32:57 AM	SiCl4 pre valve closed
2/13/2012	5:32:57 AM	SiCl4 post valve closed
2/13/2012	5:32:57 AM	Bypass valve closed
2/13/2012	5:32:57 AM	Bubbler valve closed
2/13/2012	5:32:57 AM	Helium valve opened
2/13/2012	5:32:57 AM	Main Vac valve opened
2/13/2012	5:32:57 AM	Helium MFC set to  20.000000
2/13/2012	5:32:57 AM	H2 MFC set to  0.000000
2/13/2012	5:32:57 AM	BCl3 MFC set to  0.000000
2/13/2012	5:32:57 AM	PH3 MFC set to  0.000000
2/13/2012	5:32:57 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:32:57 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:32:57 AM	Tube furnace set to 0
2/13/2012	5:33:27 AM	Helium valve closed
2/13/2012	5:33:27 AM	H2 valve closed
2/13/2012	5:33:27 AM	BCl3 valve closed
2/13/2012	5:33:27 AM	PH3 valve closed
2/13/2012	5:33:27 AM	SiCl4 pre valve closed
2/13/2012	5:33:27 AM	SiCl4 post valve closed
2/13/2012	5:33:27 AM	Bypass valve closed
2/13/2012	5:33:27 AM	Bubbler valve closed
2/13/2012	5:33:27 AM	Main Vac valve opened
2/13/2012	5:33:27 AM	Helium MFC set to  0.000000
2/13/2012	5:33:27 AM	H2 MFC set to  0.000000
2/13/2012	5:33:27 AM	BCl3 MFC set to  0.000000
2/13/2012	5:33:27 AM	PH3 MFC set to  0.000000
2/13/2012	5:33:27 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:33:27 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:33:28 AM	Tube furnace set to 0
2/13/2012	5:33:58 AM	H2 valve closed
2/13/2012	5:33:58 AM	BCl3 valve closed
2/13/2012	5:33:58 AM	PH3 valve closed
2/13/2012	5:33:58 AM	SiCl4 pre valve closed
2/13/2012	5:33:58 AM	SiCl4 post valve closed
2/13/2012	5:33:58 AM	Bypass valve closed
2/13/2012	5:33:58 AM	Bubbler valve closed
2/13/2012	5:33:58 AM	Helium valve opened
2/13/2012	5:33:58 AM	Main Vac valve opened
2/13/2012	5:33:58 AM	Helium MFC set to  20.000000
2/13/2012	5:33:58 AM	H2 MFC set to  0.000000
2/13/2012	5:33:58 AM	BCl3 MFC set to  0.000000
2/13/2012	5:33:58 AM	PH3 MFC set to  0.000000
2/13/2012	5:33:58 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:33:58 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:33:58 AM	Tube furnace set to 0
2/13/2012	5:34:28 AM	Helium valve closed
2/13/2012	5:34:28 AM	H2 valve closed
2/13/2012	5:34:28 AM	BCl3 valve closed
2/13/2012	5:34:28 AM	PH3 valve closed
2/13/2012	5:34:28 AM	SiCl4 pre valve closed
2/13/2012	5:34:28 AM	SiCl4 post valve closed
2/13/2012	5:34:28 AM	Bypass valve closed
2/13/2012	5:34:28 AM	Bubbler valve closed
2/13/2012	5:34:28 AM	Main Vac valve opened
2/13/2012	5:34:28 AM	Helium MFC set to  0.000000
2/13/2012	5:34:28 AM	H2 MFC set to  0.000000
2/13/2012	5:34:28 AM	BCl3 MFC set to  0.000000
2/13/2012	5:34:28 AM	PH3 MFC set to  0.000000
2/13/2012	5:34:28 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:34:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:34:28 AM	Tube furnace set to 0
2/13/2012	5:34:58 AM	H2 valve closed
2/13/2012	5:34:58 AM	BCl3 valve closed
2/13/2012	5:34:58 AM	PH3 valve closed
2/13/2012	5:34:58 AM	SiCl4 pre valve closed
2/13/2012	5:34:58 AM	SiCl4 post valve closed
2/13/2012	5:34:58 AM	Bypass valve closed
2/13/2012	5:34:58 AM	Bubbler valve closed
2/13/2012	5:34:58 AM	Helium valve opened
2/13/2012	5:34:58 AM	Main Vac valve opened
2/13/2012	5:34:58 AM	Helium MFC set to  20.000000
2/13/2012	5:34:58 AM	H2 MFC set to  0.000000
2/13/2012	5:34:58 AM	BCl3 MFC set to  0.000000
2/13/2012	5:34:58 AM	PH3 MFC set to  0.000000
2/13/2012	5:34:58 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:34:58 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:34:58 AM	Tube furnace set to 0
2/13/2012	5:35:28 AM	Helium valve closed
2/13/2012	5:35:28 AM	H2 valve closed
2/13/2012	5:35:28 AM	BCl3 valve closed
2/13/2012	5:35:28 AM	PH3 valve closed
2/13/2012	5:35:28 AM	SiCl4 pre valve closed
2/13/2012	5:35:28 AM	SiCl4 post valve closed
2/13/2012	5:35:28 AM	Bypass valve closed
2/13/2012	5:35:28 AM	Bubbler valve closed
2/13/2012	5:35:28 AM	Main Vac valve opened
2/13/2012	5:35:28 AM	Helium MFC set to  0.000000
2/13/2012	5:35:28 AM	H2 MFC set to  0.000000
2/13/2012	5:35:28 AM	BCl3 MFC set to  0.000000
2/13/2012	5:35:28 AM	PH3 MFC set to  0.000000
2/13/2012	5:35:28 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:35:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:35:28 AM	Tube furnace set to 200
2/13/2012	5:35:58 AM	H2 valve closed
2/13/2012	5:35:58 AM	BCl3 valve closed
2/13/2012	5:35:58 AM	PH3 valve closed
2/13/2012	5:35:58 AM	SiCl4 pre valve closed
2/13/2012	5:35:58 AM	SiCl4 post valve closed
2/13/2012	5:35:58 AM	Bypass valve closed
2/13/2012	5:35:58 AM	Bubbler valve closed
2/13/2012	5:35:58 AM	Helium valve opened
2/13/2012	5:35:58 AM	Main Vac valve opened
2/13/2012	5:35:58 AM	Helium MFC set to  20.000000
2/13/2012	5:35:58 AM	H2 MFC set to  0.000000
2/13/2012	5:35:58 AM	BCl3 MFC set to  0.000000
2/13/2012	5:35:58 AM	PH3 MFC set to  0.000000
2/13/2012	5:35:58 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:35:58 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:35:59 AM	Tube furnace set to 200
2/13/2012	5:36:29 AM	Helium valve closed
2/13/2012	5:36:29 AM	H2 valve closed
2/13/2012	5:36:29 AM	BCl3 valve closed
2/13/2012	5:36:29 AM	PH3 valve closed
2/13/2012	5:36:29 AM	SiCl4 pre valve closed
2/13/2012	5:36:29 AM	SiCl4 post valve closed
2/13/2012	5:36:29 AM	Bypass valve closed
2/13/2012	5:36:29 AM	Bubbler valve closed
2/13/2012	5:36:29 AM	Main Vac valve opened
2/13/2012	5:36:29 AM	Helium MFC set to  0.000000
2/13/2012	5:36:29 AM	H2 MFC set to  0.000000
2/13/2012	5:36:29 AM	BCl3 MFC set to  0.000000
2/13/2012	5:36:29 AM	PH3 MFC set to  0.000000
2/13/2012	5:36:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:36:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:36:29 AM	Tube furnace set to 200
2/13/2012	5:36:59 AM	H2 valve closed
2/13/2012	5:36:59 AM	BCl3 valve closed
2/13/2012	5:36:59 AM	PH3 valve closed
2/13/2012	5:36:59 AM	SiCl4 pre valve closed
2/13/2012	5:36:59 AM	SiCl4 post valve closed
2/13/2012	5:36:59 AM	Bypass valve closed
2/13/2012	5:36:59 AM	Bubbler valve closed
2/13/2012	5:36:59 AM	Helium valve opened
2/13/2012	5:36:59 AM	Main Vac valve opened
2/13/2012	5:36:59 AM	Helium MFC set to  20.000000
2/13/2012	5:36:59 AM	H2 MFC set to  0.000000
2/13/2012	5:36:59 AM	BCl3 MFC set to  0.000000
2/13/2012	5:36:59 AM	PH3 MFC set to  0.000000
2/13/2012	5:36:59 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:36:59 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:36:59 AM	Tube furnace set to 200
2/13/2012	5:37:29 AM	Helium valve closed
2/13/2012	5:37:29 AM	H2 valve closed
2/13/2012	5:37:29 AM	BCl3 valve closed
2/13/2012	5:37:29 AM	PH3 valve closed
2/13/2012	5:37:29 AM	SiCl4 pre valve closed
2/13/2012	5:37:29 AM	SiCl4 post valve closed
2/13/2012	5:37:29 AM	Bypass valve closed
2/13/2012	5:37:29 AM	Bubbler valve closed
2/13/2012	5:37:29 AM	Main Vac valve opened
2/13/2012	5:37:29 AM	Helium MFC set to  0.000000
2/13/2012	5:37:29 AM	H2 MFC set to  0.000000
2/13/2012	5:37:29 AM	BCl3 MFC set to  0.000000
2/13/2012	5:37:29 AM	PH3 MFC set to  0.000000
2/13/2012	5:37:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:37:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:37:29 AM	Tube furnace set to 200
2/13/2012	5:37:59 AM	H2 valve closed
2/13/2012	5:37:59 AM	BCl3 valve closed
2/13/2012	5:37:59 AM	PH3 valve closed
2/13/2012	5:37:59 AM	SiCl4 pre valve closed
2/13/2012	5:37:59 AM	SiCl4 post valve closed
2/13/2012	5:37:59 AM	Bypass valve closed
2/13/2012	5:37:59 AM	Bubbler valve closed
2/13/2012	5:37:59 AM	Helium valve opened
2/13/2012	5:37:59 AM	Main Vac valve opened
2/13/2012	5:37:59 AM	Helium MFC set to  20.000000
2/13/2012	5:37:59 AM	H2 MFC set to  0.000000
2/13/2012	5:37:59 AM	BCl3 MFC set to  0.000000
2/13/2012	5:37:59 AM	PH3 MFC set to  0.000000
2/13/2012	5:37:59 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:37:59 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:37:59 AM	Tube furnace set to 200
2/13/2012	5:38:29 AM	Helium valve closed
2/13/2012	5:38:29 AM	H2 valve closed
2/13/2012	5:38:29 AM	BCl3 valve closed
2/13/2012	5:38:29 AM	PH3 valve closed
2/13/2012	5:38:29 AM	SiCl4 pre valve closed
2/13/2012	5:38:29 AM	SiCl4 post valve closed
2/13/2012	5:38:29 AM	Bypass valve closed
2/13/2012	5:38:29 AM	Bubbler valve closed
2/13/2012	5:38:29 AM	Main Vac valve opened
2/13/2012	5:38:29 AM	Helium MFC set to  0.000000
2/13/2012	5:38:29 AM	H2 MFC set to  0.000000
2/13/2012	5:38:29 AM	BCl3 MFC set to  0.000000
2/13/2012	5:38:29 AM	PH3 MFC set to  0.000000
2/13/2012	5:38:29 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:38:29 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:38:30 AM	Tube furnace set to 200
2/13/2012	5:39:00 AM	H2 valve closed
2/13/2012	5:39:00 AM	BCl3 valve closed
2/13/2012	5:39:00 AM	PH3 valve closed
2/13/2012	5:39:00 AM	SiCl4 pre valve closed
2/13/2012	5:39:00 AM	SiCl4 post valve closed
2/13/2012	5:39:00 AM	Bypass valve closed
2/13/2012	5:39:00 AM	Bubbler valve closed
2/13/2012	5:39:00 AM	Helium valve opened
2/13/2012	5:39:00 AM	Main Vac valve opened
2/13/2012	5:39:00 AM	Helium MFC set to  20.000000
2/13/2012	5:39:00 AM	H2 MFC set to  0.000000
2/13/2012	5:39:00 AM	BCl3 MFC set to  0.000000
2/13/2012	5:39:00 AM	PH3 MFC set to  0.000000
2/13/2012	5:39:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:39:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:39:00 AM	Tube furnace set to 200
2/13/2012	5:39:30 AM	Helium valve closed
2/13/2012	5:39:30 AM	H2 valve closed
2/13/2012	5:39:30 AM	BCl3 valve closed
2/13/2012	5:39:30 AM	PH3 valve closed
2/13/2012	5:39:30 AM	SiCl4 pre valve closed
2/13/2012	5:39:30 AM	SiCl4 post valve closed
2/13/2012	5:39:30 AM	Bypass valve closed
2/13/2012	5:39:30 AM	Bubbler valve closed
2/13/2012	5:39:30 AM	Main Vac valve opened
2/13/2012	5:39:30 AM	Helium MFC set to  0.000000
2/13/2012	5:39:30 AM	H2 MFC set to  0.000000
2/13/2012	5:39:30 AM	BCl3 MFC set to  0.000000
2/13/2012	5:39:30 AM	PH3 MFC set to  0.000000
2/13/2012	5:39:30 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:39:30 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:39:30 AM	Tube furnace set to 200
2/13/2012	5:40:00 AM	H2 valve closed
2/13/2012	5:40:00 AM	BCl3 valve closed
2/13/2012	5:40:00 AM	PH3 valve closed
2/13/2012	5:40:00 AM	SiCl4 pre valve closed
2/13/2012	5:40:00 AM	SiCl4 post valve closed
2/13/2012	5:40:00 AM	Bypass valve closed
2/13/2012	5:40:00 AM	Bubbler valve closed
2/13/2012	5:40:00 AM	Helium valve opened
2/13/2012	5:40:00 AM	Main Vac valve opened
2/13/2012	5:40:00 AM	Helium MFC set to  20.000000
2/13/2012	5:40:00 AM	H2 MFC set to  0.000000
2/13/2012	5:40:00 AM	BCl3 MFC set to  0.000000
2/13/2012	5:40:00 AM	PH3 MFC set to  0.000000
2/13/2012	5:40:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:40:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:40:00 AM	Tube furnace set to 200
2/13/2012	5:40:30 AM	Helium valve closed
2/13/2012	5:40:30 AM	H2 valve closed
2/13/2012	5:40:30 AM	BCl3 valve closed
2/13/2012	5:40:30 AM	PH3 valve closed
2/13/2012	5:40:30 AM	SiCl4 pre valve closed
2/13/2012	5:40:30 AM	SiCl4 post valve closed
2/13/2012	5:40:30 AM	Bypass valve closed
2/13/2012	5:40:30 AM	Bubbler valve closed
2/13/2012	5:40:30 AM	Main Vac valve opened
2/13/2012	5:40:30 AM	Helium MFC set to  0.000000
2/13/2012	5:40:30 AM	H2 MFC set to  0.000000
2/13/2012	5:40:30 AM	BCl3 MFC set to  0.000000
2/13/2012	5:40:30 AM	PH3 MFC set to  0.000000
2/13/2012	5:40:30 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:40:30 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:40:30 AM	Tube furnace set to 200
2/13/2012	5:41:00 AM	H2 valve closed
2/13/2012	5:41:00 AM	BCl3 valve closed
2/13/2012	5:41:00 AM	PH3 valve closed
2/13/2012	5:41:00 AM	SiCl4 pre valve closed
2/13/2012	5:41:00 AM	SiCl4 post valve closed
2/13/2012	5:41:00 AM	Bypass valve closed
2/13/2012	5:41:00 AM	Bubbler valve closed
2/13/2012	5:41:00 AM	Helium valve opened
2/13/2012	5:41:00 AM	Main Vac valve opened
2/13/2012	5:41:00 AM	Helium MFC set to  20.000000
2/13/2012	5:41:00 AM	H2 MFC set to  0.000000
2/13/2012	5:41:00 AM	BCl3 MFC set to  0.000000
2/13/2012	5:41:00 AM	PH3 MFC set to  0.000000
2/13/2012	5:41:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:41:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:41:01 AM	Tube furnace set to 200
2/13/2012	5:41:31 AM	Helium valve closed
2/13/2012	5:41:31 AM	H2 valve closed
2/13/2012	5:41:31 AM	BCl3 valve closed
2/13/2012	5:41:31 AM	PH3 valve closed
2/13/2012	5:41:31 AM	SiCl4 pre valve closed
2/13/2012	5:41:31 AM	SiCl4 post valve closed
2/13/2012	5:41:31 AM	Bypass valve closed
2/13/2012	5:41:31 AM	Bubbler valve closed
2/13/2012	5:41:31 AM	Main Vac valve opened
2/13/2012	5:41:31 AM	Helium MFC set to  0.000000
2/13/2012	5:41:31 AM	H2 MFC set to  0.000000
2/13/2012	5:41:31 AM	BCl3 MFC set to  0.000000
2/13/2012	5:41:31 AM	PH3 MFC set to  0.000000
2/13/2012	5:41:31 AM	SiCl4 MFC set to  0.000000
2/13/2012	5:41:31 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:41:31 AM	Tube furnace set to 0
2/13/2012	5:41:32 AM	Run finished at 5:41 AM
2/13/2012	5:52:05 AM	Main Vac valve closed
2/13/2012	5:52:15 AM	Main Vac valve opened
2/13/2012	6:02:06 AM	Main Vac valve closed
2/13/2012	6:02:15 AM	Main Vac valve opened
2/13/2012	6:02:40 AM	Recipe started at 6:02 AM
2/13/2012	6:02:40 AM	Helium valve closed
2/13/2012	6:02:40 AM	H2 valve closed
2/13/2012	6:02:40 AM	BCl3 valve closed
2/13/2012	6:02:40 AM	PH3 valve closed
2/13/2012	6:02:40 AM	SiCl4 pre valve closed
2/13/2012	6:02:40 AM	SiCl4 post valve closed
2/13/2012	6:02:40 AM	Main Vac valve closed
2/13/2012	6:02:40 AM	Bypass valve closed
2/13/2012	6:02:40 AM	Bubbler valve closed
2/13/2012	6:02:40 AM	Helium MFC set to  0.000000
2/13/2012	6:02:40 AM	H2 MFC set to  0.000000
2/13/2012	6:02:40 AM	BCl3 MFC set to  0.000000
2/13/2012	6:02:40 AM	PH3 MFC set to  0.000000
2/13/2012	6:02:40 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:02:40 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:02:40 AM	Tube furnace set to 0
2/13/2012	6:02:43 AM	Helium valve closed
2/13/2012	6:02:43 AM	BCl3 valve closed
2/13/2012	6:02:43 AM	PH3 valve closed
2/13/2012	6:02:43 AM	SiCl4 pre valve closed
2/13/2012	6:02:43 AM	SiCl4 post valve closed
2/13/2012	6:02:43 AM	Main Vac valve closed
2/13/2012	6:02:43 AM	Bypass valve closed
2/13/2012	6:02:43 AM	Bubbler valve closed
2/13/2012	6:02:43 AM	H2 valve opened
2/13/2012	6:02:43 AM	Helium MFC set to  0.000000
2/13/2012	6:02:43 AM	H2 MFC set to  500.000000
2/13/2012	6:02:43 AM	BCl3 MFC set to  0.000000
2/13/2012	6:02:43 AM	PH3 MFC set to  0.000000
2/13/2012	6:02:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:02:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:02:43 AM	Tube furnace set to 0
2/13/2012	6:03:48 AM	Helium valve closed
2/13/2012	6:03:48 AM	BCl3 valve closed
2/13/2012	6:03:48 AM	PH3 valve closed
2/13/2012	6:03:48 AM	SiCl4 pre valve closed
2/13/2012	6:03:48 AM	SiCl4 post valve closed
2/13/2012	6:03:48 AM	Main Vac valve closed
2/13/2012	6:03:48 AM	Bypass valve closed
2/13/2012	6:03:48 AM	H2 valve opened
2/13/2012	6:03:48 AM	Bubbler valve opened
2/13/2012	6:03:48 AM	Helium MFC set to  0.000000
2/13/2012	6:03:48 AM	H2 MFC set to  500.000000
2/13/2012	6:03:48 AM	BCl3 MFC set to  0.000000
2/13/2012	6:03:48 AM	PH3 MFC set to  0.000000
2/13/2012	6:03:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:03:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:03:48 AM	Tube furnace set to 0
2/13/2012	6:03:49 AM	Helium valve closed
2/13/2012	6:03:49 AM	BCl3 valve closed
2/13/2012	6:03:49 AM	PH3 valve closed
2/13/2012	6:03:49 AM	SiCl4 pre valve closed
2/13/2012	6:03:49 AM	SiCl4 post valve closed
2/13/2012	6:03:49 AM	Main Vac valve closed
2/13/2012	6:03:49 AM	Bypass valve closed
2/13/2012	6:03:49 AM	H2 valve opened
2/13/2012	6:03:49 AM	Bubbler valve opened
2/13/2012	6:03:49 AM	Helium MFC set to  0.000000
2/13/2012	6:03:49 AM	H2 MFC set to  500.000000
2/13/2012	6:03:49 AM	BCl3 MFC set to  0.000000
2/13/2012	6:03:49 AM	PH3 MFC set to  0.000000
2/13/2012	6:03:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:03:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:03:49 AM	Tube furnace set to 1000
2/13/2012	6:23:49 AM	Helium valve closed
2/13/2012	6:23:49 AM	BCl3 valve closed
2/13/2012	6:23:49 AM	Main Vac valve closed
2/13/2012	6:23:49 AM	Bypass valve closed
2/13/2012	6:23:49 AM	H2 valve opened
2/13/2012	6:23:49 AM	PH3 valve opened
2/13/2012	6:23:49 AM	SiCl4 pre valve opened
2/13/2012	6:23:49 AM	SiCl4 post valve opened
2/13/2012	6:23:49 AM	Bubbler valve opened
2/13/2012	6:23:49 AM	Helium MFC set to  0.000000
2/13/2012	6:23:49 AM	H2 MFC set to  500.000000
2/13/2012	6:23:49 AM	BCl3 MFC set to  0.000000
2/13/2012	6:23:49 AM	PH3 MFC set to  1.000000
2/13/2012	6:23:49 AM	SiCl4 MFC set to  50.000000
2/13/2012	6:23:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:23:49 AM	Tube furnace set to 1000
2/13/2012	6:42:49 AM	Helium valve closed
2/13/2012	6:42:49 AM	BCl3 valve closed
2/13/2012	6:42:49 AM	PH3 valve closed
2/13/2012	6:42:49 AM	SiCl4 pre valve closed
2/13/2012	6:42:49 AM	SiCl4 post valve closed
2/13/2012	6:42:49 AM	Main Vac valve closed
2/13/2012	6:42:49 AM	Bypass valve closed
2/13/2012	6:42:49 AM	H2 valve opened
2/13/2012	6:42:49 AM	Bubbler valve opened
2/13/2012	6:42:49 AM	Helium MFC set to  0.000000
2/13/2012	6:42:49 AM	H2 MFC set to  500.000000
2/13/2012	6:42:49 AM	BCl3 MFC set to  0.000000
2/13/2012	6:42:49 AM	PH3 MFC set to  0.000000
2/13/2012	6:42:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:42:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:42:49 AM	Tube furnace set to 950
2/13/2012	6:44:49 AM	Helium valve closed
2/13/2012	6:44:49 AM	BCl3 valve closed
2/13/2012	6:44:49 AM	PH3 valve closed
2/13/2012	6:44:49 AM	SiCl4 pre valve closed
2/13/2012	6:44:49 AM	SiCl4 post valve closed
2/13/2012	6:44:49 AM	Main Vac valve closed
2/13/2012	6:44:49 AM	Bypass valve closed
2/13/2012	6:44:49 AM	H2 valve opened
2/13/2012	6:44:49 AM	Bubbler valve opened
2/13/2012	6:44:49 AM	Helium MFC set to  0.000000
2/13/2012	6:44:49 AM	H2 MFC set to  500.000000
2/13/2012	6:44:49 AM	BCl3 MFC set to  0.000000
2/13/2012	6:44:49 AM	PH3 MFC set to  0.000000
2/13/2012	6:44:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:44:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:44:50 AM	Tube furnace set to 900
2/13/2012	6:46:50 AM	Helium valve closed
2/13/2012	6:46:50 AM	BCl3 valve closed
2/13/2012	6:46:50 AM	PH3 valve closed
2/13/2012	6:46:50 AM	SiCl4 pre valve closed
2/13/2012	6:46:50 AM	SiCl4 post valve closed
2/13/2012	6:46:50 AM	Main Vac valve closed
2/13/2012	6:46:50 AM	Bypass valve closed
2/13/2012	6:46:50 AM	H2 valve opened
2/13/2012	6:46:50 AM	Bubbler valve opened
2/13/2012	6:46:50 AM	Helium MFC set to  0.000000
2/13/2012	6:46:50 AM	H2 MFC set to  500.000000
2/13/2012	6:46:50 AM	BCl3 MFC set to  0.000000
2/13/2012	6:46:50 AM	PH3 MFC set to  0.000000
2/13/2012	6:46:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:46:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:46:50 AM	Tube furnace set to 850
2/13/2012	6:48:50 AM	H2 valve closed
2/13/2012	6:48:50 AM	BCl3 valve closed
2/13/2012	6:48:50 AM	PH3 valve closed
2/13/2012	6:48:50 AM	SiCl4 pre valve closed
2/13/2012	6:48:50 AM	SiCl4 post valve closed
2/13/2012	6:48:50 AM	Main Vac valve closed
2/13/2012	6:48:50 AM	Bypass valve closed
2/13/2012	6:48:50 AM	Helium valve opened
2/13/2012	6:48:50 AM	Bubbler valve opened
2/13/2012	6:48:50 AM	Helium MFC set to  500.000000
2/13/2012	6:48:50 AM	H2 MFC set to  0.000000
2/13/2012	6:48:50 AM	BCl3 MFC set to  0.000000
2/13/2012	6:48:50 AM	PH3 MFC set to  0.000000
2/13/2012	6:48:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:48:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:48:50 AM	Tube furnace set to 800
2/13/2012	6:50:50 AM	H2 valve closed
2/13/2012	6:50:50 AM	BCl3 valve closed
2/13/2012	6:50:50 AM	PH3 valve closed
2/13/2012	6:50:50 AM	SiCl4 pre valve closed
2/13/2012	6:50:50 AM	SiCl4 post valve closed
2/13/2012	6:50:50 AM	Main Vac valve closed
2/13/2012	6:50:50 AM	Bypass valve closed
2/13/2012	6:50:50 AM	Helium valve opened
2/13/2012	6:50:50 AM	Bubbler valve opened
2/13/2012	6:50:50 AM	Helium MFC set to  500.000000
2/13/2012	6:50:50 AM	H2 MFC set to  0.000000
2/13/2012	6:50:50 AM	BCl3 MFC set to  0.000000
2/13/2012	6:50:50 AM	PH3 MFC set to  0.000000
2/13/2012	6:50:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:50:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:50:50 AM	Tube furnace set to 750
2/13/2012	6:52:50 AM	H2 valve closed
2/13/2012	6:52:50 AM	BCl3 valve closed
2/13/2012	6:52:50 AM	PH3 valve closed
2/13/2012	6:52:50 AM	SiCl4 pre valve closed
2/13/2012	6:52:50 AM	SiCl4 post valve closed
2/13/2012	6:52:50 AM	Main Vac valve closed
2/13/2012	6:52:50 AM	Bypass valve closed
2/13/2012	6:52:50 AM	Helium valve opened
2/13/2012	6:52:50 AM	Bubbler valve opened
2/13/2012	6:52:50 AM	Helium MFC set to  500.000000
2/13/2012	6:52:50 AM	H2 MFC set to  0.000000
2/13/2012	6:52:50 AM	BCl3 MFC set to  0.000000
2/13/2012	6:52:50 AM	PH3 MFC set to  0.000000
2/13/2012	6:52:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	6:52:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:52:50 AM	Tube furnace set to 0
2/13/2012	7:10:04 AM	Helium valve closed
2/13/2012	7:10:04 AM	H2 valve closed
2/13/2012	7:10:04 AM	BCl3 valve closed
2/13/2012	7:10:04 AM	PH3 valve closed
2/13/2012	7:10:04 AM	SiCl4 pre valve closed
2/13/2012	7:10:04 AM	SiCl4 post valve closed
2/13/2012	7:10:04 AM	Main Vac valve closed
2/13/2012	7:10:04 AM	Bypass valve closed
2/13/2012	7:10:04 AM	Bubbler valve closed
2/13/2012	7:10:04 AM	Helium MFC set to  0.000000
2/13/2012	7:10:04 AM	H2 MFC set to  0.000000
2/13/2012	7:10:04 AM	BCl3 MFC set to  0.000000
2/13/2012	7:10:04 AM	PH3 MFC set to  0.000000
2/13/2012	7:10:04 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:10:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:10:04 AM	Tube furnace set to 0
2/13/2012	7:10:05 AM	Run finished at 7:10 AM
2/13/2012	7:13:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	7:13:54 AM	Recipe started at 7:13 AM
2/13/2012	7:13:54 AM	Helium valve closed
2/13/2012	7:13:54 AM	H2 valve closed
2/13/2012	7:13:54 AM	BCl3 valve closed
2/13/2012	7:13:54 AM	PH3 valve closed
2/13/2012	7:13:54 AM	SiCl4 pre valve closed
2/13/2012	7:13:54 AM	SiCl4 post valve closed
2/13/2012	7:13:54 AM	Main Vac valve closed
2/13/2012	7:13:54 AM	Bypass valve closed
2/13/2012	7:13:54 AM	Bubbler valve closed
2/13/2012	7:13:54 AM	Helium MFC set to  0.000000
2/13/2012	7:13:54 AM	H2 MFC set to  0.000000
2/13/2012	7:13:54 AM	BCl3 MFC set to  0.000000
2/13/2012	7:13:54 AM	PH3 MFC set to  0.000000
2/13/2012	7:13:54 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:13:54 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:13:54 AM	Tube furnace set to 0
2/13/2012	7:13:57 AM	H2 valve closed
2/13/2012	7:13:57 AM	BCl3 valve closed
2/13/2012	7:13:57 AM	PH3 valve closed
2/13/2012	7:13:57 AM	SiCl4 pre valve closed
2/13/2012	7:13:57 AM	SiCl4 post valve closed
2/13/2012	7:13:57 AM	Main Vac valve closed
2/13/2012	7:13:57 AM	Bypass valve closed
2/13/2012	7:13:57 AM	Bubbler valve closed
2/13/2012	7:13:57 AM	Helium valve opened
2/13/2012	7:13:57 AM	Helium MFC set to  500.000000
2/13/2012	7:13:57 AM	H2 MFC set to  0.000000
2/13/2012	7:13:57 AM	BCl3 MFC set to  0.000000
2/13/2012	7:13:57 AM	PH3 MFC set to  0.000000
2/13/2012	7:13:57 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:13:57 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:13:57 AM	Tube furnace set to 0
2/13/2012	7:13:58 AM	Helium valve closed
2/13/2012	7:13:58 AM	H2 valve closed
2/13/2012	7:13:58 AM	BCl3 valve closed
2/13/2012	7:13:58 AM	PH3 valve closed
2/13/2012	7:13:58 AM	SiCl4 pre valve closed
2/13/2012	7:13:58 AM	SiCl4 post valve closed
2/13/2012	7:13:58 AM	Main Vac valve closed
2/13/2012	7:13:58 AM	Bypass valve closed
2/13/2012	7:13:58 AM	Bubbler valve closed
2/13/2012	7:13:58 AM	Helium MFC set to  0.000000
2/13/2012	7:13:58 AM	H2 MFC set to  0.000000
2/13/2012	7:13:58 AM	BCl3 MFC set to  0.000000
2/13/2012	7:13:58 AM	PH3 MFC set to  0.000000
2/13/2012	7:13:58 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:13:58 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:13:58 AM	Tube furnace set to 0
2/13/2012	7:13:59 AM	Run finished at 7:13 AM
2/13/2012	7:13:59 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	7:20:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:20:37 AM	Recipe started at 7:20 AM
2/13/2012	7:20:37 AM	Helium valve closed
2/13/2012	7:20:37 AM	H2 valve closed
2/13/2012	7:20:37 AM	BCl3 valve closed
2/13/2012	7:20:37 AM	PH3 valve closed
2/13/2012	7:20:37 AM	SiCl4 pre valve closed
2/13/2012	7:20:37 AM	SiCl4 post valve closed
2/13/2012	7:20:37 AM	Main Vac valve closed
2/13/2012	7:20:37 AM	Bubbler valve closed
2/13/2012	7:20:37 AM	Bypass valve opened
2/13/2012	7:20:37 AM	Helium MFC set to  0.000000
2/13/2012	7:20:37 AM	H2 MFC set to  0.000000
2/13/2012	7:20:37 AM	BCl3 MFC set to  0.000000
2/13/2012	7:20:37 AM	PH3 MFC set to  0.000000
2/13/2012	7:20:37 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:20:37 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:20:37 AM	Tube furnace set to 0
2/13/2012	7:21:43 AM	Helium valve closed
2/13/2012	7:21:43 AM	H2 valve closed
2/13/2012	7:21:43 AM	BCl3 valve closed
2/13/2012	7:21:43 AM	PH3 valve closed
2/13/2012	7:21:43 AM	SiCl4 pre valve closed
2/13/2012	7:21:43 AM	SiCl4 post valve closed
2/13/2012	7:21:43 AM	Main Vac valve closed
2/13/2012	7:21:43 AM	Bubbler valve closed
2/13/2012	7:21:43 AM	Bypass valve opened
2/13/2012	7:21:43 AM	Helium MFC set to  0.000000
2/13/2012	7:21:43 AM	H2 MFC set to  0.000000
2/13/2012	7:21:43 AM	BCl3 MFC set to  0.000000
2/13/2012	7:21:43 AM	PH3 MFC set to  0.000000
2/13/2012	7:21:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:21:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:21:44 AM	Tube furnace set to 0
2/13/2012	7:22:44 AM	Helium valve closed
2/13/2012	7:22:44 AM	H2 valve closed
2/13/2012	7:22:44 AM	BCl3 valve closed
2/13/2012	7:22:44 AM	PH3 valve closed
2/13/2012	7:22:44 AM	SiCl4 pre valve closed
2/13/2012	7:22:44 AM	SiCl4 post valve closed
2/13/2012	7:22:44 AM	Bypass valve closed
2/13/2012	7:22:44 AM	Bubbler valve closed
2/13/2012	7:22:44 AM	Main Vac valve opened
2/13/2012	7:22:44 AM	Helium MFC set to  0.000000
2/13/2012	7:22:44 AM	H2 MFC set to  0.000000
2/13/2012	7:22:44 AM	BCl3 MFC set to  0.000000
2/13/2012	7:22:44 AM	PH3 MFC set to  0.000000
2/13/2012	7:22:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:22:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:22:44 AM	Tube furnace set to 0
2/13/2012	7:22:45 AM	Run finished at 7:22 AM
2/13/2012	7:22:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:24:41 AM	Recipe started at 7:24 AM
2/13/2012	7:24:41 AM	Helium valve closed
2/13/2012	7:24:41 AM	H2 valve closed
2/13/2012	7:24:41 AM	BCl3 valve closed
2/13/2012	7:24:41 AM	PH3 valve closed
2/13/2012	7:24:41 AM	SiCl4 pre valve closed
2/13/2012	7:24:41 AM	SiCl4 post valve closed
2/13/2012	7:24:41 AM	Bypass valve closed
2/13/2012	7:24:41 AM	Bubbler valve closed
2/13/2012	7:24:41 AM	Main Vac valve opened
2/13/2012	7:24:41 AM	Helium MFC set to  0.000000
2/13/2012	7:24:41 AM	H2 MFC set to  0.000000
2/13/2012	7:24:41 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:41 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:41 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:41 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:41 AM	Tube furnace set to 0
2/13/2012	7:24:42 AM	H2 valve closed
2/13/2012	7:24:42 AM	BCl3 valve closed
2/13/2012	7:24:42 AM	PH3 valve closed
2/13/2012	7:24:42 AM	SiCl4 pre valve closed
2/13/2012	7:24:42 AM	SiCl4 post valve closed
2/13/2012	7:24:42 AM	Bypass valve closed
2/13/2012	7:24:42 AM	Bubbler valve closed
2/13/2012	7:24:42 AM	Helium valve opened
2/13/2012	7:24:42 AM	Main Vac valve opened
2/13/2012	7:24:42 AM	Helium MFC set to  20.000000
2/13/2012	7:24:42 AM	H2 MFC set to  0.000000
2/13/2012	7:24:42 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:42 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:43 AM	Tube furnace set to 0
2/13/2012	7:24:43 AM	Helium valve closed
2/13/2012	7:24:43 AM	H2 valve closed
2/13/2012	7:24:43 AM	BCl3 valve closed
2/13/2012	7:24:43 AM	PH3 valve closed
2/13/2012	7:24:43 AM	SiCl4 pre valve closed
2/13/2012	7:24:43 AM	SiCl4 post valve closed
2/13/2012	7:24:43 AM	Bypass valve closed
2/13/2012	7:24:43 AM	Bubbler valve closed
2/13/2012	7:24:43 AM	Main Vac valve opened
2/13/2012	7:24:43 AM	Helium MFC set to  0.000000
2/13/2012	7:24:43 AM	H2 MFC set to  0.000000
2/13/2012	7:24:43 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:43 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:43 AM	Tube furnace set to 0
2/13/2012	7:24:44 AM	H2 valve closed
2/13/2012	7:24:44 AM	BCl3 valve closed
2/13/2012	7:24:44 AM	PH3 valve closed
2/13/2012	7:24:44 AM	SiCl4 pre valve closed
2/13/2012	7:24:44 AM	SiCl4 post valve closed
2/13/2012	7:24:44 AM	Bypass valve closed
2/13/2012	7:24:44 AM	Bubbler valve closed
2/13/2012	7:24:44 AM	Helium valve opened
2/13/2012	7:24:44 AM	Main Vac valve opened
2/13/2012	7:24:44 AM	Helium MFC set to  20.000000
2/13/2012	7:24:44 AM	H2 MFC set to  0.000000
2/13/2012	7:24:44 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:44 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:44 AM	Tube furnace set to 0
2/13/2012	7:24:44 AM	Helium valve closed
2/13/2012	7:24:45 AM	H2 valve closed
2/13/2012	7:24:45 AM	BCl3 valve closed
2/13/2012	7:24:45 AM	PH3 valve closed
2/13/2012	7:24:45 AM	SiCl4 pre valve closed
2/13/2012	7:24:45 AM	SiCl4 post valve closed
2/13/2012	7:24:45 AM	Bypass valve closed
2/13/2012	7:24:45 AM	Bubbler valve closed
2/13/2012	7:24:45 AM	Main Vac valve opened
2/13/2012	7:24:45 AM	Helium MFC set to  0.000000
2/13/2012	7:24:45 AM	H2 MFC set to  0.000000
2/13/2012	7:24:45 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:45 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:45 AM	Tube furnace set to 0
2/13/2012	7:24:45 AM	H2 valve closed
2/13/2012	7:24:45 AM	BCl3 valve closed
2/13/2012	7:24:45 AM	PH3 valve closed
2/13/2012	7:24:45 AM	SiCl4 pre valve closed
2/13/2012	7:24:45 AM	SiCl4 post valve closed
2/13/2012	7:24:45 AM	Bypass valve closed
2/13/2012	7:24:45 AM	Bubbler valve closed
2/13/2012	7:24:45 AM	Helium valve opened
2/13/2012	7:24:45 AM	Main Vac valve opened
2/13/2012	7:24:45 AM	Helium MFC set to  20.000000
2/13/2012	7:24:45 AM	H2 MFC set to  0.000000
2/13/2012	7:24:45 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:45 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:45 AM	Tube furnace set to 0
2/13/2012	7:24:46 AM	Helium valve closed
2/13/2012	7:24:46 AM	H2 valve closed
2/13/2012	7:24:46 AM	BCl3 valve closed
2/13/2012	7:24:46 AM	PH3 valve closed
2/13/2012	7:24:46 AM	SiCl4 pre valve closed
2/13/2012	7:24:46 AM	SiCl4 post valve closed
2/13/2012	7:24:46 AM	Bypass valve closed
2/13/2012	7:24:46 AM	Bubbler valve closed
2/13/2012	7:24:46 AM	Main Vac valve opened
2/13/2012	7:24:46 AM	Helium MFC set to  0.000000
2/13/2012	7:24:46 AM	H2 MFC set to  0.000000
2/13/2012	7:24:46 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:46 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:46 AM	Tube furnace set to 0
2/13/2012	7:24:46 AM	H2 valve closed
2/13/2012	7:24:46 AM	BCl3 valve closed
2/13/2012	7:24:46 AM	PH3 valve closed
2/13/2012	7:24:46 AM	SiCl4 pre valve closed
2/13/2012	7:24:46 AM	SiCl4 post valve closed
2/13/2012	7:24:46 AM	Bypass valve closed
2/13/2012	7:24:46 AM	Bubbler valve closed
2/13/2012	7:24:46 AM	Helium valve opened
2/13/2012	7:24:46 AM	Main Vac valve opened
2/13/2012	7:24:46 AM	Helium MFC set to  20.000000
2/13/2012	7:24:46 AM	H2 MFC set to  0.000000
2/13/2012	7:24:46 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:46 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:46 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:46 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:47 AM	Tube furnace set to 0
2/13/2012	7:24:47 AM	Helium valve closed
2/13/2012	7:24:47 AM	H2 valve closed
2/13/2012	7:24:47 AM	BCl3 valve closed
2/13/2012	7:24:47 AM	PH3 valve closed
2/13/2012	7:24:47 AM	SiCl4 pre valve closed
2/13/2012	7:24:47 AM	SiCl4 post valve closed
2/13/2012	7:24:47 AM	Bypass valve closed
2/13/2012	7:24:47 AM	Bubbler valve closed
2/13/2012	7:24:47 AM	Main Vac valve opened
2/13/2012	7:24:47 AM	Helium MFC set to  0.000000
2/13/2012	7:24:47 AM	H2 MFC set to  0.000000
2/13/2012	7:24:47 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:47 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:47 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:47 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:48 AM	Tube furnace set to 0
2/13/2012	7:24:48 AM	H2 valve closed
2/13/2012	7:24:48 AM	BCl3 valve closed
2/13/2012	7:24:48 AM	PH3 valve closed
2/13/2012	7:24:48 AM	SiCl4 pre valve closed
2/13/2012	7:24:48 AM	SiCl4 post valve closed
2/13/2012	7:24:48 AM	Bypass valve closed
2/13/2012	7:24:48 AM	Bubbler valve closed
2/13/2012	7:24:48 AM	Helium valve opened
2/13/2012	7:24:48 AM	Main Vac valve opened
2/13/2012	7:24:48 AM	Helium MFC set to  20.000000
2/13/2012	7:24:48 AM	H2 MFC set to  0.000000
2/13/2012	7:24:48 AM	BCl3 MFC set to  0.000000
2/13/2012	7:24:48 AM	PH3 MFC set to  0.000000
2/13/2012	7:24:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:24:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:24:48 AM	Tube furnace set to 0
2/13/2012	7:25:18 AM	Helium valve closed
2/13/2012	7:25:18 AM	H2 valve closed
2/13/2012	7:25:18 AM	BCl3 valve closed
2/13/2012	7:25:18 AM	PH3 valve closed
2/13/2012	7:25:18 AM	SiCl4 pre valve closed
2/13/2012	7:25:18 AM	SiCl4 post valve closed
2/13/2012	7:25:18 AM	Bypass valve closed
2/13/2012	7:25:18 AM	Bubbler valve closed
2/13/2012	7:25:18 AM	Main Vac valve opened
2/13/2012	7:25:18 AM	Helium MFC set to  0.000000
2/13/2012	7:25:18 AM	H2 MFC set to  0.000000
2/13/2012	7:25:18 AM	BCl3 MFC set to  0.000000
2/13/2012	7:25:18 AM	PH3 MFC set to  0.000000
2/13/2012	7:25:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:25:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:25:18 AM	Tube furnace set to 0
2/13/2012	7:25:48 AM	H2 valve closed
2/13/2012	7:25:48 AM	BCl3 valve closed
2/13/2012	7:25:48 AM	PH3 valve closed
2/13/2012	7:25:48 AM	SiCl4 pre valve closed
2/13/2012	7:25:48 AM	SiCl4 post valve closed
2/13/2012	7:25:48 AM	Bypass valve closed
2/13/2012	7:25:48 AM	Bubbler valve closed
2/13/2012	7:25:48 AM	Helium valve opened
2/13/2012	7:25:48 AM	Main Vac valve opened
2/13/2012	7:25:48 AM	Helium MFC set to  20.000000
2/13/2012	7:25:48 AM	H2 MFC set to  0.000000
2/13/2012	7:25:48 AM	BCl3 MFC set to  0.000000
2/13/2012	7:25:48 AM	PH3 MFC set to  0.000000
2/13/2012	7:25:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:25:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:25:49 AM	Tube furnace set to 0
2/13/2012	7:26:19 AM	Helium valve closed
2/13/2012	7:26:19 AM	H2 valve closed
2/13/2012	7:26:19 AM	BCl3 valve closed
2/13/2012	7:26:19 AM	PH3 valve closed
2/13/2012	7:26:19 AM	SiCl4 pre valve closed
2/13/2012	7:26:19 AM	SiCl4 post valve closed
2/13/2012	7:26:19 AM	Bypass valve closed
2/13/2012	7:26:19 AM	Bubbler valve closed
2/13/2012	7:26:19 AM	Main Vac valve opened
2/13/2012	7:26:19 AM	Helium MFC set to  0.000000
2/13/2012	7:26:19 AM	H2 MFC set to  0.000000
2/13/2012	7:26:19 AM	BCl3 MFC set to  0.000000
2/13/2012	7:26:19 AM	PH3 MFC set to  0.000000
2/13/2012	7:26:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:26:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:26:19 AM	Tube furnace set to 0
2/13/2012	7:26:49 AM	H2 valve closed
2/13/2012	7:26:49 AM	BCl3 valve closed
2/13/2012	7:26:49 AM	PH3 valve closed
2/13/2012	7:26:49 AM	SiCl4 pre valve closed
2/13/2012	7:26:49 AM	SiCl4 post valve closed
2/13/2012	7:26:49 AM	Bypass valve closed
2/13/2012	7:26:49 AM	Bubbler valve closed
2/13/2012	7:26:49 AM	Helium valve opened
2/13/2012	7:26:49 AM	Main Vac valve opened
2/13/2012	7:26:49 AM	Helium MFC set to  20.000000
2/13/2012	7:26:49 AM	H2 MFC set to  0.000000
2/13/2012	7:26:49 AM	BCl3 MFC set to  0.000000
2/13/2012	7:26:49 AM	PH3 MFC set to  0.000000
2/13/2012	7:26:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:26:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:26:49 AM	Tube furnace set to 0
2/13/2012	7:27:19 AM	Helium valve closed
2/13/2012	7:27:19 AM	H2 valve closed
2/13/2012	7:27:19 AM	BCl3 valve closed
2/13/2012	7:27:19 AM	PH3 valve closed
2/13/2012	7:27:19 AM	SiCl4 pre valve closed
2/13/2012	7:27:19 AM	SiCl4 post valve closed
2/13/2012	7:27:19 AM	Bypass valve closed
2/13/2012	7:27:19 AM	Bubbler valve closed
2/13/2012	7:27:19 AM	Main Vac valve opened
2/13/2012	7:27:19 AM	Helium MFC set to  0.000000
2/13/2012	7:27:19 AM	H2 MFC set to  0.000000
2/13/2012	7:27:19 AM	BCl3 MFC set to  0.000000
2/13/2012	7:27:19 AM	PH3 MFC set to  0.000000
2/13/2012	7:27:19 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:27:19 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:27:19 AM	Tube furnace set to 0
2/13/2012	7:27:49 AM	H2 valve closed
2/13/2012	7:27:49 AM	BCl3 valve closed
2/13/2012	7:27:49 AM	PH3 valve closed
2/13/2012	7:27:49 AM	SiCl4 pre valve closed
2/13/2012	7:27:49 AM	SiCl4 post valve closed
2/13/2012	7:27:49 AM	Bypass valve closed
2/13/2012	7:27:49 AM	Bubbler valve closed
2/13/2012	7:27:49 AM	Helium valve opened
2/13/2012	7:27:49 AM	Main Vac valve opened
2/13/2012	7:27:49 AM	Helium MFC set to  20.000000
2/13/2012	7:27:49 AM	H2 MFC set to  0.000000
2/13/2012	7:27:49 AM	BCl3 MFC set to  0.000000
2/13/2012	7:27:49 AM	PH3 MFC set to  0.000000
2/13/2012	7:27:49 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:27:49 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:27:50 AM	Tube furnace set to 0
2/13/2012	7:28:20 AM	Helium valve closed
2/13/2012	7:28:20 AM	H2 valve closed
2/13/2012	7:28:20 AM	BCl3 valve closed
2/13/2012	7:28:20 AM	PH3 valve closed
2/13/2012	7:28:20 AM	SiCl4 pre valve closed
2/13/2012	7:28:20 AM	SiCl4 post valve closed
2/13/2012	7:28:20 AM	Bypass valve closed
2/13/2012	7:28:20 AM	Bubbler valve closed
2/13/2012	7:28:20 AM	Main Vac valve opened
2/13/2012	7:28:20 AM	Helium MFC set to  0.000000
2/13/2012	7:28:20 AM	H2 MFC set to  0.000000
2/13/2012	7:28:20 AM	BCl3 MFC set to  0.000000
2/13/2012	7:28:20 AM	PH3 MFC set to  0.000000
2/13/2012	7:28:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:28:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:28:20 AM	Tube furnace set to 0
2/13/2012	7:28:47 AM	H2 valve closed
2/13/2012	7:28:47 AM	BCl3 valve closed
2/13/2012	7:28:47 AM	PH3 valve closed
2/13/2012	7:28:47 AM	SiCl4 pre valve closed
2/13/2012	7:28:48 AM	SiCl4 post valve closed
2/13/2012	7:28:48 AM	Bypass valve closed
2/13/2012	7:28:48 AM	Bubbler valve closed
2/13/2012	7:28:48 AM	Helium valve opened
2/13/2012	7:28:48 AM	Main Vac valve opened
2/13/2012	7:28:48 AM	Helium MFC set to  20.000000
2/13/2012	7:28:48 AM	H2 MFC set to  0.000000
2/13/2012	7:28:48 AM	BCl3 MFC set to  0.000000
2/13/2012	7:28:48 AM	PH3 MFC set to  0.000000
2/13/2012	7:28:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:28:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:28:48 AM	Tube furnace set to 0
2/13/2012	7:28:48 AM	Helium valve closed
2/13/2012	7:28:48 AM	H2 valve closed
2/13/2012	7:28:48 AM	BCl3 valve closed
2/13/2012	7:28:48 AM	PH3 valve closed
2/13/2012	7:28:48 AM	SiCl4 pre valve closed
2/13/2012	7:28:48 AM	SiCl4 post valve closed
2/13/2012	7:28:48 AM	Bypass valve closed
2/13/2012	7:28:48 AM	Bubbler valve closed
2/13/2012	7:28:48 AM	Main Vac valve opened
2/13/2012	7:28:48 AM	Helium MFC set to  0.000000
2/13/2012	7:28:48 AM	H2 MFC set to  0.000000
2/13/2012	7:28:48 AM	BCl3 MFC set to  0.000000
2/13/2012	7:28:48 AM	PH3 MFC set to  0.000000
2/13/2012	7:28:48 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:28:48 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:28:48 AM	Tube furnace set to 200
2/13/2012	7:28:50 AM	H2 valve closed
2/13/2012	7:28:50 AM	BCl3 valve closed
2/13/2012	7:28:50 AM	PH3 valve closed
2/13/2012	7:28:50 AM	SiCl4 pre valve closed
2/13/2012	7:28:50 AM	SiCl4 post valve closed
2/13/2012	7:28:50 AM	Bypass valve closed
2/13/2012	7:28:50 AM	Bubbler valve closed
2/13/2012	7:28:50 AM	Helium valve opened
2/13/2012	7:28:50 AM	Main Vac valve opened
2/13/2012	7:28:50 AM	Helium MFC set to  20.000000
2/13/2012	7:28:50 AM	H2 MFC set to  0.000000
2/13/2012	7:28:50 AM	BCl3 MFC set to  0.000000
2/13/2012	7:28:50 AM	PH3 MFC set to  0.000000
2/13/2012	7:28:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:28:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:28:50 AM	Tube furnace set to 200
2/13/2012	7:29:20 AM	Helium valve closed
2/13/2012	7:29:20 AM	H2 valve closed
2/13/2012	7:29:20 AM	BCl3 valve closed
2/13/2012	7:29:20 AM	PH3 valve closed
2/13/2012	7:29:20 AM	SiCl4 pre valve closed
2/13/2012	7:29:20 AM	SiCl4 post valve closed
2/13/2012	7:29:20 AM	Bypass valve closed
2/13/2012	7:29:20 AM	Bubbler valve closed
2/13/2012	7:29:20 AM	Main Vac valve opened
2/13/2012	7:29:20 AM	Helium MFC set to  0.000000
2/13/2012	7:29:20 AM	H2 MFC set to  0.000000
2/13/2012	7:29:20 AM	BCl3 MFC set to  0.000000
2/13/2012	7:29:20 AM	PH3 MFC set to  0.000000
2/13/2012	7:29:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:29:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:29:20 AM	Tube furnace set to 200
2/13/2012	7:29:50 AM	H2 valve closed
2/13/2012	7:29:50 AM	BCl3 valve closed
2/13/2012	7:29:50 AM	PH3 valve closed
2/13/2012	7:29:50 AM	SiCl4 pre valve closed
2/13/2012	7:29:50 AM	SiCl4 post valve closed
2/13/2012	7:29:50 AM	Bypass valve closed
2/13/2012	7:29:50 AM	Bubbler valve closed
2/13/2012	7:29:50 AM	Helium valve opened
2/13/2012	7:29:50 AM	Main Vac valve opened
2/13/2012	7:29:50 AM	Helium MFC set to  20.000000
2/13/2012	7:29:50 AM	H2 MFC set to  0.000000
2/13/2012	7:29:50 AM	BCl3 MFC set to  0.000000
2/13/2012	7:29:50 AM	PH3 MFC set to  0.000000
2/13/2012	7:29:50 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:29:50 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:29:50 AM	Tube furnace set to 200
2/13/2012	7:30:20 AM	Helium valve closed
2/13/2012	7:30:20 AM	H2 valve closed
2/13/2012	7:30:20 AM	BCl3 valve closed
2/13/2012	7:30:20 AM	PH3 valve closed
2/13/2012	7:30:20 AM	SiCl4 pre valve closed
2/13/2012	7:30:20 AM	SiCl4 post valve closed
2/13/2012	7:30:20 AM	Bypass valve closed
2/13/2012	7:30:20 AM	Bubbler valve closed
2/13/2012	7:30:20 AM	Main Vac valve opened
2/13/2012	7:30:20 AM	Helium MFC set to  0.000000
2/13/2012	7:30:20 AM	H2 MFC set to  0.000000
2/13/2012	7:30:20 AM	BCl3 MFC set to  0.000000
2/13/2012	7:30:20 AM	PH3 MFC set to  0.000000
2/13/2012	7:30:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:30:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:30:20 AM	Tube furnace set to 200
2/13/2012	7:30:51 AM	H2 valve closed
2/13/2012	7:30:51 AM	BCl3 valve closed
2/13/2012	7:30:51 AM	PH3 valve closed
2/13/2012	7:30:51 AM	SiCl4 pre valve closed
2/13/2012	7:30:51 AM	SiCl4 post valve closed
2/13/2012	7:30:51 AM	Bypass valve closed
2/13/2012	7:30:51 AM	Bubbler valve closed
2/13/2012	7:30:51 AM	Helium valve opened
2/13/2012	7:30:51 AM	Main Vac valve opened
2/13/2012	7:30:51 AM	Helium MFC set to  20.000000
2/13/2012	7:30:51 AM	H2 MFC set to  0.000000
2/13/2012	7:30:51 AM	BCl3 MFC set to  0.000000
2/13/2012	7:30:51 AM	PH3 MFC set to  0.000000
2/13/2012	7:30:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:30:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:30:51 AM	Tube furnace set to 200
2/13/2012	7:31:21 AM	Helium valve closed
2/13/2012	7:31:21 AM	H2 valve closed
2/13/2012	7:31:21 AM	BCl3 valve closed
2/13/2012	7:31:21 AM	PH3 valve closed
2/13/2012	7:31:21 AM	SiCl4 pre valve closed
2/13/2012	7:31:21 AM	SiCl4 post valve closed
2/13/2012	7:31:21 AM	Bypass valve closed
2/13/2012	7:31:21 AM	Bubbler valve closed
2/13/2012	7:31:21 AM	Main Vac valve opened
2/13/2012	7:31:21 AM	Helium MFC set to  0.000000
2/13/2012	7:31:21 AM	H2 MFC set to  0.000000
2/13/2012	7:31:21 AM	BCl3 MFC set to  0.000000
2/13/2012	7:31:21 AM	PH3 MFC set to  0.000000
2/13/2012	7:31:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:31:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:31:21 AM	Tube furnace set to 200
2/13/2012	7:31:51 AM	H2 valve closed
2/13/2012	7:31:51 AM	BCl3 valve closed
2/13/2012	7:31:51 AM	PH3 valve closed
2/13/2012	7:31:51 AM	SiCl4 pre valve closed
2/13/2012	7:31:51 AM	SiCl4 post valve closed
2/13/2012	7:31:51 AM	Bypass valve closed
2/13/2012	7:31:51 AM	Bubbler valve closed
2/13/2012	7:31:51 AM	Helium valve opened
2/13/2012	7:31:51 AM	Main Vac valve opened
2/13/2012	7:31:51 AM	Helium MFC set to  20.000000
2/13/2012	7:31:51 AM	H2 MFC set to  0.000000
2/13/2012	7:31:51 AM	BCl3 MFC set to  0.000000
2/13/2012	7:31:51 AM	PH3 MFC set to  0.000000
2/13/2012	7:31:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:31:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:31:51 AM	Tube furnace set to 200
2/13/2012	7:32:21 AM	Helium valve closed
2/13/2012	7:32:21 AM	H2 valve closed
2/13/2012	7:32:21 AM	BCl3 valve closed
2/13/2012	7:32:21 AM	PH3 valve closed
2/13/2012	7:32:21 AM	SiCl4 pre valve closed
2/13/2012	7:32:21 AM	SiCl4 post valve closed
2/13/2012	7:32:21 AM	Bypass valve closed
2/13/2012	7:32:21 AM	Bubbler valve closed
2/13/2012	7:32:21 AM	Main Vac valve opened
2/13/2012	7:32:21 AM	Helium MFC set to  0.000000
2/13/2012	7:32:21 AM	H2 MFC set to  0.000000
2/13/2012	7:32:21 AM	BCl3 MFC set to  0.000000
2/13/2012	7:32:21 AM	PH3 MFC set to  0.000000
2/13/2012	7:32:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:32:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:32:21 AM	Tube furnace set to 200
2/13/2012	7:32:51 AM	H2 valve closed
2/13/2012	7:32:51 AM	BCl3 valve closed
2/13/2012	7:32:51 AM	PH3 valve closed
2/13/2012	7:32:51 AM	SiCl4 pre valve closed
2/13/2012	7:32:51 AM	SiCl4 post valve closed
2/13/2012	7:32:51 AM	Bypass valve closed
2/13/2012	7:32:51 AM	Bubbler valve closed
2/13/2012	7:32:51 AM	Helium valve opened
2/13/2012	7:32:51 AM	Main Vac valve opened
2/13/2012	7:32:51 AM	Helium MFC set to  20.000000
2/13/2012	7:32:51 AM	H2 MFC set to  0.000000
2/13/2012	7:32:51 AM	BCl3 MFC set to  0.000000
2/13/2012	7:32:51 AM	PH3 MFC set to  0.000000
2/13/2012	7:32:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:32:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:32:52 AM	Tube furnace set to 200
2/13/2012	7:33:22 AM	Helium valve closed
2/13/2012	7:33:22 AM	H2 valve closed
2/13/2012	7:33:22 AM	BCl3 valve closed
2/13/2012	7:33:22 AM	PH3 valve closed
2/13/2012	7:33:22 AM	SiCl4 pre valve closed
2/13/2012	7:33:22 AM	SiCl4 post valve closed
2/13/2012	7:33:22 AM	Bypass valve closed
2/13/2012	7:33:22 AM	Bubbler valve closed
2/13/2012	7:33:22 AM	Main Vac valve opened
2/13/2012	7:33:22 AM	Helium MFC set to  0.000000
2/13/2012	7:33:22 AM	H2 MFC set to  0.000000
2/13/2012	7:33:22 AM	BCl3 MFC set to  0.000000
2/13/2012	7:33:22 AM	PH3 MFC set to  0.000000
2/13/2012	7:33:22 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:33:22 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:33:22 AM	Tube furnace set to 200
2/13/2012	7:33:52 AM	H2 valve closed
2/13/2012	7:33:52 AM	BCl3 valve closed
2/13/2012	7:33:52 AM	PH3 valve closed
2/13/2012	7:33:52 AM	SiCl4 pre valve closed
2/13/2012	7:33:52 AM	SiCl4 post valve closed
2/13/2012	7:33:52 AM	Bypass valve closed
2/13/2012	7:33:52 AM	Bubbler valve closed
2/13/2012	7:33:52 AM	Helium valve opened
2/13/2012	7:33:52 AM	Main Vac valve opened
2/13/2012	7:33:52 AM	Helium MFC set to  20.000000
2/13/2012	7:33:52 AM	H2 MFC set to  0.000000
2/13/2012	7:33:52 AM	BCl3 MFC set to  0.000000
2/13/2012	7:33:52 AM	PH3 MFC set to  0.000000
2/13/2012	7:33:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:33:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:33:52 AM	Tube furnace set to 200
2/13/2012	7:34:22 AM	Helium valve closed
2/13/2012	7:34:22 AM	H2 valve closed
2/13/2012	7:34:22 AM	BCl3 valve closed
2/13/2012	7:34:22 AM	PH3 valve closed
2/13/2012	7:34:22 AM	SiCl4 pre valve closed
2/13/2012	7:34:22 AM	SiCl4 post valve closed
2/13/2012	7:34:22 AM	Bypass valve closed
2/13/2012	7:34:22 AM	Bubbler valve closed
2/13/2012	7:34:22 AM	Main Vac valve opened
2/13/2012	7:34:22 AM	Helium MFC set to  0.000000
2/13/2012	7:34:22 AM	H2 MFC set to  0.000000
2/13/2012	7:34:22 AM	BCl3 MFC set to  0.000000
2/13/2012	7:34:22 AM	PH3 MFC set to  0.000000
2/13/2012	7:34:22 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:34:22 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:34:22 AM	Tube furnace set to 0
2/13/2012	7:34:23 AM	Run finished at 7:34 AM
2/13/2012	7:41:32 AM	Main Vac valve closed
2/13/2012	7:41:37 AM	Main Vac valve opened
2/13/2012	7:41:47 AM	Helium MFC set to  0.000000
2/13/2012	7:43:26 AM	Recipe started at 7:43 AM
2/13/2012	7:43:26 AM	Helium valve closed
2/13/2012	7:43:26 AM	H2 valve closed
2/13/2012	7:43:26 AM	BCl3 valve closed
2/13/2012	7:43:26 AM	PH3 valve closed
2/13/2012	7:43:26 AM	SiCl4 pre valve closed
2/13/2012	7:43:26 AM	SiCl4 post valve closed
2/13/2012	7:43:26 AM	Bypass valve closed
2/13/2012	7:43:26 AM	Bubbler valve closed
2/13/2012	7:43:26 AM	Main Vac valve opened
2/13/2012	7:43:26 AM	Helium MFC set to  0.000000
2/13/2012	7:43:26 AM	H2 MFC set to  0.000000
2/13/2012	7:43:26 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:26 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:26 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:26 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:26 AM	Tube furnace set to 0
2/13/2012	7:43:31 AM	H2 valve closed
2/13/2012	7:43:31 AM	BCl3 valve closed
2/13/2012	7:43:31 AM	PH3 valve closed
2/13/2012	7:43:31 AM	SiCl4 pre valve closed
2/13/2012	7:43:31 AM	SiCl4 post valve closed
2/13/2012	7:43:31 AM	Bypass valve closed
2/13/2012	7:43:31 AM	Bubbler valve closed
2/13/2012	7:43:31 AM	Helium valve opened
2/13/2012	7:43:31 AM	Main Vac valve opened
2/13/2012	7:43:31 AM	Helium MFC set to  20.000000
2/13/2012	7:43:31 AM	H2 MFC set to  0.000000
2/13/2012	7:43:31 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:31 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:31 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:31 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:31 AM	Tube furnace set to 0
2/13/2012	7:43:32 AM	Helium valve closed
2/13/2012	7:43:32 AM	H2 valve closed
2/13/2012	7:43:32 AM	BCl3 valve closed
2/13/2012	7:43:32 AM	PH3 valve closed
2/13/2012	7:43:32 AM	SiCl4 pre valve closed
2/13/2012	7:43:32 AM	SiCl4 post valve closed
2/13/2012	7:43:32 AM	Bypass valve closed
2/13/2012	7:43:32 AM	Bubbler valve closed
2/13/2012	7:43:32 AM	Main Vac valve opened
2/13/2012	7:43:32 AM	Helium MFC set to  0.000000
2/13/2012	7:43:32 AM	H2 MFC set to  0.000000
2/13/2012	7:43:32 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:32 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:32 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:32 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:32 AM	Tube furnace set to 0
2/13/2012	7:43:33 AM	H2 valve closed
2/13/2012	7:43:33 AM	BCl3 valve closed
2/13/2012	7:43:33 AM	PH3 valve closed
2/13/2012	7:43:33 AM	SiCl4 pre valve closed
2/13/2012	7:43:33 AM	SiCl4 post valve closed
2/13/2012	7:43:33 AM	Bypass valve closed
2/13/2012	7:43:33 AM	Bubbler valve closed
2/13/2012	7:43:33 AM	Helium valve opened
2/13/2012	7:43:33 AM	Main Vac valve opened
2/13/2012	7:43:33 AM	Helium MFC set to  20.000000
2/13/2012	7:43:33 AM	H2 MFC set to  0.000000
2/13/2012	7:43:33 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:33 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:33 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:33 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:33 AM	Tube furnace set to 0
2/13/2012	7:43:33 AM	Helium valve closed
2/13/2012	7:43:33 AM	H2 valve closed
2/13/2012	7:43:33 AM	BCl3 valve closed
2/13/2012	7:43:33 AM	PH3 valve closed
2/13/2012	7:43:33 AM	SiCl4 pre valve closed
2/13/2012	7:43:33 AM	SiCl4 post valve closed
2/13/2012	7:43:33 AM	Bypass valve closed
2/13/2012	7:43:33 AM	Bubbler valve closed
2/13/2012	7:43:33 AM	Main Vac valve opened
2/13/2012	7:43:33 AM	Helium MFC set to  0.000000
2/13/2012	7:43:33 AM	H2 MFC set to  0.000000
2/13/2012	7:43:33 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:33 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:33 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:33 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:33 AM	Tube furnace set to 0
2/13/2012	7:43:35 AM	H2 valve closed
2/13/2012	7:43:35 AM	BCl3 valve closed
2/13/2012	7:43:35 AM	PH3 valve closed
2/13/2012	7:43:35 AM	SiCl4 pre valve closed
2/13/2012	7:43:35 AM	SiCl4 post valve closed
2/13/2012	7:43:35 AM	Bypass valve closed
2/13/2012	7:43:35 AM	Bubbler valve closed
2/13/2012	7:43:35 AM	Helium valve opened
2/13/2012	7:43:35 AM	Main Vac valve opened
2/13/2012	7:43:35 AM	Helium MFC set to  20.000000
2/13/2012	7:43:35 AM	H2 MFC set to  0.000000
2/13/2012	7:43:35 AM	BCl3 MFC set to  0.000000
2/13/2012	7:43:35 AM	PH3 MFC set to  0.000000
2/13/2012	7:43:35 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:43:35 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:43:35 AM	Tube furnace set to 0
2/13/2012	7:44:05 AM	Helium valve closed
2/13/2012	7:44:05 AM	H2 valve closed
2/13/2012	7:44:05 AM	BCl3 valve closed
2/13/2012	7:44:05 AM	PH3 valve closed
2/13/2012	7:44:05 AM	SiCl4 pre valve closed
2/13/2012	7:44:05 AM	SiCl4 post valve closed
2/13/2012	7:44:05 AM	Bypass valve closed
2/13/2012	7:44:05 AM	Bubbler valve closed
2/13/2012	7:44:05 AM	Main Vac valve opened
2/13/2012	7:44:05 AM	Helium MFC set to  0.000000
2/13/2012	7:44:05 AM	H2 MFC set to  0.000000
2/13/2012	7:44:05 AM	BCl3 MFC set to  0.000000
2/13/2012	7:44:05 AM	PH3 MFC set to  0.000000
2/13/2012	7:44:05 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:44:06 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:44:06 AM	Tube furnace set to 0
2/13/2012	7:44:36 AM	H2 valve closed
2/13/2012	7:44:36 AM	BCl3 valve closed
2/13/2012	7:44:36 AM	PH3 valve closed
2/13/2012	7:44:36 AM	SiCl4 pre valve closed
2/13/2012	7:44:36 AM	SiCl4 post valve closed
2/13/2012	7:44:36 AM	Bypass valve closed
2/13/2012	7:44:36 AM	Bubbler valve closed
2/13/2012	7:44:36 AM	Helium valve opened
2/13/2012	7:44:36 AM	Main Vac valve opened
2/13/2012	7:44:36 AM	Helium MFC set to  20.000000
2/13/2012	7:44:36 AM	H2 MFC set to  0.000000
2/13/2012	7:44:36 AM	BCl3 MFC set to  0.000000
2/13/2012	7:44:36 AM	PH3 MFC set to  0.000000
2/13/2012	7:44:36 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:44:36 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:44:36 AM	Tube furnace set to 0
2/13/2012	7:45:06 AM	Helium valve closed
2/13/2012	7:45:06 AM	H2 valve closed
2/13/2012	7:45:06 AM	BCl3 valve closed
2/13/2012	7:45:06 AM	PH3 valve closed
2/13/2012	7:45:06 AM	SiCl4 pre valve closed
2/13/2012	7:45:06 AM	SiCl4 post valve closed
2/13/2012	7:45:06 AM	Bypass valve closed
2/13/2012	7:45:06 AM	Bubbler valve closed
2/13/2012	7:45:06 AM	Main Vac valve opened
2/13/2012	7:45:06 AM	Helium MFC set to  0.000000
2/13/2012	7:45:06 AM	H2 MFC set to  0.000000
2/13/2012	7:45:06 AM	BCl3 MFC set to  0.000000
2/13/2012	7:45:06 AM	PH3 MFC set to  0.000000
2/13/2012	7:45:06 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:45:06 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:45:06 AM	Tube furnace set to 0
2/13/2012	7:45:36 AM	H2 valve closed
2/13/2012	7:45:36 AM	BCl3 valve closed
2/13/2012	7:45:36 AM	PH3 valve closed
2/13/2012	7:45:36 AM	SiCl4 pre valve closed
2/13/2012	7:45:36 AM	SiCl4 post valve closed
2/13/2012	7:45:36 AM	Bypass valve closed
2/13/2012	7:45:36 AM	Bubbler valve closed
2/13/2012	7:45:36 AM	Helium valve opened
2/13/2012	7:45:36 AM	Main Vac valve opened
2/13/2012	7:45:36 AM	Helium MFC set to  20.000000
2/13/2012	7:45:36 AM	H2 MFC set to  0.000000
2/13/2012	7:45:36 AM	BCl3 MFC set to  0.000000
2/13/2012	7:45:36 AM	PH3 MFC set to  0.000000
2/13/2012	7:45:36 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:45:36 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:45:36 AM	Tube furnace set to 0
2/13/2012	7:46:06 AM	Helium valve closed
2/13/2012	7:46:06 AM	H2 valve closed
2/13/2012	7:46:06 AM	BCl3 valve closed
2/13/2012	7:46:06 AM	PH3 valve closed
2/13/2012	7:46:06 AM	SiCl4 pre valve closed
2/13/2012	7:46:06 AM	SiCl4 post valve closed
2/13/2012	7:46:06 AM	Bypass valve closed
2/13/2012	7:46:06 AM	Bubbler valve closed
2/13/2012	7:46:06 AM	Main Vac valve opened
2/13/2012	7:46:06 AM	Helium MFC set to  0.000000
2/13/2012	7:46:06 AM	H2 MFC set to  0.000000
2/13/2012	7:46:06 AM	BCl3 MFC set to  0.000000
2/13/2012	7:46:06 AM	PH3 MFC set to  0.000000
2/13/2012	7:46:06 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:46:06 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:46:06 AM	Tube furnace set to 0
2/13/2012	7:46:36 AM	H2 valve closed
2/13/2012	7:46:36 AM	BCl3 valve closed
2/13/2012	7:46:37 AM	PH3 valve closed
2/13/2012	7:46:37 AM	SiCl4 pre valve closed
2/13/2012	7:46:37 AM	SiCl4 post valve closed
2/13/2012	7:46:37 AM	Bypass valve closed
2/13/2012	7:46:37 AM	Bubbler valve closed
2/13/2012	7:46:37 AM	Helium valve opened
2/13/2012	7:46:37 AM	Main Vac valve opened
2/13/2012	7:46:37 AM	Helium MFC set to  20.000000
2/13/2012	7:46:37 AM	H2 MFC set to  0.000000
2/13/2012	7:46:37 AM	BCl3 MFC set to  0.000000
2/13/2012	7:46:37 AM	PH3 MFC set to  0.000000
2/13/2012	7:46:37 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:46:37 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:46:37 AM	Tube furnace set to 0
2/13/2012	7:47:07 AM	Helium valve closed
2/13/2012	7:47:07 AM	H2 valve closed
2/13/2012	7:47:07 AM	BCl3 valve closed
2/13/2012	7:47:07 AM	PH3 valve closed
2/13/2012	7:47:07 AM	SiCl4 pre valve closed
2/13/2012	7:47:07 AM	SiCl4 post valve closed
2/13/2012	7:47:07 AM	Bypass valve closed
2/13/2012	7:47:07 AM	Bubbler valve closed
2/13/2012	7:47:07 AM	Main Vac valve opened
2/13/2012	7:47:07 AM	Helium MFC set to  0.000000
2/13/2012	7:47:07 AM	H2 MFC set to  0.000000
2/13/2012	7:47:07 AM	BCl3 MFC set to  0.000000
2/13/2012	7:47:07 AM	PH3 MFC set to  0.000000
2/13/2012	7:47:07 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:47:07 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:47:07 AM	Tube furnace set to 0
2/13/2012	7:47:37 AM	H2 valve closed
2/13/2012	7:47:37 AM	BCl3 valve closed
2/13/2012	7:47:37 AM	PH3 valve closed
2/13/2012	7:47:37 AM	SiCl4 pre valve closed
2/13/2012	7:47:37 AM	SiCl4 post valve closed
2/13/2012	7:47:37 AM	Bypass valve closed
2/13/2012	7:47:37 AM	Bubbler valve closed
2/13/2012	7:47:37 AM	Helium valve opened
2/13/2012	7:47:37 AM	Main Vac valve opened
2/13/2012	7:47:37 AM	Helium MFC set to  20.000000
2/13/2012	7:47:37 AM	H2 MFC set to  0.000000
2/13/2012	7:47:37 AM	BCl3 MFC set to  0.000000
2/13/2012	7:47:37 AM	PH3 MFC set to  0.000000
2/13/2012	7:47:37 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:47:37 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:47:37 AM	Tube furnace set to 0
2/13/2012	7:47:42 AM	Helium valve closed
2/13/2012	7:47:42 AM	H2 valve closed
2/13/2012	7:47:42 AM	BCl3 valve closed
2/13/2012	7:47:42 AM	PH3 valve closed
2/13/2012	7:47:42 AM	SiCl4 pre valve closed
2/13/2012	7:47:42 AM	SiCl4 post valve closed
2/13/2012	7:47:42 AM	Bypass valve closed
2/13/2012	7:47:42 AM	Bubbler valve closed
2/13/2012	7:47:42 AM	Main Vac valve opened
2/13/2012	7:47:42 AM	Helium MFC set to  0.000000
2/13/2012	7:47:42 AM	H2 MFC set to  0.000000
2/13/2012	7:47:42 AM	BCl3 MFC set to  0.000000
2/13/2012	7:47:42 AM	PH3 MFC set to  0.000000
2/13/2012	7:47:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:47:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:47:42 AM	Tube furnace set to 0
2/13/2012	7:47:42 AM	H2 valve closed
2/13/2012	7:47:42 AM	BCl3 valve closed
2/13/2012	7:47:42 AM	PH3 valve closed
2/13/2012	7:47:42 AM	SiCl4 pre valve closed
2/13/2012	7:47:42 AM	SiCl4 post valve closed
2/13/2012	7:47:42 AM	Bypass valve closed
2/13/2012	7:47:42 AM	Bubbler valve closed
2/13/2012	7:47:42 AM	Helium valve opened
2/13/2012	7:47:42 AM	Main Vac valve opened
2/13/2012	7:47:42 AM	Helium MFC set to  20.000000
2/13/2012	7:47:42 AM	H2 MFC set to  0.000000
2/13/2012	7:47:42 AM	BCl3 MFC set to  0.000000
2/13/2012	7:47:42 AM	PH3 MFC set to  0.000000
2/13/2012	7:47:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:47:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:47:43 AM	Tube furnace set to 0
2/13/2012	7:48:13 AM	Helium valve closed
2/13/2012	7:48:13 AM	H2 valve closed
2/13/2012	7:48:13 AM	BCl3 valve closed
2/13/2012	7:48:13 AM	PH3 valve closed
2/13/2012	7:48:13 AM	SiCl4 pre valve closed
2/13/2012	7:48:13 AM	SiCl4 post valve closed
2/13/2012	7:48:13 AM	Bypass valve closed
2/13/2012	7:48:13 AM	Bubbler valve closed
2/13/2012	7:48:13 AM	Main Vac valve opened
2/13/2012	7:48:13 AM	Helium MFC set to  0.000000
2/13/2012	7:48:13 AM	H2 MFC set to  0.000000
2/13/2012	7:48:13 AM	BCl3 MFC set to  0.000000
2/13/2012	7:48:13 AM	PH3 MFC set to  0.000000
2/13/2012	7:48:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:48:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:48:13 AM	Tube furnace set to 0
2/13/2012	7:48:43 AM	H2 valve closed
2/13/2012	7:48:43 AM	BCl3 valve closed
2/13/2012	7:48:43 AM	PH3 valve closed
2/13/2012	7:48:43 AM	SiCl4 pre valve closed
2/13/2012	7:48:43 AM	SiCl4 post valve closed
2/13/2012	7:48:43 AM	Bypass valve closed
2/13/2012	7:48:43 AM	Bubbler valve closed
2/13/2012	7:48:43 AM	Helium valve opened
2/13/2012	7:48:43 AM	Main Vac valve opened
2/13/2012	7:48:43 AM	Helium MFC set to  20.000000
2/13/2012	7:48:43 AM	H2 MFC set to  0.000000
2/13/2012	7:48:43 AM	BCl3 MFC set to  0.000000
2/13/2012	7:48:43 AM	PH3 MFC set to  0.000000
2/13/2012	7:48:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:48:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:48:43 AM	Tube furnace set to 0
2/13/2012	7:49:13 AM	Helium valve closed
2/13/2012	7:49:13 AM	H2 valve closed
2/13/2012	7:49:13 AM	BCl3 valve closed
2/13/2012	7:49:13 AM	PH3 valve closed
2/13/2012	7:49:13 AM	SiCl4 pre valve closed
2/13/2012	7:49:13 AM	SiCl4 post valve closed
2/13/2012	7:49:13 AM	Bypass valve closed
2/13/2012	7:49:13 AM	Bubbler valve closed
2/13/2012	7:49:13 AM	Main Vac valve opened
2/13/2012	7:49:13 AM	Helium MFC set to  0.000000
2/13/2012	7:49:13 AM	H2 MFC set to  0.000000
2/13/2012	7:49:13 AM	BCl3 MFC set to  0.000000
2/13/2012	7:49:13 AM	PH3 MFC set to  0.000000
2/13/2012	7:49:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:49:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:49:13 AM	Tube furnace set to 200
2/13/2012	7:49:43 AM	H2 valve closed
2/13/2012	7:49:43 AM	BCl3 valve closed
2/13/2012	7:49:43 AM	PH3 valve closed
2/13/2012	7:49:43 AM	SiCl4 pre valve closed
2/13/2012	7:49:43 AM	SiCl4 post valve closed
2/13/2012	7:49:43 AM	Bypass valve closed
2/13/2012	7:49:43 AM	Bubbler valve closed
2/13/2012	7:49:43 AM	Helium valve opened
2/13/2012	7:49:43 AM	Main Vac valve opened
2/13/2012	7:49:43 AM	Helium MFC set to  20.000000
2/13/2012	7:49:43 AM	H2 MFC set to  0.000000
2/13/2012	7:49:43 AM	BCl3 MFC set to  0.000000
2/13/2012	7:49:43 AM	PH3 MFC set to  0.000000
2/13/2012	7:49:43 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:49:43 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:49:43 AM	Tube furnace set to 200
2/13/2012	7:50:13 AM	Helium valve closed
2/13/2012	7:50:13 AM	H2 valve closed
2/13/2012	7:50:13 AM	BCl3 valve closed
2/13/2012	7:50:13 AM	PH3 valve closed
2/13/2012	7:50:13 AM	SiCl4 pre valve closed
2/13/2012	7:50:13 AM	SiCl4 post valve closed
2/13/2012	7:50:13 AM	Bypass valve closed
2/13/2012	7:50:13 AM	Bubbler valve closed
2/13/2012	7:50:13 AM	Main Vac valve opened
2/13/2012	7:50:13 AM	Helium MFC set to  0.000000
2/13/2012	7:50:13 AM	H2 MFC set to  0.000000
2/13/2012	7:50:13 AM	BCl3 MFC set to  0.000000
2/13/2012	7:50:13 AM	PH3 MFC set to  0.000000
2/13/2012	7:50:13 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:50:13 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:50:14 AM	Tube furnace set to 200
2/13/2012	7:50:44 AM	H2 valve closed
2/13/2012	7:50:44 AM	BCl3 valve closed
2/13/2012	7:50:44 AM	PH3 valve closed
2/13/2012	7:50:44 AM	SiCl4 pre valve closed
2/13/2012	7:50:44 AM	SiCl4 post valve closed
2/13/2012	7:50:44 AM	Bypass valve closed
2/13/2012	7:50:44 AM	Bubbler valve closed
2/13/2012	7:50:44 AM	Helium valve opened
2/13/2012	7:50:44 AM	Main Vac valve opened
2/13/2012	7:50:44 AM	Helium MFC set to  20.000000
2/13/2012	7:50:44 AM	H2 MFC set to  0.000000
2/13/2012	7:50:44 AM	BCl3 MFC set to  0.000000
2/13/2012	7:50:44 AM	PH3 MFC set to  0.000000
2/13/2012	7:50:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:50:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:50:44 AM	Tube furnace set to 200
2/13/2012	7:51:14 AM	Helium valve closed
2/13/2012	7:51:14 AM	H2 valve closed
2/13/2012	7:51:14 AM	BCl3 valve closed
2/13/2012	7:51:14 AM	PH3 valve closed
2/13/2012	7:51:14 AM	SiCl4 pre valve closed
2/13/2012	7:51:14 AM	SiCl4 post valve closed
2/13/2012	7:51:14 AM	Bypass valve closed
2/13/2012	7:51:14 AM	Bubbler valve closed
2/13/2012	7:51:14 AM	Main Vac valve opened
2/13/2012	7:51:14 AM	Helium MFC set to  0.000000
2/13/2012	7:51:14 AM	H2 MFC set to  0.000000
2/13/2012	7:51:14 AM	BCl3 MFC set to  0.000000
2/13/2012	7:51:14 AM	PH3 MFC set to  0.000000
2/13/2012	7:51:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:51:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:51:14 AM	Tube furnace set to 200
2/13/2012	7:51:44 AM	H2 valve closed
2/13/2012	7:51:44 AM	BCl3 valve closed
2/13/2012	7:51:44 AM	PH3 valve closed
2/13/2012	7:51:44 AM	SiCl4 pre valve closed
2/13/2012	7:51:44 AM	SiCl4 post valve closed
2/13/2012	7:51:44 AM	Bypass valve closed
2/13/2012	7:51:44 AM	Bubbler valve closed
2/13/2012	7:51:44 AM	Helium valve opened
2/13/2012	7:51:44 AM	Main Vac valve opened
2/13/2012	7:51:44 AM	Helium MFC set to  20.000000
2/13/2012	7:51:44 AM	H2 MFC set to  0.000000
2/13/2012	7:51:44 AM	BCl3 MFC set to  0.000000
2/13/2012	7:51:44 AM	PH3 MFC set to  0.000000
2/13/2012	7:51:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:51:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:51:44 AM	Tube furnace set to 200
2/13/2012	7:52:14 AM	Helium valve closed
2/13/2012	7:52:14 AM	H2 valve closed
2/13/2012	7:52:14 AM	BCl3 valve closed
2/13/2012	7:52:14 AM	PH3 valve closed
2/13/2012	7:52:14 AM	SiCl4 pre valve closed
2/13/2012	7:52:14 AM	SiCl4 post valve closed
2/13/2012	7:52:14 AM	Bypass valve closed
2/13/2012	7:52:14 AM	Bubbler valve closed
2/13/2012	7:52:14 AM	Main Vac valve opened
2/13/2012	7:52:14 AM	Helium MFC set to  0.000000
2/13/2012	7:52:14 AM	H2 MFC set to  0.000000
2/13/2012	7:52:14 AM	BCl3 MFC set to  0.000000
2/13/2012	7:52:14 AM	PH3 MFC set to  0.000000
2/13/2012	7:52:14 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:52:14 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:52:14 AM	Tube furnace set to 200
2/13/2012	7:52:44 AM	H2 valve closed
2/13/2012	7:52:44 AM	BCl3 valve closed
2/13/2012	7:52:44 AM	PH3 valve closed
2/13/2012	7:52:44 AM	SiCl4 pre valve closed
2/13/2012	7:52:44 AM	SiCl4 post valve closed
2/13/2012	7:52:44 AM	Bypass valve closed
2/13/2012	7:52:44 AM	Bubbler valve closed
2/13/2012	7:52:44 AM	Helium valve opened
2/13/2012	7:52:44 AM	Main Vac valve opened
2/13/2012	7:52:44 AM	Helium MFC set to  20.000000
2/13/2012	7:52:44 AM	H2 MFC set to  0.000000
2/13/2012	7:52:44 AM	BCl3 MFC set to  0.000000
2/13/2012	7:52:44 AM	PH3 MFC set to  0.000000
2/13/2012	7:52:44 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:52:44 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:52:45 AM	Tube furnace set to 200
2/13/2012	7:53:15 AM	Helium valve closed
2/13/2012	7:53:15 AM	H2 valve closed
2/13/2012	7:53:15 AM	BCl3 valve closed
2/13/2012	7:53:15 AM	PH3 valve closed
2/13/2012	7:53:15 AM	SiCl4 pre valve closed
2/13/2012	7:53:15 AM	SiCl4 post valve closed
2/13/2012	7:53:15 AM	Bypass valve closed
2/13/2012	7:53:15 AM	Bubbler valve closed
2/13/2012	7:53:15 AM	Main Vac valve opened
2/13/2012	7:53:15 AM	Helium MFC set to  0.000000
2/13/2012	7:53:15 AM	H2 MFC set to  0.000000
2/13/2012	7:53:15 AM	BCl3 MFC set to  0.000000
2/13/2012	7:53:15 AM	PH3 MFC set to  0.000000
2/13/2012	7:53:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:53:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:53:15 AM	Tube furnace set to 200
2/13/2012	7:53:45 AM	H2 valve closed
2/13/2012	7:53:45 AM	BCl3 valve closed
2/13/2012	7:53:45 AM	PH3 valve closed
2/13/2012	7:53:45 AM	SiCl4 pre valve closed
2/13/2012	7:53:45 AM	SiCl4 post valve closed
2/13/2012	7:53:45 AM	Bypass valve closed
2/13/2012	7:53:45 AM	Bubbler valve closed
2/13/2012	7:53:45 AM	Helium valve opened
2/13/2012	7:53:45 AM	Main Vac valve opened
2/13/2012	7:53:45 AM	Helium MFC set to  20.000000
2/13/2012	7:53:45 AM	H2 MFC set to  0.000000
2/13/2012	7:53:45 AM	BCl3 MFC set to  0.000000
2/13/2012	7:53:45 AM	PH3 MFC set to  0.000000
2/13/2012	7:53:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:53:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:53:45 AM	Tube furnace set to 200
2/13/2012	7:54:15 AM	Helium valve closed
2/13/2012	7:54:15 AM	H2 valve closed
2/13/2012	7:54:15 AM	BCl3 valve closed
2/13/2012	7:54:15 AM	PH3 valve closed
2/13/2012	7:54:15 AM	SiCl4 pre valve closed
2/13/2012	7:54:15 AM	SiCl4 post valve closed
2/13/2012	7:54:15 AM	Bypass valve closed
2/13/2012	7:54:15 AM	Bubbler valve closed
2/13/2012	7:54:15 AM	Main Vac valve opened
2/13/2012	7:54:15 AM	Helium MFC set to  0.000000
2/13/2012	7:54:15 AM	H2 MFC set to  0.000000
2/13/2012	7:54:15 AM	BCl3 MFC set to  0.000000
2/13/2012	7:54:15 AM	PH3 MFC set to  0.000000
2/13/2012	7:54:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:54:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:54:15 AM	Tube furnace set to 200
2/13/2012	7:54:45 AM	H2 valve closed
2/13/2012	7:54:45 AM	BCl3 valve closed
2/13/2012	7:54:45 AM	PH3 valve closed
2/13/2012	7:54:45 AM	SiCl4 pre valve closed
2/13/2012	7:54:45 AM	SiCl4 post valve closed
2/13/2012	7:54:45 AM	Bypass valve closed
2/13/2012	7:54:45 AM	Bubbler valve closed
2/13/2012	7:54:45 AM	Helium valve opened
2/13/2012	7:54:45 AM	Main Vac valve opened
2/13/2012	7:54:45 AM	Helium MFC set to  20.000000
2/13/2012	7:54:45 AM	H2 MFC set to  0.000000
2/13/2012	7:54:45 AM	BCl3 MFC set to  0.000000
2/13/2012	7:54:45 AM	PH3 MFC set to  0.000000
2/13/2012	7:54:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:54:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:54:45 AM	Tube furnace set to 200
2/13/2012	7:55:15 AM	Helium valve closed
2/13/2012	7:55:15 AM	H2 valve closed
2/13/2012	7:55:15 AM	BCl3 valve closed
2/13/2012	7:55:15 AM	PH3 valve closed
2/13/2012	7:55:15 AM	SiCl4 pre valve closed
2/13/2012	7:55:15 AM	SiCl4 post valve closed
2/13/2012	7:55:15 AM	Bypass valve closed
2/13/2012	7:55:15 AM	Bubbler valve closed
2/13/2012	7:55:15 AM	Main Vac valve opened
2/13/2012	7:55:15 AM	Helium MFC set to  0.000000
2/13/2012	7:55:15 AM	H2 MFC set to  0.000000
2/13/2012	7:55:15 AM	BCl3 MFC set to  0.000000
2/13/2012	7:55:15 AM	PH3 MFC set to  0.000000
2/13/2012	7:55:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	7:55:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:55:16 AM	Tube furnace set to 0
2/13/2012	7:55:17 AM	Run finished at 7:55 AM
2/13/2012	8:00:50 AM	Main Vac valve closed
2/13/2012	8:00:59 AM	Main Vac valve opened
2/13/2012	8:01:52 AM	Recipe started at 8:01 AM
2/13/2012	8:01:52 AM	Helium valve closed
2/13/2012	8:01:52 AM	H2 valve closed
2/13/2012	8:01:52 AM	BCl3 valve closed
2/13/2012	8:01:52 AM	PH3 valve closed
2/13/2012	8:01:52 AM	SiCl4 pre valve closed
2/13/2012	8:01:52 AM	SiCl4 post valve closed
2/13/2012	8:01:52 AM	Main Vac valve closed
2/13/2012	8:01:52 AM	Bypass valve closed
2/13/2012	8:01:52 AM	Bubbler valve closed
2/13/2012	8:01:52 AM	Helium MFC set to  0.000000
2/13/2012	8:01:52 AM	H2 MFC set to  0.000000
2/13/2012	8:01:52 AM	BCl3 MFC set to  0.000000
2/13/2012	8:01:52 AM	PH3 MFC set to  0.000000
2/13/2012	8:01:52 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:01:52 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:01:52 AM	Tube furnace set to 0
2/13/2012	8:01:55 AM	Helium valve closed
2/13/2012	8:01:55 AM	BCl3 valve closed
2/13/2012	8:01:55 AM	PH3 valve closed
2/13/2012	8:01:55 AM	SiCl4 pre valve closed
2/13/2012	8:01:55 AM	SiCl4 post valve closed
2/13/2012	8:01:55 AM	Main Vac valve closed
2/13/2012	8:01:55 AM	Bypass valve closed
2/13/2012	8:01:55 AM	Bubbler valve closed
2/13/2012	8:01:55 AM	H2 valve opened
2/13/2012	8:01:55 AM	Helium MFC set to  0.000000
2/13/2012	8:01:55 AM	H2 MFC set to  500.000000
2/13/2012	8:01:55 AM	BCl3 MFC set to  0.000000
2/13/2012	8:01:55 AM	PH3 MFC set to  0.000000
2/13/2012	8:01:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:01:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:01:56 AM	Tube furnace set to 0
2/13/2012	8:03:00 AM	Helium valve closed
2/13/2012	8:03:00 AM	BCl3 valve closed
2/13/2012	8:03:00 AM	PH3 valve closed
2/13/2012	8:03:00 AM	SiCl4 pre valve closed
2/13/2012	8:03:00 AM	SiCl4 post valve closed
2/13/2012	8:03:00 AM	Main Vac valve closed
2/13/2012	8:03:00 AM	Bypass valve closed
2/13/2012	8:03:00 AM	H2 valve opened
2/13/2012	8:03:00 AM	Bubbler valve opened
2/13/2012	8:03:00 AM	Helium MFC set to  0.000000
2/13/2012	8:03:00 AM	H2 MFC set to  500.000000
2/13/2012	8:03:00 AM	BCl3 MFC set to  0.000000
2/13/2012	8:03:00 AM	PH3 MFC set to  0.000000
2/13/2012	8:03:00 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:03:00 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:03:00 AM	Tube furnace set to 0
2/13/2012	8:03:01 AM	Helium valve closed
2/13/2012	8:03:01 AM	BCl3 valve closed
2/13/2012	8:03:01 AM	PH3 valve closed
2/13/2012	8:03:01 AM	SiCl4 pre valve closed
2/13/2012	8:03:01 AM	SiCl4 post valve closed
2/13/2012	8:03:01 AM	Main Vac valve closed
2/13/2012	8:03:01 AM	Bypass valve closed
2/13/2012	8:03:01 AM	H2 valve opened
2/13/2012	8:03:01 AM	Bubbler valve opened
2/13/2012	8:03:01 AM	Helium MFC set to  0.000000
2/13/2012	8:03:01 AM	H2 MFC set to  500.000000
2/13/2012	8:03:01 AM	BCl3 MFC set to  0.000000
2/13/2012	8:03:01 AM	PH3 MFC set to  0.000000
2/13/2012	8:03:01 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:03:01 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:03:01 AM	Tube furnace set to 1000
2/13/2012	8:21:03 AM	Helium valve closed
2/13/2012	8:21:03 AM	BCl3 valve closed
2/13/2012	8:21:03 AM	Main Vac valve closed
2/13/2012	8:21:03 AM	Bypass valve closed
2/13/2012	8:21:03 AM	H2 valve opened
2/13/2012	8:21:03 AM	PH3 valve opened
2/13/2012	8:21:03 AM	SiCl4 pre valve opened
2/13/2012	8:21:03 AM	SiCl4 post valve opened
2/13/2012	8:21:03 AM	Bubbler valve opened
2/13/2012	8:21:03 AM	Helium MFC set to  0.000000
2/13/2012	8:21:03 AM	H2 MFC set to  500.000000
2/13/2012	8:21:03 AM	BCl3 MFC set to  0.000000
2/13/2012	8:21:03 AM	PH3 MFC set to  1.000000
2/13/2012	8:21:03 AM	SiCl4 MFC set to  50.000000
2/13/2012	8:21:03 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:21:03 AM	Tube furnace set to 1000
2/13/2012	8:36:03 AM	Helium valve closed
2/13/2012	8:36:03 AM	BCl3 valve closed
2/13/2012	8:36:03 AM	PH3 valve closed
2/13/2012	8:36:03 AM	SiCl4 pre valve closed
2/13/2012	8:36:03 AM	SiCl4 post valve closed
2/13/2012	8:36:03 AM	Main Vac valve closed
2/13/2012	8:36:03 AM	Bypass valve closed
2/13/2012	8:36:03 AM	H2 valve opened
2/13/2012	8:36:03 AM	Bubbler valve opened
2/13/2012	8:36:03 AM	Helium MFC set to  0.000000
2/13/2012	8:36:03 AM	H2 MFC set to  500.000000
2/13/2012	8:36:03 AM	BCl3 MFC set to  0.000000
2/13/2012	8:36:03 AM	PH3 MFC set to  0.000000
2/13/2012	8:36:03 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:36:03 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:36:04 AM	Tube furnace set to 950
2/13/2012	8:38:04 AM	Helium valve closed
2/13/2012	8:38:04 AM	BCl3 valve closed
2/13/2012	8:38:04 AM	PH3 valve closed
2/13/2012	8:38:04 AM	SiCl4 pre valve closed
2/13/2012	8:38:04 AM	SiCl4 post valve closed
2/13/2012	8:38:04 AM	Main Vac valve closed
2/13/2012	8:38:04 AM	Bypass valve closed
2/13/2012	8:38:04 AM	H2 valve opened
2/13/2012	8:38:04 AM	Bubbler valve opened
2/13/2012	8:38:04 AM	Helium MFC set to  0.000000
2/13/2012	8:38:04 AM	H2 MFC set to  500.000000
2/13/2012	8:38:04 AM	BCl3 MFC set to  0.000000
2/13/2012	8:38:04 AM	PH3 MFC set to  0.000000
2/13/2012	8:38:04 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:38:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:38:04 AM	Tube furnace set to 900
2/13/2012	8:40:04 AM	Helium valve closed
2/13/2012	8:40:04 AM	BCl3 valve closed
2/13/2012	8:40:04 AM	PH3 valve closed
2/13/2012	8:40:04 AM	SiCl4 pre valve closed
2/13/2012	8:40:04 AM	SiCl4 post valve closed
2/13/2012	8:40:04 AM	Main Vac valve closed
2/13/2012	8:40:04 AM	Bypass valve closed
2/13/2012	8:40:04 AM	H2 valve opened
2/13/2012	8:40:04 AM	Bubbler valve opened
2/13/2012	8:40:04 AM	Helium MFC set to  0.000000
2/13/2012	8:40:04 AM	H2 MFC set to  500.000000
2/13/2012	8:40:04 AM	BCl3 MFC set to  0.000000
2/13/2012	8:40:04 AM	PH3 MFC set to  0.000000
2/13/2012	8:40:04 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:40:04 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:40:04 AM	Tube furnace set to 850
2/13/2012	8:41:15 AM	H2 valve closed
2/13/2012	8:41:15 AM	BCl3 valve closed
2/13/2012	8:41:15 AM	PH3 valve closed
2/13/2012	8:41:15 AM	SiCl4 pre valve closed
2/13/2012	8:41:15 AM	SiCl4 post valve closed
2/13/2012	8:41:15 AM	Main Vac valve closed
2/13/2012	8:41:15 AM	Bypass valve closed
2/13/2012	8:41:15 AM	Helium valve opened
2/13/2012	8:41:15 AM	Bubbler valve opened
2/13/2012	8:41:15 AM	Helium MFC set to  500.000000
2/13/2012	8:41:15 AM	H2 MFC set to  0.000000
2/13/2012	8:41:15 AM	BCl3 MFC set to  0.000000
2/13/2012	8:41:15 AM	PH3 MFC set to  0.000000
2/13/2012	8:41:15 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:41:15 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:41:16 AM	Tube furnace set to 800
2/13/2012	8:43:16 AM	H2 valve closed
2/13/2012	8:43:16 AM	BCl3 valve closed
2/13/2012	8:43:16 AM	PH3 valve closed
2/13/2012	8:43:16 AM	SiCl4 pre valve closed
2/13/2012	8:43:16 AM	SiCl4 post valve closed
2/13/2012	8:43:16 AM	Main Vac valve closed
2/13/2012	8:43:16 AM	Bypass valve closed
2/13/2012	8:43:16 AM	Helium valve opened
2/13/2012	8:43:16 AM	Bubbler valve opened
2/13/2012	8:43:16 AM	Helium MFC set to  500.000000
2/13/2012	8:43:16 AM	H2 MFC set to  0.000000
2/13/2012	8:43:16 AM	BCl3 MFC set to  0.000000
2/13/2012	8:43:16 AM	PH3 MFC set to  0.000000
2/13/2012	8:43:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:43:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:43:16 AM	Tube furnace set to 750
2/13/2012	8:45:16 AM	H2 valve closed
2/13/2012	8:45:16 AM	BCl3 valve closed
2/13/2012	8:45:16 AM	PH3 valve closed
2/13/2012	8:45:16 AM	SiCl4 pre valve closed
2/13/2012	8:45:16 AM	SiCl4 post valve closed
2/13/2012	8:45:16 AM	Main Vac valve closed
2/13/2012	8:45:16 AM	Bypass valve closed
2/13/2012	8:45:16 AM	Helium valve opened
2/13/2012	8:45:16 AM	Bubbler valve opened
2/13/2012	8:45:16 AM	Helium MFC set to  500.000000
2/13/2012	8:45:16 AM	H2 MFC set to  0.000000
2/13/2012	8:45:16 AM	BCl3 MFC set to  0.000000
2/13/2012	8:45:16 AM	PH3 MFC set to  0.000000
2/13/2012	8:45:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	8:45:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	8:45:16 AM	Tube furnace set to 0
2/13/2012	9:05:16 AM	Helium valve closed
2/13/2012	9:05:16 AM	H2 valve closed
2/13/2012	9:05:16 AM	BCl3 valve closed
2/13/2012	9:05:16 AM	PH3 valve closed
2/13/2012	9:05:16 AM	SiCl4 pre valve closed
2/13/2012	9:05:16 AM	SiCl4 post valve closed
2/13/2012	9:05:16 AM	Main Vac valve closed
2/13/2012	9:05:16 AM	Bypass valve closed
2/13/2012	9:05:16 AM	Bubbler valve closed
2/13/2012	9:05:16 AM	Helium MFC set to  0.000000
2/13/2012	9:05:16 AM	H2 MFC set to  0.000000
2/13/2012	9:05:16 AM	BCl3 MFC set to  0.000000
2/13/2012	9:05:16 AM	PH3 MFC set to  0.000000
2/13/2012	9:05:16 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:05:16 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:05:16 AM	Tube furnace set to 0
2/13/2012	9:05:17 AM	Run finished at 9:05 AM
2/13/2012	9:09:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	9:09:39 AM	Recipe started at 9:09 AM
2/13/2012	9:09:39 AM	Helium valve closed
2/13/2012	9:09:39 AM	H2 valve closed
2/13/2012	9:09:39 AM	BCl3 valve closed
2/13/2012	9:09:39 AM	PH3 valve closed
2/13/2012	9:09:39 AM	SiCl4 pre valve closed
2/13/2012	9:09:39 AM	SiCl4 post valve closed
2/13/2012	9:09:39 AM	Main Vac valve closed
2/13/2012	9:09:39 AM	Bypass valve closed
2/13/2012	9:09:39 AM	Bubbler valve closed
2/13/2012	9:09:39 AM	Helium MFC set to  0.000000
2/13/2012	9:09:39 AM	H2 MFC set to  0.000000
2/13/2012	9:09:39 AM	BCl3 MFC set to  0.000000
2/13/2012	9:09:39 AM	PH3 MFC set to  0.000000
2/13/2012	9:09:39 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:09:39 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:09:39 AM	Tube furnace set to 0
2/13/2012	9:09:42 AM	H2 valve closed
2/13/2012	9:09:42 AM	BCl3 valve closed
2/13/2012	9:09:42 AM	PH3 valve closed
2/13/2012	9:09:42 AM	SiCl4 pre valve closed
2/13/2012	9:09:42 AM	SiCl4 post valve closed
2/13/2012	9:09:42 AM	Main Vac valve closed
2/13/2012	9:09:42 AM	Bypass valve closed
2/13/2012	9:09:42 AM	Bubbler valve closed
2/13/2012	9:09:42 AM	Helium valve opened
2/13/2012	9:09:42 AM	Helium MFC set to  500.000000
2/13/2012	9:09:42 AM	H2 MFC set to  0.000000
2/13/2012	9:09:42 AM	BCl3 MFC set to  0.000000
2/13/2012	9:09:42 AM	PH3 MFC set to  0.000000
2/13/2012	9:09:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:09:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:09:42 AM	Tube furnace set to 0
2/13/2012	9:09:42 AM	Helium valve closed
2/13/2012	9:09:42 AM	H2 valve closed
2/13/2012	9:09:42 AM	BCl3 valve closed
2/13/2012	9:09:42 AM	PH3 valve closed
2/13/2012	9:09:42 AM	SiCl4 pre valve closed
2/13/2012	9:09:42 AM	SiCl4 post valve closed
2/13/2012	9:09:42 AM	Main Vac valve closed
2/13/2012	9:09:42 AM	Bypass valve closed
2/13/2012	9:09:42 AM	Bubbler valve closed
2/13/2012	9:09:42 AM	Helium MFC set to  0.000000
2/13/2012	9:09:42 AM	H2 MFC set to  0.000000
2/13/2012	9:09:42 AM	BCl3 MFC set to  0.000000
2/13/2012	9:09:42 AM	PH3 MFC set to  0.000000
2/13/2012	9:09:42 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:09:42 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:09:42 AM	Tube furnace set to 0
2/13/2012	9:09:43 AM	Run finished at 9:09 AM
2/13/2012	9:09:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	9:11:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	9:11:18 AM	Recipe started at 9:11 AM
2/13/2012	9:11:18 AM	Helium valve closed
2/13/2012	9:11:18 AM	H2 valve closed
2/13/2012	9:11:18 AM	BCl3 valve closed
2/13/2012	9:11:18 AM	PH3 valve closed
2/13/2012	9:11:18 AM	SiCl4 pre valve closed
2/13/2012	9:11:18 AM	SiCl4 post valve closed
2/13/2012	9:11:18 AM	Main Vac valve closed
2/13/2012	9:11:18 AM	Bubbler valve closed
2/13/2012	9:11:18 AM	Bypass valve opened
2/13/2012	9:11:18 AM	Helium MFC set to  0.000000
2/13/2012	9:11:18 AM	H2 MFC set to  0.000000
2/13/2012	9:11:18 AM	BCl3 MFC set to  0.000000
2/13/2012	9:11:18 AM	PH3 MFC set to  0.000000
2/13/2012	9:11:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:11:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:11:18 AM	Tube furnace set to 0
2/13/2012	9:12:17 AM	Helium valve closed
2/13/2012	9:12:17 AM	H2 valve closed
2/13/2012	9:12:17 AM	BCl3 valve closed
2/13/2012	9:12:17 AM	PH3 valve closed
2/13/2012	9:12:17 AM	SiCl4 pre valve closed
2/13/2012	9:12:17 AM	SiCl4 post valve closed
2/13/2012	9:12:17 AM	Main Vac valve closed
2/13/2012	9:12:17 AM	Bubbler valve closed
2/13/2012	9:12:17 AM	Bypass valve opened
2/13/2012	9:12:17 AM	Helium MFC set to  0.000000
2/13/2012	9:12:17 AM	H2 MFC set to  0.000000
2/13/2012	9:12:17 AM	BCl3 MFC set to  0.000000
2/13/2012	9:12:17 AM	PH3 MFC set to  0.000000
2/13/2012	9:12:17 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:12:17 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:12:17 AM	Tube furnace set to 0
2/13/2012	9:13:17 AM	Helium valve closed
2/13/2012	9:13:17 AM	H2 valve closed
2/13/2012	9:13:17 AM	BCl3 valve closed
2/13/2012	9:13:17 AM	PH3 valve closed
2/13/2012	9:13:17 AM	SiCl4 pre valve closed
2/13/2012	9:13:17 AM	SiCl4 post valve closed
2/13/2012	9:13:17 AM	Bypass valve closed
2/13/2012	9:13:17 AM	Bubbler valve closed
2/13/2012	9:13:17 AM	Main Vac valve opened
2/13/2012	9:13:17 AM	Helium MFC set to  0.000000
2/13/2012	9:13:17 AM	H2 MFC set to  0.000000
2/13/2012	9:13:17 AM	BCl3 MFC set to  0.000000
2/13/2012	9:13:17 AM	PH3 MFC set to  0.000000
2/13/2012	9:13:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:13:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:13:18 AM	Tube furnace set to 0
2/13/2012	9:13:19 AM	Run finished at 9:13 AM
2/13/2012	9:13:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	9:31:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	9:31:18 AM	Recipe started at 9:31 AM
2/13/2012	9:31:18 AM	Helium valve closed
2/13/2012	9:31:18 AM	H2 valve closed
2/13/2012	9:31:18 AM	BCl3 valve closed
2/13/2012	9:31:18 AM	PH3 valve closed
2/13/2012	9:31:18 AM	SiCl4 pre valve closed
2/13/2012	9:31:18 AM	SiCl4 post valve closed
2/13/2012	9:31:18 AM	Main Vac valve closed
2/13/2012	9:31:18 AM	Bypass valve closed
2/13/2012	9:31:18 AM	Bubbler valve closed
2/13/2012	9:31:18 AM	Helium MFC set to  0.000000
2/13/2012	9:31:18 AM	H2 MFC set to  0.000000
2/13/2012	9:31:18 AM	BCl3 MFC set to  0.000000
2/13/2012	9:31:18 AM	PH3 MFC set to  0.000000
2/13/2012	9:31:18 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:31:18 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:31:18 AM	Tube furnace set to 0
2/13/2012	9:31:21 AM	H2 valve closed
2/13/2012	9:31:21 AM	BCl3 valve closed
2/13/2012	9:31:21 AM	PH3 valve closed
2/13/2012	9:31:21 AM	SiCl4 pre valve closed
2/13/2012	9:31:21 AM	SiCl4 post valve closed
2/13/2012	9:31:21 AM	Main Vac valve closed
2/13/2012	9:31:21 AM	Bypass valve closed
2/13/2012	9:31:21 AM	Bubbler valve closed
2/13/2012	9:31:21 AM	Helium valve opened
2/13/2012	9:31:21 AM	Helium MFC set to  500.000000
2/13/2012	9:31:21 AM	H2 MFC set to  0.000000
2/13/2012	9:31:21 AM	BCl3 MFC set to  0.000000
2/13/2012	9:31:21 AM	PH3 MFC set to  0.000000
2/13/2012	9:31:21 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:31:21 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:31:22 AM	Tube furnace set to 0
2/13/2012	9:32:22 AM	Helium valve closed
2/13/2012	9:32:22 AM	H2 valve closed
2/13/2012	9:32:22 AM	BCl3 valve closed
2/13/2012	9:32:22 AM	PH3 valve closed
2/13/2012	9:32:22 AM	SiCl4 pre valve closed
2/13/2012	9:32:22 AM	SiCl4 post valve closed
2/13/2012	9:32:22 AM	Main Vac valve closed
2/13/2012	9:32:22 AM	Bypass valve closed
2/13/2012	9:32:22 AM	Bubbler valve closed
2/13/2012	9:32:22 AM	Helium MFC set to  0.000000
2/13/2012	9:32:22 AM	H2 MFC set to  0.000000
2/13/2012	9:32:22 AM	BCl3 MFC set to  0.000000
2/13/2012	9:32:22 AM	PH3 MFC set to  0.000000
2/13/2012	9:32:22 AM	SiCl4 MFC set to  0.000000
2/13/2012	9:32:22 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:32:23 AM	Tube furnace set to 0
2/13/2012	9:32:24 AM	Run finished at 9:32 AM
2/13/2012	9:32:24 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	10:10:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	10:10:37 AM	Recipe started at 10:10 AM
2/13/2012	10:10:37 AM	Helium valve closed
2/13/2012	10:10:38 AM	H2 valve closed
2/13/2012	10:10:38 AM	BCl3 valve closed
2/13/2012	10:10:38 AM	PH3 valve closed
2/13/2012	10:10:38 AM	SiCl4 pre valve closed
2/13/2012	10:10:38 AM	SiCl4 post valve closed
2/13/2012	10:10:38 AM	Main Vac valve closed
2/13/2012	10:10:38 AM	Bubbler valve closed
2/13/2012	10:10:38 AM	Bypass valve opened
2/13/2012	10:10:38 AM	Helium MFC set to  0.000000
2/13/2012	10:10:38 AM	H2 MFC set to  0.000000
2/13/2012	10:10:38 AM	BCl3 MFC set to  0.000000
2/13/2012	10:10:38 AM	PH3 MFC set to  0.000000
2/13/2012	10:10:38 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:10:38 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:10:38 AM	Tube furnace set to 0
2/13/2012	10:11:50 AM	Helium valve closed
2/13/2012	10:11:50 AM	H2 valve closed
2/13/2012	10:11:50 AM	BCl3 valve closed
2/13/2012	10:11:50 AM	PH3 valve closed
2/13/2012	10:11:50 AM	SiCl4 pre valve closed
2/13/2012	10:11:50 AM	SiCl4 post valve closed
2/13/2012	10:11:50 AM	Main Vac valve closed
2/13/2012	10:11:50 AM	Bubbler valve closed
2/13/2012	10:11:50 AM	Bypass valve opened
2/13/2012	10:11:50 AM	Helium MFC set to  0.000000
2/13/2012	10:11:50 AM	H2 MFC set to  0.000000
2/13/2012	10:11:50 AM	BCl3 MFC set to  0.000000
2/13/2012	10:11:50 AM	PH3 MFC set to  0.000000
2/13/2012	10:11:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:11:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:11:51 AM	Tube furnace set to 0
2/13/2012	10:12:51 AM	Helium valve closed
2/13/2012	10:12:51 AM	H2 valve closed
2/13/2012	10:12:51 AM	BCl3 valve closed
2/13/2012	10:12:51 AM	PH3 valve closed
2/13/2012	10:12:51 AM	SiCl4 pre valve closed
2/13/2012	10:12:51 AM	SiCl4 post valve closed
2/13/2012	10:12:51 AM	Bypass valve closed
2/13/2012	10:12:51 AM	Bubbler valve closed
2/13/2012	10:12:51 AM	Main Vac valve opened
2/13/2012	10:12:51 AM	Helium MFC set to  0.000000
2/13/2012	10:12:51 AM	H2 MFC set to  0.000000
2/13/2012	10:12:51 AM	BCl3 MFC set to  0.000000
2/13/2012	10:12:51 AM	PH3 MFC set to  0.000000
2/13/2012	10:12:51 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:12:51 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:12:51 AM	Tube furnace set to 0
2/13/2012	10:12:52 AM	Run finished at 10:12 AM
2/13/2012	10:12:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	10:13:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/13/2012	10:13:28 AM	Recipe started at 10:13 AM
2/13/2012	10:13:28 AM	Helium valve closed
2/13/2012	10:13:28 AM	H2 valve closed
2/13/2012	10:13:28 AM	BCl3 valve closed
2/13/2012	10:13:28 AM	PH3 valve closed
2/13/2012	10:13:28 AM	SiCl4 pre valve closed
2/13/2012	10:13:28 AM	SiCl4 post valve closed
2/13/2012	10:13:28 AM	Main Vac valve closed
2/13/2012	10:13:28 AM	Bubbler valve closed
2/13/2012	10:13:28 AM	Bypass valve opened
2/13/2012	10:13:28 AM	Helium MFC set to  0.000000
2/13/2012	10:13:28 AM	H2 MFC set to  0.000000
2/13/2012	10:13:28 AM	BCl3 MFC set to  0.000000
2/13/2012	10:13:28 AM	PH3 MFC set to  0.000000
2/13/2012	10:13:28 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:13:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:13:28 AM	Tube furnace set to 0
2/13/2012	10:13:28 AM	Helium valve closed
2/13/2012	10:13:28 AM	H2 valve closed
2/13/2012	10:13:28 AM	BCl3 valve closed
2/13/2012	10:13:28 AM	PH3 valve closed
2/13/2012	10:13:28 AM	SiCl4 pre valve closed
2/13/2012	10:13:28 AM	SiCl4 post valve closed
2/13/2012	10:13:28 AM	Main Vac valve closed
2/13/2012	10:13:28 AM	Bubbler valve closed
2/13/2012	10:13:28 AM	Bypass valve opened
2/13/2012	10:13:28 AM	Helium MFC set to  0.000000
2/13/2012	10:13:28 AM	H2 MFC set to  0.000000
2/13/2012	10:13:28 AM	BCl3 MFC set to  0.000000
2/13/2012	10:13:28 AM	PH3 MFC set to  0.000000
2/13/2012	10:13:28 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:13:28 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:13:28 AM	Tube furnace set to 0
2/13/2012	10:13:45 AM	Helium valve closed
2/13/2012	10:13:45 AM	H2 valve closed
2/13/2012	10:13:45 AM	BCl3 valve closed
2/13/2012	10:13:45 AM	PH3 valve closed
2/13/2012	10:13:45 AM	SiCl4 pre valve closed
2/13/2012	10:13:45 AM	SiCl4 post valve closed
2/13/2012	10:13:45 AM	Bypass valve closed
2/13/2012	10:13:45 AM	Bubbler valve closed
2/13/2012	10:13:45 AM	Main Vac valve opened
2/13/2012	10:13:45 AM	Helium MFC set to  0.000000
2/13/2012	10:13:45 AM	H2 MFC set to  0.000000
2/13/2012	10:13:45 AM	BCl3 MFC set to  0.000000
2/13/2012	10:13:45 AM	PH3 MFC set to  0.000000
2/13/2012	10:13:45 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:13:45 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:13:45 AM	Tube furnace set to 0
2/13/2012	10:14:09 AM	H2 valve closed
2/13/2012	10:14:09 AM	BCl3 valve closed
2/13/2012	10:14:09 AM	PH3 valve closed
2/13/2012	10:14:09 AM	SiCl4 pre valve closed
2/13/2012	10:14:09 AM	SiCl4 post valve closed
2/13/2012	10:14:09 AM	Bypass valve closed
2/13/2012	10:14:09 AM	Bubbler valve closed
2/13/2012	10:14:09 AM	Helium valve opened
2/13/2012	10:14:09 AM	Main Vac valve opened
2/13/2012	10:14:09 AM	Helium MFC set to  20.000000
2/13/2012	10:14:09 AM	H2 MFC set to  0.000000
2/13/2012	10:14:09 AM	BCl3 MFC set to  0.000000
2/13/2012	10:14:09 AM	PH3 MFC set to  0.000000
2/13/2012	10:14:09 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:14:09 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:14:09 AM	Tube furnace set to 0
2/13/2012	10:14:20 AM	Helium valve closed
2/13/2012	10:14:20 AM	H2 valve closed
2/13/2012	10:14:20 AM	BCl3 valve closed
2/13/2012	10:14:20 AM	PH3 valve closed
2/13/2012	10:14:20 AM	SiCl4 pre valve closed
2/13/2012	10:14:20 AM	SiCl4 post valve closed
2/13/2012	10:14:20 AM	Bypass valve closed
2/13/2012	10:14:20 AM	Bubbler valve closed
2/13/2012	10:14:20 AM	Main Vac valve opened
2/13/2012	10:14:20 AM	Helium MFC set to  0.000000
2/13/2012	10:14:20 AM	H2 MFC set to  0.000000
2/13/2012	10:14:20 AM	BCl3 MFC set to  0.000000
2/13/2012	10:14:20 AM	PH3 MFC set to  0.000000
2/13/2012	10:14:20 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:14:20 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:14:20 AM	Tube furnace set to 0
2/13/2012	10:14:38 AM	Run aborted at 10:14 AM
2/13/2012	10:14:38 AM	Helium valve closed
2/13/2012	10:14:38 AM	H2 valve closed
2/13/2012	10:14:38 AM	BCl3 valve closed
2/13/2012	10:14:38 AM	PH3 valve closed
2/13/2012	10:14:38 AM	SiCl4 pre valve closed
2/13/2012	10:14:38 AM	SiCl4 post valve closed
2/13/2012	10:14:38 AM	Bypass valve closed
2/13/2012	10:14:38 AM	Main Vac valve closed
2/13/2012	10:14:38 AM	Bubbler valve closed
2/13/2012	10:14:38 AM	Helium MFC set to  0.000000
2/13/2012	10:14:38 AM	H2 MFC set to  0.000000
2/13/2012	10:14:38 AM	BCl3 MFC set to  0.000000
2/13/2012	10:14:38 AM	PH3 MFC set to  0.000000
2/13/2012	10:14:38 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:14:39 AM	Tube furnace set to 0
2/13/2012	10:14:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/13/2012	10:14:40 AM	Main Vac valve opened
2/13/2012	10:18:53 AM	Recipe started at 10:18 AM
2/13/2012	10:18:53 AM	Helium valve closed
2/13/2012	10:18:53 AM	H2 valve closed
2/13/2012	10:18:53 AM	BCl3 valve closed
2/13/2012	10:18:53 AM	PH3 valve closed
2/13/2012	10:18:53 AM	SiCl4 pre valve closed
2/13/2012	10:18:53 AM	SiCl4 post valve closed
2/13/2012	10:18:53 AM	Bypass valve closed
2/13/2012	10:18:53 AM	Bubbler valve closed
2/13/2012	10:18:53 AM	Main Vac valve opened
2/13/2012	10:18:53 AM	Helium MFC set to  0.000000
2/13/2012	10:18:53 AM	H2 MFC set to  0.000000
2/13/2012	10:18:53 AM	BCl3 MFC set to  0.000000
2/13/2012	10:18:53 AM	PH3 MFC set to  0.000000
2/13/2012	10:18:53 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:18:53 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:18:53 AM	Tube furnace set to 150
2/13/2012	10:19:23 AM	H2 valve closed
2/13/2012	10:19:23 AM	BCl3 valve closed
2/13/2012	10:19:23 AM	PH3 valve closed
2/13/2012	10:19:23 AM	SiCl4 pre valve closed
2/13/2012	10:19:23 AM	SiCl4 post valve closed
2/13/2012	10:19:23 AM	Bypass valve closed
2/13/2012	10:19:23 AM	Bubbler valve closed
2/13/2012	10:19:23 AM	Helium valve opened
2/13/2012	10:19:23 AM	Main Vac valve opened
2/13/2012	10:19:23 AM	Helium MFC set to  20.000000
2/13/2012	10:19:23 AM	H2 MFC set to  0.000000
2/13/2012	10:19:23 AM	BCl3 MFC set to  0.000000
2/13/2012	10:19:23 AM	PH3 MFC set to  0.000000
2/13/2012	10:19:23 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:19:23 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:19:24 AM	Tube furnace set to 150
2/13/2012	10:19:54 AM	Helium valve closed
2/13/2012	10:19:54 AM	H2 valve closed
2/13/2012	10:19:54 AM	BCl3 valve closed
2/13/2012	10:19:54 AM	PH3 valve closed
2/13/2012	10:19:54 AM	SiCl4 pre valve closed
2/13/2012	10:19:54 AM	SiCl4 post valve closed
2/13/2012	10:19:54 AM	Bypass valve closed
2/13/2012	10:19:54 AM	Bubbler valve closed
2/13/2012	10:19:54 AM	Main Vac valve opened
2/13/2012	10:19:54 AM	Helium MFC set to  0.000000
2/13/2012	10:19:54 AM	H2 MFC set to  0.000000
2/13/2012	10:19:54 AM	BCl3 MFC set to  0.000000
2/13/2012	10:19:54 AM	PH3 MFC set to  0.000000
2/13/2012	10:19:54 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:19:54 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:19:54 AM	Tube furnace set to 150
2/13/2012	10:20:24 AM	H2 valve closed
2/13/2012	10:20:24 AM	BCl3 valve closed
2/13/2012	10:20:24 AM	PH3 valve closed
2/13/2012	10:20:24 AM	SiCl4 pre valve closed
2/13/2012	10:20:24 AM	SiCl4 post valve closed
2/13/2012	10:20:24 AM	Bypass valve closed
2/13/2012	10:20:24 AM	Bubbler valve closed
2/13/2012	10:20:24 AM	Helium valve opened
2/13/2012	10:20:24 AM	Main Vac valve opened
2/13/2012	10:20:24 AM	Helium MFC set to  20.000000
2/13/2012	10:20:24 AM	H2 MFC set to  0.000000
2/13/2012	10:20:24 AM	BCl3 MFC set to  0.000000
2/13/2012	10:20:24 AM	PH3 MFC set to  0.000000
2/13/2012	10:20:24 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:20:24 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:20:24 AM	Tube furnace set to 150
2/13/2012	10:20:54 AM	Helium valve closed
2/13/2012	10:20:54 AM	H2 valve closed
2/13/2012	10:20:54 AM	BCl3 valve closed
2/13/2012	10:20:54 AM	PH3 valve closed
2/13/2012	10:20:54 AM	SiCl4 pre valve closed
2/13/2012	10:20:54 AM	SiCl4 post valve closed
2/13/2012	10:20:54 AM	Bypass valve closed
2/13/2012	10:20:54 AM	Bubbler valve closed
2/13/2012	10:20:54 AM	Main Vac valve opened
2/13/2012	10:20:54 AM	Helium MFC set to  0.000000
2/13/2012	10:20:54 AM	H2 MFC set to  0.000000
2/13/2012	10:20:54 AM	BCl3 MFC set to  0.000000
2/13/2012	10:20:54 AM	PH3 MFC set to  0.000000
2/13/2012	10:20:54 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:20:54 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:20:54 AM	Tube furnace set to 150
2/13/2012	10:21:24 AM	H2 valve closed
2/13/2012	10:21:24 AM	BCl3 valve closed
2/13/2012	10:21:24 AM	PH3 valve closed
2/13/2012	10:21:24 AM	SiCl4 pre valve closed
2/13/2012	10:21:24 AM	SiCl4 post valve closed
2/13/2012	10:21:24 AM	Bypass valve closed
2/13/2012	10:21:24 AM	Bubbler valve closed
2/13/2012	10:21:24 AM	Helium valve opened
2/13/2012	10:21:24 AM	Main Vac valve opened
2/13/2012	10:21:24 AM	Helium MFC set to  20.000000
2/13/2012	10:21:24 AM	H2 MFC set to  0.000000
2/13/2012	10:21:24 AM	BCl3 MFC set to  0.000000
2/13/2012	10:21:24 AM	PH3 MFC set to  0.000000
2/13/2012	10:21:24 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:21:24 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:21:24 AM	Tube furnace set to 150
2/13/2012	10:21:54 AM	Helium valve closed
2/13/2012	10:21:54 AM	H2 valve closed
2/13/2012	10:21:54 AM	BCl3 valve closed
2/13/2012	10:21:54 AM	PH3 valve closed
2/13/2012	10:21:54 AM	SiCl4 pre valve closed
2/13/2012	10:21:54 AM	SiCl4 post valve closed
2/13/2012	10:21:55 AM	Bypass valve closed
2/13/2012	10:21:55 AM	Bubbler valve closed
2/13/2012	10:21:55 AM	Main Vac valve opened
2/13/2012	10:21:55 AM	Helium MFC set to  0.000000
2/13/2012	10:21:55 AM	H2 MFC set to  0.000000
2/13/2012	10:21:55 AM	BCl3 MFC set to  0.000000
2/13/2012	10:21:55 AM	PH3 MFC set to  0.000000
2/13/2012	10:21:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:21:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:21:55 AM	Tube furnace set to 150
2/13/2012	10:22:25 AM	H2 valve closed
2/13/2012	10:22:25 AM	BCl3 valve closed
2/13/2012	10:22:25 AM	PH3 valve closed
2/13/2012	10:22:25 AM	SiCl4 pre valve closed
2/13/2012	10:22:25 AM	SiCl4 post valve closed
2/13/2012	10:22:25 AM	Bypass valve closed
2/13/2012	10:22:25 AM	Bubbler valve closed
2/13/2012	10:22:25 AM	Helium valve opened
2/13/2012	10:22:25 AM	Main Vac valve opened
2/13/2012	10:22:25 AM	Helium MFC set to  20.000000
2/13/2012	10:22:25 AM	H2 MFC set to  0.000000
2/13/2012	10:22:25 AM	BCl3 MFC set to  0.000000
2/13/2012	10:22:25 AM	PH3 MFC set to  0.000000
2/13/2012	10:22:25 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:22:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:22:25 AM	Tube furnace set to 150
2/13/2012	10:22:55 AM	Helium valve closed
2/13/2012	10:22:55 AM	H2 valve closed
2/13/2012	10:22:55 AM	BCl3 valve closed
2/13/2012	10:22:55 AM	PH3 valve closed
2/13/2012	10:22:55 AM	SiCl4 pre valve closed
2/13/2012	10:22:55 AM	SiCl4 post valve closed
2/13/2012	10:22:55 AM	Bypass valve closed
2/13/2012	10:22:55 AM	Bubbler valve closed
2/13/2012	10:22:55 AM	Main Vac valve opened
2/13/2012	10:22:55 AM	Helium MFC set to  0.000000
2/13/2012	10:22:55 AM	H2 MFC set to  0.000000
2/13/2012	10:22:55 AM	BCl3 MFC set to  0.000000
2/13/2012	10:22:55 AM	PH3 MFC set to  0.000000
2/13/2012	10:22:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:22:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:22:55 AM	Tube furnace set to 150
2/13/2012	10:23:25 AM	H2 valve closed
2/13/2012	10:23:25 AM	BCl3 valve closed
2/13/2012	10:23:25 AM	PH3 valve closed
2/13/2012	10:23:25 AM	SiCl4 pre valve closed
2/13/2012	10:23:25 AM	SiCl4 post valve closed
2/13/2012	10:23:25 AM	Bypass valve closed
2/13/2012	10:23:25 AM	Bubbler valve closed
2/13/2012	10:23:25 AM	Helium valve opened
2/13/2012	10:23:25 AM	Main Vac valve opened
2/13/2012	10:23:25 AM	Helium MFC set to  20.000000
2/13/2012	10:23:25 AM	H2 MFC set to  0.000000
2/13/2012	10:23:25 AM	BCl3 MFC set to  0.000000
2/13/2012	10:23:25 AM	PH3 MFC set to  0.000000
2/13/2012	10:23:25 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:23:25 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:23:25 AM	Tube furnace set to 150
2/13/2012	10:23:55 AM	Helium valve closed
2/13/2012	10:23:55 AM	H2 valve closed
2/13/2012	10:23:55 AM	BCl3 valve closed
2/13/2012	10:23:55 AM	PH3 valve closed
2/13/2012	10:23:55 AM	SiCl4 pre valve closed
2/13/2012	10:23:55 AM	SiCl4 post valve closed
2/13/2012	10:23:55 AM	Bypass valve closed
2/13/2012	10:23:55 AM	Bubbler valve closed
2/13/2012	10:23:55 AM	Main Vac valve opened
2/13/2012	10:23:55 AM	Helium MFC set to  0.000000
2/13/2012	10:23:55 AM	H2 MFC set to  0.000000
2/13/2012	10:23:55 AM	BCl3 MFC set to  0.000000
2/13/2012	10:23:55 AM	PH3 MFC set to  0.000000
2/13/2012	10:23:55 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:23:55 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:23:55 AM	Tube furnace set to 150
2/13/2012	10:24:26 AM	H2 valve closed
2/13/2012	10:24:26 AM	BCl3 valve closed
2/13/2012	10:24:26 AM	PH3 valve closed
2/13/2012	10:24:26 AM	SiCl4 pre valve closed
2/13/2012	10:24:26 AM	SiCl4 post valve closed
2/13/2012	10:24:26 AM	Bypass valve closed
2/13/2012	10:24:26 AM	Bubbler valve closed
2/13/2012	10:24:26 AM	Helium valve opened
2/13/2012	10:24:26 AM	Main Vac valve opened
2/13/2012	10:24:26 AM	Helium MFC set to  20.000000
2/13/2012	10:24:26 AM	H2 MFC set to  0.000000
2/13/2012	10:24:26 AM	BCl3 MFC set to  0.000000
2/13/2012	10:24:26 AM	PH3 MFC set to  0.000000
2/13/2012	10:24:26 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:24:26 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:24:26 AM	Tube furnace set to 150
2/13/2012	10:24:52 AM	Helium valve closed
2/13/2012	10:24:52 AM	H2 valve closed
2/13/2012	10:24:52 AM	BCl3 valve closed
2/13/2012	10:24:52 AM	PH3 valve closed
2/13/2012	10:24:52 AM	SiCl4 pre valve closed
2/13/2012	10:24:52 AM	SiCl4 post valve closed
2/13/2012	10:24:52 AM	Bypass valve closed
2/13/2012	10:24:52 AM	Bubbler valve closed
2/13/2012	10:24:52 AM	Main Vac valve opened
2/13/2012	10:24:52 AM	Helium MFC set to  0.000000
2/13/2012	10:24:52 AM	H2 MFC set to  0.000000
2/13/2012	10:24:52 AM	BCl3 MFC set to  0.000000
2/13/2012	10:24:52 AM	PH3 MFC set to  0.000000
2/13/2012	10:24:53 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:24:53 AM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:24:53 AM	Tube furnace set to 150
2/13/2012	10:24:57 AM	Run aborted at 10:24 AM
2/13/2012	10:24:57 AM	Helium valve closed
2/13/2012	10:24:57 AM	H2 valve closed
2/13/2012	10:24:57 AM	BCl3 valve closed
2/13/2012	10:24:57 AM	PH3 valve closed
2/13/2012	10:24:57 AM	SiCl4 pre valve closed
2/13/2012	10:24:57 AM	SiCl4 post valve closed
2/13/2012	10:24:57 AM	Bypass valve closed
2/13/2012	10:24:57 AM	Main Vac valve closed
2/13/2012	10:24:57 AM	Bubbler valve closed
2/13/2012	10:24:57 AM	Helium MFC set to  0.000000
2/13/2012	10:24:57 AM	H2 MFC set to  0.000000
2/13/2012	10:24:57 AM	BCl3 MFC set to  0.000000
2/13/2012	10:24:57 AM	PH3 MFC set to  0.000000
2/13/2012	10:24:57 AM	SiCl4 MFC set to  0.000000
2/13/2012	10:24:57 AM	Tube furnace set to 0
2/13/2012	10:24:58 AM	Main Vac valve opened
2/13/2012	10:25:00 AM	Tube furnace set to 150
2/13/2012	10:30:40 AM	Main Vac valve closed
2/13/2012	10:31:09 AM	Main Vac valve opened
2/13/2012	10:36:33 AM	Main Vac valve closed
2/13/2012	10:38:08 AM	Main Vac valve opened
2/13/2012	11:12:51 AM	Main Vac valve closed
2/13/2012	11:13:02 AM	Main Vac valve opened
2/13/2012	1:27:50 PM	Main Vac valve closed
2/13/2012	1:28:08 PM	Main Vac valve opened
2/13/2012	1:28:28 PM	Recipe started at 1:28 PM
2/13/2012	1:28:28 PM	Helium valve closed
2/13/2012	1:28:28 PM	H2 valve closed
2/13/2012	1:28:28 PM	BCl3 valve closed
2/13/2012	1:28:28 PM	PH3 valve closed
2/13/2012	1:28:28 PM	SiCl4 pre valve closed
2/13/2012	1:28:28 PM	SiCl4 post valve closed
2/13/2012	1:28:28 PM	Bypass valve closed
2/13/2012	1:28:28 PM	Bubbler valve closed
2/13/2012	1:28:28 PM	Main Vac valve opened
2/13/2012	1:28:28 PM	Helium MFC set to  0.000000
2/13/2012	1:28:28 PM	H2 MFC set to  0.000000
2/13/2012	1:28:28 PM	BCl3 MFC set to  0.000000
2/13/2012	1:28:28 PM	PH3 MFC set to  0.000000
2/13/2012	1:28:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:28:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:28:29 PM	Tube furnace set to 150
2/13/2012	1:28:29 PM	H2 valve closed
2/13/2012	1:28:29 PM	BCl3 valve closed
2/13/2012	1:28:29 PM	PH3 valve closed
2/13/2012	1:28:29 PM	SiCl4 pre valve closed
2/13/2012	1:28:29 PM	SiCl4 post valve closed
2/13/2012	1:28:29 PM	Bypass valve closed
2/13/2012	1:28:29 PM	Bubbler valve closed
2/13/2012	1:28:29 PM	Helium valve opened
2/13/2012	1:28:29 PM	Main Vac valve opened
2/13/2012	1:28:29 PM	Helium MFC set to  20.000000
2/13/2012	1:28:29 PM	H2 MFC set to  0.000000
2/13/2012	1:28:29 PM	BCl3 MFC set to  0.000000
2/13/2012	1:28:29 PM	PH3 MFC set to  0.000000
2/13/2012	1:28:29 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:28:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:28:29 PM	Tube furnace set to 150
2/13/2012	1:28:59 PM	Helium valve closed
2/13/2012	1:28:59 PM	H2 valve closed
2/13/2012	1:28:59 PM	BCl3 valve closed
2/13/2012	1:28:59 PM	PH3 valve closed
2/13/2012	1:28:59 PM	SiCl4 pre valve closed
2/13/2012	1:28:59 PM	SiCl4 post valve closed
2/13/2012	1:28:59 PM	Bypass valve closed
2/13/2012	1:28:59 PM	Bubbler valve closed
2/13/2012	1:28:59 PM	Main Vac valve opened
2/13/2012	1:28:59 PM	Helium MFC set to  0.000000
2/13/2012	1:28:59 PM	H2 MFC set to  0.000000
2/13/2012	1:28:59 PM	BCl3 MFC set to  0.000000
2/13/2012	1:28:59 PM	PH3 MFC set to  0.000000
2/13/2012	1:28:59 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:28:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:28:59 PM	Tube furnace set to 150
2/13/2012	1:29:29 PM	H2 valve closed
2/13/2012	1:29:29 PM	BCl3 valve closed
2/13/2012	1:29:29 PM	PH3 valve closed
2/13/2012	1:29:29 PM	SiCl4 pre valve closed
2/13/2012	1:29:29 PM	SiCl4 post valve closed
2/13/2012	1:29:29 PM	Bypass valve closed
2/13/2012	1:29:29 PM	Bubbler valve closed
2/13/2012	1:29:29 PM	Helium valve opened
2/13/2012	1:29:29 PM	Main Vac valve opened
2/13/2012	1:29:29 PM	Helium MFC set to  20.000000
2/13/2012	1:29:29 PM	H2 MFC set to  0.000000
2/13/2012	1:29:29 PM	BCl3 MFC set to  0.000000
2/13/2012	1:29:29 PM	PH3 MFC set to  0.000000
2/13/2012	1:29:29 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:29:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:29:29 PM	Tube furnace set to 150
2/13/2012	1:29:59 PM	Helium valve closed
2/13/2012	1:29:59 PM	H2 valve closed
2/13/2012	1:29:59 PM	BCl3 valve closed
2/13/2012	1:29:59 PM	PH3 valve closed
2/13/2012	1:29:59 PM	SiCl4 pre valve closed
2/13/2012	1:29:59 PM	SiCl4 post valve closed
2/13/2012	1:29:59 PM	Bypass valve closed
2/13/2012	1:29:59 PM	Bubbler valve closed
2/13/2012	1:29:59 PM	Main Vac valve opened
2/13/2012	1:29:59 PM	Helium MFC set to  0.000000
2/13/2012	1:29:59 PM	H2 MFC set to  0.000000
2/13/2012	1:29:59 PM	BCl3 MFC set to  0.000000
2/13/2012	1:29:59 PM	PH3 MFC set to  0.000000
2/13/2012	1:29:59 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:29:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:30:00 PM	Tube furnace set to 150
2/13/2012	1:30:30 PM	H2 valve closed
2/13/2012	1:30:30 PM	BCl3 valve closed
2/13/2012	1:30:30 PM	PH3 valve closed
2/13/2012	1:30:30 PM	SiCl4 pre valve closed
2/13/2012	1:30:30 PM	SiCl4 post valve closed
2/13/2012	1:30:30 PM	Bypass valve closed
2/13/2012	1:30:30 PM	Bubbler valve closed
2/13/2012	1:30:30 PM	Helium valve opened
2/13/2012	1:30:30 PM	Main Vac valve opened
2/13/2012	1:30:30 PM	Helium MFC set to  20.000000
2/13/2012	1:30:30 PM	H2 MFC set to  0.000000
2/13/2012	1:30:30 PM	BCl3 MFC set to  0.000000
2/13/2012	1:30:30 PM	PH3 MFC set to  0.000000
2/13/2012	1:30:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:30:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:30:30 PM	Tube furnace set to 150
2/13/2012	1:31:00 PM	Helium valve closed
2/13/2012	1:31:00 PM	H2 valve closed
2/13/2012	1:31:00 PM	BCl3 valve closed
2/13/2012	1:31:00 PM	PH3 valve closed
2/13/2012	1:31:00 PM	SiCl4 pre valve closed
2/13/2012	1:31:00 PM	SiCl4 post valve closed
2/13/2012	1:31:00 PM	Bypass valve closed
2/13/2012	1:31:00 PM	Bubbler valve closed
2/13/2012	1:31:00 PM	Main Vac valve opened
2/13/2012	1:31:00 PM	Helium MFC set to  0.000000
2/13/2012	1:31:00 PM	H2 MFC set to  0.000000
2/13/2012	1:31:00 PM	BCl3 MFC set to  0.000000
2/13/2012	1:31:00 PM	PH3 MFC set to  0.000000
2/13/2012	1:31:00 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:31:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:31:00 PM	Tube furnace set to 150
2/13/2012	1:31:30 PM	H2 valve closed
2/13/2012	1:31:30 PM	BCl3 valve closed
2/13/2012	1:31:30 PM	PH3 valve closed
2/13/2012	1:31:30 PM	SiCl4 pre valve closed
2/13/2012	1:31:30 PM	SiCl4 post valve closed
2/13/2012	1:31:30 PM	Bypass valve closed
2/13/2012	1:31:30 PM	Bubbler valve closed
2/13/2012	1:31:30 PM	Helium valve opened
2/13/2012	1:31:30 PM	Main Vac valve opened
2/13/2012	1:31:30 PM	Helium MFC set to  20.000000
2/13/2012	1:31:30 PM	H2 MFC set to  0.000000
2/13/2012	1:31:30 PM	BCl3 MFC set to  0.000000
2/13/2012	1:31:30 PM	PH3 MFC set to  0.000000
2/13/2012	1:31:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:31:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:31:30 PM	Tube furnace set to 150
2/13/2012	1:32:00 PM	Helium valve closed
2/13/2012	1:32:00 PM	H2 valve closed
2/13/2012	1:32:00 PM	BCl3 valve closed
2/13/2012	1:32:00 PM	PH3 valve closed
2/13/2012	1:32:00 PM	SiCl4 pre valve closed
2/13/2012	1:32:00 PM	SiCl4 post valve closed
2/13/2012	1:32:00 PM	Bypass valve closed
2/13/2012	1:32:00 PM	Bubbler valve closed
2/13/2012	1:32:00 PM	Main Vac valve opened
2/13/2012	1:32:00 PM	Helium MFC set to  0.000000
2/13/2012	1:32:00 PM	H2 MFC set to  0.000000
2/13/2012	1:32:00 PM	BCl3 MFC set to  0.000000
2/13/2012	1:32:00 PM	PH3 MFC set to  0.000000
2/13/2012	1:32:00 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:32:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:32:01 PM	Tube furnace set to 150
2/13/2012	1:32:31 PM	H2 valve closed
2/13/2012	1:32:31 PM	BCl3 valve closed
2/13/2012	1:32:31 PM	PH3 valve closed
2/13/2012	1:32:31 PM	SiCl4 pre valve closed
2/13/2012	1:32:31 PM	SiCl4 post valve closed
2/13/2012	1:32:31 PM	Bypass valve closed
2/13/2012	1:32:31 PM	Bubbler valve closed
2/13/2012	1:32:31 PM	Helium valve opened
2/13/2012	1:32:31 PM	Main Vac valve opened
2/13/2012	1:32:31 PM	Helium MFC set to  20.000000
2/13/2012	1:32:31 PM	H2 MFC set to  0.000000
2/13/2012	1:32:31 PM	BCl3 MFC set to  0.000000
2/13/2012	1:32:31 PM	PH3 MFC set to  0.000000
2/13/2012	1:32:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:32:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:32:31 PM	Tube furnace set to 150
2/13/2012	1:33:01 PM	Helium valve closed
2/13/2012	1:33:01 PM	H2 valve closed
2/13/2012	1:33:01 PM	BCl3 valve closed
2/13/2012	1:33:01 PM	PH3 valve closed
2/13/2012	1:33:01 PM	SiCl4 pre valve closed
2/13/2012	1:33:01 PM	SiCl4 post valve closed
2/13/2012	1:33:01 PM	Bypass valve closed
2/13/2012	1:33:01 PM	Bubbler valve closed
2/13/2012	1:33:01 PM	Main Vac valve opened
2/13/2012	1:33:01 PM	Helium MFC set to  0.000000
2/13/2012	1:33:01 PM	H2 MFC set to  0.000000
2/13/2012	1:33:01 PM	BCl3 MFC set to  0.000000
2/13/2012	1:33:01 PM	PH3 MFC set to  0.000000
2/13/2012	1:33:01 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:33:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:33:01 PM	Tube furnace set to 150
2/13/2012	1:33:31 PM	H2 valve closed
2/13/2012	1:33:31 PM	BCl3 valve closed
2/13/2012	1:33:31 PM	PH3 valve closed
2/13/2012	1:33:31 PM	SiCl4 pre valve closed
2/13/2012	1:33:31 PM	SiCl4 post valve closed
2/13/2012	1:33:31 PM	Bypass valve closed
2/13/2012	1:33:31 PM	Bubbler valve closed
2/13/2012	1:33:31 PM	Helium valve opened
2/13/2012	1:33:31 PM	Main Vac valve opened
2/13/2012	1:33:31 PM	Helium MFC set to  20.000000
2/13/2012	1:33:31 PM	H2 MFC set to  0.000000
2/13/2012	1:33:31 PM	BCl3 MFC set to  0.000000
2/13/2012	1:33:31 PM	PH3 MFC set to  0.000000
2/13/2012	1:33:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:33:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:33:31 PM	Tube furnace set to 150
2/13/2012	1:34:01 PM	Helium valve closed
2/13/2012	1:34:01 PM	H2 valve closed
2/13/2012	1:34:01 PM	BCl3 valve closed
2/13/2012	1:34:01 PM	PH3 valve closed
2/13/2012	1:34:01 PM	SiCl4 pre valve closed
2/13/2012	1:34:01 PM	SiCl4 post valve closed
2/13/2012	1:34:01 PM	Bypass valve closed
2/13/2012	1:34:01 PM	Bubbler valve closed
2/13/2012	1:34:01 PM	Main Vac valve opened
2/13/2012	1:34:01 PM	Helium MFC set to  0.000000
2/13/2012	1:34:01 PM	H2 MFC set to  0.000000
2/13/2012	1:34:01 PM	BCl3 MFC set to  0.000000
2/13/2012	1:34:01 PM	PH3 MFC set to  0.000000
2/13/2012	1:34:01 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:34:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:34:01 PM	Tube furnace set to 150
2/13/2012	1:34:31 PM	H2 valve closed
2/13/2012	1:34:31 PM	BCl3 valve closed
2/13/2012	1:34:31 PM	PH3 valve closed
2/13/2012	1:34:31 PM	SiCl4 pre valve closed
2/13/2012	1:34:31 PM	SiCl4 post valve closed
2/13/2012	1:34:31 PM	Bypass valve closed
2/13/2012	1:34:31 PM	Bubbler valve closed
2/13/2012	1:34:31 PM	Helium valve opened
2/13/2012	1:34:31 PM	Main Vac valve opened
2/13/2012	1:34:31 PM	Helium MFC set to  20.000000
2/13/2012	1:34:31 PM	H2 MFC set to  0.000000
2/13/2012	1:34:31 PM	BCl3 MFC set to  0.000000
2/13/2012	1:34:31 PM	PH3 MFC set to  0.000000
2/13/2012	1:34:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:34:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:34:32 PM	Tube furnace set to 150
2/13/2012	1:35:02 PM	Helium valve closed
2/13/2012	1:35:02 PM	H2 valve closed
2/13/2012	1:35:02 PM	BCl3 valve closed
2/13/2012	1:35:02 PM	PH3 valve closed
2/13/2012	1:35:02 PM	SiCl4 pre valve closed
2/13/2012	1:35:02 PM	SiCl4 post valve closed
2/13/2012	1:35:02 PM	Bypass valve closed
2/13/2012	1:35:02 PM	Bubbler valve closed
2/13/2012	1:35:02 PM	Main Vac valve opened
2/13/2012	1:35:02 PM	Helium MFC set to  0.000000
2/13/2012	1:35:02 PM	H2 MFC set to  0.000000
2/13/2012	1:35:02 PM	BCl3 MFC set to  0.000000
2/13/2012	1:35:02 PM	PH3 MFC set to  0.000000
2/13/2012	1:35:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:35:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:35:02 PM	Tube furnace set to 150
2/13/2012	1:35:32 PM	H2 valve closed
2/13/2012	1:35:32 PM	BCl3 valve closed
2/13/2012	1:35:32 PM	PH3 valve closed
2/13/2012	1:35:32 PM	SiCl4 pre valve closed
2/13/2012	1:35:32 PM	SiCl4 post valve closed
2/13/2012	1:35:32 PM	Bypass valve closed
2/13/2012	1:35:32 PM	Bubbler valve closed
2/13/2012	1:35:32 PM	Helium valve opened
2/13/2012	1:35:32 PM	Main Vac valve opened
2/13/2012	1:35:32 PM	Helium MFC set to  20.000000
2/13/2012	1:35:32 PM	H2 MFC set to  0.000000
2/13/2012	1:35:32 PM	BCl3 MFC set to  0.000000
2/13/2012	1:35:32 PM	PH3 MFC set to  0.000000
2/13/2012	1:35:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:35:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:35:32 PM	Tube furnace set to 150
2/13/2012	1:36:02 PM	Helium valve closed
2/13/2012	1:36:02 PM	H2 valve closed
2/13/2012	1:36:02 PM	BCl3 valve closed
2/13/2012	1:36:02 PM	PH3 valve closed
2/13/2012	1:36:02 PM	SiCl4 pre valve closed
2/13/2012	1:36:02 PM	SiCl4 post valve closed
2/13/2012	1:36:02 PM	Bypass valve closed
2/13/2012	1:36:02 PM	Bubbler valve closed
2/13/2012	1:36:02 PM	Main Vac valve opened
2/13/2012	1:36:02 PM	Helium MFC set to  0.000000
2/13/2012	1:36:02 PM	H2 MFC set to  0.000000
2/13/2012	1:36:02 PM	BCl3 MFC set to  0.000000
2/13/2012	1:36:02 PM	PH3 MFC set to  0.000000
2/13/2012	1:36:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:36:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:36:02 PM	Tube furnace set to 150
2/13/2012	1:36:32 PM	H2 valve closed
2/13/2012	1:36:32 PM	BCl3 valve closed
2/13/2012	1:36:32 PM	PH3 valve closed
2/13/2012	1:36:32 PM	SiCl4 pre valve closed
2/13/2012	1:36:32 PM	SiCl4 post valve closed
2/13/2012	1:36:32 PM	Bypass valve closed
2/13/2012	1:36:32 PM	Bubbler valve closed
2/13/2012	1:36:32 PM	Helium valve opened
2/13/2012	1:36:32 PM	Main Vac valve opened
2/13/2012	1:36:32 PM	Helium MFC set to  20.000000
2/13/2012	1:36:32 PM	H2 MFC set to  0.000000
2/13/2012	1:36:32 PM	BCl3 MFC set to  0.000000
2/13/2012	1:36:32 PM	PH3 MFC set to  0.000000
2/13/2012	1:36:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:36:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:36:32 PM	Tube furnace set to 150
2/13/2012	1:37:02 PM	Helium valve closed
2/13/2012	1:37:02 PM	H2 valve closed
2/13/2012	1:37:02 PM	BCl3 valve closed
2/13/2012	1:37:02 PM	PH3 valve closed
2/13/2012	1:37:02 PM	SiCl4 pre valve closed
2/13/2012	1:37:02 PM	SiCl4 post valve closed
2/13/2012	1:37:02 PM	Bypass valve closed
2/13/2012	1:37:02 PM	Bubbler valve closed
2/13/2012	1:37:02 PM	Main Vac valve opened
2/13/2012	1:37:02 PM	Helium MFC set to  0.000000
2/13/2012	1:37:02 PM	H2 MFC set to  0.000000
2/13/2012	1:37:02 PM	BCl3 MFC set to  0.000000
2/13/2012	1:37:02 PM	PH3 MFC set to  0.000000
2/13/2012	1:37:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:37:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:37:03 PM	Tube furnace set to 150
2/13/2012	1:37:33 PM	H2 valve closed
2/13/2012	1:37:33 PM	BCl3 valve closed
2/13/2012	1:37:33 PM	PH3 valve closed
2/13/2012	1:37:33 PM	SiCl4 pre valve closed
2/13/2012	1:37:33 PM	SiCl4 post valve closed
2/13/2012	1:37:33 PM	Bypass valve closed
2/13/2012	1:37:33 PM	Bubbler valve closed
2/13/2012	1:37:33 PM	Helium valve opened
2/13/2012	1:37:33 PM	Main Vac valve opened
2/13/2012	1:37:33 PM	Helium MFC set to  20.000000
2/13/2012	1:37:33 PM	H2 MFC set to  0.000000
2/13/2012	1:37:33 PM	BCl3 MFC set to  0.000000
2/13/2012	1:37:33 PM	PH3 MFC set to  0.000000
2/13/2012	1:37:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:37:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:37:33 PM	Tube furnace set to 150
2/13/2012	1:38:03 PM	Helium valve closed
2/13/2012	1:38:03 PM	H2 valve closed
2/13/2012	1:38:03 PM	BCl3 valve closed
2/13/2012	1:38:03 PM	PH3 valve closed
2/13/2012	1:38:03 PM	SiCl4 pre valve closed
2/13/2012	1:38:03 PM	SiCl4 post valve closed
2/13/2012	1:38:03 PM	Bypass valve closed
2/13/2012	1:38:03 PM	Bubbler valve closed
2/13/2012	1:38:03 PM	Main Vac valve opened
2/13/2012	1:38:03 PM	Helium MFC set to  0.000000
2/13/2012	1:38:03 PM	H2 MFC set to  0.000000
2/13/2012	1:38:03 PM	BCl3 MFC set to  0.000000
2/13/2012	1:38:03 PM	PH3 MFC set to  0.000000
2/13/2012	1:38:03 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:38:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:38:03 PM	Tube furnace set to 150
2/13/2012	1:38:04 PM	Run finished at 1:38 PM
2/13/2012	1:46:42 PM	Main Vac valve closed
2/13/2012	1:47:36 PM	Main Vac valve opened
2/13/2012	1:48:21 PM	Recipe started at 1:48 PM
2/13/2012	1:48:21 PM	Helium valve closed
2/13/2012	1:48:21 PM	H2 valve closed
2/13/2012	1:48:21 PM	BCl3 valve closed
2/13/2012	1:48:21 PM	PH3 valve closed
2/13/2012	1:48:21 PM	SiCl4 pre valve closed
2/13/2012	1:48:21 PM	SiCl4 post valve closed
2/13/2012	1:48:21 PM	Main Vac valve closed
2/13/2012	1:48:21 PM	Bypass valve closed
2/13/2012	1:48:21 PM	Bubbler valve closed
2/13/2012	1:48:21 PM	Helium MFC set to  0.000000
2/13/2012	1:48:21 PM	H2 MFC set to  0.000000
2/13/2012	1:48:21 PM	BCl3 MFC set to  0.000000
2/13/2012	1:48:21 PM	PH3 MFC set to  0.000000
2/13/2012	1:48:21 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:48:21 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:48:21 PM	Tube furnace set to 0
2/13/2012	1:48:24 PM	Helium valve closed
2/13/2012	1:48:24 PM	BCl3 valve closed
2/13/2012	1:48:24 PM	PH3 valve closed
2/13/2012	1:48:24 PM	SiCl4 pre valve closed
2/13/2012	1:48:24 PM	SiCl4 post valve closed
2/13/2012	1:48:24 PM	Main Vac valve closed
2/13/2012	1:48:24 PM	Bypass valve closed
2/13/2012	1:48:24 PM	Bubbler valve closed
2/13/2012	1:48:24 PM	H2 valve opened
2/13/2012	1:48:24 PM	Helium MFC set to  0.000000
2/13/2012	1:48:24 PM	H2 MFC set to  500.000000
2/13/2012	1:48:24 PM	BCl3 MFC set to  0.000000
2/13/2012	1:48:24 PM	PH3 MFC set to  0.000000
2/13/2012	1:48:24 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:48:24 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:48:24 PM	Tube furnace set to 0
2/13/2012	1:49:28 PM	Helium valve closed
2/13/2012	1:49:28 PM	BCl3 valve closed
2/13/2012	1:49:28 PM	PH3 valve closed
2/13/2012	1:49:28 PM	SiCl4 pre valve closed
2/13/2012	1:49:28 PM	SiCl4 post valve closed
2/13/2012	1:49:28 PM	Main Vac valve closed
2/13/2012	1:49:28 PM	Bypass valve closed
2/13/2012	1:49:28 PM	H2 valve opened
2/13/2012	1:49:28 PM	Bubbler valve opened
2/13/2012	1:49:28 PM	Helium MFC set to  0.000000
2/13/2012	1:49:28 PM	H2 MFC set to  500.000000
2/13/2012	1:49:28 PM	BCl3 MFC set to  0.000000
2/13/2012	1:49:28 PM	PH3 MFC set to  0.000000
2/13/2012	1:49:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:49:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:49:28 PM	Tube furnace set to 0
2/13/2012	1:49:30 PM	Helium valve closed
2/13/2012	1:49:30 PM	BCl3 valve closed
2/13/2012	1:49:30 PM	PH3 valve closed
2/13/2012	1:49:30 PM	SiCl4 pre valve closed
2/13/2012	1:49:30 PM	SiCl4 post valve closed
2/13/2012	1:49:30 PM	Main Vac valve closed
2/13/2012	1:49:30 PM	Bypass valve closed
2/13/2012	1:49:30 PM	H2 valve opened
2/13/2012	1:49:30 PM	Bubbler valve opened
2/13/2012	1:49:30 PM	Helium MFC set to  0.000000
2/13/2012	1:49:30 PM	H2 MFC set to  500.000000
2/13/2012	1:49:30 PM	BCl3 MFC set to  0.000000
2/13/2012	1:49:30 PM	PH3 MFC set to  0.000000
2/13/2012	1:49:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	1:49:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	1:49:30 PM	Tube furnace set to 1000
2/13/2012	2:09:30 PM	Helium valve closed
2/13/2012	2:09:30 PM	BCl3 valve closed
2/13/2012	2:09:30 PM	PH3 valve closed
2/13/2012	2:09:30 PM	Main Vac valve closed
2/13/2012	2:09:30 PM	Bypass valve closed
2/13/2012	2:09:30 PM	H2 valve opened
2/13/2012	2:09:30 PM	SiCl4 pre valve opened
2/13/2012	2:09:30 PM	SiCl4 post valve opened
2/13/2012	2:09:30 PM	Bubbler valve opened
2/13/2012	2:09:30 PM	Helium MFC set to  0.000000
2/13/2012	2:09:30 PM	H2 MFC set to  500.000000
2/13/2012	2:09:30 PM	BCl3 MFC set to  20.000000
2/13/2012	2:09:30 PM	PH3 MFC set to  0.000000
2/13/2012	2:09:30 PM	SiCl4 MFC set to  50.000000
2/13/2012	2:09:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:09:30 PM	Tube furnace set to 1000
2/13/2012	2:29:30 PM	Helium valve closed
2/13/2012	2:29:30 PM	BCl3 valve closed
2/13/2012	2:29:30 PM	PH3 valve closed
2/13/2012	2:29:30 PM	SiCl4 pre valve closed
2/13/2012	2:29:30 PM	SiCl4 post valve closed
2/13/2012	2:29:30 PM	Main Vac valve closed
2/13/2012	2:29:30 PM	Bypass valve closed
2/13/2012	2:29:30 PM	H2 valve opened
2/13/2012	2:29:30 PM	Bubbler valve opened
2/13/2012	2:29:30 PM	Helium MFC set to  0.000000
2/13/2012	2:29:30 PM	H2 MFC set to  500.000000
2/13/2012	2:29:30 PM	BCl3 MFC set to  0.000000
2/13/2012	2:29:30 PM	PH3 MFC set to  0.000000
2/13/2012	2:29:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:29:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:29:30 PM	Tube furnace set to 750
2/13/2012	2:34:30 PM	H2 valve closed
2/13/2012	2:34:30 PM	BCl3 valve closed
2/13/2012	2:34:30 PM	PH3 valve closed
2/13/2012	2:34:30 PM	SiCl4 pre valve closed
2/13/2012	2:34:30 PM	SiCl4 post valve closed
2/13/2012	2:34:30 PM	Main Vac valve closed
2/13/2012	2:34:30 PM	Bypass valve closed
2/13/2012	2:34:30 PM	Helium valve opened
2/13/2012	2:34:30 PM	Bubbler valve opened
2/13/2012	2:34:30 PM	Helium MFC set to  500.000000
2/13/2012	2:34:30 PM	H2 MFC set to  0.000000
2/13/2012	2:34:30 PM	BCl3 MFC set to  0.000000
2/13/2012	2:34:30 PM	PH3 MFC set to  0.000000
2/13/2012	2:34:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:34:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:34:30 PM	Tube furnace set to 0
2/13/2012	2:54:30 PM	Helium valve closed
2/13/2012	2:54:30 PM	H2 valve closed
2/13/2012	2:54:30 PM	BCl3 valve closed
2/13/2012	2:54:30 PM	PH3 valve closed
2/13/2012	2:54:30 PM	SiCl4 pre valve closed
2/13/2012	2:54:30 PM	SiCl4 post valve closed
2/13/2012	2:54:30 PM	Main Vac valve closed
2/13/2012	2:54:30 PM	Bypass valve closed
2/13/2012	2:54:30 PM	Bubbler valve closed
2/13/2012	2:54:30 PM	Helium MFC set to  0.000000
2/13/2012	2:54:30 PM	H2 MFC set to  0.000000
2/13/2012	2:54:30 PM	BCl3 MFC set to  0.000000
2/13/2012	2:54:30 PM	PH3 MFC set to  0.000000
2/13/2012	2:54:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:54:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:54:30 PM	Tube furnace set to 0
2/13/2012	2:54:31 PM	Run finished at 2:54 PM
2/13/2012	2:54:53 PM	Bypass valve opened
2/13/2012	2:55:36 PM	Bypass valve closed
2/13/2012	2:55:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	2:55:40 PM	Recipe started at 2:55 PM
2/13/2012	2:55:40 PM	Helium valve closed
2/13/2012	2:55:40 PM	H2 valve closed
2/13/2012	2:55:40 PM	BCl3 valve closed
2/13/2012	2:55:40 PM	PH3 valve closed
2/13/2012	2:55:40 PM	SiCl4 pre valve closed
2/13/2012	2:55:40 PM	SiCl4 post valve closed
2/13/2012	2:55:40 PM	Main Vac valve closed
2/13/2012	2:55:40 PM	Bypass valve closed
2/13/2012	2:55:40 PM	Bubbler valve closed
2/13/2012	2:55:40 PM	Helium MFC set to  0.000000
2/13/2012	2:55:40 PM	H2 MFC set to  0.000000
2/13/2012	2:55:40 PM	BCl3 MFC set to  0.000000
2/13/2012	2:55:40 PM	PH3 MFC set to  0.000000
2/13/2012	2:55:40 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:55:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:55:40 PM	Tube furnace set to 0
2/13/2012	2:55:43 PM	H2 valve closed
2/13/2012	2:55:43 PM	BCl3 valve closed
2/13/2012	2:55:43 PM	PH3 valve closed
2/13/2012	2:55:43 PM	SiCl4 pre valve closed
2/13/2012	2:55:43 PM	SiCl4 post valve closed
2/13/2012	2:55:43 PM	Main Vac valve closed
2/13/2012	2:55:43 PM	Bypass valve closed
2/13/2012	2:55:43 PM	Bubbler valve closed
2/13/2012	2:55:43 PM	Helium valve opened
2/13/2012	2:55:43 PM	Helium MFC set to  500.000000
2/13/2012	2:55:43 PM	H2 MFC set to  0.000000
2/13/2012	2:55:44 PM	BCl3 MFC set to  0.000000
2/13/2012	2:55:44 PM	PH3 MFC set to  0.000000
2/13/2012	2:55:44 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:55:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:55:44 PM	Tube furnace set to 0
2/13/2012	2:56:46 PM	Helium valve closed
2/13/2012	2:56:46 PM	H2 valve closed
2/13/2012	2:56:46 PM	BCl3 valve closed
2/13/2012	2:56:46 PM	PH3 valve closed
2/13/2012	2:56:46 PM	SiCl4 pre valve closed
2/13/2012	2:56:46 PM	SiCl4 post valve closed
2/13/2012	2:56:46 PM	Main Vac valve closed
2/13/2012	2:56:46 PM	Bypass valve closed
2/13/2012	2:56:46 PM	Bubbler valve closed
2/13/2012	2:56:46 PM	Helium MFC set to  0.000000
2/13/2012	2:56:46 PM	H2 MFC set to  0.000000
2/13/2012	2:56:46 PM	BCl3 MFC set to  0.000000
2/13/2012	2:56:46 PM	PH3 MFC set to  0.000000
2/13/2012	2:56:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	2:56:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	2:56:46 PM	Tube furnace set to 0
2/13/2012	2:56:47 PM	Run finished at 2:56 PM
2/13/2012	2:56:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	3:11:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	3:11:43 PM	Recipe started at 3:11 PM
2/13/2012	3:11:43 PM	Helium valve closed
2/13/2012	3:11:43 PM	H2 valve closed
2/13/2012	3:11:43 PM	BCl3 valve closed
2/13/2012	3:11:43 PM	PH3 valve closed
2/13/2012	3:11:43 PM	SiCl4 pre valve closed
2/13/2012	3:11:43 PM	SiCl4 post valve closed
2/13/2012	3:11:43 PM	Main Vac valve closed
2/13/2012	3:11:43 PM	Bubbler valve closed
2/13/2012	3:11:43 PM	Bypass valve opened
2/13/2012	3:11:43 PM	Helium MFC set to  0.000000
2/13/2012	3:11:43 PM	H2 MFC set to  0.000000
2/13/2012	3:11:43 PM	BCl3 MFC set to  0.000000
2/13/2012	3:11:43 PM	PH3 MFC set to  0.000000
2/13/2012	3:11:43 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:11:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:11:43 PM	Tube furnace set to 0
2/13/2012	3:12:47 PM	Helium valve closed
2/13/2012	3:12:47 PM	H2 valve closed
2/13/2012	3:12:47 PM	BCl3 valve closed
2/13/2012	3:12:47 PM	PH3 valve closed
2/13/2012	3:12:47 PM	SiCl4 pre valve closed
2/13/2012	3:12:47 PM	SiCl4 post valve closed
2/13/2012	3:12:47 PM	Main Vac valve closed
2/13/2012	3:12:47 PM	Bubbler valve closed
2/13/2012	3:12:47 PM	Bypass valve opened
2/13/2012	3:12:47 PM	Helium MFC set to  0.000000
2/13/2012	3:12:47 PM	H2 MFC set to  0.000000
2/13/2012	3:12:47 PM	BCl3 MFC set to  0.000000
2/13/2012	3:12:47 PM	PH3 MFC set to  0.000000
2/13/2012	3:12:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:12:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:12:47 PM	Tube furnace set to 0
2/13/2012	3:13:47 PM	Helium valve closed
2/13/2012	3:13:47 PM	H2 valve closed
2/13/2012	3:13:47 PM	BCl3 valve closed
2/13/2012	3:13:47 PM	PH3 valve closed
2/13/2012	3:13:47 PM	SiCl4 pre valve closed
2/13/2012	3:13:47 PM	SiCl4 post valve closed
2/13/2012	3:13:47 PM	Bypass valve closed
2/13/2012	3:13:47 PM	Bubbler valve closed
2/13/2012	3:13:47 PM	Main Vac valve opened
2/13/2012	3:13:47 PM	Helium MFC set to  0.000000
2/13/2012	3:13:47 PM	H2 MFC set to  0.000000
2/13/2012	3:13:47 PM	BCl3 MFC set to  0.000000
2/13/2012	3:13:47 PM	PH3 MFC set to  0.000000
2/13/2012	3:13:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:13:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:13:47 PM	Tube furnace set to 0
2/13/2012	3:13:48 PM	Run finished at 3:13 PM
2/13/2012	3:13:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	3:14:54 PM	Recipe started at 3:14 PM
2/13/2012	3:14:54 PM	Helium valve closed
2/13/2012	3:14:54 PM	H2 valve closed
2/13/2012	3:14:54 PM	BCl3 valve closed
2/13/2012	3:14:54 PM	PH3 valve closed
2/13/2012	3:14:54 PM	SiCl4 pre valve closed
2/13/2012	3:14:54 PM	SiCl4 post valve closed
2/13/2012	3:14:54 PM	Bypass valve closed
2/13/2012	3:14:54 PM	Bubbler valve closed
2/13/2012	3:14:54 PM	Main Vac valve opened
2/13/2012	3:14:54 PM	Helium MFC set to  0.000000
2/13/2012	3:14:54 PM	H2 MFC set to  0.000000
2/13/2012	3:14:54 PM	BCl3 MFC set to  0.000000
2/13/2012	3:14:54 PM	PH3 MFC set to  0.000000
2/13/2012	3:14:54 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:14:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:14:54 PM	Tube furnace set to 150
2/13/2012	3:15:24 PM	H2 valve closed
2/13/2012	3:15:24 PM	BCl3 valve closed
2/13/2012	3:15:24 PM	PH3 valve closed
2/13/2012	3:15:24 PM	SiCl4 pre valve closed
2/13/2012	3:15:24 PM	SiCl4 post valve closed
2/13/2012	3:15:24 PM	Bypass valve closed
2/13/2012	3:15:24 PM	Bubbler valve closed
2/13/2012	3:15:24 PM	Helium valve opened
2/13/2012	3:15:24 PM	Main Vac valve opened
2/13/2012	3:15:24 PM	Helium MFC set to  20.000000
2/13/2012	3:15:24 PM	H2 MFC set to  0.000000
2/13/2012	3:15:24 PM	BCl3 MFC set to  0.000000
2/13/2012	3:15:24 PM	PH3 MFC set to  0.000000
2/13/2012	3:15:24 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:15:24 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:15:24 PM	Tube furnace set to 150
2/13/2012	3:15:54 PM	Helium valve closed
2/13/2012	3:15:54 PM	H2 valve closed
2/13/2012	3:15:54 PM	BCl3 valve closed
2/13/2012	3:15:54 PM	PH3 valve closed
2/13/2012	3:15:54 PM	SiCl4 pre valve closed
2/13/2012	3:15:54 PM	SiCl4 post valve closed
2/13/2012	3:15:54 PM	Bypass valve closed
2/13/2012	3:15:54 PM	Bubbler valve closed
2/13/2012	3:15:54 PM	Main Vac valve opened
2/13/2012	3:15:54 PM	Helium MFC set to  0.000000
2/13/2012	3:15:54 PM	H2 MFC set to  0.000000
2/13/2012	3:15:54 PM	BCl3 MFC set to  0.000000
2/13/2012	3:15:54 PM	PH3 MFC set to  0.000000
2/13/2012	3:15:54 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:15:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:15:55 PM	Tube furnace set to 150
2/13/2012	3:16:25 PM	H2 valve closed
2/13/2012	3:16:25 PM	BCl3 valve closed
2/13/2012	3:16:25 PM	PH3 valve closed
2/13/2012	3:16:25 PM	SiCl4 pre valve closed
2/13/2012	3:16:25 PM	SiCl4 post valve closed
2/13/2012	3:16:25 PM	Bypass valve closed
2/13/2012	3:16:25 PM	Bubbler valve closed
2/13/2012	3:16:25 PM	Helium valve opened
2/13/2012	3:16:25 PM	Main Vac valve opened
2/13/2012	3:16:25 PM	Helium MFC set to  20.000000
2/13/2012	3:16:25 PM	H2 MFC set to  0.000000
2/13/2012	3:16:25 PM	BCl3 MFC set to  0.000000
2/13/2012	3:16:25 PM	PH3 MFC set to  0.000000
2/13/2012	3:16:25 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:16:25 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:16:25 PM	Tube furnace set to 150
2/13/2012	3:16:55 PM	Helium valve closed
2/13/2012	3:16:55 PM	H2 valve closed
2/13/2012	3:16:55 PM	BCl3 valve closed
2/13/2012	3:16:55 PM	PH3 valve closed
2/13/2012	3:16:55 PM	SiCl4 pre valve closed
2/13/2012	3:16:55 PM	SiCl4 post valve closed
2/13/2012	3:16:55 PM	Bypass valve closed
2/13/2012	3:16:55 PM	Bubbler valve closed
2/13/2012	3:16:55 PM	Main Vac valve opened
2/13/2012	3:16:55 PM	Helium MFC set to  0.000000
2/13/2012	3:16:55 PM	H2 MFC set to  0.000000
2/13/2012	3:16:55 PM	BCl3 MFC set to  0.000000
2/13/2012	3:16:55 PM	PH3 MFC set to  0.000000
2/13/2012	3:16:55 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:16:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:16:55 PM	Tube furnace set to 150
2/13/2012	3:17:25 PM	H2 valve closed
2/13/2012	3:17:25 PM	BCl3 valve closed
2/13/2012	3:17:25 PM	PH3 valve closed
2/13/2012	3:17:25 PM	SiCl4 pre valve closed
2/13/2012	3:17:25 PM	SiCl4 post valve closed
2/13/2012	3:17:25 PM	Bypass valve closed
2/13/2012	3:17:25 PM	Bubbler valve closed
2/13/2012	3:17:25 PM	Helium valve opened
2/13/2012	3:17:25 PM	Main Vac valve opened
2/13/2012	3:17:25 PM	Helium MFC set to  20.000000
2/13/2012	3:17:25 PM	H2 MFC set to  0.000000
2/13/2012	3:17:25 PM	BCl3 MFC set to  0.000000
2/13/2012	3:17:25 PM	PH3 MFC set to  0.000000
2/13/2012	3:17:25 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:17:25 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:17:25 PM	Tube furnace set to 150
2/13/2012	3:17:55 PM	Helium valve closed
2/13/2012	3:17:55 PM	H2 valve closed
2/13/2012	3:17:55 PM	BCl3 valve closed
2/13/2012	3:17:55 PM	PH3 valve closed
2/13/2012	3:17:55 PM	SiCl4 pre valve closed
2/13/2012	3:17:55 PM	SiCl4 post valve closed
2/13/2012	3:17:55 PM	Bypass valve closed
2/13/2012	3:17:55 PM	Bubbler valve closed
2/13/2012	3:17:55 PM	Main Vac valve opened
2/13/2012	3:17:55 PM	Helium MFC set to  0.000000
2/13/2012	3:17:55 PM	H2 MFC set to  0.000000
2/13/2012	3:17:55 PM	BCl3 MFC set to  0.000000
2/13/2012	3:17:55 PM	PH3 MFC set to  0.000000
2/13/2012	3:17:55 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:17:55 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:17:55 PM	Tube furnace set to 150
2/13/2012	3:18:26 PM	H2 valve closed
2/13/2012	3:18:26 PM	BCl3 valve closed
2/13/2012	3:18:26 PM	PH3 valve closed
2/13/2012	3:18:26 PM	SiCl4 pre valve closed
2/13/2012	3:18:26 PM	SiCl4 post valve closed
2/13/2012	3:18:26 PM	Bypass valve closed
2/13/2012	3:18:26 PM	Bubbler valve closed
2/13/2012	3:18:26 PM	Helium valve opened
2/13/2012	3:18:26 PM	Main Vac valve opened
2/13/2012	3:18:26 PM	Helium MFC set to  20.000000
2/13/2012	3:18:26 PM	H2 MFC set to  0.000000
2/13/2012	3:18:26 PM	BCl3 MFC set to  0.000000
2/13/2012	3:18:26 PM	PH3 MFC set to  0.000000
2/13/2012	3:18:26 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:18:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:18:26 PM	Tube furnace set to 150
2/13/2012	3:18:56 PM	Helium valve closed
2/13/2012	3:18:56 PM	H2 valve closed
2/13/2012	3:18:56 PM	BCl3 valve closed
2/13/2012	3:18:56 PM	PH3 valve closed
2/13/2012	3:18:56 PM	SiCl4 pre valve closed
2/13/2012	3:18:56 PM	SiCl4 post valve closed
2/13/2012	3:18:56 PM	Bypass valve closed
2/13/2012	3:18:56 PM	Bubbler valve closed
2/13/2012	3:18:56 PM	Main Vac valve opened
2/13/2012	3:18:56 PM	Helium MFC set to  0.000000
2/13/2012	3:18:56 PM	H2 MFC set to  0.000000
2/13/2012	3:18:56 PM	BCl3 MFC set to  0.000000
2/13/2012	3:18:56 PM	PH3 MFC set to  0.000000
2/13/2012	3:18:56 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:18:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:18:56 PM	Tube furnace set to 150
2/13/2012	3:19:26 PM	H2 valve closed
2/13/2012	3:19:26 PM	BCl3 valve closed
2/13/2012	3:19:26 PM	PH3 valve closed
2/13/2012	3:19:26 PM	SiCl4 pre valve closed
2/13/2012	3:19:26 PM	SiCl4 post valve closed
2/13/2012	3:19:26 PM	Bypass valve closed
2/13/2012	3:19:26 PM	Bubbler valve closed
2/13/2012	3:19:26 PM	Helium valve opened
2/13/2012	3:19:26 PM	Main Vac valve opened
2/13/2012	3:19:26 PM	Helium MFC set to  20.000000
2/13/2012	3:19:26 PM	H2 MFC set to  0.000000
2/13/2012	3:19:26 PM	BCl3 MFC set to  0.000000
2/13/2012	3:19:26 PM	PH3 MFC set to  0.000000
2/13/2012	3:19:26 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:19:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:19:26 PM	Tube furnace set to 150
2/13/2012	3:19:56 PM	Helium valve closed
2/13/2012	3:19:56 PM	H2 valve closed
2/13/2012	3:19:56 PM	BCl3 valve closed
2/13/2012	3:19:56 PM	PH3 valve closed
2/13/2012	3:19:56 PM	SiCl4 pre valve closed
2/13/2012	3:19:56 PM	SiCl4 post valve closed
2/13/2012	3:19:56 PM	Bypass valve closed
2/13/2012	3:19:56 PM	Bubbler valve closed
2/13/2012	3:19:56 PM	Main Vac valve opened
2/13/2012	3:19:56 PM	Helium MFC set to  0.000000
2/13/2012	3:19:56 PM	H2 MFC set to  0.000000
2/13/2012	3:19:56 PM	BCl3 MFC set to  0.000000
2/13/2012	3:19:56 PM	PH3 MFC set to  0.000000
2/13/2012	3:19:56 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:19:56 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:19:56 PM	Tube furnace set to 150
2/13/2012	3:20:26 PM	H2 valve closed
2/13/2012	3:20:26 PM	BCl3 valve closed
2/13/2012	3:20:26 PM	PH3 valve closed
2/13/2012	3:20:26 PM	SiCl4 pre valve closed
2/13/2012	3:20:26 PM	SiCl4 post valve closed
2/13/2012	3:20:26 PM	Bypass valve closed
2/13/2012	3:20:26 PM	Bubbler valve closed
2/13/2012	3:20:26 PM	Helium valve opened
2/13/2012	3:20:26 PM	Main Vac valve opened
2/13/2012	3:20:26 PM	Helium MFC set to  20.000000
2/13/2012	3:20:26 PM	H2 MFC set to  0.000000
2/13/2012	3:20:26 PM	BCl3 MFC set to  0.000000
2/13/2012	3:20:26 PM	PH3 MFC set to  0.000000
2/13/2012	3:20:26 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:20:26 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:20:27 PM	Tube furnace set to 150
2/13/2012	3:20:57 PM	Helium valve closed
2/13/2012	3:20:57 PM	H2 valve closed
2/13/2012	3:20:57 PM	BCl3 valve closed
2/13/2012	3:20:57 PM	PH3 valve closed
2/13/2012	3:20:57 PM	SiCl4 pre valve closed
2/13/2012	3:20:57 PM	SiCl4 post valve closed
2/13/2012	3:20:57 PM	Bypass valve closed
2/13/2012	3:20:57 PM	Bubbler valve closed
2/13/2012	3:20:57 PM	Main Vac valve opened
2/13/2012	3:20:57 PM	Helium MFC set to  0.000000
2/13/2012	3:20:57 PM	H2 MFC set to  0.000000
2/13/2012	3:20:57 PM	BCl3 MFC set to  0.000000
2/13/2012	3:20:57 PM	PH3 MFC set to  0.000000
2/13/2012	3:20:57 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:20:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:20:57 PM	Tube furnace set to 150
2/13/2012	3:21:27 PM	H2 valve closed
2/13/2012	3:21:27 PM	BCl3 valve closed
2/13/2012	3:21:27 PM	PH3 valve closed
2/13/2012	3:21:27 PM	SiCl4 pre valve closed
2/13/2012	3:21:27 PM	SiCl4 post valve closed
2/13/2012	3:21:27 PM	Bypass valve closed
2/13/2012	3:21:27 PM	Bubbler valve closed
2/13/2012	3:21:27 PM	Helium valve opened
2/13/2012	3:21:27 PM	Main Vac valve opened
2/13/2012	3:21:27 PM	Helium MFC set to  20.000000
2/13/2012	3:21:27 PM	H2 MFC set to  0.000000
2/13/2012	3:21:27 PM	BCl3 MFC set to  0.000000
2/13/2012	3:21:27 PM	PH3 MFC set to  0.000000
2/13/2012	3:21:27 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:21:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:21:27 PM	Tube furnace set to 150
2/13/2012	3:21:57 PM	Helium valve closed
2/13/2012	3:21:57 PM	H2 valve closed
2/13/2012	3:21:57 PM	BCl3 valve closed
2/13/2012	3:21:57 PM	PH3 valve closed
2/13/2012	3:21:57 PM	SiCl4 pre valve closed
2/13/2012	3:21:57 PM	SiCl4 post valve closed
2/13/2012	3:21:57 PM	Bypass valve closed
2/13/2012	3:21:57 PM	Bubbler valve closed
2/13/2012	3:21:57 PM	Main Vac valve opened
2/13/2012	3:21:57 PM	Helium MFC set to  0.000000
2/13/2012	3:21:57 PM	H2 MFC set to  0.000000
2/13/2012	3:21:57 PM	BCl3 MFC set to  0.000000
2/13/2012	3:21:57 PM	PH3 MFC set to  0.000000
2/13/2012	3:21:57 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:21:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:21:57 PM	Tube furnace set to 150
2/13/2012	3:22:27 PM	H2 valve closed
2/13/2012	3:22:27 PM	BCl3 valve closed
2/13/2012	3:22:27 PM	PH3 valve closed
2/13/2012	3:22:27 PM	SiCl4 pre valve closed
2/13/2012	3:22:27 PM	SiCl4 post valve closed
2/13/2012	3:22:27 PM	Bypass valve closed
2/13/2012	3:22:27 PM	Bubbler valve closed
2/13/2012	3:22:27 PM	Helium valve opened
2/13/2012	3:22:27 PM	Main Vac valve opened
2/13/2012	3:22:27 PM	Helium MFC set to  20.000000
2/13/2012	3:22:27 PM	H2 MFC set to  0.000000
2/13/2012	3:22:27 PM	BCl3 MFC set to  0.000000
2/13/2012	3:22:27 PM	PH3 MFC set to  0.000000
2/13/2012	3:22:27 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:22:27 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:22:27 PM	Tube furnace set to 150
2/13/2012	3:22:57 PM	Helium valve closed
2/13/2012	3:22:57 PM	H2 valve closed
2/13/2012	3:22:57 PM	BCl3 valve closed
2/13/2012	3:22:57 PM	PH3 valve closed
2/13/2012	3:22:57 PM	SiCl4 pre valve closed
2/13/2012	3:22:57 PM	SiCl4 post valve closed
2/13/2012	3:22:57 PM	Bypass valve closed
2/13/2012	3:22:57 PM	Bubbler valve closed
2/13/2012	3:22:57 PM	Main Vac valve opened
2/13/2012	3:22:57 PM	Helium MFC set to  0.000000
2/13/2012	3:22:57 PM	H2 MFC set to  0.000000
2/13/2012	3:22:57 PM	BCl3 MFC set to  0.000000
2/13/2012	3:22:57 PM	PH3 MFC set to  0.000000
2/13/2012	3:22:57 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:22:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:22:58 PM	Tube furnace set to 150
2/13/2012	3:23:28 PM	H2 valve closed
2/13/2012	3:23:28 PM	BCl3 valve closed
2/13/2012	3:23:28 PM	PH3 valve closed
2/13/2012	3:23:28 PM	SiCl4 pre valve closed
2/13/2012	3:23:28 PM	SiCl4 post valve closed
2/13/2012	3:23:28 PM	Bypass valve closed
2/13/2012	3:23:28 PM	Bubbler valve closed
2/13/2012	3:23:28 PM	Helium valve opened
2/13/2012	3:23:28 PM	Main Vac valve opened
2/13/2012	3:23:28 PM	Helium MFC set to  20.000000
2/13/2012	3:23:28 PM	H2 MFC set to  0.000000
2/13/2012	3:23:28 PM	BCl3 MFC set to  0.000000
2/13/2012	3:23:28 PM	PH3 MFC set to  0.000000
2/13/2012	3:23:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:23:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:23:28 PM	Tube furnace set to 150
2/13/2012	3:23:58 PM	Helium valve closed
2/13/2012	3:23:58 PM	H2 valve closed
2/13/2012	3:23:58 PM	BCl3 valve closed
2/13/2012	3:23:58 PM	PH3 valve closed
2/13/2012	3:23:58 PM	SiCl4 pre valve closed
2/13/2012	3:23:58 PM	SiCl4 post valve closed
2/13/2012	3:23:58 PM	Bypass valve closed
2/13/2012	3:23:58 PM	Bubbler valve closed
2/13/2012	3:23:58 PM	Main Vac valve opened
2/13/2012	3:23:58 PM	Helium MFC set to  0.000000
2/13/2012	3:23:58 PM	H2 MFC set to  0.000000
2/13/2012	3:23:58 PM	BCl3 MFC set to  0.000000
2/13/2012	3:23:58 PM	PH3 MFC set to  0.000000
2/13/2012	3:23:58 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:23:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:23:58 PM	Tube furnace set to 150
2/13/2012	3:24:28 PM	H2 valve closed
2/13/2012	3:24:28 PM	BCl3 valve closed
2/13/2012	3:24:28 PM	PH3 valve closed
2/13/2012	3:24:28 PM	SiCl4 pre valve closed
2/13/2012	3:24:28 PM	SiCl4 post valve closed
2/13/2012	3:24:28 PM	Bypass valve closed
2/13/2012	3:24:28 PM	Bubbler valve closed
2/13/2012	3:24:28 PM	Helium valve opened
2/13/2012	3:24:28 PM	Main Vac valve opened
2/13/2012	3:24:28 PM	Helium MFC set to  20.000000
2/13/2012	3:24:28 PM	H2 MFC set to  0.000000
2/13/2012	3:24:28 PM	BCl3 MFC set to  0.000000
2/13/2012	3:24:28 PM	PH3 MFC set to  0.000000
2/13/2012	3:24:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:24:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:24:28 PM	Tube furnace set to 150
2/13/2012	3:24:58 PM	Helium valve closed
2/13/2012	3:24:58 PM	H2 valve closed
2/13/2012	3:24:58 PM	BCl3 valve closed
2/13/2012	3:24:58 PM	PH3 valve closed
2/13/2012	3:24:58 PM	SiCl4 pre valve closed
2/13/2012	3:24:58 PM	SiCl4 post valve closed
2/13/2012	3:24:58 PM	Bypass valve closed
2/13/2012	3:24:58 PM	Bubbler valve closed
2/13/2012	3:24:58 PM	Main Vac valve opened
2/13/2012	3:24:58 PM	Helium MFC set to  0.000000
2/13/2012	3:24:58 PM	H2 MFC set to  0.000000
2/13/2012	3:24:58 PM	BCl3 MFC set to  0.000000
2/13/2012	3:24:58 PM	PH3 MFC set to  0.000000
2/13/2012	3:24:58 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:24:58 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:24:58 PM	Tube furnace set to 150
2/13/2012	3:24:59 PM	Run finished at 3:24 PM
2/13/2012	3:26:09 PM	Main Vac valve closed
2/13/2012	3:26:27 PM	Main Vac valve opened
2/13/2012	3:27:14 PM	Recipe started at 3:27 PM
2/13/2012	3:27:14 PM	Helium valve closed
2/13/2012	3:27:14 PM	H2 valve closed
2/13/2012	3:27:14 PM	BCl3 valve closed
2/13/2012	3:27:14 PM	PH3 valve closed
2/13/2012	3:27:14 PM	SiCl4 pre valve closed
2/13/2012	3:27:14 PM	SiCl4 post valve closed
2/13/2012	3:27:14 PM	Bypass valve closed
2/13/2012	3:27:14 PM	Bubbler valve closed
2/13/2012	3:27:14 PM	Main Vac valve opened
2/13/2012	3:27:14 PM	Helium MFC set to  0.000000
2/13/2012	3:27:14 PM	H2 MFC set to  0.000000
2/13/2012	3:27:14 PM	BCl3 MFC set to  0.000000
2/13/2012	3:27:14 PM	PH3 MFC set to  0.000000
2/13/2012	3:27:14 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:27:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:27:14 PM	Tube furnace set to 150
2/13/2012	3:27:44 PM	H2 valve closed
2/13/2012	3:27:44 PM	BCl3 valve closed
2/13/2012	3:27:44 PM	PH3 valve closed
2/13/2012	3:27:44 PM	SiCl4 pre valve closed
2/13/2012	3:27:44 PM	SiCl4 post valve closed
2/13/2012	3:27:44 PM	Bypass valve closed
2/13/2012	3:27:44 PM	Bubbler valve closed
2/13/2012	3:27:44 PM	Helium valve opened
2/13/2012	3:27:44 PM	Main Vac valve opened
2/13/2012	3:27:44 PM	Helium MFC set to  20.000000
2/13/2012	3:27:44 PM	H2 MFC set to  0.000000
2/13/2012	3:27:44 PM	BCl3 MFC set to  0.000000
2/13/2012	3:27:44 PM	PH3 MFC set to  0.000000
2/13/2012	3:27:44 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:27:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:27:44 PM	Tube furnace set to 150
2/13/2012	3:28:14 PM	Helium valve closed
2/13/2012	3:28:14 PM	H2 valve closed
2/13/2012	3:28:14 PM	BCl3 valve closed
2/13/2012	3:28:14 PM	PH3 valve closed
2/13/2012	3:28:14 PM	SiCl4 pre valve closed
2/13/2012	3:28:14 PM	SiCl4 post valve closed
2/13/2012	3:28:14 PM	Bypass valve closed
2/13/2012	3:28:14 PM	Bubbler valve closed
2/13/2012	3:28:14 PM	Main Vac valve opened
2/13/2012	3:28:14 PM	Helium MFC set to  0.000000
2/13/2012	3:28:14 PM	H2 MFC set to  0.000000
2/13/2012	3:28:14 PM	BCl3 MFC set to  0.000000
2/13/2012	3:28:14 PM	PH3 MFC set to  0.000000
2/13/2012	3:28:14 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:28:14 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:28:14 PM	Tube furnace set to 150
2/13/2012	3:28:44 PM	H2 valve closed
2/13/2012	3:28:44 PM	BCl3 valve closed
2/13/2012	3:28:44 PM	PH3 valve closed
2/13/2012	3:28:44 PM	SiCl4 pre valve closed
2/13/2012	3:28:44 PM	SiCl4 post valve closed
2/13/2012	3:28:44 PM	Bypass valve closed
2/13/2012	3:28:44 PM	Bubbler valve closed
2/13/2012	3:28:44 PM	Helium valve opened
2/13/2012	3:28:44 PM	Main Vac valve opened
2/13/2012	3:28:44 PM	Helium MFC set to  20.000000
2/13/2012	3:28:44 PM	H2 MFC set to  0.000000
2/13/2012	3:28:44 PM	BCl3 MFC set to  0.000000
2/13/2012	3:28:44 PM	PH3 MFC set to  0.000000
2/13/2012	3:28:44 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:28:44 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:28:45 PM	Tube furnace set to 150
2/13/2012	3:29:15 PM	Helium valve closed
2/13/2012	3:29:15 PM	H2 valve closed
2/13/2012	3:29:15 PM	BCl3 valve closed
2/13/2012	3:29:15 PM	PH3 valve closed
2/13/2012	3:29:15 PM	SiCl4 pre valve closed
2/13/2012	3:29:15 PM	SiCl4 post valve closed
2/13/2012	3:29:15 PM	Bypass valve closed
2/13/2012	3:29:15 PM	Bubbler valve closed
2/13/2012	3:29:15 PM	Main Vac valve opened
2/13/2012	3:29:15 PM	Helium MFC set to  0.000000
2/13/2012	3:29:15 PM	H2 MFC set to  0.000000
2/13/2012	3:29:15 PM	BCl3 MFC set to  0.000000
2/13/2012	3:29:15 PM	PH3 MFC set to  0.000000
2/13/2012	3:29:15 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:29:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:29:15 PM	Tube furnace set to 150
2/13/2012	3:29:45 PM	H2 valve closed
2/13/2012	3:29:45 PM	BCl3 valve closed
2/13/2012	3:29:45 PM	PH3 valve closed
2/13/2012	3:29:45 PM	SiCl4 pre valve closed
2/13/2012	3:29:45 PM	SiCl4 post valve closed
2/13/2012	3:29:45 PM	Bypass valve closed
2/13/2012	3:29:45 PM	Bubbler valve closed
2/13/2012	3:29:45 PM	Helium valve opened
2/13/2012	3:29:45 PM	Main Vac valve opened
2/13/2012	3:29:45 PM	Helium MFC set to  20.000000
2/13/2012	3:29:45 PM	H2 MFC set to  0.000000
2/13/2012	3:29:45 PM	BCl3 MFC set to  0.000000
2/13/2012	3:29:45 PM	PH3 MFC set to  0.000000
2/13/2012	3:29:45 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:29:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:29:45 PM	Tube furnace set to 150
2/13/2012	3:30:15 PM	Helium valve closed
2/13/2012	3:30:15 PM	H2 valve closed
2/13/2012	3:30:15 PM	BCl3 valve closed
2/13/2012	3:30:15 PM	PH3 valve closed
2/13/2012	3:30:15 PM	SiCl4 pre valve closed
2/13/2012	3:30:15 PM	SiCl4 post valve closed
2/13/2012	3:30:15 PM	Bypass valve closed
2/13/2012	3:30:15 PM	Bubbler valve closed
2/13/2012	3:30:15 PM	Main Vac valve opened
2/13/2012	3:30:15 PM	Helium MFC set to  0.000000
2/13/2012	3:30:15 PM	H2 MFC set to  0.000000
2/13/2012	3:30:15 PM	BCl3 MFC set to  0.000000
2/13/2012	3:30:15 PM	PH3 MFC set to  0.000000
2/13/2012	3:30:15 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:30:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:30:15 PM	Tube furnace set to 150
2/13/2012	3:30:45 PM	H2 valve closed
2/13/2012	3:30:45 PM	BCl3 valve closed
2/13/2012	3:30:45 PM	PH3 valve closed
2/13/2012	3:30:45 PM	SiCl4 pre valve closed
2/13/2012	3:30:45 PM	SiCl4 post valve closed
2/13/2012	3:30:45 PM	Bypass valve closed
2/13/2012	3:30:45 PM	Bubbler valve closed
2/13/2012	3:30:45 PM	Helium valve opened
2/13/2012	3:30:45 PM	Main Vac valve opened
2/13/2012	3:30:45 PM	Helium MFC set to  20.000000
2/13/2012	3:30:45 PM	H2 MFC set to  0.000000
2/13/2012	3:30:45 PM	BCl3 MFC set to  0.000000
2/13/2012	3:30:45 PM	PH3 MFC set to  0.000000
2/13/2012	3:30:45 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:30:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:30:45 PM	Tube furnace set to 150
2/13/2012	3:31:15 PM	Helium valve closed
2/13/2012	3:31:15 PM	H2 valve closed
2/13/2012	3:31:15 PM	BCl3 valve closed
2/13/2012	3:31:15 PM	PH3 valve closed
2/13/2012	3:31:15 PM	SiCl4 pre valve closed
2/13/2012	3:31:15 PM	SiCl4 post valve closed
2/13/2012	3:31:15 PM	Bypass valve closed
2/13/2012	3:31:15 PM	Bubbler valve closed
2/13/2012	3:31:15 PM	Main Vac valve opened
2/13/2012	3:31:15 PM	Helium MFC set to  0.000000
2/13/2012	3:31:15 PM	H2 MFC set to  0.000000
2/13/2012	3:31:15 PM	BCl3 MFC set to  0.000000
2/13/2012	3:31:15 PM	PH3 MFC set to  0.000000
2/13/2012	3:31:15 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:31:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:31:16 PM	Tube furnace set to 150
2/13/2012	3:31:46 PM	H2 valve closed
2/13/2012	3:31:46 PM	BCl3 valve closed
2/13/2012	3:31:46 PM	PH3 valve closed
2/13/2012	3:31:46 PM	SiCl4 pre valve closed
2/13/2012	3:31:46 PM	SiCl4 post valve closed
2/13/2012	3:31:46 PM	Bypass valve closed
2/13/2012	3:31:46 PM	Bubbler valve closed
2/13/2012	3:31:46 PM	Helium valve opened
2/13/2012	3:31:46 PM	Main Vac valve opened
2/13/2012	3:31:46 PM	Helium MFC set to  20.000000
2/13/2012	3:31:46 PM	H2 MFC set to  0.000000
2/13/2012	3:31:46 PM	BCl3 MFC set to  0.000000
2/13/2012	3:31:46 PM	PH3 MFC set to  0.000000
2/13/2012	3:31:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:31:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:31:46 PM	Tube furnace set to 150
2/13/2012	3:32:16 PM	Helium valve closed
2/13/2012	3:32:16 PM	H2 valve closed
2/13/2012	3:32:16 PM	BCl3 valve closed
2/13/2012	3:32:16 PM	PH3 valve closed
2/13/2012	3:32:16 PM	SiCl4 pre valve closed
2/13/2012	3:32:16 PM	SiCl4 post valve closed
2/13/2012	3:32:16 PM	Bypass valve closed
2/13/2012	3:32:16 PM	Bubbler valve closed
2/13/2012	3:32:16 PM	Main Vac valve opened
2/13/2012	3:32:16 PM	Helium MFC set to  0.000000
2/13/2012	3:32:16 PM	H2 MFC set to  0.000000
2/13/2012	3:32:16 PM	BCl3 MFC set to  0.000000
2/13/2012	3:32:16 PM	PH3 MFC set to  0.000000
2/13/2012	3:32:16 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:32:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:32:16 PM	Tube furnace set to 150
2/13/2012	3:32:46 PM	H2 valve closed
2/13/2012	3:32:46 PM	BCl3 valve closed
2/13/2012	3:32:46 PM	PH3 valve closed
2/13/2012	3:32:46 PM	SiCl4 pre valve closed
2/13/2012	3:32:46 PM	SiCl4 post valve closed
2/13/2012	3:32:46 PM	Bypass valve closed
2/13/2012	3:32:46 PM	Bubbler valve closed
2/13/2012	3:32:46 PM	Helium valve opened
2/13/2012	3:32:46 PM	Main Vac valve opened
2/13/2012	3:32:46 PM	Helium MFC set to  20.000000
2/13/2012	3:32:46 PM	H2 MFC set to  0.000000
2/13/2012	3:32:46 PM	BCl3 MFC set to  0.000000
2/13/2012	3:32:46 PM	PH3 MFC set to  0.000000
2/13/2012	3:32:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:32:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:32:46 PM	Tube furnace set to 150
2/13/2012	3:33:16 PM	Helium valve closed
2/13/2012	3:33:16 PM	H2 valve closed
2/13/2012	3:33:16 PM	BCl3 valve closed
2/13/2012	3:33:16 PM	PH3 valve closed
2/13/2012	3:33:16 PM	SiCl4 pre valve closed
2/13/2012	3:33:16 PM	SiCl4 post valve closed
2/13/2012	3:33:16 PM	Bypass valve closed
2/13/2012	3:33:16 PM	Bubbler valve closed
2/13/2012	3:33:16 PM	Main Vac valve opened
2/13/2012	3:33:16 PM	Helium MFC set to  0.000000
2/13/2012	3:33:16 PM	H2 MFC set to  0.000000
2/13/2012	3:33:16 PM	BCl3 MFC set to  0.000000
2/13/2012	3:33:16 PM	PH3 MFC set to  0.000000
2/13/2012	3:33:16 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:33:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:33:16 PM	Tube furnace set to 150
2/13/2012	3:33:46 PM	H2 valve closed
2/13/2012	3:33:46 PM	BCl3 valve closed
2/13/2012	3:33:46 PM	PH3 valve closed
2/13/2012	3:33:46 PM	SiCl4 pre valve closed
2/13/2012	3:33:46 PM	SiCl4 post valve closed
2/13/2012	3:33:46 PM	Bypass valve closed
2/13/2012	3:33:47 PM	Bubbler valve closed
2/13/2012	3:33:47 PM	Helium valve opened
2/13/2012	3:33:47 PM	Main Vac valve opened
2/13/2012	3:33:47 PM	Helium MFC set to  20.000000
2/13/2012	3:33:47 PM	H2 MFC set to  0.000000
2/13/2012	3:33:47 PM	BCl3 MFC set to  0.000000
2/13/2012	3:33:47 PM	PH3 MFC set to  0.000000
2/13/2012	3:33:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:33:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:33:47 PM	Tube furnace set to 150
2/13/2012	3:34:17 PM	Helium valve closed
2/13/2012	3:34:17 PM	H2 valve closed
2/13/2012	3:34:17 PM	BCl3 valve closed
2/13/2012	3:34:17 PM	PH3 valve closed
2/13/2012	3:34:17 PM	SiCl4 pre valve closed
2/13/2012	3:34:17 PM	SiCl4 post valve closed
2/13/2012	3:34:17 PM	Bypass valve closed
2/13/2012	3:34:17 PM	Bubbler valve closed
2/13/2012	3:34:17 PM	Main Vac valve opened
2/13/2012	3:34:17 PM	Helium MFC set to  0.000000
2/13/2012	3:34:17 PM	H2 MFC set to  0.000000
2/13/2012	3:34:17 PM	BCl3 MFC set to  0.000000
2/13/2012	3:34:17 PM	PH3 MFC set to  0.000000
2/13/2012	3:34:17 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:34:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:34:17 PM	Tube furnace set to 150
2/13/2012	3:34:47 PM	H2 valve closed
2/13/2012	3:34:47 PM	BCl3 valve closed
2/13/2012	3:34:47 PM	PH3 valve closed
2/13/2012	3:34:47 PM	SiCl4 pre valve closed
2/13/2012	3:34:47 PM	SiCl4 post valve closed
2/13/2012	3:34:47 PM	Bypass valve closed
2/13/2012	3:34:47 PM	Bubbler valve closed
2/13/2012	3:34:47 PM	Helium valve opened
2/13/2012	3:34:47 PM	Main Vac valve opened
2/13/2012	3:34:47 PM	Helium MFC set to  20.000000
2/13/2012	3:34:47 PM	H2 MFC set to  0.000000
2/13/2012	3:34:47 PM	BCl3 MFC set to  0.000000
2/13/2012	3:34:47 PM	PH3 MFC set to  0.000000
2/13/2012	3:34:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:34:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:34:47 PM	Tube furnace set to 150
2/13/2012	3:35:17 PM	Helium valve closed
2/13/2012	3:35:17 PM	H2 valve closed
2/13/2012	3:35:17 PM	BCl3 valve closed
2/13/2012	3:35:17 PM	PH3 valve closed
2/13/2012	3:35:17 PM	SiCl4 pre valve closed
2/13/2012	3:35:17 PM	SiCl4 post valve closed
2/13/2012	3:35:17 PM	Bypass valve closed
2/13/2012	3:35:17 PM	Bubbler valve closed
2/13/2012	3:35:17 PM	Main Vac valve opened
2/13/2012	3:35:17 PM	Helium MFC set to  0.000000
2/13/2012	3:35:17 PM	H2 MFC set to  0.000000
2/13/2012	3:35:17 PM	BCl3 MFC set to  0.000000
2/13/2012	3:35:17 PM	PH3 MFC set to  0.000000
2/13/2012	3:35:17 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:35:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:35:17 PM	Tube furnace set to 150
2/13/2012	3:35:47 PM	H2 valve closed
2/13/2012	3:35:47 PM	BCl3 valve closed
2/13/2012	3:35:47 PM	PH3 valve closed
2/13/2012	3:35:47 PM	SiCl4 pre valve closed
2/13/2012	3:35:47 PM	SiCl4 post valve closed
2/13/2012	3:35:47 PM	Bypass valve closed
2/13/2012	3:35:47 PM	Bubbler valve closed
2/13/2012	3:35:47 PM	Helium valve opened
2/13/2012	3:35:47 PM	Main Vac valve opened
2/13/2012	3:35:47 PM	Helium MFC set to  20.000000
2/13/2012	3:35:47 PM	H2 MFC set to  0.000000
2/13/2012	3:35:47 PM	BCl3 MFC set to  0.000000
2/13/2012	3:35:47 PM	PH3 MFC set to  0.000000
2/13/2012	3:35:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:35:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:35:47 PM	Tube furnace set to 150
2/13/2012	3:36:18 PM	Helium valve closed
2/13/2012	3:36:18 PM	H2 valve closed
2/13/2012	3:36:18 PM	BCl3 valve closed
2/13/2012	3:36:18 PM	PH3 valve closed
2/13/2012	3:36:18 PM	SiCl4 pre valve closed
2/13/2012	3:36:18 PM	SiCl4 post valve closed
2/13/2012	3:36:18 PM	Bypass valve closed
2/13/2012	3:36:18 PM	Bubbler valve closed
2/13/2012	3:36:18 PM	Main Vac valve opened
2/13/2012	3:36:18 PM	Helium MFC set to  0.000000
2/13/2012	3:36:18 PM	H2 MFC set to  0.000000
2/13/2012	3:36:18 PM	BCl3 MFC set to  0.000000
2/13/2012	3:36:18 PM	PH3 MFC set to  0.000000
2/13/2012	3:36:18 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:36:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:36:18 PM	Tube furnace set to 150
2/13/2012	3:36:48 PM	H2 valve closed
2/13/2012	3:36:48 PM	BCl3 valve closed
2/13/2012	3:36:48 PM	PH3 valve closed
2/13/2012	3:36:48 PM	SiCl4 pre valve closed
2/13/2012	3:36:48 PM	SiCl4 post valve closed
2/13/2012	3:36:48 PM	Bypass valve closed
2/13/2012	3:36:48 PM	Bubbler valve closed
2/13/2012	3:36:48 PM	Helium valve opened
2/13/2012	3:36:48 PM	Main Vac valve opened
2/13/2012	3:36:48 PM	Helium MFC set to  20.000000
2/13/2012	3:36:48 PM	H2 MFC set to  0.000000
2/13/2012	3:36:48 PM	BCl3 MFC set to  0.000000
2/13/2012	3:36:48 PM	PH3 MFC set to  0.000000
2/13/2012	3:36:48 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:36:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:36:48 PM	Tube furnace set to 150
2/13/2012	3:37:18 PM	Helium valve closed
2/13/2012	3:37:18 PM	H2 valve closed
2/13/2012	3:37:18 PM	BCl3 valve closed
2/13/2012	3:37:18 PM	PH3 valve closed
2/13/2012	3:37:18 PM	SiCl4 pre valve closed
2/13/2012	3:37:18 PM	SiCl4 post valve closed
2/13/2012	3:37:18 PM	Bypass valve closed
2/13/2012	3:37:18 PM	Bubbler valve closed
2/13/2012	3:37:18 PM	Main Vac valve opened
2/13/2012	3:37:18 PM	Helium MFC set to  0.000000
2/13/2012	3:37:18 PM	H2 MFC set to  0.000000
2/13/2012	3:37:18 PM	BCl3 MFC set to  0.000000
2/13/2012	3:37:18 PM	PH3 MFC set to  0.000000
2/13/2012	3:37:18 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:37:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:37:18 PM	Tube furnace set to 150
2/13/2012	3:37:19 PM	Run finished at 3:37 PM
2/13/2012	3:38:00 PM	Main Vac valve closed
2/13/2012	3:38:17 PM	Main Vac valve opened
2/13/2012	3:39:02 PM	Recipe started at 3:38 PM
2/13/2012	3:39:02 PM	Helium valve closed
2/13/2012	3:39:02 PM	H2 valve closed
2/13/2012	3:39:02 PM	BCl3 valve closed
2/13/2012	3:39:02 PM	PH3 valve closed
2/13/2012	3:39:02 PM	SiCl4 pre valve closed
2/13/2012	3:39:02 PM	SiCl4 post valve closed
2/13/2012	3:39:02 PM	Bypass valve closed
2/13/2012	3:39:02 PM	Bubbler valve closed
2/13/2012	3:39:02 PM	Main Vac valve opened
2/13/2012	3:39:02 PM	Helium MFC set to  0.000000
2/13/2012	3:39:02 PM	H2 MFC set to  0.000000
2/13/2012	3:39:02 PM	BCl3 MFC set to  0.000000
2/13/2012	3:39:02 PM	PH3 MFC set to  0.000000
2/13/2012	3:39:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:39:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:39:03 PM	Tube furnace set to 150
2/13/2012	3:39:33 PM	H2 valve closed
2/13/2012	3:39:33 PM	BCl3 valve closed
2/13/2012	3:39:33 PM	PH3 valve closed
2/13/2012	3:39:33 PM	SiCl4 pre valve closed
2/13/2012	3:39:33 PM	SiCl4 post valve closed
2/13/2012	3:39:33 PM	Bypass valve closed
2/13/2012	3:39:33 PM	Bubbler valve closed
2/13/2012	3:39:33 PM	Helium valve opened
2/13/2012	3:39:33 PM	Main Vac valve opened
2/13/2012	3:39:33 PM	Helium MFC set to  20.000000
2/13/2012	3:39:33 PM	H2 MFC set to  0.000000
2/13/2012	3:39:33 PM	BCl3 MFC set to  0.000000
2/13/2012	3:39:33 PM	PH3 MFC set to  0.000000
2/13/2012	3:39:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:39:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:39:33 PM	Tube furnace set to 150
2/13/2012	3:40:03 PM	Helium valve closed
2/13/2012	3:40:03 PM	H2 valve closed
2/13/2012	3:40:03 PM	BCl3 valve closed
2/13/2012	3:40:03 PM	PH3 valve closed
2/13/2012	3:40:03 PM	SiCl4 pre valve closed
2/13/2012	3:40:03 PM	SiCl4 post valve closed
2/13/2012	3:40:03 PM	Bypass valve closed
2/13/2012	3:40:03 PM	Bubbler valve closed
2/13/2012	3:40:03 PM	Main Vac valve opened
2/13/2012	3:40:03 PM	Helium MFC set to  0.000000
2/13/2012	3:40:03 PM	H2 MFC set to  0.000000
2/13/2012	3:40:03 PM	BCl3 MFC set to  0.000000
2/13/2012	3:40:03 PM	PH3 MFC set to  0.000000
2/13/2012	3:40:03 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:40:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:40:03 PM	Tube furnace set to 150
2/13/2012	3:40:33 PM	H2 valve closed
2/13/2012	3:40:33 PM	BCl3 valve closed
2/13/2012	3:40:33 PM	PH3 valve closed
2/13/2012	3:40:33 PM	SiCl4 pre valve closed
2/13/2012	3:40:33 PM	SiCl4 post valve closed
2/13/2012	3:40:33 PM	Bypass valve closed
2/13/2012	3:40:33 PM	Bubbler valve closed
2/13/2012	3:40:33 PM	Helium valve opened
2/13/2012	3:40:33 PM	Main Vac valve opened
2/13/2012	3:40:33 PM	Helium MFC set to  20.000000
2/13/2012	3:40:33 PM	H2 MFC set to  0.000000
2/13/2012	3:40:33 PM	BCl3 MFC set to  0.000000
2/13/2012	3:40:33 PM	PH3 MFC set to  0.000000
2/13/2012	3:40:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:40:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:40:33 PM	Tube furnace set to 150
2/13/2012	3:41:03 PM	Helium valve closed
2/13/2012	3:41:03 PM	H2 valve closed
2/13/2012	3:41:03 PM	BCl3 valve closed
2/13/2012	3:41:03 PM	PH3 valve closed
2/13/2012	3:41:03 PM	SiCl4 pre valve closed
2/13/2012	3:41:03 PM	SiCl4 post valve closed
2/13/2012	3:41:03 PM	Bypass valve closed
2/13/2012	3:41:03 PM	Bubbler valve closed
2/13/2012	3:41:03 PM	Main Vac valve opened
2/13/2012	3:41:03 PM	Helium MFC set to  0.000000
2/13/2012	3:41:03 PM	H2 MFC set to  0.000000
2/13/2012	3:41:03 PM	BCl3 MFC set to  0.000000
2/13/2012	3:41:03 PM	PH3 MFC set to  0.000000
2/13/2012	3:41:03 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:41:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:41:03 PM	Tube furnace set to 150
2/13/2012	3:41:33 PM	H2 valve closed
2/13/2012	3:41:33 PM	BCl3 valve closed
2/13/2012	3:41:33 PM	PH3 valve closed
2/13/2012	3:41:33 PM	SiCl4 pre valve closed
2/13/2012	3:41:33 PM	SiCl4 post valve closed
2/13/2012	3:41:33 PM	Bypass valve closed
2/13/2012	3:41:33 PM	Bubbler valve closed
2/13/2012	3:41:33 PM	Helium valve opened
2/13/2012	3:41:33 PM	Main Vac valve opened
2/13/2012	3:41:33 PM	Helium MFC set to  20.000000
2/13/2012	3:41:33 PM	H2 MFC set to  0.000000
2/13/2012	3:41:33 PM	BCl3 MFC set to  0.000000
2/13/2012	3:41:33 PM	PH3 MFC set to  0.000000
2/13/2012	3:41:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:41:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:41:34 PM	Tube furnace set to 150
2/13/2012	3:42:04 PM	Helium valve closed
2/13/2012	3:42:04 PM	H2 valve closed
2/13/2012	3:42:04 PM	BCl3 valve closed
2/13/2012	3:42:04 PM	PH3 valve closed
2/13/2012	3:42:04 PM	SiCl4 pre valve closed
2/13/2012	3:42:04 PM	SiCl4 post valve closed
2/13/2012	3:42:04 PM	Bypass valve closed
2/13/2012	3:42:04 PM	Bubbler valve closed
2/13/2012	3:42:04 PM	Main Vac valve opened
2/13/2012	3:42:04 PM	Helium MFC set to  0.000000
2/13/2012	3:42:04 PM	H2 MFC set to  0.000000
2/13/2012	3:42:04 PM	BCl3 MFC set to  0.000000
2/13/2012	3:42:04 PM	PH3 MFC set to  0.000000
2/13/2012	3:42:04 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:42:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:42:04 PM	Tube furnace set to 150
2/13/2012	3:42:34 PM	H2 valve closed
2/13/2012	3:42:34 PM	BCl3 valve closed
2/13/2012	3:42:34 PM	PH3 valve closed
2/13/2012	3:42:34 PM	SiCl4 pre valve closed
2/13/2012	3:42:34 PM	SiCl4 post valve closed
2/13/2012	3:42:34 PM	Bypass valve closed
2/13/2012	3:42:34 PM	Bubbler valve closed
2/13/2012	3:42:34 PM	Helium valve opened
2/13/2012	3:42:34 PM	Main Vac valve opened
2/13/2012	3:42:34 PM	Helium MFC set to  20.000000
2/13/2012	3:42:34 PM	H2 MFC set to  0.000000
2/13/2012	3:42:34 PM	BCl3 MFC set to  0.000000
2/13/2012	3:42:34 PM	PH3 MFC set to  0.000000
2/13/2012	3:42:34 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:42:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:42:34 PM	Tube furnace set to 150
2/13/2012	3:43:04 PM	Helium valve closed
2/13/2012	3:43:04 PM	H2 valve closed
2/13/2012	3:43:04 PM	BCl3 valve closed
2/13/2012	3:43:04 PM	PH3 valve closed
2/13/2012	3:43:04 PM	SiCl4 pre valve closed
2/13/2012	3:43:04 PM	SiCl4 post valve closed
2/13/2012	3:43:04 PM	Bypass valve closed
2/13/2012	3:43:04 PM	Bubbler valve closed
2/13/2012	3:43:04 PM	Main Vac valve opened
2/13/2012	3:43:04 PM	Helium MFC set to  0.000000
2/13/2012	3:43:04 PM	H2 MFC set to  0.000000
2/13/2012	3:43:04 PM	BCl3 MFC set to  0.000000
2/13/2012	3:43:04 PM	PH3 MFC set to  0.000000
2/13/2012	3:43:04 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:43:04 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:43:04 PM	Tube furnace set to 150
2/13/2012	3:43:34 PM	H2 valve closed
2/13/2012	3:43:34 PM	BCl3 valve closed
2/13/2012	3:43:34 PM	PH3 valve closed
2/13/2012	3:43:34 PM	SiCl4 pre valve closed
2/13/2012	3:43:34 PM	SiCl4 post valve closed
2/13/2012	3:43:34 PM	Bypass valve closed
2/13/2012	3:43:34 PM	Bubbler valve closed
2/13/2012	3:43:34 PM	Helium valve opened
2/13/2012	3:43:34 PM	Main Vac valve opened
2/13/2012	3:43:34 PM	Helium MFC set to  20.000000
2/13/2012	3:43:34 PM	H2 MFC set to  0.000000
2/13/2012	3:43:34 PM	BCl3 MFC set to  0.000000
2/13/2012	3:43:34 PM	PH3 MFC set to  0.000000
2/13/2012	3:43:34 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:43:34 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:43:34 PM	Tube furnace set to 150
2/13/2012	3:44:05 PM	Helium valve closed
2/13/2012	3:44:05 PM	H2 valve closed
2/13/2012	3:44:05 PM	BCl3 valve closed
2/13/2012	3:44:05 PM	PH3 valve closed
2/13/2012	3:44:05 PM	SiCl4 pre valve closed
2/13/2012	3:44:05 PM	SiCl4 post valve closed
2/13/2012	3:44:05 PM	Bypass valve closed
2/13/2012	3:44:05 PM	Bubbler valve closed
2/13/2012	3:44:05 PM	Main Vac valve opened
2/13/2012	3:44:05 PM	Helium MFC set to  0.000000
2/13/2012	3:44:05 PM	H2 MFC set to  0.000000
2/13/2012	3:44:05 PM	BCl3 MFC set to  0.000000
2/13/2012	3:44:05 PM	PH3 MFC set to  0.000000
2/13/2012	3:44:05 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:44:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:44:05 PM	Tube furnace set to 150
2/13/2012	3:44:35 PM	H2 valve closed
2/13/2012	3:44:35 PM	BCl3 valve closed
2/13/2012	3:44:35 PM	PH3 valve closed
2/13/2012	3:44:35 PM	SiCl4 pre valve closed
2/13/2012	3:44:35 PM	SiCl4 post valve closed
2/13/2012	3:44:35 PM	Bypass valve closed
2/13/2012	3:44:35 PM	Bubbler valve closed
2/13/2012	3:44:35 PM	Helium valve opened
2/13/2012	3:44:35 PM	Main Vac valve opened
2/13/2012	3:44:35 PM	Helium MFC set to  20.000000
2/13/2012	3:44:35 PM	H2 MFC set to  0.000000
2/13/2012	3:44:35 PM	BCl3 MFC set to  0.000000
2/13/2012	3:44:35 PM	PH3 MFC set to  0.000000
2/13/2012	3:44:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:44:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:44:35 PM	Tube furnace set to 150
2/13/2012	3:45:05 PM	Helium valve closed
2/13/2012	3:45:05 PM	H2 valve closed
2/13/2012	3:45:05 PM	BCl3 valve closed
2/13/2012	3:45:05 PM	PH3 valve closed
2/13/2012	3:45:05 PM	SiCl4 pre valve closed
2/13/2012	3:45:05 PM	SiCl4 post valve closed
2/13/2012	3:45:05 PM	Bypass valve closed
2/13/2012	3:45:05 PM	Bubbler valve closed
2/13/2012	3:45:05 PM	Main Vac valve opened
2/13/2012	3:45:05 PM	Helium MFC set to  0.000000
2/13/2012	3:45:05 PM	H2 MFC set to  0.000000
2/13/2012	3:45:05 PM	BCl3 MFC set to  0.000000
2/13/2012	3:45:05 PM	PH3 MFC set to  0.000000
2/13/2012	3:45:05 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:45:05 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:45:05 PM	Tube furnace set to 150
2/13/2012	3:45:35 PM	H2 valve closed
2/13/2012	3:45:35 PM	BCl3 valve closed
2/13/2012	3:45:35 PM	PH3 valve closed
2/13/2012	3:45:35 PM	SiCl4 pre valve closed
2/13/2012	3:45:35 PM	SiCl4 post valve closed
2/13/2012	3:45:35 PM	Bypass valve closed
2/13/2012	3:45:35 PM	Bubbler valve closed
2/13/2012	3:45:35 PM	Helium valve opened
2/13/2012	3:45:35 PM	Main Vac valve opened
2/13/2012	3:45:35 PM	Helium MFC set to  20.000000
2/13/2012	3:45:35 PM	H2 MFC set to  0.000000
2/13/2012	3:45:35 PM	BCl3 MFC set to  0.000000
2/13/2012	3:45:35 PM	PH3 MFC set to  0.000000
2/13/2012	3:45:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:45:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:45:35 PM	Tube furnace set to 150
2/13/2012	3:46:05 PM	Helium valve closed
2/13/2012	3:46:05 PM	H2 valve closed
2/13/2012	3:46:05 PM	BCl3 valve closed
2/13/2012	3:46:05 PM	PH3 valve closed
2/13/2012	3:46:05 PM	SiCl4 pre valve closed
2/13/2012	3:46:06 PM	SiCl4 post valve closed
2/13/2012	3:46:06 PM	Bypass valve closed
2/13/2012	3:46:06 PM	Bubbler valve closed
2/13/2012	3:46:06 PM	Main Vac valve opened
2/13/2012	3:46:06 PM	Helium MFC set to  0.000000
2/13/2012	3:46:06 PM	H2 MFC set to  0.000000
2/13/2012	3:46:06 PM	BCl3 MFC set to  0.000000
2/13/2012	3:46:06 PM	PH3 MFC set to  0.000000
2/13/2012	3:46:06 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:46:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:46:06 PM	Tube furnace set to 150
2/13/2012	3:46:36 PM	H2 valve closed
2/13/2012	3:46:36 PM	BCl3 valve closed
2/13/2012	3:46:36 PM	PH3 valve closed
2/13/2012	3:46:36 PM	SiCl4 pre valve closed
2/13/2012	3:46:36 PM	SiCl4 post valve closed
2/13/2012	3:46:36 PM	Bypass valve closed
2/13/2012	3:46:36 PM	Bubbler valve closed
2/13/2012	3:46:36 PM	Helium valve opened
2/13/2012	3:46:36 PM	Main Vac valve opened
2/13/2012	3:46:36 PM	Helium MFC set to  20.000000
2/13/2012	3:46:36 PM	H2 MFC set to  0.000000
2/13/2012	3:46:36 PM	BCl3 MFC set to  0.000000
2/13/2012	3:46:36 PM	PH3 MFC set to  0.000000
2/13/2012	3:46:36 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:46:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:46:36 PM	Tube furnace set to 150
2/13/2012	3:47:06 PM	Helium valve closed
2/13/2012	3:47:06 PM	H2 valve closed
2/13/2012	3:47:06 PM	BCl3 valve closed
2/13/2012	3:47:06 PM	PH3 valve closed
2/13/2012	3:47:06 PM	SiCl4 pre valve closed
2/13/2012	3:47:06 PM	SiCl4 post valve closed
2/13/2012	3:47:06 PM	Bypass valve closed
2/13/2012	3:47:06 PM	Bubbler valve closed
2/13/2012	3:47:06 PM	Main Vac valve opened
2/13/2012	3:47:06 PM	Helium MFC set to  0.000000
2/13/2012	3:47:06 PM	H2 MFC set to  0.000000
2/13/2012	3:47:06 PM	BCl3 MFC set to  0.000000
2/13/2012	3:47:06 PM	PH3 MFC set to  0.000000
2/13/2012	3:47:06 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:47:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:47:06 PM	Tube furnace set to 150
2/13/2012	3:47:36 PM	H2 valve closed
2/13/2012	3:47:36 PM	BCl3 valve closed
2/13/2012	3:47:36 PM	PH3 valve closed
2/13/2012	3:47:36 PM	SiCl4 pre valve closed
2/13/2012	3:47:36 PM	SiCl4 post valve closed
2/13/2012	3:47:36 PM	Bypass valve closed
2/13/2012	3:47:36 PM	Bubbler valve closed
2/13/2012	3:47:36 PM	Helium valve opened
2/13/2012	3:47:36 PM	Main Vac valve opened
2/13/2012	3:47:36 PM	Helium MFC set to  20.000000
2/13/2012	3:47:36 PM	H2 MFC set to  0.000000
2/13/2012	3:47:36 PM	BCl3 MFC set to  0.000000
2/13/2012	3:47:36 PM	PH3 MFC set to  0.000000
2/13/2012	3:47:36 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:47:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:47:36 PM	Tube furnace set to 150
2/13/2012	3:48:06 PM	Helium valve closed
2/13/2012	3:48:06 PM	H2 valve closed
2/13/2012	3:48:06 PM	BCl3 valve closed
2/13/2012	3:48:06 PM	PH3 valve closed
2/13/2012	3:48:06 PM	SiCl4 pre valve closed
2/13/2012	3:48:06 PM	SiCl4 post valve closed
2/13/2012	3:48:06 PM	Bypass valve closed
2/13/2012	3:48:06 PM	Bubbler valve closed
2/13/2012	3:48:06 PM	Main Vac valve opened
2/13/2012	3:48:06 PM	Helium MFC set to  0.000000
2/13/2012	3:48:06 PM	H2 MFC set to  0.000000
2/13/2012	3:48:06 PM	BCl3 MFC set to  0.000000
2/13/2012	3:48:06 PM	PH3 MFC set to  0.000000
2/13/2012	3:48:06 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:48:06 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:48:06 PM	Tube furnace set to 150
2/13/2012	3:48:37 PM	H2 valve closed
2/13/2012	3:48:37 PM	BCl3 valve closed
2/13/2012	3:48:37 PM	PH3 valve closed
2/13/2012	3:48:37 PM	SiCl4 pre valve closed
2/13/2012	3:48:37 PM	SiCl4 post valve closed
2/13/2012	3:48:37 PM	Bypass valve closed
2/13/2012	3:48:37 PM	Bubbler valve closed
2/13/2012	3:48:37 PM	Helium valve opened
2/13/2012	3:48:37 PM	Main Vac valve opened
2/13/2012	3:48:37 PM	Helium MFC set to  20.000000
2/13/2012	3:48:37 PM	H2 MFC set to  0.000000
2/13/2012	3:48:37 PM	BCl3 MFC set to  0.000000
2/13/2012	3:48:37 PM	PH3 MFC set to  0.000000
2/13/2012	3:48:37 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:48:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:48:37 PM	Tube furnace set to 150
2/13/2012	3:49:07 PM	Helium valve closed
2/13/2012	3:49:07 PM	H2 valve closed
2/13/2012	3:49:07 PM	BCl3 valve closed
2/13/2012	3:49:07 PM	PH3 valve closed
2/13/2012	3:49:07 PM	SiCl4 pre valve closed
2/13/2012	3:49:07 PM	SiCl4 post valve closed
2/13/2012	3:49:07 PM	Bypass valve closed
2/13/2012	3:49:07 PM	Bubbler valve closed
2/13/2012	3:49:07 PM	Main Vac valve opened
2/13/2012	3:49:07 PM	Helium MFC set to  0.000000
2/13/2012	3:49:07 PM	H2 MFC set to  0.000000
2/13/2012	3:49:07 PM	BCl3 MFC set to  0.000000
2/13/2012	3:49:07 PM	PH3 MFC set to  0.000000
2/13/2012	3:49:07 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:49:07 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:49:07 PM	Tube furnace set to 150
2/13/2012	3:49:08 PM	Run finished at 3:49 PM
2/13/2012	3:53:41 PM	Main Vac valve closed
2/13/2012	3:54:01 PM	Main Vac valve opened
2/13/2012	3:55:43 PM	Recipe started at 3:55 PM
2/13/2012	3:55:43 PM	Helium valve closed
2/13/2012	3:55:43 PM	H2 valve closed
2/13/2012	3:55:43 PM	BCl3 valve closed
2/13/2012	3:55:43 PM	PH3 valve closed
2/13/2012	3:55:43 PM	SiCl4 pre valve closed
2/13/2012	3:55:43 PM	SiCl4 post valve closed
2/13/2012	3:55:43 PM	Main Vac valve closed
2/13/2012	3:55:43 PM	Bypass valve closed
2/13/2012	3:55:43 PM	Bubbler valve closed
2/13/2012	3:55:43 PM	Helium MFC set to  0.000000
2/13/2012	3:55:43 PM	H2 MFC set to  0.000000
2/13/2012	3:55:43 PM	BCl3 MFC set to  0.000000
2/13/2012	3:55:43 PM	PH3 MFC set to  0.000000
2/13/2012	3:55:43 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:55:43 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:55:43 PM	Tube furnace set to 0
2/13/2012	3:55:46 PM	Helium valve closed
2/13/2012	3:55:46 PM	BCl3 valve closed
2/13/2012	3:55:46 PM	PH3 valve closed
2/13/2012	3:55:46 PM	SiCl4 pre valve closed
2/13/2012	3:55:46 PM	SiCl4 post valve closed
2/13/2012	3:55:46 PM	Main Vac valve closed
2/13/2012	3:55:46 PM	Bypass valve closed
2/13/2012	3:55:46 PM	Bubbler valve closed
2/13/2012	3:55:46 PM	H2 valve opened
2/13/2012	3:55:46 PM	Helium MFC set to  0.000000
2/13/2012	3:55:46 PM	H2 MFC set to  500.000000
2/13/2012	3:55:46 PM	BCl3 MFC set to  0.000000
2/13/2012	3:55:46 PM	PH3 MFC set to  0.000000
2/13/2012	3:55:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:55:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:55:46 PM	Tube furnace set to 0
2/13/2012	3:56:51 PM	Helium valve closed
2/13/2012	3:56:51 PM	BCl3 valve closed
2/13/2012	3:56:51 PM	PH3 valve closed
2/13/2012	3:56:51 PM	SiCl4 pre valve closed
2/13/2012	3:56:51 PM	SiCl4 post valve closed
2/13/2012	3:56:51 PM	Main Vac valve closed
2/13/2012	3:56:51 PM	Bypass valve closed
2/13/2012	3:56:51 PM	H2 valve opened
2/13/2012	3:56:51 PM	Bubbler valve opened
2/13/2012	3:56:51 PM	Helium MFC set to  0.000000
2/13/2012	3:56:51 PM	H2 MFC set to  500.000000
2/13/2012	3:56:51 PM	BCl3 MFC set to  0.000000
2/13/2012	3:56:51 PM	PH3 MFC set to  0.000000
2/13/2012	3:56:51 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:56:51 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:56:51 PM	Tube furnace set to 0
2/13/2012	3:56:52 PM	Helium valve closed
2/13/2012	3:56:52 PM	BCl3 valve closed
2/13/2012	3:56:52 PM	PH3 valve closed
2/13/2012	3:56:52 PM	SiCl4 pre valve closed
2/13/2012	3:56:52 PM	SiCl4 post valve closed
2/13/2012	3:56:52 PM	Main Vac valve closed
2/13/2012	3:56:52 PM	Bypass valve closed
2/13/2012	3:56:52 PM	H2 valve opened
2/13/2012	3:56:52 PM	Bubbler valve opened
2/13/2012	3:56:52 PM	Helium MFC set to  0.000000
2/13/2012	3:56:52 PM	H2 MFC set to  500.000000
2/13/2012	3:56:52 PM	BCl3 MFC set to  0.000000
2/13/2012	3:56:52 PM	PH3 MFC set to  0.000000
2/13/2012	3:56:52 PM	SiCl4 MFC set to  0.000000
2/13/2012	3:56:52 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	3:56:52 PM	Tube furnace set to 1000
2/13/2012	4:16:52 PM	Helium valve closed
2/13/2012	4:16:52 PM	PH3 valve closed
2/13/2012	4:16:52 PM	Main Vac valve closed
2/13/2012	4:16:52 PM	Bypass valve closed
2/13/2012	4:16:52 PM	H2 valve opened
2/13/2012	4:16:52 PM	BCl3 valve opened
2/13/2012	4:16:52 PM	SiCl4 pre valve opened
2/13/2012	4:16:52 PM	SiCl4 post valve opened
2/13/2012	4:16:52 PM	Bubbler valve opened
2/13/2012	4:16:52 PM	Helium MFC set to  0.000000
2/13/2012	4:16:52 PM	H2 MFC set to  500.000000
2/13/2012	4:16:52 PM	BCl3 MFC set to  20.000000
2/13/2012	4:16:52 PM	PH3 MFC set to  0.000000
2/13/2012	4:16:52 PM	SiCl4 MFC set to  50.000000
2/13/2012	4:16:52 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:16:52 PM	Tube furnace set to 1000
2/13/2012	4:36:52 PM	Helium valve closed
2/13/2012	4:36:52 PM	BCl3 valve closed
2/13/2012	4:36:52 PM	PH3 valve closed
2/13/2012	4:36:52 PM	SiCl4 pre valve closed
2/13/2012	4:36:52 PM	SiCl4 post valve closed
2/13/2012	4:36:52 PM	Main Vac valve closed
2/13/2012	4:36:52 PM	Bypass valve closed
2/13/2012	4:36:52 PM	H2 valve opened
2/13/2012	4:36:52 PM	Bubbler valve opened
2/13/2012	4:36:52 PM	Helium MFC set to  0.000000
2/13/2012	4:36:52 PM	H2 MFC set to  500.000000
2/13/2012	4:36:52 PM	BCl3 MFC set to  0.000000
2/13/2012	4:36:52 PM	PH3 MFC set to  0.000000
2/13/2012	4:36:52 PM	SiCl4 MFC set to  0.000000
2/13/2012	4:36:52 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:36:52 PM	Tube furnace set to 750
2/13/2012	4:41:52 PM	H2 valve closed
2/13/2012	4:41:52 PM	BCl3 valve closed
2/13/2012	4:41:52 PM	PH3 valve closed
2/13/2012	4:41:52 PM	SiCl4 pre valve closed
2/13/2012	4:41:52 PM	SiCl4 post valve closed
2/13/2012	4:41:52 PM	Main Vac valve closed
2/13/2012	4:41:52 PM	Bypass valve closed
2/13/2012	4:41:52 PM	Helium valve opened
2/13/2012	4:41:52 PM	Bubbler valve opened
2/13/2012	4:41:53 PM	Helium MFC set to  500.000000
2/13/2012	4:41:53 PM	H2 MFC set to  0.000000
2/13/2012	4:41:53 PM	BCl3 MFC set to  0.000000
2/13/2012	4:41:53 PM	PH3 MFC set to  0.000000
2/13/2012	4:41:53 PM	SiCl4 MFC set to  0.000000
2/13/2012	4:41:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	4:41:53 PM	Tube furnace set to 0
2/13/2012	5:01:53 PM	Helium valve closed
2/13/2012	5:01:53 PM	H2 valve closed
2/13/2012	5:01:53 PM	BCl3 valve closed
2/13/2012	5:01:53 PM	PH3 valve closed
2/13/2012	5:01:53 PM	SiCl4 pre valve closed
2/13/2012	5:01:53 PM	SiCl4 post valve closed
2/13/2012	5:01:53 PM	Main Vac valve closed
2/13/2012	5:01:53 PM	Bypass valve closed
2/13/2012	5:01:53 PM	Bubbler valve closed
2/13/2012	5:01:53 PM	Helium MFC set to  0.000000
2/13/2012	5:01:53 PM	H2 MFC set to  0.000000
2/13/2012	5:01:53 PM	BCl3 MFC set to  0.000000
2/13/2012	5:01:53 PM	PH3 MFC set to  0.000000
2/13/2012	5:01:53 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:01:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:01:53 PM	Tube furnace set to 0
2/13/2012	5:01:54 PM	Run finished at 5:01 PM
2/13/2012	5:16:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	5:16:51 PM	Recipe started at 5:16 PM
2/13/2012	5:16:51 PM	Helium valve closed
2/13/2012	5:16:51 PM	H2 valve closed
2/13/2012	5:16:51 PM	BCl3 valve closed
2/13/2012	5:16:51 PM	PH3 valve closed
2/13/2012	5:16:51 PM	SiCl4 pre valve closed
2/13/2012	5:16:51 PM	SiCl4 post valve closed
2/13/2012	5:16:51 PM	Main Vac valve closed
2/13/2012	5:16:51 PM	Bubbler valve closed
2/13/2012	5:16:51 PM	Bypass valve opened
2/13/2012	5:16:51 PM	Helium MFC set to  0.000000
2/13/2012	5:16:51 PM	H2 MFC set to  0.000000
2/13/2012	5:16:51 PM	BCl3 MFC set to  0.000000
2/13/2012	5:16:51 PM	PH3 MFC set to  0.000000
2/13/2012	5:16:51 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:16:51 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:16:51 PM	Tube furnace set to 0
2/13/2012	5:17:53 PM	Helium valve closed
2/13/2012	5:17:53 PM	H2 valve closed
2/13/2012	5:17:53 PM	BCl3 valve closed
2/13/2012	5:17:53 PM	PH3 valve closed
2/13/2012	5:17:53 PM	SiCl4 pre valve closed
2/13/2012	5:17:53 PM	SiCl4 post valve closed
2/13/2012	5:17:53 PM	Main Vac valve closed
2/13/2012	5:17:53 PM	Bubbler valve closed
2/13/2012	5:17:53 PM	Bypass valve opened
2/13/2012	5:17:53 PM	Helium MFC set to  0.000000
2/13/2012	5:17:53 PM	H2 MFC set to  0.000000
2/13/2012	5:17:53 PM	BCl3 MFC set to  0.000000
2/13/2012	5:17:53 PM	PH3 MFC set to  0.000000
2/13/2012	5:17:53 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:17:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:17:54 PM	Tube furnace set to 0
2/13/2012	5:18:54 PM	Helium valve closed
2/13/2012	5:18:54 PM	H2 valve closed
2/13/2012	5:18:54 PM	BCl3 valve closed
2/13/2012	5:18:54 PM	PH3 valve closed
2/13/2012	5:18:54 PM	SiCl4 pre valve closed
2/13/2012	5:18:54 PM	SiCl4 post valve closed
2/13/2012	5:18:54 PM	Bypass valve closed
2/13/2012	5:18:54 PM	Bubbler valve closed
2/13/2012	5:18:54 PM	Main Vac valve opened
2/13/2012	5:18:54 PM	Helium MFC set to  0.000000
2/13/2012	5:18:54 PM	H2 MFC set to  0.000000
2/13/2012	5:18:54 PM	BCl3 MFC set to  0.000000
2/13/2012	5:18:54 PM	PH3 MFC set to  0.000000
2/13/2012	5:18:54 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:18:54 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:18:54 PM	Tube furnace set to 0
2/13/2012	5:18:55 PM	Run finished at 5:18 PM
2/13/2012	5:18:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	5:19:28 PM	Recipe started at 5:19 PM
2/13/2012	5:19:28 PM	Helium valve closed
2/13/2012	5:19:28 PM	H2 valve closed
2/13/2012	5:19:28 PM	BCl3 valve closed
2/13/2012	5:19:28 PM	PH3 valve closed
2/13/2012	5:19:28 PM	SiCl4 pre valve closed
2/13/2012	5:19:28 PM	SiCl4 post valve closed
2/13/2012	5:19:28 PM	Bypass valve closed
2/13/2012	5:19:28 PM	Bubbler valve closed
2/13/2012	5:19:28 PM	Main Vac valve opened
2/13/2012	5:19:28 PM	Helium MFC set to  0.000000
2/13/2012	5:19:28 PM	H2 MFC set to  0.000000
2/13/2012	5:19:28 PM	BCl3 MFC set to  0.000000
2/13/2012	5:19:28 PM	PH3 MFC set to  0.000000
2/13/2012	5:19:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:19:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:19:29 PM	Tube furnace set to 150
2/13/2012	5:19:59 PM	H2 valve closed
2/13/2012	5:19:59 PM	BCl3 valve closed
2/13/2012	5:19:59 PM	PH3 valve closed
2/13/2012	5:19:59 PM	SiCl4 pre valve closed
2/13/2012	5:19:59 PM	SiCl4 post valve closed
2/13/2012	5:19:59 PM	Bypass valve closed
2/13/2012	5:19:59 PM	Bubbler valve closed
2/13/2012	5:19:59 PM	Helium valve opened
2/13/2012	5:19:59 PM	Main Vac valve opened
2/13/2012	5:19:59 PM	Helium MFC set to  20.000000
2/13/2012	5:19:59 PM	H2 MFC set to  0.000000
2/13/2012	5:19:59 PM	BCl3 MFC set to  0.000000
2/13/2012	5:19:59 PM	PH3 MFC set to  0.000000
2/13/2012	5:19:59 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:19:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:19:59 PM	Tube furnace set to 150
2/13/2012	5:20:29 PM	Helium valve closed
2/13/2012	5:20:29 PM	H2 valve closed
2/13/2012	5:20:29 PM	BCl3 valve closed
2/13/2012	5:20:29 PM	PH3 valve closed
2/13/2012	5:20:29 PM	SiCl4 pre valve closed
2/13/2012	5:20:29 PM	SiCl4 post valve closed
2/13/2012	5:20:29 PM	Bypass valve closed
2/13/2012	5:20:29 PM	Bubbler valve closed
2/13/2012	5:20:29 PM	Main Vac valve opened
2/13/2012	5:20:29 PM	Helium MFC set to  0.000000
2/13/2012	5:20:29 PM	H2 MFC set to  0.000000
2/13/2012	5:20:29 PM	BCl3 MFC set to  0.000000
2/13/2012	5:20:29 PM	PH3 MFC set to  0.000000
2/13/2012	5:20:29 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:20:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:20:29 PM	Tube furnace set to 150
2/13/2012	5:20:59 PM	H2 valve closed
2/13/2012	5:20:59 PM	BCl3 valve closed
2/13/2012	5:20:59 PM	PH3 valve closed
2/13/2012	5:20:59 PM	SiCl4 pre valve closed
2/13/2012	5:20:59 PM	SiCl4 post valve closed
2/13/2012	5:20:59 PM	Bypass valve closed
2/13/2012	5:20:59 PM	Bubbler valve closed
2/13/2012	5:20:59 PM	Helium valve opened
2/13/2012	5:20:59 PM	Main Vac valve opened
2/13/2012	5:20:59 PM	Helium MFC set to  20.000000
2/13/2012	5:20:59 PM	H2 MFC set to  0.000000
2/13/2012	5:20:59 PM	BCl3 MFC set to  0.000000
2/13/2012	5:20:59 PM	PH3 MFC set to  0.000000
2/13/2012	5:20:59 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:20:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:20:59 PM	Tube furnace set to 150
2/13/2012	5:21:29 PM	Helium valve closed
2/13/2012	5:21:29 PM	H2 valve closed
2/13/2012	5:21:29 PM	BCl3 valve closed
2/13/2012	5:21:29 PM	PH3 valve closed
2/13/2012	5:21:29 PM	SiCl4 pre valve closed
2/13/2012	5:21:29 PM	SiCl4 post valve closed
2/13/2012	5:21:29 PM	Bypass valve closed
2/13/2012	5:21:29 PM	Bubbler valve closed
2/13/2012	5:21:29 PM	Main Vac valve opened
2/13/2012	5:21:29 PM	Helium MFC set to  0.000000
2/13/2012	5:21:29 PM	H2 MFC set to  0.000000
2/13/2012	5:21:29 PM	BCl3 MFC set to  0.000000
2/13/2012	5:21:29 PM	PH3 MFC set to  0.000000
2/13/2012	5:21:29 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:21:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:21:29 PM	Tube furnace set to 150
2/13/2012	5:21:59 PM	H2 valve closed
2/13/2012	5:21:59 PM	BCl3 valve closed
2/13/2012	5:21:59 PM	PH3 valve closed
2/13/2012	5:21:59 PM	SiCl4 pre valve closed
2/13/2012	5:21:59 PM	SiCl4 post valve closed
2/13/2012	5:21:59 PM	Bypass valve closed
2/13/2012	5:21:59 PM	Bubbler valve closed
2/13/2012	5:21:59 PM	Helium valve opened
2/13/2012	5:21:59 PM	Main Vac valve opened
2/13/2012	5:22:00 PM	Helium MFC set to  20.000000
2/13/2012	5:22:00 PM	H2 MFC set to  0.000000
2/13/2012	5:22:00 PM	BCl3 MFC set to  0.000000
2/13/2012	5:22:00 PM	PH3 MFC set to  0.000000
2/13/2012	5:22:00 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:22:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:22:00 PM	Tube furnace set to 150
2/13/2012	5:22:30 PM	Helium valve closed
2/13/2012	5:22:30 PM	H2 valve closed
2/13/2012	5:22:30 PM	BCl3 valve closed
2/13/2012	5:22:30 PM	PH3 valve closed
2/13/2012	5:22:30 PM	SiCl4 pre valve closed
2/13/2012	5:22:30 PM	SiCl4 post valve closed
2/13/2012	5:22:30 PM	Bypass valve closed
2/13/2012	5:22:30 PM	Bubbler valve closed
2/13/2012	5:22:30 PM	Main Vac valve opened
2/13/2012	5:22:30 PM	Helium MFC set to  0.000000
2/13/2012	5:22:30 PM	H2 MFC set to  0.000000
2/13/2012	5:22:30 PM	BCl3 MFC set to  0.000000
2/13/2012	5:22:30 PM	PH3 MFC set to  0.000000
2/13/2012	5:22:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:22:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:22:30 PM	Tube furnace set to 150
2/13/2012	5:23:00 PM	H2 valve closed
2/13/2012	5:23:00 PM	BCl3 valve closed
2/13/2012	5:23:00 PM	PH3 valve closed
2/13/2012	5:23:00 PM	SiCl4 pre valve closed
2/13/2012	5:23:00 PM	SiCl4 post valve closed
2/13/2012	5:23:00 PM	Bypass valve closed
2/13/2012	5:23:00 PM	Bubbler valve closed
2/13/2012	5:23:00 PM	Helium valve opened
2/13/2012	5:23:00 PM	Main Vac valve opened
2/13/2012	5:23:00 PM	Helium MFC set to  20.000000
2/13/2012	5:23:00 PM	H2 MFC set to  0.000000
2/13/2012	5:23:00 PM	BCl3 MFC set to  0.000000
2/13/2012	5:23:00 PM	PH3 MFC set to  0.000000
2/13/2012	5:23:00 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:23:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:23:00 PM	Tube furnace set to 150
2/13/2012	5:23:30 PM	Helium valve closed
2/13/2012	5:23:30 PM	H2 valve closed
2/13/2012	5:23:30 PM	BCl3 valve closed
2/13/2012	5:23:30 PM	PH3 valve closed
2/13/2012	5:23:30 PM	SiCl4 pre valve closed
2/13/2012	5:23:30 PM	SiCl4 post valve closed
2/13/2012	5:23:30 PM	Bypass valve closed
2/13/2012	5:23:30 PM	Bubbler valve closed
2/13/2012	5:23:30 PM	Main Vac valve opened
2/13/2012	5:23:30 PM	Helium MFC set to  0.000000
2/13/2012	5:23:30 PM	H2 MFC set to  0.000000
2/13/2012	5:23:30 PM	BCl3 MFC set to  0.000000
2/13/2012	5:23:30 PM	PH3 MFC set to  0.000000
2/13/2012	5:23:30 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:23:30 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:23:30 PM	Tube furnace set to 150
2/13/2012	5:24:00 PM	H2 valve closed
2/13/2012	5:24:00 PM	BCl3 valve closed
2/13/2012	5:24:00 PM	PH3 valve closed
2/13/2012	5:24:00 PM	SiCl4 pre valve closed
2/13/2012	5:24:00 PM	SiCl4 post valve closed
2/13/2012	5:24:00 PM	Bypass valve closed
2/13/2012	5:24:00 PM	Bubbler valve closed
2/13/2012	5:24:00 PM	Helium valve opened
2/13/2012	5:24:00 PM	Main Vac valve opened
2/13/2012	5:24:00 PM	Helium MFC set to  20.000000
2/13/2012	5:24:00 PM	H2 MFC set to  0.000000
2/13/2012	5:24:00 PM	BCl3 MFC set to  0.000000
2/13/2012	5:24:00 PM	PH3 MFC set to  0.000000
2/13/2012	5:24:00 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:24:00 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:24:01 PM	Tube furnace set to 150
2/13/2012	5:24:31 PM	Helium valve closed
2/13/2012	5:24:31 PM	H2 valve closed
2/13/2012	5:24:31 PM	BCl3 valve closed
2/13/2012	5:24:31 PM	PH3 valve closed
2/13/2012	5:24:31 PM	SiCl4 pre valve closed
2/13/2012	5:24:31 PM	SiCl4 post valve closed
2/13/2012	5:24:31 PM	Bypass valve closed
2/13/2012	5:24:31 PM	Bubbler valve closed
2/13/2012	5:24:31 PM	Main Vac valve opened
2/13/2012	5:24:31 PM	Helium MFC set to  0.000000
2/13/2012	5:24:31 PM	H2 MFC set to  0.000000
2/13/2012	5:24:31 PM	BCl3 MFC set to  0.000000
2/13/2012	5:24:31 PM	PH3 MFC set to  0.000000
2/13/2012	5:24:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:24:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:24:31 PM	Tube furnace set to 150
2/13/2012	5:25:01 PM	H2 valve closed
2/13/2012	5:25:01 PM	BCl3 valve closed
2/13/2012	5:25:01 PM	PH3 valve closed
2/13/2012	5:25:01 PM	SiCl4 pre valve closed
2/13/2012	5:25:01 PM	SiCl4 post valve closed
2/13/2012	5:25:01 PM	Bypass valve closed
2/13/2012	5:25:01 PM	Bubbler valve closed
2/13/2012	5:25:01 PM	Helium valve opened
2/13/2012	5:25:01 PM	Main Vac valve opened
2/13/2012	5:25:01 PM	Helium MFC set to  20.000000
2/13/2012	5:25:01 PM	H2 MFC set to  0.000000
2/13/2012	5:25:01 PM	BCl3 MFC set to  0.000000
2/13/2012	5:25:01 PM	PH3 MFC set to  0.000000
2/13/2012	5:25:01 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:25:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:25:01 PM	Tube furnace set to 150
2/13/2012	5:25:31 PM	Helium valve closed
2/13/2012	5:25:31 PM	H2 valve closed
2/13/2012	5:25:31 PM	BCl3 valve closed
2/13/2012	5:25:31 PM	PH3 valve closed
2/13/2012	5:25:31 PM	SiCl4 pre valve closed
2/13/2012	5:25:31 PM	SiCl4 post valve closed
2/13/2012	5:25:31 PM	Bypass valve closed
2/13/2012	5:25:31 PM	Bubbler valve closed
2/13/2012	5:25:31 PM	Main Vac valve opened
2/13/2012	5:25:31 PM	Helium MFC set to  0.000000
2/13/2012	5:25:31 PM	H2 MFC set to  0.000000
2/13/2012	5:25:31 PM	BCl3 MFC set to  0.000000
2/13/2012	5:25:31 PM	PH3 MFC set to  0.000000
2/13/2012	5:25:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:25:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:25:31 PM	Tube furnace set to 150
2/13/2012	5:26:01 PM	H2 valve closed
2/13/2012	5:26:01 PM	BCl3 valve closed
2/13/2012	5:26:01 PM	PH3 valve closed
2/13/2012	5:26:01 PM	SiCl4 pre valve closed
2/13/2012	5:26:01 PM	SiCl4 post valve closed
2/13/2012	5:26:01 PM	Bypass valve closed
2/13/2012	5:26:01 PM	Bubbler valve closed
2/13/2012	5:26:01 PM	Helium valve opened
2/13/2012	5:26:01 PM	Main Vac valve opened
2/13/2012	5:26:01 PM	Helium MFC set to  20.000000
2/13/2012	5:26:01 PM	H2 MFC set to  0.000000
2/13/2012	5:26:01 PM	BCl3 MFC set to  0.000000
2/13/2012	5:26:01 PM	PH3 MFC set to  0.000000
2/13/2012	5:26:01 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:26:01 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:26:01 PM	Tube furnace set to 150
2/13/2012	5:26:31 PM	Helium valve closed
2/13/2012	5:26:31 PM	H2 valve closed
2/13/2012	5:26:31 PM	BCl3 valve closed
2/13/2012	5:26:31 PM	PH3 valve closed
2/13/2012	5:26:31 PM	SiCl4 pre valve closed
2/13/2012	5:26:31 PM	SiCl4 post valve closed
2/13/2012	5:26:31 PM	Bypass valve closed
2/13/2012	5:26:31 PM	Bubbler valve closed
2/13/2012	5:26:31 PM	Main Vac valve opened
2/13/2012	5:26:31 PM	Helium MFC set to  0.000000
2/13/2012	5:26:31 PM	H2 MFC set to  0.000000
2/13/2012	5:26:31 PM	BCl3 MFC set to  0.000000
2/13/2012	5:26:31 PM	PH3 MFC set to  0.000000
2/13/2012	5:26:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:26:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:26:32 PM	Tube furnace set to 150
2/13/2012	5:27:02 PM	H2 valve closed
2/13/2012	5:27:02 PM	BCl3 valve closed
2/13/2012	5:27:02 PM	PH3 valve closed
2/13/2012	5:27:02 PM	SiCl4 pre valve closed
2/13/2012	5:27:02 PM	SiCl4 post valve closed
2/13/2012	5:27:02 PM	Bypass valve closed
2/13/2012	5:27:02 PM	Bubbler valve closed
2/13/2012	5:27:02 PM	Helium valve opened
2/13/2012	5:27:02 PM	Main Vac valve opened
2/13/2012	5:27:02 PM	Helium MFC set to  20.000000
2/13/2012	5:27:02 PM	H2 MFC set to  0.000000
2/13/2012	5:27:02 PM	BCl3 MFC set to  0.000000
2/13/2012	5:27:02 PM	PH3 MFC set to  0.000000
2/13/2012	5:27:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:27:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:27:02 PM	Tube furnace set to 150
2/13/2012	5:27:32 PM	Helium valve closed
2/13/2012	5:27:32 PM	H2 valve closed
2/13/2012	5:27:32 PM	BCl3 valve closed
2/13/2012	5:27:32 PM	PH3 valve closed
2/13/2012	5:27:32 PM	SiCl4 pre valve closed
2/13/2012	5:27:32 PM	SiCl4 post valve closed
2/13/2012	5:27:32 PM	Bypass valve closed
2/13/2012	5:27:32 PM	Bubbler valve closed
2/13/2012	5:27:32 PM	Main Vac valve opened
2/13/2012	5:27:32 PM	Helium MFC set to  0.000000
2/13/2012	5:27:32 PM	H2 MFC set to  0.000000
2/13/2012	5:27:32 PM	BCl3 MFC set to  0.000000
2/13/2012	5:27:32 PM	PH3 MFC set to  0.000000
2/13/2012	5:27:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:27:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:27:32 PM	Tube furnace set to 150
2/13/2012	5:28:02 PM	H2 valve closed
2/13/2012	5:28:02 PM	BCl3 valve closed
2/13/2012	5:28:02 PM	PH3 valve closed
2/13/2012	5:28:02 PM	SiCl4 pre valve closed
2/13/2012	5:28:02 PM	SiCl4 post valve closed
2/13/2012	5:28:02 PM	Bypass valve closed
2/13/2012	5:28:02 PM	Bubbler valve closed
2/13/2012	5:28:02 PM	Helium valve opened
2/13/2012	5:28:02 PM	Main Vac valve opened
2/13/2012	5:28:02 PM	Helium MFC set to  20.000000
2/13/2012	5:28:02 PM	H2 MFC set to  0.000000
2/13/2012	5:28:02 PM	BCl3 MFC set to  0.000000
2/13/2012	5:28:02 PM	PH3 MFC set to  0.000000
2/13/2012	5:28:02 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:28:02 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:28:02 PM	Tube furnace set to 150
2/13/2012	5:28:32 PM	Helium valve closed
2/13/2012	5:28:32 PM	H2 valve closed
2/13/2012	5:28:32 PM	BCl3 valve closed
2/13/2012	5:28:32 PM	PH3 valve closed
2/13/2012	5:28:32 PM	SiCl4 pre valve closed
2/13/2012	5:28:32 PM	SiCl4 post valve closed
2/13/2012	5:28:32 PM	Bypass valve closed
2/13/2012	5:28:32 PM	Bubbler valve closed
2/13/2012	5:28:32 PM	Main Vac valve opened
2/13/2012	5:28:32 PM	Helium MFC set to  0.000000
2/13/2012	5:28:32 PM	H2 MFC set to  0.000000
2/13/2012	5:28:32 PM	BCl3 MFC set to  0.000000
2/13/2012	5:28:32 PM	PH3 MFC set to  0.000000
2/13/2012	5:28:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:28:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:28:32 PM	Tube furnace set to 150
2/13/2012	5:29:02 PM	H2 valve closed
2/13/2012	5:29:02 PM	BCl3 valve closed
2/13/2012	5:29:02 PM	PH3 valve closed
2/13/2012	5:29:02 PM	SiCl4 pre valve closed
2/13/2012	5:29:03 PM	SiCl4 post valve closed
2/13/2012	5:29:03 PM	Bypass valve closed
2/13/2012	5:29:03 PM	Bubbler valve closed
2/13/2012	5:29:03 PM	Helium valve opened
2/13/2012	5:29:03 PM	Main Vac valve opened
2/13/2012	5:29:03 PM	Helium MFC set to  20.000000
2/13/2012	5:29:03 PM	H2 MFC set to  0.000000
2/13/2012	5:29:03 PM	BCl3 MFC set to  0.000000
2/13/2012	5:29:03 PM	PH3 MFC set to  0.000000
2/13/2012	5:29:03 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:29:03 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:29:03 PM	Tube furnace set to 150
2/13/2012	5:29:33 PM	Helium valve closed
2/13/2012	5:29:33 PM	H2 valve closed
2/13/2012	5:29:33 PM	BCl3 valve closed
2/13/2012	5:29:33 PM	PH3 valve closed
2/13/2012	5:29:33 PM	SiCl4 pre valve closed
2/13/2012	5:29:33 PM	SiCl4 post valve closed
2/13/2012	5:29:33 PM	Bypass valve closed
2/13/2012	5:29:33 PM	Bubbler valve closed
2/13/2012	5:29:33 PM	Main Vac valve opened
2/13/2012	5:29:33 PM	Helium MFC set to  0.000000
2/13/2012	5:29:33 PM	H2 MFC set to  0.000000
2/13/2012	5:29:33 PM	BCl3 MFC set to  0.000000
2/13/2012	5:29:33 PM	PH3 MFC set to  0.000000
2/13/2012	5:29:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:29:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:29:33 PM	Tube furnace set to 150
2/13/2012	5:29:34 PM	Run finished at 5:29 PM
2/13/2012	5:30:19 PM	Main Vac valve closed
2/13/2012	5:30:32 PM	Main Vac valve opened
2/13/2012	5:30:40 PM	Recipe started at 5:30 PM
2/13/2012	5:30:40 PM	Helium valve closed
2/13/2012	5:30:40 PM	H2 valve closed
2/13/2012	5:30:40 PM	BCl3 valve closed
2/13/2012	5:30:40 PM	PH3 valve closed
2/13/2012	5:30:40 PM	SiCl4 pre valve closed
2/13/2012	5:30:40 PM	SiCl4 post valve closed
2/13/2012	5:30:40 PM	Bypass valve closed
2/13/2012	5:30:40 PM	Bubbler valve closed
2/13/2012	5:30:40 PM	Main Vac valve opened
2/13/2012	5:30:40 PM	Helium MFC set to  0.000000
2/13/2012	5:30:40 PM	H2 MFC set to  0.000000
2/13/2012	5:30:40 PM	BCl3 MFC set to  0.000000
2/13/2012	5:30:40 PM	PH3 MFC set to  0.000000
2/13/2012	5:30:40 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:30:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:30:41 PM	Tube furnace set to 150
2/13/2012	5:30:45 PM	H2 valve closed
2/13/2012	5:30:45 PM	BCl3 valve closed
2/13/2012	5:30:45 PM	PH3 valve closed
2/13/2012	5:30:45 PM	SiCl4 pre valve closed
2/13/2012	5:30:45 PM	SiCl4 post valve closed
2/13/2012	5:30:45 PM	Bypass valve closed
2/13/2012	5:30:45 PM	Bubbler valve closed
2/13/2012	5:30:45 PM	Helium valve opened
2/13/2012	5:30:45 PM	Main Vac valve opened
2/13/2012	5:30:45 PM	Helium MFC set to  20.000000
2/13/2012	5:30:45 PM	H2 MFC set to  0.000000
2/13/2012	5:30:45 PM	BCl3 MFC set to  0.000000
2/13/2012	5:30:45 PM	PH3 MFC set to  0.000000
2/13/2012	5:30:45 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:30:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:30:45 PM	Tube furnace set to 150
2/13/2012	5:31:15 PM	Helium valve closed
2/13/2012	5:31:15 PM	H2 valve closed
2/13/2012	5:31:15 PM	BCl3 valve closed
2/13/2012	5:31:15 PM	PH3 valve closed
2/13/2012	5:31:15 PM	SiCl4 pre valve closed
2/13/2012	5:31:15 PM	SiCl4 post valve closed
2/13/2012	5:31:15 PM	Bypass valve closed
2/13/2012	5:31:15 PM	Bubbler valve closed
2/13/2012	5:31:15 PM	Main Vac valve opened
2/13/2012	5:31:15 PM	Helium MFC set to  0.000000
2/13/2012	5:31:15 PM	H2 MFC set to  0.000000
2/13/2012	5:31:15 PM	BCl3 MFC set to  0.000000
2/13/2012	5:31:15 PM	PH3 MFC set to  0.000000
2/13/2012	5:31:15 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:31:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:31:15 PM	Tube furnace set to 150
2/13/2012	5:31:45 PM	H2 valve closed
2/13/2012	5:31:45 PM	BCl3 valve closed
2/13/2012	5:31:45 PM	PH3 valve closed
2/13/2012	5:31:45 PM	SiCl4 pre valve closed
2/13/2012	5:31:45 PM	SiCl4 post valve closed
2/13/2012	5:31:45 PM	Bypass valve closed
2/13/2012	5:31:45 PM	Bubbler valve closed
2/13/2012	5:31:45 PM	Helium valve opened
2/13/2012	5:31:45 PM	Main Vac valve opened
2/13/2012	5:31:45 PM	Helium MFC set to  20.000000
2/13/2012	5:31:45 PM	H2 MFC set to  0.000000
2/13/2012	5:31:45 PM	BCl3 MFC set to  0.000000
2/13/2012	5:31:45 PM	PH3 MFC set to  0.000000
2/13/2012	5:31:45 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:31:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:31:45 PM	Tube furnace set to 150
2/13/2012	5:32:15 PM	Helium valve closed
2/13/2012	5:32:15 PM	H2 valve closed
2/13/2012	5:32:15 PM	BCl3 valve closed
2/13/2012	5:32:15 PM	PH3 valve closed
2/13/2012	5:32:15 PM	SiCl4 pre valve closed
2/13/2012	5:32:15 PM	SiCl4 post valve closed
2/13/2012	5:32:15 PM	Bypass valve closed
2/13/2012	5:32:15 PM	Bubbler valve closed
2/13/2012	5:32:15 PM	Main Vac valve opened
2/13/2012	5:32:15 PM	Helium MFC set to  0.000000
2/13/2012	5:32:15 PM	H2 MFC set to  0.000000
2/13/2012	5:32:15 PM	BCl3 MFC set to  0.000000
2/13/2012	5:32:15 PM	PH3 MFC set to  0.000000
2/13/2012	5:32:15 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:32:15 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:32:15 PM	Tube furnace set to 150
2/13/2012	5:32:45 PM	H2 valve closed
2/13/2012	5:32:45 PM	BCl3 valve closed
2/13/2012	5:32:45 PM	PH3 valve closed
2/13/2012	5:32:45 PM	SiCl4 pre valve closed
2/13/2012	5:32:45 PM	SiCl4 post valve closed
2/13/2012	5:32:45 PM	Bypass valve closed
2/13/2012	5:32:45 PM	Bubbler valve closed
2/13/2012	5:32:45 PM	Helium valve opened
2/13/2012	5:32:45 PM	Main Vac valve opened
2/13/2012	5:32:45 PM	Helium MFC set to  20.000000
2/13/2012	5:32:45 PM	H2 MFC set to  0.000000
2/13/2012	5:32:45 PM	BCl3 MFC set to  0.000000
2/13/2012	5:32:45 PM	PH3 MFC set to  0.000000
2/13/2012	5:32:45 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:32:45 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:32:46 PM	Tube furnace set to 150
2/13/2012	5:33:16 PM	Helium valve closed
2/13/2012	5:33:16 PM	H2 valve closed
2/13/2012	5:33:16 PM	BCl3 valve closed
2/13/2012	5:33:16 PM	PH3 valve closed
2/13/2012	5:33:16 PM	SiCl4 pre valve closed
2/13/2012	5:33:16 PM	SiCl4 post valve closed
2/13/2012	5:33:16 PM	Bypass valve closed
2/13/2012	5:33:16 PM	Bubbler valve closed
2/13/2012	5:33:16 PM	Main Vac valve opened
2/13/2012	5:33:16 PM	Helium MFC set to  0.000000
2/13/2012	5:33:16 PM	H2 MFC set to  0.000000
2/13/2012	5:33:16 PM	BCl3 MFC set to  0.000000
2/13/2012	5:33:16 PM	PH3 MFC set to  0.000000
2/13/2012	5:33:16 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:33:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:33:16 PM	Tube furnace set to 150
2/13/2012	5:33:46 PM	H2 valve closed
2/13/2012	5:33:46 PM	BCl3 valve closed
2/13/2012	5:33:46 PM	PH3 valve closed
2/13/2012	5:33:46 PM	SiCl4 pre valve closed
2/13/2012	5:33:46 PM	SiCl4 post valve closed
2/13/2012	5:33:46 PM	Bypass valve closed
2/13/2012	5:33:46 PM	Bubbler valve closed
2/13/2012	5:33:46 PM	Helium valve opened
2/13/2012	5:33:46 PM	Main Vac valve opened
2/13/2012	5:33:46 PM	Helium MFC set to  20.000000
2/13/2012	5:33:46 PM	H2 MFC set to  0.000000
2/13/2012	5:33:46 PM	BCl3 MFC set to  0.000000
2/13/2012	5:33:46 PM	PH3 MFC set to  0.000000
2/13/2012	5:33:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:33:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:33:46 PM	Tube furnace set to 150
2/13/2012	5:34:16 PM	Helium valve closed
2/13/2012	5:34:16 PM	H2 valve closed
2/13/2012	5:34:16 PM	BCl3 valve closed
2/13/2012	5:34:16 PM	PH3 valve closed
2/13/2012	5:34:16 PM	SiCl4 pre valve closed
2/13/2012	5:34:16 PM	SiCl4 post valve closed
2/13/2012	5:34:16 PM	Bypass valve closed
2/13/2012	5:34:16 PM	Bubbler valve closed
2/13/2012	5:34:16 PM	Main Vac valve opened
2/13/2012	5:34:16 PM	Helium MFC set to  0.000000
2/13/2012	5:34:16 PM	H2 MFC set to  0.000000
2/13/2012	5:34:16 PM	BCl3 MFC set to  0.000000
2/13/2012	5:34:16 PM	PH3 MFC set to  0.000000
2/13/2012	5:34:16 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:34:16 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:34:16 PM	Tube furnace set to 150
2/13/2012	5:34:46 PM	H2 valve closed
2/13/2012	5:34:46 PM	BCl3 valve closed
2/13/2012	5:34:46 PM	PH3 valve closed
2/13/2012	5:34:46 PM	SiCl4 pre valve closed
2/13/2012	5:34:46 PM	SiCl4 post valve closed
2/13/2012	5:34:46 PM	Bypass valve closed
2/13/2012	5:34:46 PM	Bubbler valve closed
2/13/2012	5:34:46 PM	Helium valve opened
2/13/2012	5:34:46 PM	Main Vac valve opened
2/13/2012	5:34:46 PM	Helium MFC set to  20.000000
2/13/2012	5:34:46 PM	H2 MFC set to  0.000000
2/13/2012	5:34:46 PM	BCl3 MFC set to  0.000000
2/13/2012	5:34:46 PM	PH3 MFC set to  0.000000
2/13/2012	5:34:46 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:34:46 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:34:47 PM	Tube furnace set to 150
2/13/2012	5:35:17 PM	Helium valve closed
2/13/2012	5:35:17 PM	H2 valve closed
2/13/2012	5:35:17 PM	BCl3 valve closed
2/13/2012	5:35:17 PM	PH3 valve closed
2/13/2012	5:35:17 PM	SiCl4 pre valve closed
2/13/2012	5:35:17 PM	SiCl4 post valve closed
2/13/2012	5:35:17 PM	Bypass valve closed
2/13/2012	5:35:17 PM	Bubbler valve closed
2/13/2012	5:35:17 PM	Main Vac valve opened
2/13/2012	5:35:17 PM	Helium MFC set to  0.000000
2/13/2012	5:35:17 PM	H2 MFC set to  0.000000
2/13/2012	5:35:17 PM	BCl3 MFC set to  0.000000
2/13/2012	5:35:17 PM	PH3 MFC set to  0.000000
2/13/2012	5:35:17 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:35:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:35:17 PM	Tube furnace set to 150
2/13/2012	5:35:47 PM	H2 valve closed
2/13/2012	5:35:47 PM	BCl3 valve closed
2/13/2012	5:35:47 PM	PH3 valve closed
2/13/2012	5:35:47 PM	SiCl4 pre valve closed
2/13/2012	5:35:47 PM	SiCl4 post valve closed
2/13/2012	5:35:47 PM	Bypass valve closed
2/13/2012	5:35:47 PM	Bubbler valve closed
2/13/2012	5:35:47 PM	Helium valve opened
2/13/2012	5:35:47 PM	Main Vac valve opened
2/13/2012	5:35:47 PM	Helium MFC set to  20.000000
2/13/2012	5:35:47 PM	H2 MFC set to  0.000000
2/13/2012	5:35:47 PM	BCl3 MFC set to  0.000000
2/13/2012	5:35:47 PM	PH3 MFC set to  0.000000
2/13/2012	5:35:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:35:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:35:47 PM	Tube furnace set to 150
2/13/2012	5:36:17 PM	Helium valve closed
2/13/2012	5:36:17 PM	H2 valve closed
2/13/2012	5:36:17 PM	BCl3 valve closed
2/13/2012	5:36:17 PM	PH3 valve closed
2/13/2012	5:36:17 PM	SiCl4 pre valve closed
2/13/2012	5:36:17 PM	SiCl4 post valve closed
2/13/2012	5:36:17 PM	Bypass valve closed
2/13/2012	5:36:17 PM	Bubbler valve closed
2/13/2012	5:36:17 PM	Main Vac valve opened
2/13/2012	5:36:17 PM	Helium MFC set to  0.000000
2/13/2012	5:36:17 PM	H2 MFC set to  0.000000
2/13/2012	5:36:17 PM	BCl3 MFC set to  0.000000
2/13/2012	5:36:17 PM	PH3 MFC set to  0.000000
2/13/2012	5:36:17 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:36:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:36:17 PM	Tube furnace set to 150
2/13/2012	5:36:47 PM	H2 valve closed
2/13/2012	5:36:47 PM	BCl3 valve closed
2/13/2012	5:36:47 PM	PH3 valve closed
2/13/2012	5:36:47 PM	SiCl4 pre valve closed
2/13/2012	5:36:47 PM	SiCl4 post valve closed
2/13/2012	5:36:47 PM	Bypass valve closed
2/13/2012	5:36:47 PM	Bubbler valve closed
2/13/2012	5:36:47 PM	Helium valve opened
2/13/2012	5:36:47 PM	Main Vac valve opened
2/13/2012	5:36:47 PM	Helium MFC set to  20.000000
2/13/2012	5:36:47 PM	H2 MFC set to  0.000000
2/13/2012	5:36:47 PM	BCl3 MFC set to  0.000000
2/13/2012	5:36:47 PM	PH3 MFC set to  0.000000
2/13/2012	5:36:47 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:36:47 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:36:47 PM	Tube furnace set to 150
2/13/2012	5:37:17 PM	Helium valve closed
2/13/2012	5:37:17 PM	H2 valve closed
2/13/2012	5:37:17 PM	BCl3 valve closed
2/13/2012	5:37:17 PM	PH3 valve closed
2/13/2012	5:37:17 PM	SiCl4 pre valve closed
2/13/2012	5:37:17 PM	SiCl4 post valve closed
2/13/2012	5:37:17 PM	Bypass valve closed
2/13/2012	5:37:17 PM	Bubbler valve closed
2/13/2012	5:37:17 PM	Main Vac valve opened
2/13/2012	5:37:17 PM	Helium MFC set to  0.000000
2/13/2012	5:37:17 PM	H2 MFC set to  0.000000
2/13/2012	5:37:17 PM	BCl3 MFC set to  0.000000
2/13/2012	5:37:17 PM	PH3 MFC set to  0.000000
2/13/2012	5:37:17 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:37:17 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:37:18 PM	Tube furnace set to 150
2/13/2012	5:37:48 PM	H2 valve closed
2/13/2012	5:37:48 PM	BCl3 valve closed
2/13/2012	5:37:48 PM	PH3 valve closed
2/13/2012	5:37:48 PM	SiCl4 pre valve closed
2/13/2012	5:37:48 PM	SiCl4 post valve closed
2/13/2012	5:37:48 PM	Bypass valve closed
2/13/2012	5:37:48 PM	Bubbler valve closed
2/13/2012	5:37:48 PM	Helium valve opened
2/13/2012	5:37:48 PM	Main Vac valve opened
2/13/2012	5:37:48 PM	Helium MFC set to  20.000000
2/13/2012	5:37:48 PM	H2 MFC set to  0.000000
2/13/2012	5:37:48 PM	BCl3 MFC set to  0.000000
2/13/2012	5:37:48 PM	PH3 MFC set to  0.000000
2/13/2012	5:37:48 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:37:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:37:48 PM	Tube furnace set to 150
2/13/2012	5:38:18 PM	Helium valve closed
2/13/2012	5:38:18 PM	H2 valve closed
2/13/2012	5:38:18 PM	BCl3 valve closed
2/13/2012	5:38:18 PM	PH3 valve closed
2/13/2012	5:38:18 PM	SiCl4 pre valve closed
2/13/2012	5:38:18 PM	SiCl4 post valve closed
2/13/2012	5:38:18 PM	Bypass valve closed
2/13/2012	5:38:18 PM	Bubbler valve closed
2/13/2012	5:38:18 PM	Main Vac valve opened
2/13/2012	5:38:18 PM	Helium MFC set to  0.000000
2/13/2012	5:38:18 PM	H2 MFC set to  0.000000
2/13/2012	5:38:18 PM	BCl3 MFC set to  0.000000
2/13/2012	5:38:18 PM	PH3 MFC set to  0.000000
2/13/2012	5:38:18 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:38:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:38:18 PM	Tube furnace set to 150
2/13/2012	5:38:48 PM	H2 valve closed
2/13/2012	5:38:48 PM	BCl3 valve closed
2/13/2012	5:38:48 PM	PH3 valve closed
2/13/2012	5:38:48 PM	SiCl4 pre valve closed
2/13/2012	5:38:48 PM	SiCl4 post valve closed
2/13/2012	5:38:48 PM	Bypass valve closed
2/13/2012	5:38:48 PM	Bubbler valve closed
2/13/2012	5:38:48 PM	Helium valve opened
2/13/2012	5:38:48 PM	Main Vac valve opened
2/13/2012	5:38:48 PM	Helium MFC set to  20.000000
2/13/2012	5:38:48 PM	H2 MFC set to  0.000000
2/13/2012	5:38:48 PM	BCl3 MFC set to  0.000000
2/13/2012	5:38:48 PM	PH3 MFC set to  0.000000
2/13/2012	5:38:48 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:38:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:38:48 PM	Tube furnace set to 150
2/13/2012	5:39:18 PM	Helium valve closed
2/13/2012	5:39:18 PM	H2 valve closed
2/13/2012	5:39:18 PM	BCl3 valve closed
2/13/2012	5:39:18 PM	PH3 valve closed
2/13/2012	5:39:18 PM	SiCl4 pre valve closed
2/13/2012	5:39:18 PM	SiCl4 post valve closed
2/13/2012	5:39:18 PM	Bypass valve closed
2/13/2012	5:39:18 PM	Bubbler valve closed
2/13/2012	5:39:18 PM	Main Vac valve opened
2/13/2012	5:39:18 PM	Helium MFC set to  0.000000
2/13/2012	5:39:18 PM	H2 MFC set to  0.000000
2/13/2012	5:39:18 PM	BCl3 MFC set to  0.000000
2/13/2012	5:39:18 PM	PH3 MFC set to  0.000000
2/13/2012	5:39:18 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:39:18 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:39:18 PM	Tube furnace set to 150
2/13/2012	5:39:48 PM	H2 valve closed
2/13/2012	5:39:48 PM	BCl3 valve closed
2/13/2012	5:39:48 PM	PH3 valve closed
2/13/2012	5:39:48 PM	SiCl4 pre valve closed
2/13/2012	5:39:48 PM	SiCl4 post valve closed
2/13/2012	5:39:48 PM	Bypass valve closed
2/13/2012	5:39:48 PM	Bubbler valve closed
2/13/2012	5:39:48 PM	Helium valve opened
2/13/2012	5:39:48 PM	Main Vac valve opened
2/13/2012	5:39:48 PM	Helium MFC set to  20.000000
2/13/2012	5:39:48 PM	H2 MFC set to  0.000000
2/13/2012	5:39:48 PM	BCl3 MFC set to  0.000000
2/13/2012	5:39:48 PM	PH3 MFC set to  0.000000
2/13/2012	5:39:48 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:39:48 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:39:49 PM	Tube furnace set to 150
2/13/2012	5:40:19 PM	Helium valve closed
2/13/2012	5:40:19 PM	H2 valve closed
2/13/2012	5:40:19 PM	BCl3 valve closed
2/13/2012	5:40:19 PM	PH3 valve closed
2/13/2012	5:40:19 PM	SiCl4 pre valve closed
2/13/2012	5:40:19 PM	SiCl4 post valve closed
2/13/2012	5:40:19 PM	Bypass valve closed
2/13/2012	5:40:19 PM	Bubbler valve closed
2/13/2012	5:40:19 PM	Main Vac valve opened
2/13/2012	5:40:19 PM	Helium MFC set to  0.000000
2/13/2012	5:40:19 PM	H2 MFC set to  0.000000
2/13/2012	5:40:19 PM	BCl3 MFC set to  0.000000
2/13/2012	5:40:19 PM	PH3 MFC set to  0.000000
2/13/2012	5:40:19 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:40:19 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:40:19 PM	Tube furnace set to 150
2/13/2012	5:40:20 PM	Run finished at 5:40 PM
2/13/2012	5:40:40 PM	Main Vac valve closed
2/13/2012	5:41:07 PM	Main Vac valve opened
2/13/2012	5:41:28 PM	Recipe started at 5:41 PM
2/13/2012	5:41:28 PM	Helium valve closed
2/13/2012	5:41:28 PM	H2 valve closed
2/13/2012	5:41:28 PM	BCl3 valve closed
2/13/2012	5:41:28 PM	PH3 valve closed
2/13/2012	5:41:28 PM	SiCl4 pre valve closed
2/13/2012	5:41:28 PM	SiCl4 post valve closed
2/13/2012	5:41:28 PM	Main Vac valve closed
2/13/2012	5:41:28 PM	Bypass valve closed
2/13/2012	5:41:28 PM	Bubbler valve closed
2/13/2012	5:41:28 PM	Helium MFC set to  0.000000
2/13/2012	5:41:28 PM	H2 MFC set to  0.000000
2/13/2012	5:41:28 PM	BCl3 MFC set to  0.000000
2/13/2012	5:41:28 PM	PH3 MFC set to  0.000000
2/13/2012	5:41:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:41:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:41:28 PM	Tube furnace set to 0
2/13/2012	5:41:31 PM	Helium valve closed
2/13/2012	5:41:31 PM	BCl3 valve closed
2/13/2012	5:41:31 PM	PH3 valve closed
2/13/2012	5:41:31 PM	SiCl4 pre valve closed
2/13/2012	5:41:31 PM	SiCl4 post valve closed
2/13/2012	5:41:31 PM	Main Vac valve closed
2/13/2012	5:41:31 PM	Bypass valve closed
2/13/2012	5:41:31 PM	Bubbler valve closed
2/13/2012	5:41:31 PM	H2 valve opened
2/13/2012	5:41:31 PM	Helium MFC set to  0.000000
2/13/2012	5:41:31 PM	H2 MFC set to  500.000000
2/13/2012	5:41:31 PM	BCl3 MFC set to  0.000000
2/13/2012	5:41:31 PM	PH3 MFC set to  0.000000
2/13/2012	5:41:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:41:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:41:31 PM	Tube furnace set to 0
2/13/2012	5:42:36 PM	Helium valve closed
2/13/2012	5:42:36 PM	BCl3 valve closed
2/13/2012	5:42:36 PM	PH3 valve closed
2/13/2012	5:42:36 PM	SiCl4 pre valve closed
2/13/2012	5:42:36 PM	SiCl4 post valve closed
2/13/2012	5:42:36 PM	Main Vac valve closed
2/13/2012	5:42:36 PM	Bypass valve closed
2/13/2012	5:42:36 PM	H2 valve opened
2/13/2012	5:42:36 PM	Bubbler valve opened
2/13/2012	5:42:36 PM	Helium MFC set to  0.000000
2/13/2012	5:42:36 PM	H2 MFC set to  500.000000
2/13/2012	5:42:36 PM	BCl3 MFC set to  0.000000
2/13/2012	5:42:36 PM	PH3 MFC set to  0.000000
2/13/2012	5:42:36 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:42:36 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:42:36 PM	Tube furnace set to 0
2/13/2012	5:42:37 PM	Helium valve closed
2/13/2012	5:42:37 PM	BCl3 valve closed
2/13/2012	5:42:37 PM	PH3 valve closed
2/13/2012	5:42:37 PM	SiCl4 pre valve closed
2/13/2012	5:42:37 PM	SiCl4 post valve closed
2/13/2012	5:42:37 PM	Main Vac valve closed
2/13/2012	5:42:37 PM	Bypass valve closed
2/13/2012	5:42:37 PM	H2 valve opened
2/13/2012	5:42:37 PM	Bubbler valve opened
2/13/2012	5:42:37 PM	Helium MFC set to  0.000000
2/13/2012	5:42:37 PM	H2 MFC set to  500.000000
2/13/2012	5:42:37 PM	BCl3 MFC set to  0.000000
2/13/2012	5:42:37 PM	PH3 MFC set to  0.000000
2/13/2012	5:42:37 PM	SiCl4 MFC set to  0.000000
2/13/2012	5:42:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	5:42:37 PM	Tube furnace set to 1000
2/13/2012	6:02:37 PM	Helium valve closed
2/13/2012	6:02:37 PM	PH3 valve closed
2/13/2012	6:02:37 PM	Main Vac valve closed
2/13/2012	6:02:37 PM	Bypass valve closed
2/13/2012	6:02:37 PM	H2 valve opened
2/13/2012	6:02:37 PM	BCl3 valve opened
2/13/2012	6:02:37 PM	SiCl4 pre valve opened
2/13/2012	6:02:37 PM	SiCl4 post valve opened
2/13/2012	6:02:37 PM	Bubbler valve opened
2/13/2012	6:02:37 PM	Helium MFC set to  0.000000
2/13/2012	6:02:37 PM	H2 MFC set to  500.000000
2/13/2012	6:02:37 PM	BCl3 MFC set to  20.000000
2/13/2012	6:02:37 PM	PH3 MFC set to  0.000000
2/13/2012	6:02:37 PM	SiCl4 MFC set to  50.000000
2/13/2012	6:02:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:02:37 PM	Tube furnace set to 1000
2/13/2012	6:22:37 PM	Helium valve closed
2/13/2012	6:22:37 PM	BCl3 valve closed
2/13/2012	6:22:37 PM	PH3 valve closed
2/13/2012	6:22:37 PM	SiCl4 pre valve closed
2/13/2012	6:22:37 PM	SiCl4 post valve closed
2/13/2012	6:22:37 PM	Main Vac valve closed
2/13/2012	6:22:37 PM	Bypass valve closed
2/13/2012	6:22:37 PM	H2 valve opened
2/13/2012	6:22:37 PM	Bubbler valve opened
2/13/2012	6:22:37 PM	Helium MFC set to  0.000000
2/13/2012	6:22:37 PM	H2 MFC set to  500.000000
2/13/2012	6:22:37 PM	BCl3 MFC set to  0.000000
2/13/2012	6:22:37 PM	PH3 MFC set to  0.000000
2/13/2012	6:22:37 PM	SiCl4 MFC set to  0.000000
2/13/2012	6:22:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:22:37 PM	Tube furnace set to 750
2/13/2012	6:27:37 PM	H2 valve closed
2/13/2012	6:27:37 PM	BCl3 valve closed
2/13/2012	6:27:37 PM	PH3 valve closed
2/13/2012	6:27:37 PM	SiCl4 pre valve closed
2/13/2012	6:27:37 PM	SiCl4 post valve closed
2/13/2012	6:27:37 PM	Main Vac valve closed
2/13/2012	6:27:37 PM	Bypass valve closed
2/13/2012	6:27:37 PM	Helium valve opened
2/13/2012	6:27:37 PM	Bubbler valve opened
2/13/2012	6:27:37 PM	Helium MFC set to  500.000000
2/13/2012	6:27:37 PM	H2 MFC set to  0.000000
2/13/2012	6:27:37 PM	BCl3 MFC set to  0.000000
2/13/2012	6:27:37 PM	PH3 MFC set to  0.000000
2/13/2012	6:27:37 PM	SiCl4 MFC set to  0.000000
2/13/2012	6:27:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:27:38 PM	Tube furnace set to 0
2/13/2012	6:47:38 PM	Helium valve closed
2/13/2012	6:47:38 PM	H2 valve closed
2/13/2012	6:47:38 PM	BCl3 valve closed
2/13/2012	6:47:38 PM	PH3 valve closed
2/13/2012	6:47:38 PM	SiCl4 pre valve closed
2/13/2012	6:47:38 PM	SiCl4 post valve closed
2/13/2012	6:47:38 PM	Main Vac valve closed
2/13/2012	6:47:38 PM	Bypass valve closed
2/13/2012	6:47:38 PM	Bubbler valve closed
2/13/2012	6:47:38 PM	Helium MFC set to  0.000000
2/13/2012	6:47:38 PM	H2 MFC set to  0.000000
2/13/2012	6:47:38 PM	BCl3 MFC set to  0.000000
2/13/2012	6:47:38 PM	PH3 MFC set to  0.000000
2/13/2012	6:47:38 PM	SiCl4 MFC set to  0.000000
2/13/2012	6:47:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	6:47:38 PM	Tube furnace set to 0
2/13/2012	6:47:39 PM	Run finished at 6:47 PM
2/13/2012	7:05:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:05:32 PM	Recipe started at 7:05 PM
2/13/2012	7:05:32 PM	Helium valve closed
2/13/2012	7:05:32 PM	H2 valve closed
2/13/2012	7:05:32 PM	BCl3 valve closed
2/13/2012	7:05:32 PM	PH3 valve closed
2/13/2012	7:05:32 PM	SiCl4 pre valve closed
2/13/2012	7:05:32 PM	SiCl4 post valve closed
2/13/2012	7:05:32 PM	Main Vac valve closed
2/13/2012	7:05:32 PM	Bubbler valve closed
2/13/2012	7:05:32 PM	Bypass valve opened
2/13/2012	7:05:32 PM	Helium MFC set to  0.000000
2/13/2012	7:05:32 PM	H2 MFC set to  0.000000
2/13/2012	7:05:32 PM	BCl3 MFC set to  0.000000
2/13/2012	7:05:32 PM	PH3 MFC set to  0.000000
2/13/2012	7:05:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:05:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:05:32 PM	Tube furnace set to 0
2/13/2012	7:06:35 PM	Helium valve closed
2/13/2012	7:06:35 PM	H2 valve closed
2/13/2012	7:06:35 PM	BCl3 valve closed
2/13/2012	7:06:35 PM	PH3 valve closed
2/13/2012	7:06:35 PM	SiCl4 pre valve closed
2/13/2012	7:06:35 PM	SiCl4 post valve closed
2/13/2012	7:06:35 PM	Main Vac valve closed
2/13/2012	7:06:35 PM	Bubbler valve closed
2/13/2012	7:06:35 PM	Bypass valve opened
2/13/2012	7:06:35 PM	Helium MFC set to  0.000000
2/13/2012	7:06:35 PM	H2 MFC set to  0.000000
2/13/2012	7:06:35 PM	BCl3 MFC set to  0.000000
2/13/2012	7:06:35 PM	PH3 MFC set to  0.000000
2/13/2012	7:06:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:06:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:06:35 PM	Tube furnace set to 0
2/13/2012	7:07:35 PM	Helium valve closed
2/13/2012	7:07:35 PM	H2 valve closed
2/13/2012	7:07:35 PM	BCl3 valve closed
2/13/2012	7:07:35 PM	PH3 valve closed
2/13/2012	7:07:35 PM	SiCl4 pre valve closed
2/13/2012	7:07:35 PM	SiCl4 post valve closed
2/13/2012	7:07:35 PM	Bypass valve closed
2/13/2012	7:07:35 PM	Bubbler valve closed
2/13/2012	7:07:35 PM	Main Vac valve opened
2/13/2012	7:07:35 PM	Helium MFC set to  0.000000
2/13/2012	7:07:35 PM	H2 MFC set to  0.000000
2/13/2012	7:07:35 PM	BCl3 MFC set to  0.000000
2/13/2012	7:07:35 PM	PH3 MFC set to  0.000000
2/13/2012	7:07:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:07:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:07:36 PM	Tube furnace set to 0
2/13/2012	7:07:37 PM	Run finished at 7:07 PM
2/13/2012	7:07:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:11:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	7:11:53 PM	Recipe started at 7:11 PM
2/13/2012	7:11:53 PM	Helium valve closed
2/13/2012	7:11:53 PM	H2 valve closed
2/13/2012	7:11:53 PM	BCl3 valve closed
2/13/2012	7:11:53 PM	PH3 valve closed
2/13/2012	7:11:53 PM	SiCl4 pre valve closed
2/13/2012	7:11:53 PM	SiCl4 post valve closed
2/13/2012	7:11:53 PM	Main Vac valve closed
2/13/2012	7:11:53 PM	Bypass valve closed
2/13/2012	7:11:53 PM	Bubbler valve closed
2/13/2012	7:11:53 PM	Helium MFC set to  0.000000
2/13/2012	7:11:53 PM	H2 MFC set to  0.000000
2/13/2012	7:11:53 PM	BCl3 MFC set to  0.000000
2/13/2012	7:11:53 PM	PH3 MFC set to  0.000000
2/13/2012	7:11:53 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:11:53 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:11:54 PM	Tube furnace set to 0
2/13/2012	7:11:57 PM	H2 valve closed
2/13/2012	7:11:57 PM	BCl3 valve closed
2/13/2012	7:11:57 PM	PH3 valve closed
2/13/2012	7:11:57 PM	SiCl4 pre valve closed
2/13/2012	7:11:57 PM	SiCl4 post valve closed
2/13/2012	7:11:57 PM	Main Vac valve closed
2/13/2012	7:11:57 PM	Bypass valve closed
2/13/2012	7:11:57 PM	Bubbler valve closed
2/13/2012	7:11:57 PM	Helium valve opened
2/13/2012	7:11:57 PM	Helium MFC set to  500.000000
2/13/2012	7:11:57 PM	H2 MFC set to  0.000000
2/13/2012	7:11:57 PM	BCl3 MFC set to  0.000000
2/13/2012	7:11:57 PM	PH3 MFC set to  0.000000
2/13/2012	7:11:57 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:11:57 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:11:57 PM	Tube furnace set to 0
2/13/2012	7:12:59 PM	Helium valve closed
2/13/2012	7:12:59 PM	H2 valve closed
2/13/2012	7:12:59 PM	BCl3 valve closed
2/13/2012	7:12:59 PM	PH3 valve closed
2/13/2012	7:12:59 PM	SiCl4 pre valve closed
2/13/2012	7:12:59 PM	SiCl4 post valve closed
2/13/2012	7:12:59 PM	Main Vac valve closed
2/13/2012	7:12:59 PM	Bypass valve closed
2/13/2012	7:12:59 PM	Bubbler valve closed
2/13/2012	7:12:59 PM	Helium MFC set to  0.000000
2/13/2012	7:12:59 PM	H2 MFC set to  0.000000
2/13/2012	7:12:59 PM	BCl3 MFC set to  0.000000
2/13/2012	7:12:59 PM	PH3 MFC set to  0.000000
2/13/2012	7:12:59 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:12:59 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:12:59 PM	Tube furnace set to 0
2/13/2012	7:13:00 PM	Run finished at 7:13 PM
2/13/2012	7:13:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	7:17:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:17:39 PM	Recipe started at 7:17 PM
2/13/2012	7:17:39 PM	Helium valve closed
2/13/2012	7:17:39 PM	H2 valve closed
2/13/2012	7:17:39 PM	BCl3 valve closed
2/13/2012	7:17:39 PM	PH3 valve closed
2/13/2012	7:17:39 PM	SiCl4 pre valve closed
2/13/2012	7:17:39 PM	SiCl4 post valve closed
2/13/2012	7:17:39 PM	Main Vac valve closed
2/13/2012	7:17:39 PM	Bubbler valve closed
2/13/2012	7:17:39 PM	Bypass valve opened
2/13/2012	7:17:39 PM	Helium MFC set to  0.000000
2/13/2012	7:17:39 PM	H2 MFC set to  0.000000
2/13/2012	7:17:39 PM	BCl3 MFC set to  0.000000
2/13/2012	7:17:39 PM	PH3 MFC set to  0.000000
2/13/2012	7:17:39 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:17:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:17:39 PM	Tube furnace set to 0
2/13/2012	7:18:38 PM	Helium valve closed
2/13/2012	7:18:38 PM	H2 valve closed
2/13/2012	7:18:38 PM	BCl3 valve closed
2/13/2012	7:18:38 PM	PH3 valve closed
2/13/2012	7:18:38 PM	SiCl4 pre valve closed
2/13/2012	7:18:38 PM	SiCl4 post valve closed
2/13/2012	7:18:38 PM	Main Vac valve closed
2/13/2012	7:18:38 PM	Bubbler valve closed
2/13/2012	7:18:38 PM	Bypass valve opened
2/13/2012	7:18:38 PM	Helium MFC set to  0.000000
2/13/2012	7:18:38 PM	H2 MFC set to  0.000000
2/13/2012	7:18:38 PM	BCl3 MFC set to  0.000000
2/13/2012	7:18:38 PM	PH3 MFC set to  0.000000
2/13/2012	7:18:38 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:18:38 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:18:38 PM	Tube furnace set to 0
2/13/2012	7:19:38 PM	Helium valve closed
2/13/2012	7:19:38 PM	H2 valve closed
2/13/2012	7:19:38 PM	BCl3 valve closed
2/13/2012	7:19:38 PM	PH3 valve closed
2/13/2012	7:19:39 PM	SiCl4 pre valve closed
2/13/2012	7:19:39 PM	SiCl4 post valve closed
2/13/2012	7:19:39 PM	Bypass valve closed
2/13/2012	7:19:39 PM	Bubbler valve closed
2/13/2012	7:19:39 PM	Main Vac valve opened
2/13/2012	7:19:39 PM	Helium MFC set to  0.000000
2/13/2012	7:19:39 PM	H2 MFC set to  0.000000
2/13/2012	7:19:39 PM	BCl3 MFC set to  0.000000
2/13/2012	7:19:39 PM	PH3 MFC set to  0.000000
2/13/2012	7:19:39 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:19:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:19:39 PM	Tube furnace set to 0
2/13/2012	7:19:40 PM	Run finished at 7:19 PM
2/13/2012	7:19:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	7:21:28 PM	Recipe started at 7:21 PM
2/13/2012	7:21:28 PM	Helium valve closed
2/13/2012	7:21:28 PM	H2 valve closed
2/13/2012	7:21:28 PM	BCl3 valve closed
2/13/2012	7:21:28 PM	PH3 valve closed
2/13/2012	7:21:28 PM	SiCl4 pre valve closed
2/13/2012	7:21:28 PM	SiCl4 post valve closed
2/13/2012	7:21:28 PM	Main Vac valve closed
2/13/2012	7:21:28 PM	Bypass valve closed
2/13/2012	7:21:28 PM	Bubbler valve closed
2/13/2012	7:21:28 PM	Helium MFC set to  0.000000
2/13/2012	7:21:28 PM	H2 MFC set to  0.000000
2/13/2012	7:21:28 PM	BCl3 MFC set to  0.000000
2/13/2012	7:21:28 PM	PH3 MFC set to  0.000000
2/13/2012	7:21:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	7:21:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	7:21:28 PM	Tube furnace set to 0
2/13/2012	9:21:28 PM	Helium valve closed
2/13/2012	9:21:28 PM	H2 valve closed
2/13/2012	9:21:28 PM	BCl3 valve closed
2/13/2012	9:21:28 PM	PH3 valve closed
2/13/2012	9:21:28 PM	SiCl4 pre valve closed
2/13/2012	9:21:28 PM	SiCl4 post valve closed
2/13/2012	9:21:28 PM	Main Vac valve closed
2/13/2012	9:21:28 PM	Bypass valve closed
2/13/2012	9:21:28 PM	Bubbler valve closed
2/13/2012	9:21:28 PM	Helium MFC set to  0.000000
2/13/2012	9:21:28 PM	H2 MFC set to  0.000000
2/13/2012	9:21:28 PM	BCl3 MFC set to  0.000000
2/13/2012	9:21:28 PM	PH3 MFC set to  0.000000
2/13/2012	9:21:28 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:21:28 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:21:28 PM	Tube furnace set to 0
2/13/2012	9:21:31 PM	Helium valve closed
2/13/2012	9:21:31 PM	BCl3 valve closed
2/13/2012	9:21:31 PM	PH3 valve closed
2/13/2012	9:21:31 PM	SiCl4 pre valve closed
2/13/2012	9:21:31 PM	SiCl4 post valve closed
2/13/2012	9:21:31 PM	Main Vac valve closed
2/13/2012	9:21:31 PM	Bypass valve closed
2/13/2012	9:21:31 PM	Bubbler valve closed
2/13/2012	9:21:31 PM	H2 valve opened
2/13/2012	9:21:31 PM	Helium MFC set to  0.000000
2/13/2012	9:21:31 PM	H2 MFC set to  500.000000
2/13/2012	9:21:31 PM	BCl3 MFC set to  0.000000
2/13/2012	9:21:31 PM	PH3 MFC set to  0.000000
2/13/2012	9:21:31 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:21:31 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:21:32 PM	Tube furnace set to 0
2/13/2012	9:22:39 PM	Helium valve closed
2/13/2012	9:22:39 PM	BCl3 valve closed
2/13/2012	9:22:39 PM	PH3 valve closed
2/13/2012	9:22:39 PM	SiCl4 pre valve closed
2/13/2012	9:22:39 PM	SiCl4 post valve closed
2/13/2012	9:22:39 PM	Main Vac valve closed
2/13/2012	9:22:39 PM	Bypass valve closed
2/13/2012	9:22:39 PM	H2 valve opened
2/13/2012	9:22:39 PM	Bubbler valve opened
2/13/2012	9:22:39 PM	Helium MFC set to  0.000000
2/13/2012	9:22:39 PM	H2 MFC set to  500.000000
2/13/2012	9:22:39 PM	BCl3 MFC set to  0.000000
2/13/2012	9:22:39 PM	PH3 MFC set to  0.000000
2/13/2012	9:22:39 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:22:39 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:22:39 PM	Tube furnace set to 0
2/13/2012	9:22:40 PM	Helium valve closed
2/13/2012	9:22:40 PM	BCl3 valve closed
2/13/2012	9:22:40 PM	PH3 valve closed
2/13/2012	9:22:40 PM	SiCl4 pre valve closed
2/13/2012	9:22:40 PM	SiCl4 post valve closed
2/13/2012	9:22:40 PM	Main Vac valve closed
2/13/2012	9:22:40 PM	Bypass valve closed
2/13/2012	9:22:40 PM	H2 valve opened
2/13/2012	9:22:40 PM	Bubbler valve opened
2/13/2012	9:22:40 PM	Helium MFC set to  0.000000
2/13/2012	9:22:40 PM	H2 MFC set to  500.000000
2/13/2012	9:22:40 PM	BCl3 MFC set to  0.000000
2/13/2012	9:22:40 PM	PH3 MFC set to  0.000000
2/13/2012	9:22:40 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:22:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:22:40 PM	Tube furnace set to 1000
2/13/2012	9:47:40 PM	Helium valve closed
2/13/2012	9:47:40 PM	BCl3 valve closed
2/13/2012	9:47:40 PM	PH3 valve closed
2/13/2012	9:47:40 PM	SiCl4 pre valve closed
2/13/2012	9:47:40 PM	SiCl4 post valve closed
2/13/2012	9:47:40 PM	Main Vac valve closed
2/13/2012	9:47:40 PM	Bypass valve closed
2/13/2012	9:47:40 PM	H2 valve opened
2/13/2012	9:47:40 PM	Bubbler valve opened
2/13/2012	9:47:40 PM	Helium MFC set to  0.000000
2/13/2012	9:47:40 PM	H2 MFC set to  500.000000
2/13/2012	9:47:40 PM	BCl3 MFC set to  0.000000
2/13/2012	9:47:40 PM	PH3 MFC set to  0.000000
2/13/2012	9:47:40 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:47:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:47:40 PM	Tube furnace set to 1000
2/13/2012	9:57:40 PM	Helium valve closed
2/13/2012	9:57:40 PM	BCl3 valve closed
2/13/2012	9:57:40 PM	PH3 valve closed
2/13/2012	9:57:40 PM	SiCl4 pre valve closed
2/13/2012	9:57:40 PM	SiCl4 post valve closed
2/13/2012	9:57:40 PM	Main Vac valve closed
2/13/2012	9:57:40 PM	Bypass valve closed
2/13/2012	9:57:40 PM	H2 valve opened
2/13/2012	9:57:40 PM	Bubbler valve opened
2/13/2012	9:57:40 PM	Helium MFC set to  0.000000
2/13/2012	9:57:40 PM	H2 MFC set to  500.000000
2/13/2012	9:57:40 PM	BCl3 MFC set to  0.000000
2/13/2012	9:57:40 PM	PH3 MFC set to  0.000000
2/13/2012	9:57:40 PM	SiCl4 MFC set to  0.000000
2/13/2012	9:57:40 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	9:57:41 PM	Tube furnace set to 750
2/13/2012	10:12:41 PM	H2 valve closed
2/13/2012	10:12:41 PM	BCl3 valve closed
2/13/2012	10:12:41 PM	PH3 valve closed
2/13/2012	10:12:41 PM	SiCl4 pre valve closed
2/13/2012	10:12:41 PM	SiCl4 post valve closed
2/13/2012	10:12:41 PM	Main Vac valve closed
2/13/2012	10:12:41 PM	Bypass valve closed
2/13/2012	10:12:41 PM	Helium valve opened
2/13/2012	10:12:41 PM	Bubbler valve opened
2/13/2012	10:12:41 PM	Helium MFC set to  500.000000
2/13/2012	10:12:41 PM	H2 MFC set to  0.000000
2/13/2012	10:12:41 PM	BCl3 MFC set to  0.000000
2/13/2012	10:12:41 PM	PH3 MFC set to  0.000000
2/13/2012	10:12:41 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:12:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:12:41 PM	Tube furnace set to 0
2/13/2012	10:32:41 PM	Helium valve closed
2/13/2012	10:32:41 PM	H2 valve closed
2/13/2012	10:32:41 PM	BCl3 valve closed
2/13/2012	10:32:41 PM	PH3 valve closed
2/13/2012	10:32:41 PM	SiCl4 pre valve closed
2/13/2012	10:32:41 PM	SiCl4 post valve closed
2/13/2012	10:32:41 PM	Main Vac valve closed
2/13/2012	10:32:41 PM	Bypass valve closed
2/13/2012	10:32:41 PM	Bubbler valve closed
2/13/2012	10:32:41 PM	Helium MFC set to  0.000000
2/13/2012	10:32:41 PM	H2 MFC set to  0.000000
2/13/2012	10:32:41 PM	BCl3 MFC set to  0.000000
2/13/2012	10:32:41 PM	PH3 MFC set to  0.000000
2/13/2012	10:32:41 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:32:41 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:32:41 PM	Tube furnace set to 0
2/13/2012	10:42:26 PM	Run aborted at 10:42 PM
2/13/2012	10:42:26 PM	Helium valve closed
2/13/2012	10:42:26 PM	H2 valve closed
2/13/2012	10:42:26 PM	BCl3 valve closed
2/13/2012	10:42:26 PM	PH3 valve closed
2/13/2012	10:42:26 PM	SiCl4 pre valve closed
2/13/2012	10:42:26 PM	SiCl4 post valve closed
2/13/2012	10:42:26 PM	Bypass valve closed
2/13/2012	10:42:26 PM	Main Vac valve closed
2/13/2012	10:42:26 PM	Bubbler valve closed
2/13/2012	10:42:26 PM	Helium MFC set to  0.000000
2/13/2012	10:42:26 PM	H2 MFC set to  0.000000
2/13/2012	10:42:26 PM	BCl3 MFC set to  0.000000
2/13/2012	10:42:26 PM	PH3 MFC set to  0.000000
2/13/2012	10:42:26 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:42:26 PM	Tube furnace set to 0
2/13/2012	10:42:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	10:42:29 PM	Recipe started at 10:42 PM
2/13/2012	10:42:29 PM	Helium valve closed
2/13/2012	10:42:29 PM	H2 valve closed
2/13/2012	10:42:29 PM	BCl3 valve closed
2/13/2012	10:42:29 PM	PH3 valve closed
2/13/2012	10:42:29 PM	SiCl4 pre valve closed
2/13/2012	10:42:29 PM	SiCl4 post valve closed
2/13/2012	10:42:29 PM	Main Vac valve closed
2/13/2012	10:42:29 PM	Bypass valve closed
2/13/2012	10:42:29 PM	Bubbler valve closed
2/13/2012	10:42:29 PM	Helium MFC set to  0.000000
2/13/2012	10:42:29 PM	H2 MFC set to  0.000000
2/13/2012	10:42:29 PM	BCl3 MFC set to  0.000000
2/13/2012	10:42:29 PM	PH3 MFC set to  0.000000
2/13/2012	10:42:29 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:42:29 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:42:29 PM	Tube furnace set to 0
2/13/2012	10:42:32 PM	H2 valve closed
2/13/2012	10:42:32 PM	BCl3 valve closed
2/13/2012	10:42:32 PM	PH3 valve closed
2/13/2012	10:42:32 PM	SiCl4 pre valve closed
2/13/2012	10:42:32 PM	SiCl4 post valve closed
2/13/2012	10:42:32 PM	Main Vac valve closed
2/13/2012	10:42:32 PM	Bypass valve closed
2/13/2012	10:42:32 PM	Bubbler valve closed
2/13/2012	10:42:32 PM	Helium valve opened
2/13/2012	10:42:32 PM	Helium MFC set to  500.000000
2/13/2012	10:42:32 PM	H2 MFC set to  0.000000
2/13/2012	10:42:32 PM	BCl3 MFC set to  0.000000
2/13/2012	10:42:32 PM	PH3 MFC set to  0.000000
2/13/2012	10:42:32 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:42:32 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:42:32 PM	Tube furnace set to 0
2/13/2012	10:42:37 PM	Helium valve closed
2/13/2012	10:42:37 PM	H2 valve closed
2/13/2012	10:42:37 PM	BCl3 valve closed
2/13/2012	10:42:37 PM	PH3 valve closed
2/13/2012	10:42:37 PM	SiCl4 pre valve closed
2/13/2012	10:42:37 PM	SiCl4 post valve closed
2/13/2012	10:42:37 PM	Main Vac valve closed
2/13/2012	10:42:37 PM	Bypass valve closed
2/13/2012	10:42:37 PM	Bubbler valve closed
2/13/2012	10:42:37 PM	Helium MFC set to  0.000000
2/13/2012	10:42:37 PM	H2 MFC set to  0.000000
2/13/2012	10:42:37 PM	BCl3 MFC set to  0.000000
2/13/2012	10:42:37 PM	PH3 MFC set to  0.000000
2/13/2012	10:42:37 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:42:37 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:42:37 PM	Tube furnace set to 0
2/13/2012	10:42:38 PM	Run finished at 10:42 PM
2/13/2012	10:42:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/13/2012	10:48:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/13/2012	10:48:33 PM	Recipe started at 10:48 PM
2/13/2012	10:48:33 PM	Helium valve closed
2/13/2012	10:48:33 PM	H2 valve closed
2/13/2012	10:48:33 PM	BCl3 valve closed
2/13/2012	10:48:33 PM	PH3 valve closed
2/13/2012	10:48:33 PM	SiCl4 pre valve closed
2/13/2012	10:48:33 PM	SiCl4 post valve closed
2/13/2012	10:48:33 PM	Main Vac valve closed
2/13/2012	10:48:33 PM	Bubbler valve closed
2/13/2012	10:48:33 PM	Bypass valve opened
2/13/2012	10:48:33 PM	Helium MFC set to  0.000000
2/13/2012	10:48:33 PM	H2 MFC set to  0.000000
2/13/2012	10:48:33 PM	BCl3 MFC set to  0.000000
2/13/2012	10:48:33 PM	PH3 MFC set to  0.000000
2/13/2012	10:48:33 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:48:33 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:48:33 PM	Tube furnace set to 0
2/13/2012	10:49:35 PM	Helium valve closed
2/13/2012	10:49:35 PM	H2 valve closed
2/13/2012	10:49:35 PM	BCl3 valve closed
2/13/2012	10:49:35 PM	PH3 valve closed
2/13/2012	10:49:35 PM	SiCl4 pre valve closed
2/13/2012	10:49:35 PM	SiCl4 post valve closed
2/13/2012	10:49:35 PM	Main Vac valve closed
2/13/2012	10:49:35 PM	Bubbler valve closed
2/13/2012	10:49:35 PM	Bypass valve opened
2/13/2012	10:49:35 PM	Helium MFC set to  0.000000
2/13/2012	10:49:35 PM	H2 MFC set to  0.000000
2/13/2012	10:49:35 PM	BCl3 MFC set to  0.000000
2/13/2012	10:49:35 PM	PH3 MFC set to  0.000000
2/13/2012	10:49:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:49:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:49:35 PM	Tube furnace set to 0
2/13/2012	10:50:35 PM	Helium valve closed
2/13/2012	10:50:35 PM	H2 valve closed
2/13/2012	10:50:35 PM	BCl3 valve closed
2/13/2012	10:50:35 PM	PH3 valve closed
2/13/2012	10:50:35 PM	SiCl4 pre valve closed
2/13/2012	10:50:35 PM	SiCl4 post valve closed
2/13/2012	10:50:35 PM	Bypass valve closed
2/13/2012	10:50:35 PM	Bubbler valve closed
2/13/2012	10:50:35 PM	Main Vac valve opened
2/13/2012	10:50:35 PM	Helium MFC set to  0.000000
2/13/2012	10:50:35 PM	H2 MFC set to  0.000000
2/13/2012	10:50:35 PM	BCl3 MFC set to  0.000000
2/13/2012	10:50:35 PM	PH3 MFC set to  0.000000
2/13/2012	10:50:35 PM	SiCl4 MFC set to  0.000000
2/13/2012	10:50:35 PM	Bypass solenoid MFC set to  0.000000
2/13/2012	10:50:35 PM	Tube furnace set to 0
2/13/2012	10:50:36 PM	Run finished at 10:50 PM
2/13/2012	10:50:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
